CN208352275U - The device of graphite boat up and down is automated for PECVD - Google Patents
The device of graphite boat up and down is automated for PECVD Download PDFInfo
- Publication number
- CN208352275U CN208352275U CN201821119572.1U CN201821119572U CN208352275U CN 208352275 U CN208352275 U CN 208352275U CN 201821119572 U CN201821119572 U CN 201821119572U CN 208352275 U CN208352275 U CN 208352275U
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- China
- Prior art keywords
- mechanical arm
- portal frame
- graphite boat
- plate
- supporting plate
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The utility model relates to manufacture of solar cells equipment technical fields, more particularly to a kind of device that graphite boat up and down is automated for PECVD, including pedestal, portal frame, left mechanical arm and right mechanical arm, portal frame is fixed on pedestal, left mechanical arm, which can slide up and down, is arranged in the left-external side of portal frame, right mechanical arm, which can slide up and down, is arranged in the right outside of portal frame, the left inside side of portal frame is further fixedly arranged on left cache shelf, the Right Inboard of portal frame is further fixedly arranged on right cache shelf, and left cache shelf and right cache shelf or so are symmetrical arranged one by one.It when replacing graphite boat, is able to carry out automation and picks and places graphite boat, save cost of labor, and can once be put into specified position.
Description
Technical field
The utility model relates to manufacture of solar cells equipment technical fields, more particularly to a kind of PECVD that is used for automate
The device of upper and lower graphite boat.
Background technique
During manufacture of solar cells, manually when upper and lower graphite boat, since graphite boat is larger, two people's lifts are at least needed
Take, this method is unfavorable for saving cost of labor, and when artificial lift takes often once put it is not in place, it is time-consuming and laborious.
Utility model content
Technical problem to be solved by the utility model is: being asked to solve the time-consuming and laborious technology of artificial graphite boat up and down
Topic, the utility model provide a kind of device that graphite boat up and down is automated for PECVD.
The technical scheme adopted by the utility model to solve the technical problem is as follows: a kind of automate stone up and down for PECVD
The device of Mo Zhou, including pedestal, portal frame, left mechanical arm and right mechanical arm, portal frame are fixed on pedestal, left mechanical arm
It can slide up and down and the left-external side of portal frame is set, right mechanical arm, which can slide up and down, is arranged in the right outside of portal frame, door
The left inside side of shape frame is further fixedly arranged on left cache shelf, and the Right Inboard of portal frame is further fixedly arranged on right cache shelf, left cache shelf
It is symmetrical arranged one by one with right cache shelf or so.
Further, the specific structure of left mechanical arm and right mechanical arm slided up and down are as follows: the portal frame left-external side setting
There is longitudinal left mechanical arm sliding slot, the rear inside of left mechanical arm is provided with left mechanical arm sliding block, left mechanical arm sliding block and left machine
Tool arm sliding slot is slidably matched, and the right outside of the portal frame is provided with longitudinal right mechanical arm sliding slot, in the rear end of right mechanical arm
Side is provided with right mechanical arm sliding block, and right mechanical arm sliding block and right mechanical arm sliding slot are slidably matched, are additionally provided at the top of portal frame
For driving the mechanical arm driving device of left mechanical arm and right mechanical arm.
For the ease of supporting and lifting the both ends of graphite boat, left machine capable of sliding back and forth is additionally provided on the bottom surface of the left mechanical arm
Machinery claw is provided with left mechanical claw drive unit in left mechanical arm, is additionally provided with the right side capable of sliding back and forth on the bottom surface of right mechanical arm
Gripper is provided with right mechanical claw drive unit in right mechanical arm.
Further, specifically, the left gripper and right gripper are symmetrical set, and the left gripper includes left cunning
Block and left supporting plate, the sliding slot on the upper end of left slider and the bottom surface of left mechanical arm are slidably matched, the lower end of left slider and left supporting plate
It is fixedly connected, the right gripper includes right sliding block and right supporting plate, the sliding slot on the upper end of right sliding block and the bottom surface of right mechanical arm
It is slidably matched, the lower end of right sliding block is fixedly connected with right supporting plate, and left supporting plate and the equal level of right supporting plate extend internally.
