CN208358561U - A kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism - Google Patents
A kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism Download PDFInfo
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- CN208358561U CN208358561U CN201820342870.0U CN201820342870U CN208358561U CN 208358561 U CN208358561 U CN 208358561U CN 201820342870 U CN201820342870 U CN 201820342870U CN 208358561 U CN208358561 U CN 208358561U
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Abstract
The utility model discloses a kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanisms, belong to twin shaft dicing saw art field.Two guide rails are installed in parallel in the marble beam base, and guide rail is fixed by eccentric pin and marble beam base, first movement platform and the second mobile platform are installed on the guide rail, and sliding block is installed between first movement platform and the second mobile platform and guide rail, the sliding block is slidably connected with guide rail, installation accuracy is high, reduce the difficulty for the high-precision processing that machine adds, promote the stability of double crossbeam axis, it ensure that installation from machinery, the stability and high precision of movement, position compensation is carried out by precision feed-back compensation device, to guarantee to stablize the precision of high speed positional dissection.
Description
Technical field
The utility model relates to a kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanisms, belong to twin shaft scribing machine
Technical field.
Background technique
Scribing equipment come out in the 1970s, along with electronic technology and related industry rapid development, international half
Great variety has had occurred in the production of conductor industry, and update with rapid changepl. never-ending changes and improvements occurs for scribing equipment, and application field is more and more wider.
The initial equipment is used for integrated circuit relevant industries by four or five country's exploitations such as Britain, the U.S., Japan, such as silicon wafer is cut,
By initial 3 cun till now 16 cuns；In addition, semiconductor material in electronics industry application affect scribing equipment technology and
Market flourish, electronics industry application in, by initial bulky grain, low precision, single stack package product, it is present for developing
The market trend of " light, thin, short, small, hard, high-precision ", it is desirable that all electronic devices other than smaller volume, high-precision,
There are also stronger functions, need to guarantee the product of high efficiency, high-quality.IC package is one of semiconductor three industries, is sealed thereafter
Dress process specifically includes that scribing, bonding die, ultrasonic ball bonding, encapsulation, detection, packaging.Scribing machine is first on IC post package line
Key equipment, especially wafer, IC chip cutting using upper, determine the core status of scribing equipment.
Semiconductor material and application have become the important mark for measuring a national economic development, scientific and technological progress and military capability of the country
Will.Scribing equipment is suitable for the semiconductor manufacturing industries such as IC, LED, wafer, photovoltaic, optical photoconductor, medical instrument, integrated circuit
From to ultra-large development, integrated level is higher and higher, and precision is higher and higher on a large scale, but the precision of electronic component it is higher and higher,
Material is more and more thinner, quality requirements are higher and higher, and efficiency requirements are higher and higher, and the application of twin shaft scribing machine is more and more wider, high-precision
The demand for spending cutting equipment is also higher and higher.
Domestic is before external import using high-precision dual-axis scribing equipment, and main cause is domestic basic spare and accessory parts
Processing technology is weak, and cost with high accuracy is just high, and technical bottleneck limitation, many equipment cutting axis are in mobile cutting process, essence
Degree is unable to satisfy product requirement, cut lengths deviation, and cutting stabilization is poor, and reason is that the precision of axis is not up to standard.
In conclusion existing technical bottleneck defect has the precision of 4: 1. workpieces, the i.e. machining accuracy of axis pedestal not
It is up to standard；2. the machine in traditional design adds part to do pedestal, after installing guide rail, the linear precision of guide rail can not reached requirement, to make
At the accuracy error in practical cutting, the Z axis cantilever at actual processing is longer, and the straightness error that can amplify crossbeam axis influences,
Trueness error caused by during actual processing is bigger；3. the mode of precision feedback device design installation causes shadow to precision
It rings；4. the control precision of system.
Utility model content
In view of the above-mentioned problems, the technical problem to be solved by the present invention is to provide a kind of Dali stone structure high-precision crossbeams
Double lead driving shaft mechanism.
