CN208304395U - A kind of centrosymmetric UVW platform - Google Patents
A kind of centrosymmetric UVW platform Download PDFInfo
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- CN208304395U CN208304395U CN201820519324.XU CN201820519324U CN208304395U CN 208304395 U CN208304395 U CN 208304395U CN 201820519324 U CN201820519324 U CN 201820519324U CN 208304395 U CN208304395 U CN 208304395U
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Abstract
The utility model discloses a kind of centrosymmetric UVW platform, including fixed platform and driving mechanism；The top of fixed platform is equipped with moving platform, there is guiding mechanism between fixed platform and moving platform；Guiding mechanism includes three sets of guidance sets；Wherein the rotary motion director element in a set of guidance set is connected with the geometric center of moving platform, first straight line motion guide element in this guidance set makees X to guiding to moving platform, second straight line motion guide element in this guidance set makees Y-direction guiding to moving platform, rotary motion director element in other two sets of guidance sets is connected with moving platform respectively, this two rotary motions director element is symmetrical about the symmetrical centre of moving platform, first straight line motion guide element in this two sets of guidance sets makees Y-direction guiding to moving platform, second straight line motion guide element in this two sets of guidance sets makees X to guiding to moving platform, when moving platform being avoided to move along Y-direction, because of moving platform discontinuity equalization, cause the kinematic error of moving platform two sides inconsistent.
Description
Technical field
The utility model relates to UVW platform technology fields, and in particular to a kind of centrosymmetric UVW platform.
Background technique
Currently, high-accuracy technique of counterpoint occupies more and more important position in micro Process manufacturing, technique of counterpoint is wide
It is general to be related to semiconductor equipment, network printing equipment, LED or liquid crystal display panel manufacture, fiber alignment, the processing of micromechanics electronic device
The industries such as encapsulation.In order to improve part processing precision, accelerate contraposition efficiency, relevant industries propose higher want to technique of counterpoint
It asks, and high-precision technique of counterpoint then depends on the high-performance of UVW platform.
The kinematic chain of well known UVW platform is made of 3 drive chains and 1 driven chain, this 4 kinematic chains are distributed in its top
On four angles of the platform or center of its four edges.If setting platform is having the direction of 2 drive chains as X-direction, only 1
The direction of drive chain is Y-direction, then since Y-direction only has a drive chain, and the drive chain is not in the center line of moving platform
On, therefore when moving platform is run in the Y direction, due to moving platform discontinuity equalization, easily there is the kinematic error of Y-direction drive chain side
It is smaller, but the larger situation of kinematic error of its driven chain side.
It can be seen that the prior art also certain defect.
Utility model content
In view of this, in order to solve the problems in the prior art, it is flat that the utility model proposes a kind of centrosymmetric UVW
Platform.
The utility model is solved the above problems by following technological means:
A kind of centrosymmetric UVW platform, including fixed platform and driving mechanism；
The top of the fixed platform is equipped with moving platform, is parallel to each other between moving platform and fixed platform, the fixed platform and dynamic
Be provided with guiding mechanism between platform, guiding mechanism can make moving platform relative to fixed platform along Y-direction or X to moving；
The guiding mechanism includes three sets of guidance sets；
The guidance set includes that first straight line motion guide element, second straight line motion guide element and rotary motion are led
To element, the guide direction of first straight line motion guide element and the guide direction of second straight line motion guide element are mutually hung down
Directly, and the fixing piece in first straight line motion guide element is connected with the movable part of second straight line motion guide element, and first
Movable part in linear movement guide element is connected by rotary motion director element with moving platform, rotary motion director element
Moving platform can be made to return relative to the axial line rotation of the movable part wraparound transhipment action-oriented element of first straight line motion guide element
The axial line for transporting action-oriented element is parallel with Z-direction, and the fixing piece of second straight line motion guide element is connected with fixed platform；
Wherein the rotary motion director element in a set of guidance set is connected with the geometric center of moving platform, and this is oriented to
The second straight line motion guide that first straight line motion guide element in component makees X to guiding, in this guidance set to moving platform
Element makees Y-direction guiding to moving platform, and driving mechanism has three sets, wherein a set of driving mechanism drives this second straight line motion guide member
The movable part of part is moved along Y-direction, and then moving platform is driven to move along Y-direction；
Rotary motion director element in other two sets of guidance sets is connected with moving platform respectively, and this two rotary motion
Symmetrical centre central symmetry of the director element about moving platform, the first straight line motion guide element pair in this two sets of guidance sets
Moving platform makees Y-direction guiding, and the second straight line motion guide element in this two sets of guidance sets makees X to guiding to moving platform, and
Other two sets of driving mechanisms respectively drive the movable part of a second straight line motion guide element along X to moving, and then drive dynamic flat
Platform is along X to moving.