Further, specifically, the left cache shelf includes left connection board and left caching plate, left caching plate and portal frame
Left inside side is fixedly connected by left connection board, and right cache shelf includes right connection board and right caching plate, right caching plate and portal frame
Right Inboard is fixedly connected by right connection board, and the distance between the outside of the outside of left caching plate and corresponding right caching plate is d,
It on the inside of left supporting plate and is D the distance between on the inside of right supporting plate, d is less than D.
For the ease of storing graphite boat, left conveyer belt in the front-back direction, left caching plate are additionally provided on the left caching plate
On be provided with left transfer drive, right conveyer belt in the front-back direction is additionally provided on the right caching plate, on right caching plate
It is provided with right transfer drive.
For the ease of transporting graphite boat, the bottom of the pedestal is also equipped with multiple universal wheels.
The utility model has the beneficial effects that the device that graphite boat up and down is automated for PECVD of the utility model,
It when replacing graphite boat, is able to carry out automation and picks and places graphite boat, save cost of labor, and can once be put into specified
Position.
Detailed description of the invention
The present invention will be further described with reference to the accompanying drawings and examples.
Fig. 1 is the main view that the utility model automates the device of graphite boat up and down for PECVD.
Fig. 2 is the perspective view that the utility model automates the device of graphite boat up and down for PECVD.
In figure: 1, pedestal, 11, universal wheel, 2, portal frame, 21, left mechanical arm sliding slot, 31, left mechanical arm, 311, left cunning
Block, 312, left supporting plate, 313, right sliding block, 314, right supporting plate, 32, right mechanical arm, 42, left cache shelf, 421, left connection board, 422,
Left caching plate, 4221, left conveyer belt, 43, right cache shelf, 431, right connection board, 432, right caching plate, 4321, right conveyer belt, 5,
Graphite boat.
Specific embodiment
The utility model is described in further detail presently in connection with attached drawing.These attached drawings are simplified schematic diagram,
Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows composition related with the utility model.
It as illustrated in fig. 1 and 2, is the utility model optimum embodiment, a kind of dress automating graphite boat up and down for PECVD
It sets, including pedestal 1, portal frame 2, left mechanical arm 31 and right mechanical arm 32, portal frame 2 are fixed on pedestal 1, pedestal 1
Bottom is also equipped with multiple universal wheels 11, and left mechanical arm 31, which can slide up and down, is arranged in the left-external side of portal frame 2, right mechanical arm
32, which can slide up and down, is arranged in the right outside of portal frame 2, and the left inside side of portal frame 2 is further fixedly arranged on multiple left cache shelfs
42, the Right Inboard of portal frame 2 is further fixedly arranged on multiple right cache shelfs 43, and left cache shelf 42 and right cache shelf 43 or so one are a pair of
Claim setting.
The left-external side of portal frame 2 is provided with longitudinal left mechanical arm sliding slot 21, and the rear inside of left mechanical arm 31 is provided with
Left mechanical arm sliding block, left mechanical arm sliding block and left mechanical arm sliding slot 21 are slidably matched, and the right outside of portal frame 2 is provided with longitudinal
Right mechanical arm sliding slot 22, the rear inside of right mechanical arm 32 are provided with right mechanical arm sliding block, right mechanical arm sliding block and right mechanical arm
Sliding slot 22 is slidably matched, and the top of portal frame 2 is additionally provided with for driving the mechanical arm of left mechanical arm 31 and right mechanical arm 32 to drive
Dynamic device.Left mechanical arm sliding slot 21 and right mechanical arm sliding slot 22 are similar to T-slot.
It is additionally provided with left gripper capable of sliding back and forth on the bottom surface of left mechanical arm 31, is provided with left machine in left mechanical arm 31
Machinery claw driving device is additionally provided with right gripper capable of sliding back and forth on the bottom surface of right mechanical arm 32, is arranged in right mechanical arm 32
There is right mechanical claw drive unit.