The Dali stone structure high-precision crossbeam double lead driving shaft mechanism of the utility model, it includes marble crossbeam bottom
Seat, guide rail, sliding block, first movement platform, grating scale mounting blocks, the second mobile platform, screw rod, platform transmission device connector,
Buffer stopper, grating, mechanical position limitation, the first drag chain mounting plate, servo motor, the second drag chain mounting plate, drag chain, eccentric pin,
Third drag chain mounting plate, axis transport positioning plate, moving shaft holder, shaft coupling, fixed bearing block, INDEX point, organ bell-type are dust-proof
Shield, the first sealing plate and the second sealing plate are equipped with two guide rails in the marble beam base in parallel, and guide rail is logical
It crosses eccentric pin to fix with marble beam base, first movement platform is installed on the guide rail and the second movement is flat
Platform, and sliding block is installed between first movement platform and the second mobile platform and guide rail, the sliding block is slidably connected with guide rail,
Two sides are provided with eccentric pin to the guide rail up and down, are respectively mounted above the first movement platform and the second mobile platform
There are grating scale mounting blocks, screw rod is mounted on rear side of the first movement platform and the second mobile platform, and screw rod is by putting down
Platform transmission device connector is connect with first movement platform and the second mobile platform, and described screw rod one end passes through shaft coupling and watches
Motor connection is taken, moving shaft holder and fixed bearing block are provided on the screw rod, the moving shaft holder and first move
Moving platform, the second mobile platform are fixedly connected, and the fixed bearing block is fixedly connected with marble beam base, and described
Buffer stopper is provided on rear side of one mobile platform and the second mobile platform, and on the outside of first movement platform and the second mobile platform,
Mechanical position limitation is provided in marble beam base, be equipped on the end face of the marble beam base grating and
INDEX point, the marble beam base periphery are equipped with the first drag chain mounting plate, the second drag chain mounting plate and third drag chain
Axis is installed on the outside of mounting plate, the first movement platform and the second mobile platform and transports positioning plate, the first movement
Organ bell-type is connected with by the first sealing plate and the second sealing plate between platform, the second mobile platform and marble beam base
Dust cover.
Preferably, the shaft coupling is double diaphragm couplings.
The utility model has the beneficial effects that its structure is simple, design structure is stablized, and installation accuracy is high, reduces machine and adds
High-precision processing difficulty, promote the stability of double crossbeam axis, ensure that installation, the stability of movement and high-precision from machinery
Degree property, position compensation is carried out by precision feed-back compensation device, to guarantee to stablize the precision of high speed positional dissection.
Detailed description of the invention
The present invention is described in detail by the following detailed description and drawings for ease of explanation,.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the side view of the utility model；
Fig. 3 is the schematic diagram of internal structure of the utility model；
Fig. 4 is guide rail and sliding block mounting structure schematic diagram in the utility model；
Fig. 5 is eccentric pin mounting structure schematic diagram in the utility model.
Appended drawing reference: marble beam base 1, guide rail 2, sliding block 3, first movement platform 4, grating scale mounting blocks 5, second
Mobile platform 6, screw rod 7, platform transmission device connector 8, buffer stopper 9, grating 10, mechanical position limitation 11, the first drag chain mounting plate
13, servo motor 14, the second drag chain mounting plate 15, drag chain 16, eccentric pin 17, third drag chain mounting plate 18, axis transport fixed
Position plate 19, moving shaft holder 20, shaft coupling 21, fixed bearing block 22, INDEX point 23, organ bell-type dust cover 24, first are close
Sealing plate 25, the second sealing plate 26.