Preferably, the guiding mechanism further includes having two sets of guidance sets, and the rotary motion in this two sets of guidance sets is led
It is connected respectively with moving platform to element, and symmetrical centre central symmetry of this two rotary motions director element about moving platform,
First straight line motion guide element in this two sets of guidance sets makees Y-direction guiding to moving platform, and in this two sets of guidance sets
Two linear movement guide elements make X to guiding to moving platform.
Preferably, the first straight line motion guide element and second straight line motion guide element are rolling linear guide
The movable part of pair, first straight line motion guide element and second straight line motion guide element is the cunning in linear rolling guide
The fixing piece of block, first straight line motion guide element and second straight line motion guide element is leading in linear rolling guide
Rail, rotary motion director element are to intersect ball collar, and the outer ring for intersecting ball collar is connected with moving platform, intersects ball collar
Inner ring be connected with the movable part of first straight line motion guide element.
Preferably, the driving mechanism includes servo motor, ball wire bar pair, connecting plate and two bearing blocks；
Lead screw both ends in the ball wire bar pair, which are respectively rotated with a bearing block, to be connected；
The servo motor is connect by shaft coupling with lead screw；
One end of the connecting plate is connected with the nut in ball wire bar pair, the other end and first straight line motion guide element
Sliding block be connected, servo motor drives lead screw rotation, and then moves along a straight line on guide rail with movable slider.
Preferably, the lower section of the fixed platform is equipped with Isolating Platform, and fixed platform is fixed on Isolating Platform.
Preferably, multiple location holes are opened up on the fixed platform, Isolating Platform is equipped with corresponding number of fixed with location hole
Position pin, and positioning pin is inserted in corresponding positioning hole.
Compared with prior art, the beneficial effects of the utility model are as follows:
When the avoidable moving platform of the utility model is moved along Y-direction, due to moving platform discontinuity equalization, cause described dynamic flat
The inconsistent situation of the kinematic error of platform two sides.
Detailed description of the invention
It, below will be to required in embodiment description in order to illustrate more clearly of the technical scheme in the embodiment of the utility model
Attached drawing to be used is briefly described, it should be apparent that, the accompanying drawings in the following description is only some realities of the utility model
Example is applied, it for those of ordinary skill in the art, without creative efforts, can also be according to these attached drawings
Obtain other attached drawings.
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the structural schematic diagram of guidance set.
Description of symbols:
1, fixed platform；2, moving platform；3, guidance set；4, first straight line motion guide element；5, second straight line movement is led
To element；6, rotary motion director element；7, movable part；8, fixing piece.
Specific embodiment
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, below in conjunction with attached drawing and
The technical solution of the utility model is described in detail in specific embodiment.It should be pointed out that described embodiment is only
It is only the utility model a part of the embodiment, instead of all the embodiments, based on the embodiments of the present invention, this field
Those of ordinary skill's every other embodiment obtained without making creative work, belongs to the utility model
The range of protection.
It is to be appreciated that the orientation or positional relationship of the instructions such as term " top ", " bottom " is based on the figure
Orientation or positional relationship is merely for convenience of describing the present invention and simplifying the description, rather than the dress of indication or suggestion meaning
It sets or element must have a particular orientation, be constructed and operated in a specific orientation, therefore should not be understood as to the utility model
Limitation.
Term " first ", " second ", " third " are used for description purposes only, and are not understood to indicate or imply relatively important
Property or implicitly indicate the quantity of indicated technical characteristic.Define as a result, " first ", " second ", " third " feature can
To explicitly or implicitly include one or more of the features.In the description of the present invention, unless otherwise indicated,
" one group " is meant that two or more.
