CN208346247U - A kind of vacuum evaporation coating membrane carrier - Google Patents

A kind of vacuum evaporation coating membrane carrier Download PDF

Info

Publication number
CN208346247U
CN208346247U CN201820403055.0U CN201820403055U CN208346247U CN 208346247 U CN208346247 U CN 208346247U CN 201820403055 U CN201820403055 U CN 201820403055U CN 208346247 U CN208346247 U CN 208346247U
Authority
CN
China
Prior art keywords
vacuum evaporation
evaporation coating
coating membrane
membrane carrier
carrier
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201820403055.0U
Other languages
Chinese (zh)
Inventor
陈珂珩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Suzhou Rui Kang Vacuum Technology Co Ltd
Original Assignee
Suzhou Rui Kang Vacuum Technology Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Suzhou Rui Kang Vacuum Technology Co Ltd filed Critical Suzhou Rui Kang Vacuum Technology Co Ltd
Priority to CN201820403055.0U priority Critical patent/CN208346247U/en
Application granted granted Critical
Publication of CN208346247U publication Critical patent/CN208346247U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

Existing plating material carrier is usually intended only to adapt to the shape of graphite crucible and customize on the market at present; so the upper surface of general plating material carrier is all plane; but when the material to be plated of liquid is transferred on plating material carrier; with regard to needing the adding speed of material to be plated very slow; just can guarantee that the material to be plated of liquid will not be overflowed from plating material carrier, this reduces efficiency material to be plated being transferred on plating material carrier.In view of this, the utility model proposes a kind of vacuum evaporation coating membrane carriers, sunk structure is contained at least one surface in two surfaces of the carrier, enable the material to be plated of liquid so smooth that be added in vacuum evaporation coating membrane carrier in this way, it improves work efficiency, and due to the presence of sunk structure, meeting is so that the specific surface area of entire vacuum evaporation coating membrane carrier increases, adsorption rate of the material to be plated of liquid on vacuum evaporation coating membrane carrier can be promoted, and also will increase the evaporation rate of the material to be plated during vacuum vapor plating.

