CN208207260U - Reflectance coating, reflecting element and LED matrix for deep UV - Google Patents
Reflectance coating, reflecting element and LED matrix for deep UV Download PDFInfo
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- CN208207260U CN208207260U CN201820619902.7U CN201820619902U CN208207260U CN 208207260 U CN208207260 U CN 208207260U CN 201820619902 U CN201820619902 U CN 201820619902U CN 208207260 U CN208207260 U CN 208207260U
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Abstract
The utility model discloses a kind of reflectance coatings, reflecting element and LED matrix for deep UV, the reflectance coating includes multilayer film, the multilayer film includes the second oxidation film of the first oxidation film of several layers and several layers, first oxidation film and the second oxidation film are alternately distributed, and first oxidation film be hafnium oxide film or pellumina, the second oxidation film be silicon oxide film.The utility model uses the hafnium oxide film with adhesiveness and reflectivity or aluminium oxide cooperation silica as dielectric material, the deep UV reflectance coating to be formed and can replace noble metal gold is designed by film structure, therefrom guarantees to generate reflecting properties excellent deep UV reflectance coating under conditions of reducing material cost.
Description
Technical field
The utility model relates to optical thin film preparation field, more particularly to a kind of reflectance coating for deep UV, anti-
Penetrate part and LED matrix.
Background technique
Ultraviolet light LED (UV-LED) is the another important directions that the current major LED enterprise in the whole world is actively laid out.Its impetus it
Suddenly, growth is fast expected considerably beyond people." Minamata pact " along with morning prior to signature in 2013, it is contemplated that the year two thousand twenty generation
Prohibit mercury within the scope of boundary comprehensively, undoubtedly pushes the Max point of booster force of UV-LED development.
Claim according to the Market Report that related media is made, UV-LED just gradually penetrates into various application fields, in addition one
A little policies push, and the market share of UV-LED expects to reach as many as 500,000,000 U.S. dollars in the year two thousand twenty.It can be seen that UV-LED is that have
The product of huge market potential and business opportunity.Since 2014, media reported the message in relation to UV-LED successively, and increase year by year
It is more, it can be seen that UV-LED has been the trend of the times of industry development in the teeth of the storm.
For industry, the leading disinfection and sterilization field UVC-LED, such as water sterilization, food sterilization, air cleaning etc..It answers
It is considerable for household application market, medical market prospect, especially in powerful deep UV LED (UVC-LED) product more
It is that there are very big potentiality.Currently, great power LED (UVC-LED) product is in most deep UVs in order to improve deep UV
Emissive porwer, its bracket reflector inner surface using electric plating method plate noble metal gold, to improve reflector to depth
The reflectivity of ultraviolet light, to realize the purpose for improving deep UV emissive porwer.However, reflector is needed using gold-plated method
Noble metal gold is consumed, deep UV LED (UVC-LED) bracket higher cost is caused；The production technology of reflector is opposite simultaneously
It is complicated.
Utility model content
The utility model provides a kind of reflectance coating, reflecting element and LED matrix for deep UV, and which overcome existing
Deep UV LED (UVC-LED) product of technology using golden film as at high cost, complex process present in reflectance coating not
Foot.
The technical scheme adopted by the utility model to solve the technical problem is as follows: a kind of reflectance coating for deep UV,
Including multilayer film, the multilayer film includes the second oxidation film of the first oxidation film of several layers and several layers, the first oxidation film and second
Oxidation film is alternately distributed, and the first oxidation film is hafnium oxide film or pellumina, and the second oxidation film is silicon oxide film.
Further, the film of each odd-level is the first oxidation film, and the film of each even level is the second oxidation film.
Further, first oxidation film is hafnium oxide film, and the thickness of each layer hafnium oxide film is respectively 30~35nm, or
Person, first oxidation film are pellumina, and the thickness of each layer pellumina is respectively 35~45nm.
Further, being located at outermost film is silicon oxide film, and thickness is greater than the thickness of remaining each layer silicon oxide film.