Specific embodiment
As Figure 1-Figure 5, present embodiment uses following technical scheme: it includes marble beam base 1, leads
Rail 2, sliding block 3, first movement platform 4, grating scale mounting blocks 5, the second mobile platform 6, screw rod 7, platform transmission device connector
8, buffer stopper 9, grating 10, mechanical position limitation 11, the first drag chain mounting plate 13, servo motor 14, the second drag chain mounting plate 15, drag chain
16, eccentric pin 17, third drag chain mounting plate 18, axis transport positioning plate 19, moving shaft holder 20, shaft coupling 21, fixing axle
Seat 22, INDEX point 23, organ bell-type dust cover 24, the first sealing plate 25 and the second sealing plate 26 are held, the marble is horizontal
Two guide rails 2 are installed in parallel, and guide rail 2 is fixed by eccentric pin 17 and marble beam base 1 on beam bottom seat 1, institute
First movement platform 4 and the second mobile platform 6, and first movement platform 4 and the second mobile platform 6 are installed on the guide rail 2 stated
Sliding block 3 is installed between guide rail 2, the sliding block 3 is slidably connected with guide rail 2, and about 2 two sides of guide rail are provided with partially
Grating scale mounting blocks 5 are mounted on above heart positioning pin 17, the first movement platform 4 and the second mobile platform 6, it is described
Screw rod 7 is mounted on rear side of first movement platform 4 and the second mobile platform 6, and screw rod 7 passes through platform transmission device connector 8
It is connect with first movement platform 4 and the second mobile platform 6, described 7 one end of screw rod is connected by shaft coupling 21 and servo motor 14
It connects, the shaft coupling 21 is double diaphragm couplings, is provided with moving shaft holder 20 and fixed bearing block on the screw rod 7
22, the moving shaft holder 20 is fixedly connected with first movement platform 4, the second mobile platform 6, the fixed bearing block
22 are fixedly connected with marble beam base 1, are provided on rear side of the first movement platform 4 and the second mobile platform 6 slow
Block 9 is rushed, and is provided with mechanical position limitation 11 on 6 outside of first movement platform 4 and the second mobile platform, marble beam base 1,
Grating 10 and INDEX point 23, the marble beam base 1 week are installed on the end face of the marble beam base 1
While being equipped with the first drag chain mounting plate 13, the second drag chain mounting plate 15 and third drag chain mounting plate 18, the first movement is flat
Axis is installed on the outside of platform 4 and the second mobile platform 6 and transports positioning plate 19, the first movement platform 4, the second mobile platform 6
Organ bell-type dust cover 24 is connected with by the first sealing plate 25 and the second sealing plate 26 between marble beam base 1.
The installation process of present embodiment are as follows: guiding device guide rail 2 is mounted on marble countertop, is corrected by straight rail
After the precision of good guide rail 2 is 0.003mm, guide rail 2 is positioned using securing device eccentric pin 17, at this time marble
The core component of transmission shaft is installed, and the movement of crossbeam axis is that have guiding device to determine, which ensure that the straight of axis operation
Line precision and stability；
After the installation firm position of first movement platform 4 and the second mobile platform 6, by transmission device screw rod 7, mobile bearing
Seat 20, shaft coupling 21 and fixed bearing block 22 are mounted in marble beam base 1, and use platform transmission device connector 8
First movement platform 4 and the second mobile platform 6 are connected respectively on screw rod 7, smooth rear completion installation is adjusted；
After grating 10 needs to be mounted on 1 end face of marble beam base by first movement platform 4, continue that INDEX is installed
Point 23 is adjusted after energization and is finished.The device provides the coordinate of precision and the compensation of precision during exercise, feeds back to control card
It is controlled；
After mechanical position limitation 11 needs to complete axle drive disk assembly installation, the two sides marble beam base 1 for being mounted on axis is carried out
On, prevent mobile first movement platform 4 and the second mobile platform 6 beyond stroke；Buffer stopper 9 is mounted on peripheral device 11, is prevented
Only 6 mechanical collision disfiguring workpiece of first movement platform 4 and the second mobile platform；
Servo motor 14 is directly installed on fixed bearing block 22, is passed by fixed bearing block 22 by shaft coupling 21
Dynamic, axis has system to provide order when running, and precision feedback device provides position coordinates, realize Double tabletop it is equidistant move come into
Row processing needs when use to install lifting shaft and cutting axis on first movement platform 4 and the second mobile platform 6, to reach
The purpose of actual use.
The basic principles and main features of the present invention and the advantages of the present invention have been shown and described above.Current row
The technical staff of industry is described in above embodiments and description it should be appreciated that the present utility model is not limited to the above embodiments
Only illustrate the principles of the present invention, on the premise of not departing from the spirit and scope of the utility model, the utility model is also
It will have various changes and improvements, these various changes and improvements fall within the scope of the claimed invention.The utility model
Claimed range is defined by the appending claims and its equivalent thereof.
