CN208250404U - A kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable - Google Patents
A kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable Download PDFInfo
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- CN208250404U CN208250404U CN201820863017.3U CN201820863017U CN208250404U CN 208250404 U CN208250404 U CN 208250404U CN 201820863017 U CN201820863017 U CN 201820863017U CN 208250404 U CN208250404 U CN 208250404U
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- main body
- connecting rod
- inner casing
- vertical slot
- body frame
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Abstract
The utility model discloses a kind of ion plating equipments with the vacuum chamber inner casing being conveniently replaceable, including support base, vertical slot, transverse groove, fixed plate and door-plate, the upper surface of the support base is fixed with main body frame, and the internal reservation of main body frame has turning cell, the vertical slot is arranged on the inner wall of main body frame, and vertical slot is located at the outside of turning cell, the transverse groove is arranged on the inner wall of main body frame, and transverse groove is located at the outside of turning cell, the inner casing main body is placed on the upper surface of firm banking, and inner casing main body is located at the inside of main body frame, the top of the firm banking is fixed with gag lever post, the door-plate is connected with main body frame.This has the ion plating equipment for the vacuum chamber inner casing being conveniently replaceable, and the internal reservation of main body frame has turning cell, and the length of vertical slot is greater than the length of fixed plate, and when fixed plate enters in turning cell from vertical slot, the setting of turning cell is rotated convenient for fixed plate.
Description
Technical field
It is specially a kind of in the vacuum chamber being conveniently replaceable the utility model relates to ion plating equipment equipment technical field
The ion plating equipment of shell.
Background technique
Modern Aviation industry used in plated film method type it is very much, such as plating, spraying plating, chemical plating, diffusance and
Roll compacting, packet plating etc..Wherein many coating process have been people's grasp, and have played remarkable effect in production.But it is existing
Coating process does not catch up with product development with rapid changepl. never-ending changes and improvements, so that people be promoted to explore new coating technique." ion plating " is exactly close
A kind of newest vacuum coating technology to grow up for over ten years.Ion plating makes gas under vacuum conditions, using gas discharge
Body is evaporated material part ionization, and in gas ion or under being evaporated the bombardment of substance ion, by evaporated material or it is anti-
Object is answered to be deposited on the method on substrate.Including magnetic controlled sputtering ion plating, reactive ion plating, HCD ion plating
(hollow cathode vapour deposition method), multi-arc ion coating (cathodic arc ion plating) etc..Ion plating is a new hair of technique for vacuum coating
Exhibition.When conventional vacuum plated film (also known as vacuum evaporation), workpiece is clamping in vacuum (-tight) housing, after high-temperature evaporation source electrified regulation, promotees
Make material to be plated --- evaporation material fusing evaporation.Due to temperature rise, evaporation material particle obtains certain kinetic energy, then along direction of visual lines Xu
Xu Shangsheng is finally attached on workpiece surface and accumulates film forming.During carrying out ion film plating, evaporation material particle meeting and vacuum
The inner wall of room is in contact, and after vacuum chamber works long hours, inner wall can be infected with the film that a large amount of evaporation material particle is formed, this
Sample not only influences whether the plated film of workpiece, also influences whether the service life of vacuum chamber.
Utility model content
The purpose of this utility model is to provide a kind of ion plating equipments with the vacuum chamber inner casing being conveniently replaceable, with solution
It is certainly mentioned above in the background art during carrying out ion film plating, evaporation material particle can connect with the inner wall of vacuum chamber
Touching, after vacuum chamber works long hours, inner wall can be infected with the film that a large amount of evaporation material particle is formed, and not only will affect in this way
To the plated film of workpiece, the problem of also influencing whether the service life of vacuum chamber.
To achieve the above object, the utility model provides the following technical solutions: a kind of in the vacuum chamber being conveniently replaceable
The upper surface of the ion plating equipment of shell, including support base, vertical slot, transverse groove, fixed plate and door-plate, the support base is solid
Surely there is main body frame, and the internal reservation of main body frame has turning cell, the vertical slot is arranged on the inner wall of main body frame, and
Vertical slot is located at the outside of turning cell, and the transverse groove is arranged on the inner wall of main body frame, and transverse groove is located at turning cell
Outside, the fixed plate are placed on the inside of turning cell, and the middle position of fixed plate is fixed with first connecting rod, and described first
The first nut is provided on the outside of connecting rod, and the right end of first connecting rod is connected with the second connecting rod, second connecting rod
Outside be provided with the second nut, and the right end of the second connecting rod, by threaded hole and inner casing main body, the inner casing main body is placed
In the upper surface of firm banking, and inner casing main body is located at the inside of main body frame, and the top of the firm banking is fixed with limit
Bar, the door-plate are connected with main body frame.