Further, positioned at outermost silicon oxide film with a thickness of 90~95nm, the thickness of remaining each layer silicon oxide film
Respectively 40~50nm.
Further, first oxidation film is hafnium oxide film, the number of plies of hafnium oxide film and silicon oxide film be respectively greater than or
Equal to 10 layers, the overall thickness of the reflectance coating is 840~850nm；Alternatively, first oxidation film is pellumina, aluminium oxide
The number of plies of film and silicon oxide film is respectively greater than or is equal to 20 layers, and the overall thickness of the reflectance coating is 1775~1785nm.
The utility model separately provides a kind of reflecting element, including matrix, and matrix surface setting is above-mentioned described in the utility model
The reflectance coating for deep UV.
Further, described matrix is cup-shaped, and inner surface is vapor-deposited with the reflectance coating, and/or, described matrix be copper or
Nitrogenize aluminium material.
The utility model separately provides a kind of LED matrix, is UVC-LED product, including reflecting element described in the utility model,
The light of LED is reflected by the reflectance coating of the reflecting element.
Compared to the prior art, the utility model has the following beneficial effects:
1, the utility model uses the hafnium oxide film with adhesiveness and reflectivity or aluminium oxide cooperation silica as medium
Material designs the deep UV reflectance coating to be formed and can replace noble metal gold by film structure, therefrom guarantees reducing material
The excellent deep UV reflectance coating of reflecting properties is generated under conditions of cost；
2, the reflectance coating of the utility model is constituted using first oxidation film and the alternatively distributed mode of the second oxidation film,
Can not only release film layer stress, avoid film layer from rupturing, additionally it is possible to so that the molecular structure of adjacent film layers is staggered, to reach more preferable
Reflecting effect.
3, the odd number tunic preferably uses the first oxidation film (i.e. hafnium oxide film or aluminium oxide), and even number tunic uses second
Oxidation film (i.e. silicon oxide film) can be preferably attached on matrix using characteristic of first oxidation film with adhesiveness, make to reflect
The cooperation of film and matrix is stronger, and reflectance coating is more difficult to fall off from matrix.
4, outermost film will be located at and is set as silicon oxide film, and the thickness of this layer of silicon oxide film is made to be greater than remaining each layer oxidation
The thickness of silicon fiml can make to be located at outermost silicon oxide film other than with reflection function, moreover it is possible to as protective film, to make
Reflectance coating is more difficult to suffer damage.
5, the utility model, can efficient, letter in such a way that electron beam evaporation film technique replaces original wet process to be electroplated
Clean technique produces the required reflectance coating for deep UV, therefrom improves the anti-of deep UV LED (UVC-LED) product
Penetrate the production efficiency of part.
The utility model is described in further detail with reference to the accompanying drawings and embodiments；But a kind of use of the utility model
It is not limited to the embodiment in the reflectance coating, reflecting element and LED matrix of deep UV.
Detailed description of the invention
Fig. 1 is the film layer distribution schematic diagram of the reflectance coating of one the utility model of embodiment；
Fig. 2 is the diagrammatic cross-section of the LED matrix of one the utility model of embodiment；
Fig. 3 is the enlarged diagram of the part I in one Fig. 2 of embodiment；
Fig. 4 is the reflectivity of the reflectance coating of one the utility model of embodiment and the relation schematic diagram of ultraviolet wavelength；
Fig. 5 is the reflectivity of the reflectance coating of two the utility model of embodiment and the relation schematic diagram of ultraviolet wavelength.
Specific embodiment
Embodiment one
Shown in Figure 1, a kind of reflectance coating for deep UV of the utility model is vaporized on a matrix,
Including multilayer film, the multilayer film includes the second oxidation film of the first oxidation film of several layers and several layers, the first oxidation film and second
Oxidation film is alternately distributed, and the first oxidation film is hafnium oxide film 1, and the second oxidation film is silicon oxide film 2.Specifically, each odd-level
Film is hafnium oxide film 1, and the film of each even level is silicon oxide film 2.Defining the film being attached directly on matrix surface is first
Tunic (odd-level), the film being attached on second tunic is the second tunic (even level), and the film being attached on the second tunic is
Third tunic (odd-level), the film being attached on third tunic are the 4th tunic (even level), and so on；Apart from matrix surface
Farthest film is positioned at outermost film.