Claims (4)
1. a kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism, it is characterised in that: it includes marble crossbeam bottom
Seat (1), guide rail (2), sliding block (3), first movement platform (4), grating scale mounting blocks (5), the second mobile platform (6), screw rod
(7), platform transmission device connector (8), buffer stopper (9), grating (10), mechanical position limitation (11), the first drag chain mounting plate (13),
Servo motor (14), the second drag chain mounting plate (15), drag chain (16), eccentric pin (17), third drag chain mounting plate (18), axis
Transport positioning plate (19), moving shaft holder (20), shaft coupling (21), fixed bearing block (22), INDEX point (23), organ bell-type
Dust cover (24), the first sealing plate (25) and the second sealing plate (26) are installed in parallel in the marble beam base (1)
There are two guide rails (2), and guide rail (2) is fixed by eccentric pin (17) and marble beam base (1), the guide rail
(2) first movement platform (4) and the second mobile platform (6), and first movement platform (4) and the second mobile platform are installed on
(6) it is equipped between guide rail (2) sliding block (3), the sliding block (3) is slidably connected with guide rail (2), on the guide rail (2)
Lower two sides are provided with eccentric pin (17), are mounted on above the first movement platform (4) and the second mobile platform (6)
It is mounted on screw rod (7) on rear side of grating scale mounting blocks (5), the first movement platform (4) and the second mobile platform (6), and
Screw rod (7) is connect by platform transmission device connector (8) with first movement platform (4) and the second mobile platform (6), described
Screw rod (7) one end is connect by shaft coupling (21) with servo motor (14), and the screw rod is provided with moving shaft holder on (7)
(20) and fixed bearing block (22), the moving shaft holder (20) and first movement platform (4), the second mobile platform (6) are solid
Fixed connection, the fixed bearing block (22) are fixedly connected with marble beam base (1), the first movement platform (4)
It is provided with buffer stopper (9) with the second mobile platform (6) rear side, and first movement platform (4) and the second mobile platform (6) are outside
It is provided with mechanical position limitation (11) on side, marble beam base (1), pacifies on the end face of the marble beam base (1)
Equipped with grating (10) and INDEX point (23), axis is installed on the outside of the first movement platform (4) and the second mobile platform (6)
It transports positioning plate (19).
2. a kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism according to claim 1, it is characterised in that:
Described marble beam base (1) periphery is equipped with the first drag chain mounting plate (13), the second drag chain mounting plate (15) and third
Drag chain mounting plate (18).
3. a kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism according to claim 1, it is characterised in that:
Pass through the first sealing plate between the first movement platform (4), the second mobile platform (6) and marble beam base (1)
(25) and the second sealing plate (26) is connected with organ bell-type dust cover (24).
4. a kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism according to claim 1, it is characterised in that:
The shaft coupling (21) is double diaphragm couplings.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820342870.0U CN208358561U (en) | 2018-03-13 | 2018-03-13 | A kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820342870.0U CN208358561U (en) | 2018-03-13 | 2018-03-13 | A kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism |
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| Publication Number | Publication Date |
|---|---|
| CN208358561U true CN208358561U (en) | 2019-01-11 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820342870.0U Active CN208358561U (en) | 2018-03-13 | 2018-03-13 | A kind of Dali stone structure high-precision crossbeam double lead driving shaft mechanism |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114872211A (en) * | 2022-07-08 | 2022-08-09 | 沈阳和研科技有限公司 | Automatic compensation method for Y axis of double-axis scribing machine and double-axis scribing machine |
-
2018
- 2018-03-13 CN CN201820342870.0U patent/CN208358561U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114872211A (en) * | 2022-07-08 | 2022-08-09 | 沈阳和研科技有限公司 | Automatic compensation method for Y axis of double-axis scribing machine and double-axis scribing machine |
| CN114872211B (en) * | 2022-07-08 | 2022-10-25 | 沈阳和研科技有限公司 | Automatic compensation method for Y axis of double-axis scribing machine and double-axis scribing machine |
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