Preferably, the shape and structure of the turning cell is circle, and the diameter of turning cell is equal to the length of vertical slot, simultaneously
The diameter of turning cell is greater than the length of fixed plate.
Preferably, the shape and structure that the vertical slot and transverse groove are constituted is " ten " font, and the length of vertical slot is big
In the length of transverse groove.
Preferably, the vertical slot and transverse groove is of same size, and the width of vertical slot is greater than the width of fixed plate, together
When transverse groove length be less than fixed plate length.
Preferably, the connection relationship between the first connecting rod and the second connecting rod and the first nut and the second nut is equal
It to be threadedly coupled, and is to be threadedly coupled between the right end of the second connecting rod and inner casing main body.
Preferably, the first connecting rod and the second connecting rod are provided with two groups, and first connecting rod and the second connection altogether
Bar is axisymmetricly arranged about the center line of inner casing main body, while constituting rotation between first connecting rod and the second connecting rod and connecting
It connects.
Preferably, the gag lever post is equally distributed in the upper surface of firm banking, and the shape that gag lever post is constituted
Structure is circle, and the round diameter of gag lever post composition is greater than the diameter of inner casing main body.
Compared with prior art, the utility model has the beneficial effects that this have the vacuum chamber inner casing being conveniently replaceable from
Sub- coating machine, the internal reservation of (1) main body frame have turning cell, and the length of vertical slot is greater than the length of fixed plate, works as fixed plate
It is entered in turning cell from vertical slot, the setting of turning cell is rotated convenient for fixed plate；(2) length of transverse groove, which is less than, fixes
The length of plate, in this way when fixed plate enters turning cell from vertical slot, after being rotated by 90 °, the setting of transverse groove can hinder fixed plate
Leave turning cell；(3) connection relationship between first connecting rod and the second connecting rod and the first nut and the second nut is spiral shell
Line connection, the first nut can firmly link together first connecting rod with main body frame, while the second nut can incite somebody to action
Second connecting rod firmly links together in inner casing main body；(4) rotation is constituted between first connecting rod and the second connecting rod to connect
It connects, is convenient for the second connecting rod linking together first connecting rod with main body frame and inner casing main body respectively in this way.
Detailed description of the invention
Fig. 1 is the utility model positive structure diagram.
Fig. 2 is the utility model first connecting rod and the first nut structure diagram.
Fig. 3 is the utility model vertical slot and lateral slot structure schematic diagram.
Fig. 4 is the utility model fixed plate and first connecting rod side structure schematic view.
Fig. 5 is the utility model first connecting rod and the second connecting rod structural schematic diagram.
In figure: 1, support base, 2, main body frame, 3, turning cell, 4, vertical slot, 5, transverse groove, 6, fixed plate, 7, first
Connecting rod, the 8, first nut, the 9, second connecting rod, the 10, second nut, 11, inner casing main body, 12, threaded hole, 13, firm banking,
14, gag lever post, 15, door-plate.
Specific embodiment
The following will be combined with the drawings in the embodiments of the present invention, carries out the technical scheme in the embodiment of the utility model
Clearly and completely describe, it is clear that the described embodiments are only a part of the embodiments of the utility model, rather than whole
Embodiment.Based on the embodiments of the present invention, those of ordinary skill in the art are without making creative work
Every other embodiment obtained, fall within the protection scope of the utility model.