In the present embodiment, the thickness of each layer hafnium oxide film 1 is respectively 30~35nm, and the thickness one of each layer hafnium oxide film 1
It causes, takes preferred values 33.67nm.It is silicon oxide film positioned at outermost film, thickness is greater than the thickness of remaining each layer silicon oxide film.
Positioned at outermost silicon oxide film with a thickness of 90~95nm, preferred values 92.61nm is taken, the thickness point of remaining each layer silicon oxide film
Not Wei 40~50nm, and the consistency of thickness of remaining each layer silicon oxide film takes preferred values 46.31nm.
In the present embodiment, the hafnium oxide film 1 is consistent with the number of plies of silicon oxide film 2, and hafnium oxide film 1 and silicon oxide film 2
The number of plies be respectively greater than or be equal to 10 layers, take 10 layers of preferred values.The overall thickness of the reflectance coating is 840~850nm, takes preferred values
846nm.It is anti-to can effectively improve it by rationally designing to its thicknesses of layers and the number of plies for the reflectance coating of the utility model
Rate is penetrated, makes it to deep UV, the reflectivity of especially short wave ultraviolet (UVC) reaches 90% or even 95% or more.
A kind of preparation method of the reflectance coating for deep UV of the utility model, comprising the following steps:
1) plated matrix is cleaned；
2) described matrix is heated, matrix is heated to 300~350 DEG C, and support holder is placed into vacuum on fixture
In coating machine, vacuum coating equipment is evacuated down to (5~9) × 10-4Ion beam current density is set 180~201 μ A by Pa
cm-2；
3) first be deposited one layer of hafnium oxide film, then on hafnium oxide film be deposited one layer of silicon oxide film, and by hafnium oxide film, oxidation
The thickness of silicon fiml is controlled respectively in corresponding setting value；
4) it repeats step 3) for several times, until other film layers have been deposited, and guarantees that hafnium oxide film 1 and silicon oxide film 2 alternately divide
Cloth；
5) after cooling, the matrix that the good reflectance coating is deposited is taken out.
Described matrix preferably uses cup-shaped base body, and can be arranged directly on the substrate of LED matrix, and the reflection is deposited
When film, substrate also one is placed into vacuum coating equipment, and the fixture is equipped with block piece, for falling into base cavity to substrate
Upper surface in range is blocked, and the cavity wall surface of only matrix is exposed, the reflectance coating is deposited.
It refers to shown in Fig. 2, Fig. 3, a kind of reflecting element of the utility model, including matrix 6, which is provided with
For the reflectance coating 7 of deep UV, the reflectance coating 7 is described in the utility model a kind of for deep UV using above-described embodiment
Reflectance coating, also that is, reflectance coating 7 is alternately distributed by hafnium oxide film 1 and silicon oxide film 2, and the film of each odd-level is hafnium oxide
Film 1, the film of each even level are silicon oxide film 2, and hafnium oxide film 1 and the thickness of silicon oxide film 2, the number of plies are as described above.
In the present embodiment, described matrix 6 has cavity, and specific described matrix 6 is cup-shaped, and inner surface is vapor-deposited with described anti-
Penetrate film 7.Described matrix 6 is copper or nitridation aluminium material.
