CN208219014U - The quartzy furnace of solar battery diffusion - Google Patents
The quartzy furnace of solar battery diffusion Download PDFInfo
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- CN208219014U CN208219014U CN201820810554.1U CN201820810554U CN208219014U CN 208219014 U CN208219014 U CN 208219014U CN 201820810554 U CN201820810554 U CN 201820810554U CN 208219014 U CN208219014 U CN 208219014U
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- air inlet
- inlet pipe
- boiler tube
- offgas duct
- furnace
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Abstract
It is spread the utility model discloses a kind of solar battery and uses quartzy furnace, it includes boiler tube, from the air inlet pipe and offgas duct in the furnace tail insertion boiler tube of boiler tube, and air inlet pipe and offgas duct are arranged each parallel to the axial direction of boiler tube.Air inlet pipe is inserted into the top in boiler tube, and offgas duct is inserted into the lower part in boiler tube, and air inlet pipe is identical with the length of offgas duct, equally distributed multiple apertures is offered in air inlet pipe and offgas duct, and from furnace tail to fire door, the size of aperture is changed from small to big.The quartzy furnace of this solar battery diffusion, compared with the prior art, improve the length and link position of air inlet pipe, air inlet pipe and offgas duct are all improved to the long tube with different size apertures simultaneously, in this way in diffusion technique operational process, gas source be out of boiler tube top spray and under, exhaust gas lower section enter offgas duct discharge, spread gas source can uniformly in silicon wafer whole face.To improve the uniformity of silicon wafer diffusion square resistance, and then improve conversion efficiency of solar cell.
Description
Technical field
The utility model relates to a kind of solar batteries to spread with quartzy furnace.
Background technique
In the crystal silicon solar batteries technological process of production, diffusion technique process forms PN junction, this technical process needs high
Cleanliness and prolonged high temperature ventilation body source procedure generally use quartzy furnace, and boiler tube is quartz material, and one end is furnace tail, phase
Pair the other end be fire door.Silicon wafer is that neighboring vertical is diffused in boiler tube.Traditional quartzy furnace such as attached drawing 1 is to 3 institute of attached drawing
Show, air inlet pipe 2 is short tube, and tube body is light pipe (not with holes), is connected at the center of the furnace tail of boiler tube 1 and (inserts from air inlet intubation 11
Enter), offgas duct 3 is long tube, and tube body is also light pipe (not with holes), lower section in insertion boiler tube (from 12 insertion of tail gas intubation).Expanding
In day labor skill operational process, gas source enters in boiler tube from furnace tail, is diffused with air-flow toward fire door, exhaust gas enters from fire door
Offgas duct is discharged outward, causes silicon wafer whole face that cannot uniformly spread in this way；Square after diffusion technique, among silicon wafer
Resistance is apparently higher than four sides, very unevenly.
Summary of the invention
To solve the above-mentioned problems, it is spread the purpose of this utility model is to provide a kind of solar battery and uses quartzy furnace,
Improve the uniformity of silicon wafer diffusion square resistance.
In order to reach the goals above, the technical solution adopted in the utility model is: a kind of solar battery diffusion quartz
Furnace, it includes boiler tube, from the air inlet pipe and offgas duct in the furnace tail insertion boiler tube of boiler tube, and air inlet pipe and offgas duct are each parallel to furnace
The axial setting of pipe.Air inlet pipe is inserted into the top in boiler tube, and offgas duct is inserted into the lower part in boiler tube, the length of air inlet pipe and offgas duct
Spend identical, equally distributed multiple apertures offered in air inlet pipe and offgas duct, and from furnace tail to fire door, the size of aperture by
It is small to become larger.
Further, from furnace tail to fire door, multiple apertures are divided into several groups, and the orifice size in every group is identical, and from furnace
Tail to fire door, the orifice size of each group changes from small to big.
Further, air inlet pipe and offgas duct are all made of quartz material.