Description

A kind of vacuum evaporation coating membrane carrier
Technical field
The utility model relates to arrive vacuum coating technology, particularly with regard to a kind of vacuum evaporation coating membrane carrier.
Background technique
Evaporation coating techniques refer to that certain substance makes it be deposited on the surface of solids by heating evaporation, wherein there is a kind of heating Mode is to be heated using electron beam heating, when being heated using electron beam heating, can make the temperature of heating Degree reaches 1000 DEG C~3000 DEG C, and evaporation of metal Coating Materials is sufficiently evaporated and is deposited on the table of material to be coated Face, therefore popularized at present by the way of electron beam heating.
In order to enable the commonly used vacuum evaporating coating machine using electron beam heating is capable of handling volatilization temperature In 400 DEG C~800 DEG C of organic matter, material to be plated can be all stored using special graphite crucible.And the material to be plated of organic matter Material needs to be made into liquid, then will include material to be plated so generally can all be transferred to through the material to be plated of liquid on plating material carrier The plating material carrier of material is placed in graphite crucible, and existing plating material carrier is usually intended only to adapt to graphite earthenware on the market at present The shape of crucible and customize, so the upper surface of general plating material carrier is all plane, but the material to be plated of liquid is transferred to When on plating material carrier, it is necessary to which the adding speed of material to be plated is very slow, just can guarantee that the material to be plated of liquid will not be from plating It is overflowed on material carrier, this reduces the efficiency being transferred to material to be plated on plating material carrier.
Utility model content
In view of this, the utility model proposes a kind of vacuum evaporation coating membrane carrier, in two surfaces of the carrier at least Contain sunk structure in one surface, so that the material to be plated of liquid can be smooth be added to vacuum evaporation coating membrane carrier In, it improves work efficiency, and due to the presence of sunk structure, the specific surface area of entire vacuum evaporation coating membrane carrier can be made to increase Greatly, adsorption rate of the material to be plated of liquid on vacuum evaporation coating membrane carrier can be promoted, and also will increase vacuum vapor plating The evaporation rate of material to be plated in the process.
A kind of vacuum evaporation coating membrane carrier comprising the ontology 1 of vacuum evaporation coating membrane carrier, it is characterised in that: vacuum is steamed The ontology 1 of hair plating membrane carrier has upper surface 11 and the surface of lower surface 12 two, has raised brim 111, tiltedly on upper surface 11 Slope surface 112, depressed area 113, wherein depressed area 113 is located at most intermediate, and slope 112 is located at making a circle in week for depressed area 113, convex It plays edge 111 and is located at making a circle in week for slope 112.
Further, lower surface 12 also has raised brim, slope and depressed area, and depressed area is located at most middle position, Slope is located at making a circle in week for depressed area, and raised brim is located at making a circle in week for slope.
Further, the ontology of vacuum evaporation coating membrane carrier is cylindrical body.
Further, raised brim 111 is annular, and the outside diameter of annular is 12mm~25mm, and interior circular diameter is 10mm~24mm, annular outside diameter are 1mm~2mm bigger than interior circular diameter.
Further, the angle of slope 112 and horizontal plane is 75 °~90 °.
Further, depressed area 113 is circle, a diameter of 9mm~23mm.
Further, the ontology 1 of vacuum evaporation coating membrane carrier is formed by brass particle by high temperature sintering, brass particle Partial size is 0.01mm~0.1mm.
It can be seen that since the vacuum evaporation coating membrane carrier of the utility model increases depressed area design, so that liquid Material to be plated can be smoothly transferred on plating membrane carrier, without there is a situation where liquid to overflow.In addition, setting due to depressed area Meter improves the speed that material to be plated is adsorbed on plating membrane carrier so that the specific surface area of entire vacuum evaporation coating membrane carrier increases The evaporation rate of material to be plated during degree and vacuum coating.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the vacuum evaporation coating membrane carrier of the utility model.
Main element symbol description
Vacuum vapor plating carrier body 1
Upper surface 11
Raised brim 111
Slope 112
Depressed area 113
Lower surface 12
The following detailed description will be further explained with reference to the above drawings the utility model.
Specific embodiment
Case 1 is embodied:
A kind of vacuum evaporation coating membrane carrier comprising the ontology 1 of vacuum evaporation coating membrane carrier, it is characterised in that: vacuum is steamed The ontology 1 of hair plating membrane carrier has upper surface 11 and the surface of lower surface 12 two, has raised brim 111, tiltedly on upper surface 11 Slope surface 112, depressed area 113, wherein depressed area 113 is located at most intermediate, and slope 112 is located at making a circle in week for depressed area 113, convex It plays edge 111 and is located at making a circle in week for slope 112, lower surface 12 also has raised brim, slope and depressed area, depressed area Positioned at most middle position, slope is located at making a circle in week for depressed area, and raised brim is located at making a circle in week for slope.
The ontology 1 of vacuum evaporation coating membrane carrier is cylindrical body, and raised brim 111 is annular, and the outside diameter of annular is 14mm, interior circular diameter are 13mm, and slope 112 and the angle of horizontal plane are 78 °, and depressed area 113 is circle, a diameter of 12mm。
The ontology 1 of vacuum evaporation coating membrane carrier is formed by brass particle by high temperature sintering, and the partial size of brass particle is 0.01mm~0.1mm.
Case 2 is embodied:
A kind of vacuum evaporation coating membrane carrier comprising the ontology 1 of vacuum evaporation coating membrane carrier, it is characterised in that: vacuum is steamed The ontology 1 of hair plating membrane carrier has upper surface 11 and the surface of lower surface 12 two, has raised brim 111, tiltedly on upper surface 11 Slope surface 112, depressed area 113, wherein depressed area 113 is located at most intermediate, and slope 112 is located at making a circle in week for depressed area 113, convex It plays edge 111 and is located at making a circle in week for slope 112, lower surface 12 also has raised brim, slope and depressed area, depressed area Positioned at most middle position, slope is located at making a circle in week for depressed area, and raised brim is located at making a circle in week for slope.
The ontology 1 of vacuum evaporation coating membrane carrier is cylindrical body, and raised brim 111 is annular, and the outside diameter of annular is 20mm, interior circular diameter are 18mm, and slope 112 and the angle of horizontal plane are 80 °, and depressed area 113 is circle, a diameter of 16mm。
The ontology 1 of vacuum evaporation coating membrane carrier is formed by brass particle by high temperature sintering, and the partial size of brass particle is 0.01mm~0.1mm.
Case 3 is embodied:
A kind of vacuum evaporation coating membrane carrier comprising the ontology 1 of vacuum evaporation coating membrane carrier, it is characterised in that: vacuum is steamed The ontology 1 of hair plating membrane carrier has upper surface 11 and the surface of lower surface 12 two, has raised brim 111, tiltedly on upper surface 11 Slope surface 112, depressed area 113, wherein depressed area 113 is located at most intermediate, and slope 112 is located at making a circle in week for depressed area 113, convex It plays edge 111 and is located at making a circle in week for slope 112, lower surface 12 also has raised brim, slope and depressed area, depressed area Positioned at most middle position, slope is located at making a circle in week for depressed area, and raised brim is located at making a circle in week for slope.
The ontology 1 of vacuum evaporation coating membrane carrier is cylindrical body, and raised brim 111 is annular, and the outside diameter of annular is 24mm, interior circular diameter are 22.5mm, and slope 112 and the angle of horizontal plane are 85 °, and depressed area 113 is circle, a diameter of 22mm。
The ontology 1 of vacuum evaporation coating membrane carrier is formed by brass particle by high temperature sintering, and the partial size of brass particle is 0.01mm~0.1mm.
Using the vacuum evaporation coating membrane carrier in above-described embodiment 1~3, the material to be plated of liquid can be enabled smooth It is transferred on plating membrane carrier, without there is a situation where liquid to overflow.In addition, due to the design of depressed area, so that entire vacuum The specific surface area of evaporation coating carrier increases, and improves speed and vacuum coating that material to be plated is adsorbed on plating membrane carrier During material to be plated evaporation rate.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed, But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to In the protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.