Left gripper and right gripper are symmetrical set, and left gripper includes left slider 311 and left supporting plate 312, left cunning
Sliding slot on the upper end of block 311 and the bottom surface of left mechanical arm 31 is slidably matched, and the lower end of left slider 311 and left supporting plate 312 are fixed
Connection, right gripper includes right sliding block 313 and right supporting plate 314, the cunning on the upper end of right sliding block 313 and the bottom surface of right mechanical arm 32
Slot is slidably matched, and the lower end of right sliding block 313 is fixedly connected with right supporting plate 314, in left supporting plate 312 and the equal horizontal direction of right supporting plate 314
Extend.
Left cache shelf 42 include left connection board 421 and left caching plate 422, it is left caching plate 422 and portal frame 2 left inside side lead to
It crosses left connection board 421 to be fixedly connected, right cache shelf 43 includes right connection board 431 and right caching plate 432, right caching plate 432 and door
The Right Inboard of shape frame 2 is fixedly connected by right connection board 431, the outside of left caching plate 422 and corresponding right caching plate 432 it is outer
The distance between side is d, and the distance between 314 inside of left 312 inside of supporting plate and right supporting plate is D, and d is less than D.
It is additionally provided with left conveyer belt 4221 in the front-back direction on left caching plate 422, is provided with left conveying on left caching plate 422
With driving device, it is additionally provided with right conveyer belt 4321 in the front-back direction on right caching plate 432, is provided with the right side on right caching plate 432
Transfer drive.
Working principle: the both ends of graphite boat 5 have groove, protrude into picking-up graphite boat convenient for left supporting plate 312 and right supporting plate 314
5, mechanical arm driving device can drive left mechanical arm 31 is synchronous with right mechanical arm 32 to move up and down, when left mechanical arm 31 and right machine
When tool arm 32 moves to desired height, left machinery claw drive unit drives left supporting plate 312 to move to the front end of left mechanical arm 31, right
Mechanical claw drive unit drives right supporting plate 314 to move to the front end of right mechanical arm 32, and left supporting plate 312 and right supporting plate 314 be just at this time
It protruding into well in the groove of the left and right ends of graphite boat 5, left mechanical arm 31 and right mechanical arm 32 move upwards again, graphite boat 5 is lifted,
Left supporting plate 312 is synchronous with right supporting plate 314 to be moved backward, and then left mechanical arm 31 and right mechanical arm 32 move still further below, by graphite
Boat 5 is placed on left caching plate 422 and right caching plate 432, the left conveyer belt 4221 and right caching plate 432 on left caching plate 422
On right conveyer belt 4321, can will be placed into it is left caching plate 422 and it is right caching plate 432 on graphite boat 5 transport backward, graphite
After boat 5 is detached from left supporting plate 312 and right supporting plate 314, left mechanical arm 31 and right mechanical arm 32 can continue to transport next graphite boat
5.The device that graphite boat up and down is automated for PECVD of the utility model is able to carry out certainly when replacing graphite boat 5
Dynamicization picks and places graphite boat 5, saves cost of labor, and can once be put into specified position.Driving device in figure is omitted
To draw, the driving device of this utility model is all made of the motor of required model.
It is enlightenment, through the above description, related work people with the above-mentioned desirable embodiment according to the utility model
Member can carry out various changes and amendments in the range of without departing from this item utility model technical idea completely.This item is real
It is not limited to the contents of the specification with novel technical scope, it is necessary to its technology is determined according to scope of the claims
Property range.
Claims (7)
1. a kind of device for automating graphite boat up and down for PECVD, it is characterised in that: including pedestal (1), portal frame (2), a left side
Mechanical arm (31) and right mechanical arm (32), portal frame (2) are fixed on pedestal (1), and left mechanical arm (31) can slide up and down
Setting portal frame (2) left-external side, right mechanical arm (32) can slide up and down be arranged in the right outside of portal frame (2), door
The left inside side of shape frame (2) is further fixedly arranged on left cache shelf (42), and the Right Inboard of portal frame (2) is further fixedly arranged on right cache shelf
(43), left cache shelf (42) and right cache shelf (43) left and right are symmetrical arranged one by one.
