CN104582422A - Water-cooled heat sink - Google Patents

Water-cooled heat sink Download PDF

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Publication number
CN104582422A
CN104582422A CN201310517868.4A CN201310517868A CN104582422A CN 104582422 A CN104582422 A CN 104582422A CN 201310517868 A CN201310517868 A CN 201310517868A CN 104582422 A CN104582422 A CN 104582422A
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CN
China
Prior art keywords
water
cooling
cooling tube
described water
radiating device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201310517868.4A
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Chinese (zh)
Inventor
马涛
高海军
刘军凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Raintree Scientific Instruments Shanghai Corp
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Raintree Scientific Instruments Shanghai Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Raintree Scientific Instruments Shanghai Corp filed Critical Raintree Scientific Instruments Shanghai Corp
Priority to CN201310517868.4A priority Critical patent/CN104582422A/en
Publication of CN104582422A publication Critical patent/CN104582422A/en
Pending legal-status Critical Current

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Abstract

The invention provides a water-cooled heat sink. The water-cooled heat sink comprises a water-cooling housing, splints and water-cooling pipes, wherein the water-cooling housing is used for accommodating an energy source, and an outer groove is formed in the outer side of at least one side wall of the water-cooling housing; an inner groove is formed in the inner side of each of the splints, and the outer grooves of the water-cooling housing and the inner grooves of the splints are in complimentary shapes and are matched to form a water-cooling pipe channel; a water-cooling joint is arranged at each of the two ends of each water-cooling pipe, and the water-cooling pipes are placed in the water-cooling pipe channel; heat conducting adhesive layers are respectively arranged in the outer grooves of the water-cooling housing and the inner grooves of the splints, the water-cooling pipes are connected to the interior of the water-cooling pipe channel through the heat conducting adhesive layers, and gaps between the water-cooling pipe channel and the water cooling pipes are filled with the heat conducting adhesive layers. According to the water-cooled heat sink, the water-cooled heat sink has favorable reliability and maintainability.