Claims (8)

1. a kind of vacuum evaporation coating membrane carrier comprising the ontology (1) of vacuum evaporation coating membrane carrier, it is characterised in that: vacuum is steamed The ontology (1) of hair plating membrane carrier has upper surface (11) and the surface of lower surface (12) two, has lug on upper surface (11) Edge (111), slope (112), depressed area (113), wherein depressed area (113) are located at most intermediate, and slope (112) is located at recess Area (113) makes a circle in week, and raised brim (111) is located at making a circle in week for slope (112).
2. vacuum evaporation coating membrane carrier as described in claim 1, it is characterised in that: lower surface (12) also have raised brim, Slope and depressed area, depressed area are located at most middle position, and slope is located at making a circle in week for depressed area, and raised brim is located at oblique The week of slope surface makes a circle.
3. vacuum evaporation coating membrane carrier as described in claim 1, it is characterised in that: the ontology (1) of vacuum evaporation coating membrane carrier For cylindrical body.
4. vacuum evaporation coating membrane carrier as described in claim 1, it is characterised in that: raised brim (111) is annular, annular Outside diameter be 12mm~25mm, interior circular diameter is 10mm~24mm, annular outside diameter is 1mm bigger than interior circular diameter~ 2mm。
5. vacuum evaporation coating membrane carrier as described in claim 1, it is characterised in that: the angle of slope (112) and horizontal plane It is 75 °~90 °.
6. vacuum evaporation coating membrane carrier as described in claim 1, it is characterised in that: depressed area (113) are circle, a diameter of 9mm~23mm.
7. vacuum evaporation coating membrane carrier as described in claim 1, it is characterised in that: the ontology (1) of vacuum evaporation coating membrane carrier It is formed by brass particle by high temperature sintering.
8. vacuum evaporation coating membrane carrier as claimed in claim 7, it is characterised in that: the partial size of brass particle be 0.01mm~ 0.1mm。
CN201820403055.0U 2018-03-23 2018-03-23 A kind of vacuum evaporation coating membrane carrier Active CN208346247U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201820403055.0U CN208346247U (en) 2018-03-23 2018-03-23 A kind of vacuum evaporation coating membrane carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201820403055.0U CN208346247U (en) 2018-03-23 2018-03-23 A kind of vacuum evaporation coating membrane carrier

Publications (1)

Publication Number Publication Date
CN208346247U true CN208346247U (en) 2019-01-08

Family

ID=64885408

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201820403055.0U Active CN208346247U (en) 2018-03-23 2018-03-23 A kind of vacuum evaporation coating membrane carrier

Country Status (1)

Country Link
CN (1) CN208346247U (en)

Similar Documents

Publication Publication Date Title
WO2011139439A3 (en) Physical vapor deposition chamber with rotating magnet assembly and centrally fed rf power
CN208346247U (en) A kind of vacuum evaporation coating membrane carrier
CN205556764U (en) Even coating by vaporization device
CN108950510A (en) Deposition ring and Pvd equipment for physical vapour deposition (PVD)
WO2018059019A1 (en) Crucible, evaporation deposition device and evaporation deposition system
CN204589290U (en) A kind of arc ions vacuum plating unit bias voltage supplementary unit
CN204111859U (en) Magnetron sputtering loop device and magnetron sputter reactor
CN107287561A (en) Prevent the crucible blocked
CN204982037U (en) Rotation type coating machine
CN208346249U (en) A kind of novel graphite crucible
CN108677148B (en) Evaporation source and evaporation device
CN207581906U (en) A kind of Pvd equipment
CN207331050U (en) A kind of optical vacuum plated film high temperature is without expansion clamp
CN103774120A (en) Gas uniformizing device for PECVD (Plasma Enhanced Chemical Vapor Deposition) system
CN204779787U (en) Magnetron sputtering target rifle
KR101310296B1 (en) Thermal Evaporator
CN203878203U (en) Coating device
CN208667840U (en) Deposition ring and Pvd equipment for physical vapour deposition (PVD)
CN108330450B (en) Evaporation crucible and air outlet sheet structure thereof
CN204265841U (en) Ion film plating fixture
CN206408286U (en) A kind of crucible device of eyeglass vacuum coating
CN204529955U (en) A kind of evaporation unit of plated film
CN210560696U (en) Organic vacuum evaporation source crucible with any installation angle
CN206843578U (en) One kind is glasses lens plated to use rotary disk
CN209522912U (en) The coating clamp that a kind of novel diameter improving production capacity is 495mm

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant