CN208187335U - A kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer - Google Patents
A kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer Download PDFInfo
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- CN208187335U CN208187335U CN201820829008.2U CN201820829008U CN208187335U CN 208187335 U CN208187335 U CN 208187335U CN 201820829008 U CN201820829008 U CN 201820829008U CN 208187335 U CN208187335 U CN 208187335U
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Abstract
The utility model discloses a kind of capacitive displacement sensing devices that transmission is isolated at a distance based on dual transformer, comprising: passive device, first transmission line, second transmission line, the second transformer and active device;One end of first transmission line is connected to the first output end of passive device, and the other end of first transmission line is connected to the first input end of the second transformer;One end of second transmission line is connected to the second output terminal of passive device, and the other end of second transmission line is connected to the second input terminal of the second transformer;The input terminal of passive device is for connecting carrier signal, passive device according to carrier signal output include differential capacitance displacement information modulated signal, modulated signal is transferred to the second transformer and active device by first transmission line and second transmission line, by first transmission line and second transmission line by passive device with active device far from the heat consumption of active device is had an impact not to passive device region, active device is used to export the relative position information of inertial mass.
Description
Technical field
The utility model belongs to capacitive displacement sensing measurement technical field, is based on dual transformer more particularly, to one kind
The capacitive displacement sensing device of remote isolation transmission.
Background technique
Capacitive Displacement Sensor With High Accuracy is mainly used in as a kind of conventional contactless sensor based on capacitance variations
Inertia measurement device in, such as gyroscope, accelerometer.Capacitive Displacement Sensor With High Accuracy composition mainly include capacitance bridge,
Front-end circuit, phase sensitive detection and low pass circuit etc..Capacitive Displacement Sensor With High Accuracy currently based on transformer bridge is extensive
Applied in space static electricity accelerometer and inertial sensor.Its resolution ratio is up to 10-7pF/Hz1/2Magnitude, corresponding displacement detecting
It is horizontal close to circuit thermal noise up to micromicron magnitude.
It generates heat due to having certain power consumption when the work of capacitive displacement sensing circuit, and part inertia type instrument is to mechanical sensitivity list
The structure and temperature stability of member propose very high requirement, such as the thermostabilization of sensing probe in space static electricity gravity gradiometer
Hundred micro- K magnitudes need to be reached.Therefore it is required that capacitive displacement detection circuit must be detected far from sensing probe certain distance, simultaneously
Detection resolution still reaches micromicron magnitude.
Utility model content
In view of the drawbacks of the prior art, the purpose of this utility model is to provide one kind is isolated at a distance based on dual transformer
The capacitive displacement sensing device of transmission, it is intended to solve in the prior art due between capacitive displacement detection circuit and sensing probe
The heat affecting and temperature for being closer generation influence the technical problem for causing detection resolution low.
The utility model provides a kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer, special
Sign is, comprising: passive device, first transmission line, second transmission line, the second transformer and active device;First transmission
One end of line is connected to the first output end of the passive device, and the other end of the first transmission line is connected to described second and becomes
The first input end of depressor;One end of second transmission line is connected to the second output terminal of the passive device, second transmission line
The other end is connected to the second input terminal of second transformer;The first input end of active device is connected to the second transformer
Output end, the second input terminal of active device is for connecting carrier signal;The input terminal of passive device is used to connect carrier signal,
Passive device according to the carrier signal output include differential capacitance displacement information modulated signal, modulated signal pass through first
Transmission line and second transmission line are transferred to the second transformer and active device, will be passive by first transmission line and second transmission line
Device is with active device far from the heat consumption of active device is had an impact not to passive device region, and active device is for exporting
The relative position information of inertial mass.
Further, first transmission line and second transmission line are that distance is greater than 1 meter of coaxial cable less than 10 meters.
Further, passive device includes: mechanical sensitivity probe and the first transformer;The input terminal of mechanical sensitivity probe
As the input terminal of the passive device, the first output end of mechanical sensitivity probe is connected to the first defeated of first transformer
Entering end, the second output terminal of mechanical sensitivity probe is connected to the second input terminal of first transformer, and the of the first transformer
First output end of one output end as passive device, the second output terminal of the first transformer as the passive device second
Output end;The mechanical sensitivity probe is used for defeated according to displacement movement signal for detecting displacement movement signal, the first transformer
Differential signal when two bridge imbalances out.
Further, mechanical sensitivity probe includes: inertial mass, first capacitor and the second capacitor;First capacitor and
Two capacitors are respectively connected to one end of first transmission line and one end of second transmission line, when first capacitor and the size of the second capacitor not
When equal, the output of the first transformer includes the modulated signal of differential capacitance displacement information.
