CN208207508U - 用于光刻机系统的在线检测装置 - Google Patents
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- CN208207508U CN208207508U CN201820656769.2U CN201820656769U CN208207508U CN 208207508 U CN208207508 U CN 208207508U CN 201820656769 U CN201820656769 U CN 201820656769U CN 208207508 U CN208207508 U CN 208207508U
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CN201820656769.2U CN208207508U (zh) | 2018-05-03 | 2018-05-03 | 用于光刻机系统的在线检测装置 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108803248A (zh) * | 2018-05-03 | 2018-11-13 | 中国科学院光电研究院 | 投影物镜的数值孔径的在线检测装置及方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108803248A (zh) * | 2018-05-03 | 2018-11-13 | 中国科学院光电研究院 | 投影物镜的数值孔径的在线检测装置及方法 |
CN108803248B (zh) * | 2018-05-03 | 2024-04-02 | 中国科学院光电研究院 | 投影物镜的数值孔径的在线检测装置及方法 |
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Effective date of registration: 20200909 Address after: 100029 Beijing city Chaoyang District Beitucheng West Road No. 3 Patentee after: Institute of Microelectronics of the Chinese Academy of Sciences Address before: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee before: Aerospace Information Research Institute,Chinese Academy of Sciences Effective date of registration: 20200909 Address after: 100190, No. 19 West Fourth Ring Road, Beijing, Haidian District Patentee after: Aerospace Information Research Institute,Chinese Academy of Sciences Address before: 100094, No. 9 Deng Nan Road, Beijing, Haidian District Patentee before: Academy of Opto-Electronics, Chinese Academy of Sciences |