Fig. 1-5 is please referred to, the utility model provides a kind of technical solution: a kind of with the vacuum chamber inner casing being conveniently replaceable
The upper surface of ion plating equipment, including support base 1, vertical slot 4, transverse groove 5, fixed plate 6 and door-plate 15, support base 1 is solid
Surely there is main body frame 2, and the internal reservation of main body frame 2 has turning cell 3, the shape and structure of turning cell 3 is round, and turning cell
3 diameter is equal to the length of vertical slot 4, while the diameter of turning cell 3 is greater than the length of fixed plate 6, and the setting of turning cell 3 is convenient for
Fixed plate 6 is rotated, and vertical slot 4 is arranged on the inner wall of main body frame 2, and vertical slot 4 is located at the outside of turning cell 3, is erected
The shape and structure constituted to slot 4 and transverse groove 5 is " ten " font, and the length of vertical slot 4 is greater than the length of transverse groove 5, this
Sample enters the inside of turning cell 3 convenient for fixed plate 6, vertical slot 4 and transverse groove 5 it is of same size, and the width of vertical slot 4 is big
In the width of fixed plate 6, while the length of transverse groove 5 is less than the length of fixed plate 6, and the setting of transverse groove 5 can hinder fixed plate 6
Turning cell 3 is left, transverse groove 5 is arranged on the inner wall of main body frame 2, and transverse groove 5 is located at the outside of turning cell 3, fixed plate 6
It is placed on the inside of turning cell 3, and the middle position of fixed plate 6 is fixed with first connecting rod 7, the outside of first connecting rod 7 is set
Be equipped with the first nut 8, and the right end of first connecting rod 7 be connected with the second connecting rod 9, first connecting rod 7 and the second connecting rod 9 with
Connection relationship between first nut 8 and the second nut 10 is to be threadedly coupled, and the right end of the second connecting rod 9 and inner casing main body
To be threadedly coupled between 11, it is convenient for the movement of the first nut 8 and the second nut 10, first connecting rod 7 and the second connecting rod 9 in this way
It is provided with two groups altogether, and first connecting rod 7 and the second connecting rod 9 are axisymmetricly arranged about the center line of inner casing main body 11, together
When first connecting rod 7 and the second connecting rod 9 between constitute rotation connection, so that the second connecting rod 9 can pass through threaded hole
12 are connected with inner casing main body 11, and the outside of the second connecting rod 9 is provided with the second nut 10, and the right end of the second connecting rod 9 is logical
Threaded hole 12 and inner casing main body 11 are crossed, inner casing main body 11 is placed on the upper surface of firm banking 13, and inner casing main body 11 is located at master
The inside of body frame 2, the top of firm banking 13 are fixed with gag lever post 14, and gag lever post 14 is equally distributed in firm banking 13
Upper surface, and the shape and structure that is constituted of gag lever post 14 is circle, and the round diameter that gag lever post 14 is constituted is greater than inner casing master
The diameter of body 11, the setting of gag lever post 14 prevent inner casing main body 11 from moving, and door-plate 15 is connected with main body frame 2.
Working principle: when having the ion plating equipment for the vacuum chamber inner casing being conveniently replaceable using this, it is first turned on door-plate
15, this door-plate 15 is existing structure, identical as existing ion plating equipment structure, and is not the novel point of present specification, will
Inner casing main body 11 is placed on the upper surface of firm banking 13, while inner casing main body 11 is located at the inside of gag lever post 14, then rotates
Inner casing main body 11, so that the intersection point of threaded hole 12 and vertical slot 4 and transverse groove 5 in inner casing main body 11 is in same horizontal line
On, then the fixed plate 6 on first connecting rod 7 is put by then take first connecting rod 7 and the second connecting rod 9 from vertical slot 4
It into turning cell 3, is then rotated by 90 °, is at this time put into the first nut 8 from the second connecting rod 9, so that the first nut 8 and
One nut 8 is in contact, and then the second nut 10 is in contact with the second connecting rod 9, then by one end of the second connecting rod 9 and spiral shell
Pit 12 is corresponding, rotates the second connecting rod 9 so that the second connecting rod 9 is connected with inner casing main body 11 and then rotates the first spiral shell
Mother 8, so that the first nut 8 is fitted tightly on the inner wall of main body frame 2, then rotates the second nut 10, so that the second nut
10 are fitted tightly on the outer wall of inner casing main body 11, and here it is the ion plating equipments with the vacuum chamber inner casing being conveniently replaceable
Application method, the content being not described in detail in this specification belong to the prior art well known to professional and technical personnel in the field.