Further, there is air inlet intubation and tail gas to be intubated, air inlet pipe is intubated insertion boiler tube from air inlet at the furnace tail of boiler tube
Interior, offgas duct is intubated in insertion boiler tube from tail gas.
Further, one end of air inlet pipe and offgas duct all has clamping portion, the clamping portion of air inlet pipe and offgas duct
Port of the clamping portion respectively with the port of air inlet intubation and tail gas intubation is mutually clamped.
Further, offgas duct has two.
Due to the adoption of the above technical scheme, compared with the prior art the diffusion of the utility model solar battery is changed with quartzy furnace
Into the length and link position of air inlet pipe, while air inlet pipe and offgas duct being all improved to the length with different size apertures
Pipe, in such diffusion technique operational process, gas source be out of boiler tube top spray and under, exhaust gas enters offgas duct row in lower section
Out, gas source is spread can uniformly in silicon wafer whole face.To improve the uniformity of silicon wafer diffusion square resistance, into
And improve conversion efficiency of solar cell.
Detailed description of the invention
Attached drawing 1 is the solar battery diffusion the schematic diagram of the section structure of the boiler tube of quartzy furnace in background technique；
Attached drawing 2 is the solar battery diffusion the schematic diagram of the section structure of the air inlet pipe of quartzy furnace in background technique；
Attached drawing 3 is the solar battery diffusion the schematic diagram of the section structure of the offgas duct of quartzy furnace in background technique；
Attached drawing 4 is the schematic diagram of the section structure of the utility model solar battery diffusion with the boiler tube of quartzy furnace；
Attached drawing 5 is side structure schematic view of the utility model solar battery diffusion with the boiler tube of quartzy furnace
Attached drawing 6 is the schematic diagram of the section structure of the utility model solar battery diffusion with the air inlet pipe of quartzy furnace；
Attached drawing 7 is the schematic diagram of the section structure of the utility model solar battery diffusion with the offgas duct of quartzy furnace；
Figure label are as follows:
1, boiler tube；11, air inlet is intubated；12, tail gas is intubated；2, air inlet pipe；3, offgas duct；4, aperture；5, clamping portion.
Specific embodiment
The preferred embodiment of the utility model is described in detail with reference to the accompanying drawing, so that advantages of the present invention and spy
Sign can be easier to be readily appreciated by one skilled in the art.
Structural schematic diagram from attached drawing 4 to attached drawing 7 can be seen that the diffusion quartz of the solar battery in the present embodiment
Furnace, it includes boiler tube 1, from the air inlet pipe 2 and offgas duct 3 in the furnace tail insertion boiler tube 1 of boiler tube 1, and air inlet pipe 2 and offgas duct 3 are equal
It is parallel to the axial setting of boiler tube 1.In the present embodiment, offgas duct 3 has two.
Air inlet pipe 2 is inserted into the top in boiler tube 1, and offgas duct 3 is inserted into the lower part in boiler tube 1, air inlet pipe 2 and offgas duct 3
Length is identical, equally distributed multiple apertures 4 is offered in air inlet pipe 2 and offgas duct 3, and from furnace tail to fire door, aperture 4
Size is changed from small to big.
There is air inlet intubation 11 and tail gas intubation 12, air inlet in 5 the present embodiment of attached drawing 4 and attached drawing, at the furnace tail of boiler tube 1
Pipe 2 is from 11 insertion boiler tube 1 of air inlet intubation, and offgas duct 3 is from 12 insertion boiler tube 1 of tail gas intubation.
In a kind of highly preferred embodiment, one end of air inlet pipe 2 and offgas duct 3 all has clamping portion 5, air inlet pipe
The port that 2 clamping portion 5 and the clamping portion 5 of offgas duct 3 are intubated 12 with the port of air inlet intubation 11 and tail gas respectively is mutually clamped.