Refer to shown in Fig. 2, Fig. 3, a kind of LED matrix of the utility model, be UVC-LED product, including substrate 3,
Deep ultraviolet LED, outer cover 8 and above-mentioned reflecting element described in the utility model, by the reflectance coating 7 of the reflecting element to deep ultraviolet
The light of LED is reflected.The substrate 3 is used using nitridation aluminium material, deep ultraviolet LED, that is, UVC LED chip 9
Conductive adhesion layer 5 is bonded in 3 upper surface of substrate, and the conductive adhesion layer 5 uses gold-tin alloy.The reflecting element can be described as instead again
Cup is penetrated, is arranged on the substrate 3, and be wrapped circumferentially around deep ultraviolet LED chip 9.The outer cover 8 is specially lens, is used
Quartz glass is made, and outer cover 8 is adhered on the substrate 3 using insulation adhesive layer 4 made of epoxy glue, and wraps up reflecting element and depth
UV LED chip 9.
Experimental study shows the reflection efficiency of the reflectance coating 7 of the utility model and relationship such as Fig. 4 institute of ultraviolet wavelength
Show, when ultraviolet wavelength is in 250~306nm, the reflectance coating 7 of the utility model to the reflectivity of ultraviolet light reach 90% with
On, especially when ultraviolet wavelength is 275nm, the reflectance coating 7 of the utility model reaches the reflectivity of ultraviolet light
99.5175%；It is greater than the ultraviolet light of 306nm for wavelength, the reflectance coating 7 of the utility model is to the reflectivity of ultraviolet light with purple
The increase of outside line wavelength and be gradually reduced.Thus, the reflection made of the hafnium oxide film 1 and silicon oxide film 2 are alternately distributed
Film 7 is highly suitable as the reflectance coating of deep UV, is particularly suitable as the reflectance coating of short wave ultraviolet (UVC).Compared to tradition
Reflectance coating using golden film as deep UV, the reflectance coating 7 of the utility model can not only substantially reduce material cost, simplify
Processing technology improves production efficiency, moreover it is possible to significantly improve reflectance coating 7 to the reflection efficiency of deep UV.
Embodiment two
The difference of itself and embodiment one is: first oxidation film is pellumina, the thickness point of each layer pellumina
Not Wei 35~45nm, and the consistency of thickness of each layer pellumina takes preferred values 40.5nm.
In the present embodiment, the pellumina is consistent with the number of plies of silicon oxide film, and the layer of pellumina and silicon oxide film
Number is respectively greater than or is equal to 20 layers, takes 20 layers of preferred values.The overall thickness of the reflectance coating is 1775~1785nm, takes preferred values
1780nm。
Experimental study show the reflection efficiency of the reflectance coating of the utility model and the relationship of ultraviolet wavelength as shown in figure 5,
When ultraviolet wavelength is in 263~288nm, the reflectance coating of the utility model reaches 85% or more to the reflectivity of ultraviolet light, spy
It is not when ultraviolet wavelength is in 264~287nm, the reflectance coating of the utility model reaches 90% or more to the reflectivity of ultraviolet light,
And when ultraviolet wavelength is 275nm, the reflectance coating of the utility model reaches peak to the reflectivity of ultraviolet light
98.7472%；When ultraviolet wavelength is in 258~262nm, the reflectance coating of the utility model is less than the reflectivity of ultraviolet light
80%, and be gradually increased with the increase of ultraviolet wavelength, and be less than the ultraviolet light of 261nm, the utility model for wavelength
Reflectance coating to the reflectivity of ultraviolet light less than 30%；It is greater than the ultraviolet light of 288nm, the reflectance coating of the utility model for wavelength
The reflectivity of ultraviolet light is gradually reduced with the increase of ultraviolet wavelength, and is greater than the ultraviolet light of 294nm for wavelength, this
The reflectance coating of utility model is to the reflectivity of ultraviolet light less than 30%.
As embodiment one, the reflectance coating made of the pellumina and silicon oxide film are alternately distributed is very suitable to
As the reflectance coating of deep UV, it is particularly suitable as the reflectance coating of short wave ultraviolet (UVC).Compared to conventionally employed golden film conduct
The reflectance coating of deep UV, the reflectance coating of the utility model can not only equally substantially reduce material cost, simplify processing technology,
Improve production efficiency, moreover it is possible to significantly improve reflectance coating to the reflection efficiency of deep UV.