Term " center ", " longitudinal direction ", " transverse direction ", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom",
The orientation or positional relationship of the instructions such as "inner", "outside" is to be based on the orientation or positional relationship shown in the drawings, and is only for ease of description
The utility model simplifies description, rather than indicates or imply signified device or element and must have a particular orientation, be spy
Fixed orientation construction and operation, thus should not be understood as the limitation that content is protected to the utility model.
Although the utility model is described in detail with reference to the foregoing embodiments, come for those skilled in the art
Say, it is still possible to modify the technical solutions described in the foregoing embodiments, or to part of technical characteristic into
Row equivalent replacement, within the spirit and principle of the utility model, any modification, equivalent replacement, improvement and so on should all
It is included within the scope of protection of this utility model.
Claims (7)
1. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable, including support base (1), vertical slot (4), transverse direction
Slot (5), fixed plate (6) and door-plate (15), it is characterised in that: the upper surface of the support base (1) is fixed with main body frame
(2), and the internal reservation of main body frame (2) has turning cell (3), inner wall of vertical slot (4) setting in main body frame (2)
On, and vertical slot (4) is located at the outside of turning cell (3), the transverse groove (5) is arranged on the inner wall of main body frame (2), and horizontal
It is located at the outside of turning cell (3) to slot (5), the fixed plate (6) is placed on the inside of turning cell (3), and in fixed plate (6)
Between position be fixed with first connecting rod (7), be provided with the first nut (8) on the outside of the first connecting rod (7), and first connection
The right end of bar (7) is connected with the second connecting rod (9), is provided with the second nut (10) on the outside of second connecting rod (9), and the
The right end of two connecting rods (9) is placed on firm banking by threaded hole (12) and inner casing main body (11), the inner casing main body (11)
(13) upper surface, and inner casing main body (11) is located at the inside of main body frame (2), the top of the firm banking (13) is fixed with
Gag lever post (14), the door-plate (15) are connected with main body frame (2).
2. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable according to claim 1, it is characterised in that:
The shape and structure of the turning cell (3) is circle, and the diameter of turning cell (3) is equal to the length of vertical slot (4), while turning cell
(3) diameter is greater than the length of fixed plate (6).
3. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable according to claim 1, it is characterised in that:
The shape and structure that the vertical slot (4) and transverse groove (5) are constituted is " ten " font, and the length of vertical slot (4) is greater than laterally
The length of slot (5).
4. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable according to claim 1, it is characterised in that:
The vertical slot (4) and transverse groove (5) it is of same size, and the width of vertical slot (4) is greater than the width of fixed plate (6), simultaneously
The length of transverse groove (5) is less than the length of fixed plate (6).
5. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable according to claim 1, it is characterised in that:
Connection relationship between the first connecting rod (7) and the second connecting rod (9) and the first nut (8) and the second nut (10) is
It is threadedly coupled, and is to be threadedly coupled between the right end of the second connecting rod (9) and inner casing main body (11).
6. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable according to claim 1, it is characterised in that:
The first connecting rod (7) and the second connecting rod (9) are provided with two groups altogether, and first connecting rod (7) and the second connecting rod (9) are closed
Axisymmetricly it is arranged in the center line of inner casing main body (11), while constitutes and turning between first connecting rod (7) and the second connecting rod (9)
Dynamic connection.
7. a kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable according to claim 1, it is characterised in that:
The gag lever post (14) is equally distributed in the upper surface of firm banking (13), and the shape and structure that gag lever post (14) is constituted
It is greater than the diameter of inner casing main body (11) for the round diameter of circle, and gag lever post (14) composition.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820863017.3U CN208250404U (en) | 2018-06-05 | 2018-06-05 | A kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820863017.3U CN208250404U (en) | 2018-06-05 | 2018-06-05 | A kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208250404U true CN208250404U (en) | 2018-12-18 |
Family
ID=64653621
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820863017.3U Expired - Fee Related CN208250404U (en) | 2018-06-05 | 2018-06-05 | A kind of ion plating equipment with the vacuum chamber inner casing being conveniently replaceable |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208250404U (en) |
-
2018
- 2018-06-05 CN CN201820863017.3U patent/CN208250404U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181218 Termination date: 20190605 |