Embodiment
As shown in Figs. 1-2, a kind of centrosymmetric UVW platform, including fixed platform 1 and driving mechanism；
The top of the fixed platform 1 is equipped with moving platform 2, is parallel to each other between moving platform 2 and fixed platform 1, the fixed platform 1
Be provided with guiding mechanism between moving platform 2, guiding mechanism can make moving platform 2 relative to fixed platform 1 along Y-direction or X to moving；
The guiding mechanism includes three sets of guidance sets 3；
The guidance set 3 includes first straight line motion guide element 4, second straight line motion guide element 5 and revolution fortune
Action-oriented element 6, the guide direction of first straight line motion guide element 4 and the guide direction of second straight line motion guide element 5
It is mutually perpendicular to, first straight line motion guide element 4 and second straight line motion guide element 5 all include fixing piece 8 and movable part
7, movable part 7 can move linearly relative to fixing piece 8, and the fixing piece 8 and second in first straight line motion guide element 4 is directly
The movable part 7 of line motion guide element 5 is connected, and the movable part 7 in first straight line motion guide element 4 is led by rotary motion
It is connected to element 6 with moving platform 2, rotary motion director element 6 can make moving platform 2 relative to first straight line motion guide element 4
7 wraparound of movable part transhipment action-oriented element 6 axial line rotation, the axial line of rotary motion director element 6 is parallel with Z-direction,
The fixing piece 8 of second straight line motion guide element 5 is connected with fixed platform 1；
Wherein the rotary motion director element 6 in a set of guidance set 3 is connected with the geometric center of moving platform 2, and this
The second straight line that first straight line motion guide element 4 in guidance set 3 makees X to guiding, in this guidance set 3 to moving platform 2
Motion guide element 5 makees Y-direction guiding to moving platform 2, and driving mechanism has three sets, wherein a set of driving mechanism drives this second straight line
The movable part 7 of motion guide element 5 is moved along Y-direction, this first straight line motion guide element 4 and rotary motion director element 6
It is moved therewith along Y-direction, and then moving platform 2 is driven to move along Y-direction；
Rotary motion director element 6 in other two sets of guidance sets 3 is connected with moving platform 2 respectively, and this two revolution
Symmetrical centre central symmetry of the motion guide element 6 about moving platform 2, the first straight line movement in this two sets of guidance sets 3 are led
Y-direction guiding is made to moving platform 2 to element 4, the second straight line motion guide element 5 in this two sets of guidance sets 3 makees moving platform 2
X is to guiding, and other two sets of driving mechanisms respectively drive the movable part 7 of a second straight line motion guide element 5 along X to shifting
Dynamic, this first straight line motion guide element 4 and rotary motion director element 6 drive moving platform 2 therewith along X to moving
Along X to moving.To due to 2 discontinuity equalization of moving platform, cause when the utility model, which can avoid moving platform 2, to be moved along Y-direction
The inconsistent situation of the kinematic error of 2 two sides of moving platform.
Preferably, the guiding mechanism further includes having two sets of guidance sets 3, the rotary motion in this two sets of guidance sets 3
Director element 6 is connected with moving platform 2 respectively, and this symmetrical centre center of two rotary motions director element 6 about moving platform 2
Symmetrically, the first straight line motion guide element 4 in this two sets of guidance sets 3 makees Y-direction guiding to moving platform 2, this two sets of guiding groups
Second straight line motion guide element 5 in part 3 makees X to guiding to moving platform 2.It is another that two sets of guidance sets 3 are arranged in moving platform 2
Diagonally, the rigidity for increasing platform enhances the load and stability of platform.
Preferably, the first straight line motion guide element 4 and second straight line motion guide element 5 are rolling linear guide
The movable part 7 of pair, first straight line motion guide element 4 and second straight line motion guide element 5 is in linear rolling guide
Sliding block, the fixing piece 8 of first straight line motion guide element 4 and second straight line motion guide element 5 is rolling linear guide
Guide rail in pair, rotary motion director element 6 are to intersect ball collar, and the outer ring for intersecting ball collar is connected with moving platform 2, hands over
The inner ring of fork ball collar is connected with the movable part 7 of first straight line motion guide element 4.It can be intersected in ball collar by adjusting
The height of gasket adjusts the height of guidance set 3.
Preferably, the driving mechanism includes servo motor, ball wire bar pair, connecting plate and two bearing blocks；
Lead screw both ends in the ball wire bar pair, which are respectively rotated with a bearing block, to be connected；
The servo motor is connect by shaft coupling with lead screw；
One end of the connecting plate is connected with the nut in ball wire bar pair, the other end and first straight line motion guide element
Sliding block be connected, servo motor drives lead screw rotation, and then moves along a straight line on guide rail with movable slider.
Preferably, the lower section of the fixed platform 1 is equipped with Isolating Platform, and fixed platform 1 is fixed on Isolating Platform.
Preferably, multiple location holes are opened up on the fixed platform 1, Isolating Platform is equipped with corresponding number of fixed with location hole
Position pin, and positioning pin is inserted in corresponding positioning hole.Fixed platform 1 is fixed on above Isolating Platform by location hole.Not only
It is processing and the assembly precision of platform, same there are also to working environment locating for platform, external environmental noise and exterior vibration
It will affect to platform aligning accuracy, therefore, Isolating Platform reduces the position error of platform.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the protection scope of the utility model.Therefore, the scope of protection shall be subject to the appended claims for the utility model patent.