Above-described embodiment only is used to further illustrate a kind of reflectance coating for deep UV, reflecting element of the utility model
And LED matrix, but the utility model is not limited to embodiment, and it is all to implement according to the technical essence of the utility model to above
Any simple modification, equivalent change and modification made by example, each fall in the protection scope of technical solutions of the utility model.
Claims (9)
1. a kind of reflectance coating for deep UV, including multilayer film, it is characterised in that: the multilayer film includes several layers first
The second oxidation film of oxidation film and several layers, the first oxidation film and the second oxidation film are alternately distributed, and the first oxidation film is hafnium oxide
Film or pellumina, the second oxidation film are silicon oxide film.
2. the reflectance coating according to claim 1 for deep UV, it is characterised in that: the film of each odd-level is first
Oxidation film, the film of each even level are the second oxidation film.
3. the reflectance coating according to claim 1 or 2 for deep UV, it is characterised in that: first oxidation film is
The thickness of hafnium oxide film, each layer hafnium oxide film is respectively 30~35nm, alternatively, first oxidation film is pellumina, each layer
The thickness of pellumina is respectively 35~45nm.
4. the reflectance coating according to claim 1 or 2 for deep UV, it is characterised in that: be positioned at outermost film
Silicon oxide film, thickness are greater than the thickness of remaining each layer silicon oxide film.
5. the reflectance coating according to claim 4 for deep UV, it is characterised in that: be located at outermost silicon oxide film
With a thickness of 90~95nm, the thickness of remaining each layer silicon oxide film is respectively 40~50nm.
6. the reflectance coating according to claim 1 for deep UV, it is characterised in that: first oxidation film is oxidation
The number of plies of hafnium film, hafnium oxide film and silicon oxide film is respectively greater than or is equal to 10 layers, and the overall thickness of the reflectance coating is 840~
850nm；Alternatively, first oxidation film is pellumina, the number of plies of pellumina and silicon oxide film is respectively greater than or is equal to 20
Layer, the overall thickness of the reflectance coating are 1775~1785nm.
7. a kind of reflecting element, including matrix, it is characterised in that: the matrix surface is arranged just like any one of claim 1-6 institute
The reflectance coating for deep UV stated.
8. reflecting element according to claim 7, it is characterised in that: described matrix is cup-shaped, and inner surface is vapor-deposited with described
Reflectance coating, and/or, described matrix is copper or nitridation aluminium material.
9. a kind of LED matrix is UVC-LED product, it is characterised in that: including reflecting element as claimed in claim 7 or 8, lead to
The reflectance coating for crossing the reflecting element reflects the light of LED.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820619902.7U CN208207260U (en) | 2018-04-27 | 2018-04-27 | Reflectance coating, reflecting element and LED matrix for deep UV |
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| CN201820619902.7U CN208207260U (en) | 2018-04-27 | 2018-04-27 | Reflectance coating, reflecting element and LED matrix for deep UV |
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| CN208207260U true CN208207260U (en) | 2018-12-07 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108508517A (en) * | 2018-04-27 | 2018-09-07 | 厦门信达光电物联科技研究院有限公司 | Reflectance coating for deep UV and preparation method thereof, reflecting element and LED matrix |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108508517A (en) * | 2018-04-27 | 2018-09-07 | 厦门信达光电物联科技研究院有限公司 | Reflectance coating for deep UV and preparation method thereof, reflecting element and LED matrix |
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| TR01 | Transfer of patent right |
Effective date of registration: 20210809 Address after: 361000 Xinda photoelectric complex building, No. 610, Lingdou West Road, Siming District, Xiamen City, Fujian Province Patentee after: XIAMEN XINDECO OPTOELECTRONICS Co.,Ltd. Address before: 361000 third floor, Xinda photoelectric complex building, No. 610, Lingdou West Road, Siming District, Xiamen City, Fujian Province Patentee before: XIAMEN XINDECO PHOTOELECTRIC IOT TECHNOLOGY RESEARCH INSTITUTE Co.,Ltd. |