2. the device of graphite boat up and down is automated for PECVD as described in claim 1, it is characterised in that: the portal frame
(2) left-external side is provided with longitudinal left mechanical arm sliding slot (21), and the rear inside of left mechanical arm (31) is provided with left mechanical arm
Sliding block, left mechanical arm sliding block and left mechanical arm sliding slot (21) are slidably matched, and the right outside of the portal frame (2) is provided with longitudinal
Right mechanical arm sliding slot (22), the rear inside of right mechanical arm (32) are provided with right mechanical arm sliding block, right mechanical arm sliding block and right machine
Tool arm sliding slot (22) is slidably matched, and is additionally provided at the top of portal frame (2) for driving left mechanical arm (31) and right mechanical arm
(32) mechanical arm driving device.
3. the device of graphite boat up and down is automated for PECVD as described in claim 1, it is characterised in that: the left machinery
It is additionally provided with left gripper capable of sliding back and forth on the bottom surface of arm (31), left gripper driving dress is provided in left mechanical arm (31)
It sets, right gripper capable of sliding back and forth is additionally provided on the bottom surface of right mechanical arm (32), right mechanical arm is provided with right machine on (32)
Machinery claw driving device.
4. the device of graphite boat up and down is automated for PECVD as claimed in claim 3, it is characterised in that: the left machinery
Pawl and right gripper are symmetrical set, and the left gripper includes left slider (311) and left supporting plate (312), left slider (311)
Upper end and left mechanical arm (31) bottom surface on sliding slot be slidably matched, the lower end of left slider (311) and left supporting plate (312) are fixed
Connection, the right gripper include right sliding block (313) and right supporting plate (314), the upper end of right sliding block (313) and right mechanical arm (32)
Bottom surface on sliding slot be slidably matched, the lower end of right sliding block (313) is fixedly connected with right supporting plate (314), left supporting plate (312) and the right side
Supporting plate (314) level extends internally.
5. the device of graphite boat up and down is automated for PECVD as claimed in claim 4, it is characterised in that: the left side is slow
Depositing frame (42) includes left connection board (421) and left caching plate (422), and the left inside side of left caching plate (422) and portal frame (2) passes through
Left connection board (421) is fixedly connected, and right cache shelf (43) includes right connection board (431) and right caching plate (432), right caching plate
(432) it is fixedly connected with the Right Inboard of portal frame (2) by right connection board (431), the outside of left caching plate (422) and corresponding
The distance between the outside of right caching plate (432) is d, is the distance between on the inside of left supporting plate (312) inside and right supporting plate (314)
D, d are less than D.
6. the device of graphite boat up and down is automated for PECVD as claimed in claim 5, it is characterised in that: the left caching
It is additionally provided with left conveyer belt (4221) in the front-back direction on plate (422), left conveyer belt driving dress is provided on left caching plate (422)
It sets, right conveyer belt (4321) in the front-back direction is additionally provided on the right caching plate (432), is provided on right caching plate (432)
Right transfer drive.
7. the device of graphite boat up and down is automated for PECVD as described in claim 1, it is characterised in that: the pedestal (1)
Bottom be also equipped with multiple universal wheels (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821119572.1U CN208352275U (en) | 2018-07-13 | 2018-07-13 | The device of graphite boat up and down is automated for PECVD |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821119572.1U CN208352275U (en) | 2018-07-13 | 2018-07-13 | The device of graphite boat up and down is automated for PECVD |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208352275U true CN208352275U (en) | 2019-01-08 |
Family
ID=64904865
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821119572.1U Active CN208352275U (en) | 2018-07-13 | 2018-07-13 | The device of graphite boat up and down is automated for PECVD |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208352275U (en) |
-
2018
- 2018-07-13 CN CN201821119572.1U patent/CN208352275U/en active Active
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