In attached drawing 6 and attached the present embodiment shown in Fig. 7, from furnace tail to fire door, multiple apertures 4 divide for several groups, and every group
In 4 size of aperture it is identical, and from furnace tail to fire door, 4 size of aperture of each group is changed from small to big.
In a kind of highly preferred embodiment, air inlet pipe 2 and offgas duct 3 are all made of quartz material.
The quartzy furnace of this solar battery diffusion, improves the length and link position of air inlet pipe 2, while by air inlet pipe 2
All it is improved to the long tube with different size apertures 4 with offgas duct 3, in such diffusion technique operational process, gas source is from furnace
Top spray in pipe 1 and under, exhaust gas enters offgas duct 3 in lower section and is discharged, and obtain gas source can uniformly in silicon wafer whole face
Diffusion to improve the uniformity of silicon wafer diffusion square resistance, and then improves conversion efficiency of solar cell.
The above embodiments are only for explaining the technical ideas and features of the present invention, and its object is to allow be familiar with technique
Personage can understand the content of the utility model and implement accordingly, do not limit the protection scope of the present invention.
All equivalent change or modifications according to made by the spirit of the present invention essence, should all cover the protection scope of the utility model it
It is interior.
Claims (6)
1. a kind of quartzy furnace of solar battery diffusion, it includes boiler tube (1), furnace tail insertion boiler tube (1) from the boiler tube (1)
Interior air inlet pipe (2) and offgas duct (3), the air inlet pipe (2) and offgas duct (3) are arranged each parallel to the axial direction of boiler tube (1),
Be characterized in that: the air inlet pipe (2) is inserted into the top in the boiler tube (1), and the offgas duct (3) is inserted into the boiler tube (1)
Lower part, the air inlet pipe (2) is identical with the length of offgas duct (3), offers in the air inlet pipe (2) and offgas duct (3)
Equally distributed multiple apertures (4), and from furnace tail to fire door, the size of the aperture (4) is changed from small to big.
2. the quartzy furnace of solar battery diffusion according to claim 1, it is characterised in that: described from furnace tail to fire door
Multiple apertures (4) are divided into several groups, and aperture (4) size in every group is identical, and from furnace tail to fire door, aperture (4) ruler of each group
It is very little to change from small to big.
3. the quartzy furnace of solar battery according to claim 1 diffusion, it is characterised in that: the air inlet pipe (2) and
Offgas duct (3) is all made of quartz material.
4. the quartzy furnace of solar battery diffusion according to claim 1, it is characterised in that: the furnace tail of the boiler tube (1)
Place has air inlet intubation (11) and tail gas intubation (12), and the air inlet pipe (2) is intubated (11) insertion boiler tube (1) from the air inlet
Interior, the offgas duct (3) is from tail gas intubation (12) insertion boiler tube (1).
5. the quartzy furnace of solar battery according to claim 4 diffusion, it is characterised in that: the air inlet pipe (2) and
One end of offgas duct (3) all has clamping portion (5), the clamping portion (5) of air inlet pipe (2) and clamping portion (5) difference of offgas duct (3)
It is mutually clamped with the port of the port of air inlet intubation (11) and tail gas intubation (12).
6. the quartzy furnace of solar battery diffusion according to claim 1, it is characterised in that: the offgas duct (3) has two
Root.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820810554.1U CN208219014U (en) | 2018-05-28 | 2018-05-28 | The quartzy furnace of solar battery diffusion |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820810554.1U CN208219014U (en) | 2018-05-28 | 2018-05-28 | The quartzy furnace of solar battery diffusion |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208219014U true CN208219014U (en) | 2018-12-11 |
Family
ID=64506608
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820810554.1U Active CN208219014U (en) | 2018-05-28 | 2018-05-28 | The quartzy furnace of solar battery diffusion |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208219014U (en) |
-
2018
- 2018-05-28 CN CN201820810554.1U patent/CN208219014U/en active Active
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