Further, active device includes: sequentially connected preamplifier, signal processing circuit, phase sensitive detection electricity
Road and low-pass filter, first input end of the input terminal of preamplifier as the active device, phase-sensitive detection circuit
Second input terminal of the control terminal as the active device, output end of the output end of low-pass filter as active device;Before
Amplifier is set for will include that the modulated signal of differential capacitance displacement information is converted into voltage signal, signal processing circuit is used for
Voltage signal is filtered, phase-sensitive detection circuit is used to detect the amplitude of differential capacitance signal, and low-pass filter is used for
Demodulate the gradual relative position information of inertial mass.
Further, when work, when inertial mass is subjected to displacement movement in inertia system in mechanical sensitivity probe,
Its first capacitor and the second capacitance size for being formed with frame change, by carrier wave by slowly varying first capacitor and the
For two capacitance modulations in the first transformer, first transmission line and second transmission line are used to transmit the difference of first capacitor and the second capacitor
Divide modulated signal, differential modulating signal is further amplified after the measurement of the second transformer by preamplifier as voltage letter
Number, signal processing circuit improves amplified signal, and phase-sensitive detection circuit, which is used to demodulate, isolates slowly varying the
The differential capacitance signal of one capacitor and the second capacitor, low-pass filter is for obtaining low frequency differential capacitance letter after filtering out high-frequency signal
Number, that is, realize capacitive displacement sensing measurement.
The utility model is popped one's head in passive mechanical sensitivity by remote transmission line keeps apart with active detection circuit
A distance meets and needs far so that reducing has power sense circuit to influence the heat affecting of passive mechanical sensing probe and temperature
In capacitive displacement sensing measurement or the measuring system having higher requirements to thermal coupling.
Detailed description of the invention
Fig. 1 is a kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer provided by the utility model
Schematic diagram.
Wherein 1 is carrier signal;2 be mechanical sensitivity probe, and 21 be the inertial reference object in mechanical sensitivity probe, and 22 are
First capacitor, 23 be the second capacitor, and 22 and 23 form a pair of of capacitor;31 be the first transformer, and 32 be the second transformer;41 be
One transmission line, 42 be second transmission line;5 be preamplifier;6 be signal processing circuit;7 be phase-sensitive detection circuit;8 be low pass
Filter;9 be passive (not generating heat) region;10 be active (fever) region.
Specific embodiment
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention will be further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
The utility model provides a kind of remote capacitive displacement sensing device, is suitable for the displacement of demand high-accuracy capacitor and passes
Each application field of inductive circuit, such as accelerometer, space inertial sensor inertia type instrument or geophysical survey and observation
In instrument.The utility model combines mechanical sensing probe to realize high precision displacement detection, while not popping one's head in and generating to mechanical sensitivity
Biggish temperature influences, to guarantee the very-high performance of complete machine.
Fig. 1 shows a kind of capacitor position that transmission is isolated at a distance based on dual transformer provided by the embodiment of the utility model
The structure for moving sensing device illustrates only part relevant to the utility model embodiment, details are as follows for ease of description:
Capacitive displacement sensing device provided by the embodiment of the utility model includes: passive device, first transmission line 41, and second
Transmission line 42, the second transformer 32 and active device;The input terminal of passive device for connecting carrier signal, passive device it is defeated
Outlet be used to export include differential capacitance displacement information modulated signal, the first input end of active device includes for reception
There is the modulated signal of differential capacitance displacement information, one end of first transmission line 41 is connected to the first output end of passive device, the
The other end of one transmission line 41 is connected to the first input end of the second transformer 32;One end of second transmission line 42 is connected to passive
The second output terminal of device, the other end of second transmission line 42 are connected to the second input terminal of the second transformer 32;First transmission
Line 41 and second transmission line 42 are used for passive device is separate with active device, reach the heat consumption of active device to passive device region
The purpose that domain does not have an impact, while reaching and connecting the output end signal of passive device to the input terminal of the second transformer, and
Second transformer output end connects the first input end of active device, and then can realize subsequent circuit function, specifically, this
Utility model medium and long distance transmission line is placed on the centre of isolation transmission front end transformer and the second transformer, is conducive to further
Inhibit external interference, improves detectability;The output end of active device is used to export the relative position information of inertial mass.