Claims (6)
1. a kind of centrosymmetric UVW platform, which is characterized in that including fixed platform and driving mechanism；
The top of the fixed platform is equipped with moving platform, is parallel to each other between moving platform and fixed platform, the fixed platform and moving platform
Between be provided with guiding mechanism, guiding mechanism can make moving platform relative to fixed platform along Y-direction or X to moving；
The guiding mechanism includes three sets of guidance sets；
The guidance set includes first straight line motion guide element, second straight line motion guide element and rotary motion guiding member
Part, the guide direction of first straight line motion guide element and the guide direction of second straight line motion guide element are mutually perpendicular to, and
And the fixing piece in first straight line motion guide element is connected with the movable part of second straight line motion guide element, first straight line fortune
Movable part in action-oriented element is connected by rotary motion director element with moving platform, and rotary motion director element can make
Axial line rotation of the platform relative to the movable part wraparound transhipment action-oriented element of first straight line motion guide element, rotary motion
The axial line of director element is parallel with Z-direction, and the fixing piece of second straight line motion guide element is connected with fixed platform；
Wherein the rotary motion director element in a set of guidance set is connected with the geometric center of moving platform, and this guidance set
In first straight line motion guide element X is made to guiding, in this guidance set to moving platform second straight line motion guide element
Y-direction guiding is made to moving platform, driving mechanism there are three sets, wherein a set of driving mechanism drives this second straight line motion guide element
Movable part is moved along Y-direction, and then moving platform is driven to move along Y-direction；
Rotary motion director element in other two sets of guidance sets is connected with moving platform respectively, and this two rotary motion is oriented to
Symmetrical centre central symmetry of the element about moving platform, the first straight line motion guide element in this two sets of guidance sets is to dynamic flat
Platform makees Y-direction guiding, and the second straight line motion guide element in this two sets of guidance sets makees X to guiding to moving platform, and in addition
Two sets of driving mechanisms respectively drive the movable part of a second straight line motion guide element along X to moving, and then drive moving platform along X
To movement.
2. centrosymmetric UVW platform according to claim 1, which is characterized in that the guiding mechanism further includes having two
Guidance set is covered, the rotary motion director element in this two sets of guidance sets is connected with moving platform respectively, and this two revolutions fortune
Symmetrical centre central symmetry of the action-oriented element about moving platform, the first straight line motion guide element in this two sets of guidance sets
Y-direction guiding is made to moving platform, the second straight line motion guide element in this two sets of guidance sets makees X to guiding to moving platform.
3. centrosymmetric UVW platform according to claim 1 or 2, which is characterized in that the first straight line motion guide
Element and second straight line motion guide element are linear rolling guide, first straight line motion guide element and second straight line fortune
The movable part of action-oriented element is the sliding block in linear rolling guide, first straight line motion guide element and second straight line fortune
The fixing piece of action-oriented element is the guide rail in linear rolling guide, and rotary motion director element is to intersect ball collar,
The outer ring for intersecting ball collar is connected with moving platform, intersects the activity of the inner ring and first straight line motion guide element of ball collar
Part is connected.
4. centrosymmetric UVW platform according to claim 3, which is characterized in that the driving mechanism includes servo electricity
Machine, ball wire bar pair, connecting plate and two bearing blocks；
Lead screw both ends in the ball wire bar pair, which are respectively rotated with a bearing block, to be connected；
The servo motor is connect by shaft coupling with lead screw；
One end of the connecting plate is connected with the nut in ball wire bar pair, the cunning of the other end and first straight line motion guide element
Block is connected, and servo motor drives lead screw rotation, and then moves along a straight line on guide rail with movable slider.
5. centrosymmetric UVW platform according to claim 1, which is characterized in that the lower section of the fixed platform be equipped with every
Platform is shaken, fixed platform is fixed on Isolating Platform.
6. centrosymmetric UVW platform according to claim 5, which is characterized in that it is multiple fixed to open up on the fixed platform
Position hole, Isolating Platform be equipped with the corresponding number of positioning pin of location hole, and positioning pin is inserted in corresponding positioning hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820519324.XU CN208304395U (en) | 2018-04-12 | 2018-04-12 | A kind of centrosymmetric UVW platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820519324.XU CN208304395U (en) | 2018-04-12 | 2018-04-12 | A kind of centrosymmetric UVW platform |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208304395U true CN208304395U (en) | 2019-01-01 |
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ID=64719684
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820519324.XU Withdrawn - After Issue CN208304395U (en) | 2018-04-12 | 2018-04-12 | A kind of centrosymmetric UVW platform |
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| CN (1) | CN208304395U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110370031A (en) * | 2018-04-12 | 2019-10-25 | 广州中国科学院先进技术研究所 | A kind of centrosymmetric UVW platform |
-
2018
- 2018-04-12 CN CN201820519324.XU patent/CN208304395U/en not_active Withdrawn - After Issue
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110370031A (en) * | 2018-04-12 | 2019-10-25 | 广州中国科学院先进技术研究所 | A kind of centrosymmetric UVW platform |
| CN110370031B (en) * | 2018-04-12 | 2024-05-07 | 广州中国科学院先进技术研究所 | Centrosymmetric UVW platform |
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Granted publication date: 20190101 Effective date of abandoning: 20240507 |
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| AV01 | Patent right actively abandoned |
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| AV01 | Patent right actively abandoned |