Description

A kind of water-cooling heat radiating device
Technical field
The present invention relates to a kind of water-cooling radiating structure, particularly relate to the water-cooling heat radiating device on the manufacture of semiconductor large scale integrated circuit and checkout equipment.
Background technology
In the detection and manufacturing process of semiconductor large scale integrated circuit, often need to use one or more energy source, provide the electromagnetic wave of various wavelength to use to measurement or system of processing, unnecessary energy often needs cooling system to drain.
Conventional cooling system comprises having structure:
1. use forging type, be cast in water-cooled housing by water-cooled metal pipe, which requires higher to the material of water cooling tube, its fusing point and metallographic thermal stable temperature must far above the casting temperatures of housing, and when pipeline is complicated, casting mould high cost, is not especially suitable for small lot manufacture.
2. directly in water-cooled housing, process water-cooled path, its processing technology requires high, is difficult to processed complex pipeline equally.
3. double plate structure, namely processes pipeline on hot plate and cold drawing, then connects two plates, and this sealing structure area is large, and sealing surface is often near thermal source, and reliability is lower, and maintenance and repair is also often more difficult.
Production line and equipment require higher to the reliability and maintainability of these cooling systems, and especially for the water-cooling system that caloric value is larger, above-mentioned cooling system is often difficult to realize.
Summary of the invention
The object of the present invention is to provide a kind of water-cooling heat radiating device, it has good reliability and maintainability.
For achieving the above object, the present invention is achieved through the following technical solutions:
Water-cooling heat radiating device according to the present invention comprises:
Water-cooled housing, it holds energy source, and the outside of at least one sidewall of described water-cooled housing is provided with outer channel;
Clamping plate, are provided with internal channel inside it, and outer channel and the internal channel of described clamping plate of described water-cooled housing have complementary shape and coordinate and form water cooling tube passage; And
Water cooling tube, its two ends are provided with water-cooling joint, and described water cooling tube is placed in described water cooling tube passage;
Wherein, heat conduction glue-line is respectively equipped with in the outer channel of described water-cooled housing and the internal channel of described clamping plate, described water cooling tube is connected in described water cooling tube passage by described heat conduction glue-line, and described heat conduction glue-line fills up the gap between described water cooling tube passage and described water cooling tube.
Wherein, described heat conduction glue-line is formed by the mixture of conductive metal powder and adhesive.
Wherein, described water cooling tube is U-shaped.
Wherein, described clamping plate are connected to described water-cooled housing by attachment screw.
Wherein, described water-cooling joint is positioned at beyond described water-cooled housing.
Because heat conduction glue-line perfection can peel off and change, therefore when needing to carry out cleaning and safeguarding to water-cooling system, detachable lower plate, take out water cooled pipeline, and the sealing in water route self can not be affected, not having cooling fluid spills, thus safety, carry out maintenance, repair or replacing easily.
And this structure does not need to use mould to manufacture, and is more suitable for the small lot batch manufacture of precision instrument industry, contributes to reducing inventory cost.
Accompanying drawing explanation
Preferred implementation by describing in detail below in conjunction with accompanying drawing is understood by further feature of the present invention and advantage better, in accompanying drawing, and the same or analogous parts of identical designated, wherein:
Fig. 1 shows the stereogram of water-cooling heat radiating device according to a preferred embodiment of the present invention;
Fig. 2 shows the decomposing schematic representation of the water-cooling heat radiating device in Fig. 1; And
Fig. 3 shows the partial schematic diagram of water-cooling heat radiating device according to a further advantageous embodiment of the invention, shows the distortion of the shape of the water cooling tube of this embodiment.
Description of reference numerals:
10 water-cooled housing 11 outer channel
20 clamping plate 21 internal channel
30 water cooling tube 31 water-cooling joints
40 attachment screws
Embodiment
In the specific descriptions of following preferred embodiment, with reference to the accompanying drawing formed appended by a part of the present invention.Appended accompanying drawing shows by way of example and can realize specific embodiment of the present invention.The embodiment of example is not intended to limit according to all embodiments of the present invention.Be appreciated that under the prerequisite not departing from scope of the present invention, other embodiments can be utilized, also can carry out amendment that is structural or logicality.
In following specific descriptions, the term of directivity, such as "left", "right" " top ", " bottom ", "front", "rear", " guiding ", " forward ", " delaying " etc., use with reference to the direction described in accompanying drawing.The parts of embodiments of the invention can be placed in multiple different direction, and the term of directivity is nonrestrictive for the object of example.
Fig. 1 shows the stereogram of water-cooling heat radiating device according to a preferred embodiment of the present invention; Fig. 2 shows the decomposing schematic representation of the water-cooling heat radiating device in Fig. 1.Water-cooling heat radiating device according to the present invention comprises the water-cooled housing 10, clamping plate 20 and the water cooling tube 30 that hold energy source.The outside of at least one sidewall of water-cooled housing 10 is provided with outer channel 11, and the inner side of clamping plate 20 is provided with internal channel 21, and the outer channel 11 of water-cooled housing 10 and the internal channel 21 of clamping plate 20 have complementary shape and coordinate and form water cooling tube passage.The two ends of water cooling tube 30 are provided with water-cooling joint 31, and water cooling tube 30 is placed in described water cooling tube passage.Wherein, be respectively equipped with heat conduction glue-line in the outer channel 11 of water-cooled housing 10 and the internal channel 21 of clamping plate 20, water cooling tube 30 is connected in water cooling tube passage by heat conduction glue-line, and heat conduction glue-line fills up the gap between water cooling tube passage and water cooling tube 30.
Preferably, heat conduction glue-line is formed by the mixture of conductive metal powder and adhesive.
Preferably, water-cooling joint 31 is positioned at the outside of water-cooled housing 10, is used for connecting water-cooled fluid source.
In the embodiment shown in Fig. 1 and Fig. 2, the left side wall of water-cooled housing 10 and the outside of right side wall are respectively equipped with outer channel 11, thus be provided with two clamping plate coordinated with it 20, outer channel can also be set in any one of water-cooled housing 10 or multiple sidewall and clamping plate and the water cooling tube of identical number are provided.Water cooling tube in this embodiment is U-shaped, can also be arbitrary shape.The distortion of the shape of the water cooling tube of water-cooling heat radiating device of the present invention has been shown in Fig. 3.
In an assembling process, special heat conduction colloid is used evenly to be full of the outer heat-transfer area of water cooling tube 30 to form heat conduction glue-line, water-cooled housing 10 and clamping plate 20 have the groove holding pipeline, under suitable controlled condition, colloid will be full of the gap between groove and water cooling tube, and this not only plays connection function, more can obtain required thermal resistance, and owing to being flexible material after colloid solidification, the impact of water impact on systematic function can be weakened.
The present invention uses bonding mode to be fixed in housing channel by metal water-cooling pipe, by controlling heat-conducting glue layer material and thickness, control system thermal resistance, thus can realize complicated water route design more easily.
By making the joint of metal water-cooling pipe (sealing surface) be arranged on beyond housing, stow away from heat and power supply, thus the reliability improving system; Because heat conduction glue-line can perfection peel off and change under certain condition controls, therefore when needing to carry out cleaning and safeguarding to water-cooling system, water-cooled clamping plate can be unloaded, removing conduit, and the sealing in water route self can not be affected, do not have cooling fluid to spill, thus safety, carry out maintenance, repair or replacing easily.Because not needing to use mould, being more suitable for the small lot batch manufacture of precision instrument industry, contributing to reducing inventory cost.
The present invention is not limited to execution mode shown in accompanying drawing.Use the present invention, various complex pipeline can be designed, and in housing and cleat surface processing respective groove, also in pipeline different piece, different bondline thicknesss can be used, realize various special local cooling requirements.Obviously, the present invention is also applicable in other liquid cooling system.
Below technology contents and the technical characterstic of specific embodiments of the invention has been disclosed; but be appreciated that; under creative ideas of the present invention; those skilled in the art can not make various changes in the combination of this feature clearly illustrated and improve above-mentioned disclosed various characteristic sum, but all belongs to protection scope of the present invention.The description of above-described embodiment is exemplary and not restrictive, and protection scope of the present invention determined by claim.

Claims (5)

1. a water-cooling heat radiating device, is characterized in that, described water-cooling heat radiating device comprises:
Water-cooled housing (10), it holds energy source, and the outside of at least one sidewall of described water-cooled housing (10) is provided with outer channel (11);
Clamping plate (20), be provided with internal channel (21) inside it, the outer channel (11) of described water-cooled housing (10) and the internal channel (21) of described clamping plate (20) have complementary shape and coordinate and form water cooling tube passage; And
Water cooling tube (30), its two ends are provided with water-cooling joint (31), and described water cooling tube (30) is placed in described water cooling tube passage;
Wherein, heat conduction glue-line is respectively equipped with in the outer channel (11) of described water-cooled housing (10) and the internal channel (21) of described clamping plate (20), described water cooling tube (30) is connected in described water cooling tube passage by described heat conduction glue-line, and described heat conduction glue-line fills up the gap between described water cooling tube passage and described water cooling tube (30).
2. water-cooling heat radiating device according to claim 1, is characterized in that, described heat conduction glue-line is formed by the mixture of conductive metal powder and adhesive.
3. water-cooling heat radiating device according to claim 1 and 2, is characterized in that, described water cooling tube (30) is U-shaped.
4. water-cooling heat radiating device according to claim 1 and 2, is characterized in that, described clamping plate (20) are connected to described water-cooled housing (10) by attachment screw (40).
5. water-cooling heat radiating device according to claim 1 and 2, is characterized in that, described water-cooling joint (31) is positioned at beyond described water-cooled housing (10).
CN201310517868.4A 2013-10-28 2013-10-28 Water-cooled heat sink Pending CN104582422A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201310517868.4A CN104582422A (en) 2013-10-28 2013-10-28 Water-cooled heat sink

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201310517868.4A CN104582422A (en) 2013-10-28 2013-10-28 Water-cooled heat sink

Publications (1)

Publication Number Publication Date
CN104582422A true CN104582422A (en) 2015-04-29

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107690204A (en) * 2016-08-03 2018-02-13 芜湖艾尔达科技有限责任公司 A kind of heating component
CN107801361A (en) * 2017-11-29 2018-03-13 苏州工业职业技术学院 A kind of heat abstractor of electromechanical equipment

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002074032A1 (en) * 2001-03-02 2002-09-19 Sanyo Electric Co., Ltd. Electronic device
CN201294706Y (en) * 2008-10-20 2009-08-19 钱国平 Composite material tube cold type radiator
CN102611223A (en) * 2012-03-20 2012-07-25 中科盛创(青岛)电气有限公司 Water cooling structure of axial magnetic flux permanent-magnet wind driven generator
CN202586769U (en) * 2012-04-17 2012-12-05 嘉善华瑞赛晶电气设备科技有限公司 Double-water-channel water cooling plate for power module
CN203136425U (en) * 2013-03-18 2013-08-14 王晓光 Water-cooling plate

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002074032A1 (en) * 2001-03-02 2002-09-19 Sanyo Electric Co., Ltd. Electronic device
CN201294706Y (en) * 2008-10-20 2009-08-19 钱国平 Composite material tube cold type radiator
CN102611223A (en) * 2012-03-20 2012-07-25 中科盛创(青岛)电气有限公司 Water cooling structure of axial magnetic flux permanent-magnet wind driven generator
CN202586769U (en) * 2012-04-17 2012-12-05 嘉善华瑞赛晶电气设备科技有限公司 Double-water-channel water cooling plate for power module
CN203136425U (en) * 2013-03-18 2013-08-14 王晓光 Water-cooling plate

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107690204A (en) * 2016-08-03 2018-02-13 芜湖艾尔达科技有限责任公司 A kind of heating component
CN107801361A (en) * 2017-11-29 2018-03-13 苏州工业职业技术学院 A kind of heat abstractor of electromechanical equipment
CN107801361B (en) * 2017-11-29 2023-08-11 苏州工业职业技术学院 Heat abstractor of electromechanical device

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Application publication date: 20150429