Passive device includes: mechanical sensitivity probe 2 and the first transformer 31, and mechanical sensitivity probe is mechanical biography physically
Feel unit, the first transformer 31 is mainly used for exporting differential signal when two bridge imbalances, wherein mechanical sensitivity probe 2
It include: inertial mass 21, first capacitor 22 and the second capacitor 23, first capacitor 22 and the second capacitor 23 are respectively connected to the first transformation
Two input terminals of device 31, when first capacitor 22 and unequal the second capacitor 23, the output of the first transformer 31 includes difference
The modulated signal of capacitive displacement information.
One end of first transmission line 41 is connected to the first output end of the first transformer 31, the other end of first transmission line 41
It is connected to the first input end of the second transformer 32, one end of second transmission line 42 is connected to the second output of the first transformer 31
End, the other end of second transmission line 42 are connected to the second input terminal of the second transformer 32, the first output of the second transformer 32
End is connected to the first input end of active device, the second output terminal ground connection of the second transformer 32;Second input of active device
End connection carrier signal 1.
First transmission line 41 and second transmission line 42 specifically refer to distance greater than 1 meter less than 10 in the utility model embodiment
The transmission line of rice, generally can be coaxial cable.
Active device includes: preamplifier 5, signal processing circuit 6, phase-sensitive detection circuit 7 and low-pass filter 8, preceding
First input end of the input terminal as active device of amplifier 5 is set, the input terminal of signal processing circuit 6 is connected to preposition amplification
The output end of device 5, second input terminal of the first input end of phase-sensitive detection circuit 7 as active device, phase-sensitive detection circuit 7
Second input terminal is connected to the output end of signal processing circuit 6, and the input terminal of low-pass filter 8 is connected to phase-sensitive detection circuit 7
Output end, output end of the output end of low-pass filter 8 as active device;Preamplifier 5 mainly will include difference
The modulated signal of capacitive displacement information is converted into voltage signal, and signal processing circuit 6 mainly carries out voltage signal further
Filtering, phase-sensitive detection circuit 7 and low-pass filter 8 constitute lock-in amplifier;Finally demodulate the gradual opposite position of inertial mass
Confidence breath, the i.e. output end of active device.
As one embodiment of the utility model, preamplifier 5 can be the operational amplifier of low noise high bandwidth,
Signal processing circuit 6 can be the multi-stage filter based on operational amplifier, phase-sensitive detection circuit 7 can for switch demodulation or
Analog multiplier, low-pass filter 8 can be the multiple order low pass filter based on operational amplifier.
The utility model is by being separated passive device and active device using remote transmission line, to realize active device
The heat consumption of part, which does not generate heat affecting and temperature on passive device, to be influenced, and can finally solve to need high-accuracy capacitor displacement detecting, or
Person needs active circuit heat consumption not generate to machine assembly in the engineer application of heat affecting.
In the utility model embodiment, when inertial reference object 21 occurs in inertia system in mechanical sensitivity probe 2
When displacement movement, the first capacitor 22 and 23 size of the second capacitor formed with frame changes, and will slowly be become by carrier wave 1
The first capacitor 22 of change and the second capacitor 23 are modulated in the first transformer 31, and remote transmission line 4 is used to transmit first capacitor
22 and second capacitor 23 differential modulating signal, isolation transmission the second transformer 32 be used to measure differential modulating signal, preceding storing
Differential modulating signal is further amplified as voltage signal big device 5, and signal processing circuit 6 is to amplified signal further progress
Conditioning, such as filtering, phase-sensitive detection circuit 7 are mainly used for demodulation and isolate slowly varying first capacitor 22 and the second capacitor 23
Differential capacitance signal, low-pass filter 8 finally filter out high-frequency signal, to obtain low frequency difference capacitance signal, that is, realize
Capacitive displacement sensing measurement, due to the effect of remote transmission line 4, by entire capacitive displacement sensing circuit can be divided into it is passive (no
Fever) region 9 and active (fever) region 10, and finally realize active (fever) region 10 of reduction to passive (not generating heat) region
9 heat affecting and temperature influence, the capacitive displacement sensing for needing to be spaced a distance from suitable for sensing probe and detection circuit
Measurement, or active device requires in relatively high capacitive displacement sensing measurement system the heat affecting of passive device.
As it will be easily appreciated by one skilled in the art that the above is only the preferred embodiment of the utility model only, not
To limit the utility model, any modification made within the spirit and principle of the present invention, equivalent replacement and change
Into etc., it should be included within the scope of protection of this utility model.
Claims (6)
1. a kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer characterized by comprising passive device
Part, first transmission line (41), second transmission line (42), the second transformer (32) and active device;
One end of the first transmission line (41) is connected to the first output end of the passive device, the first transmission line (41)
The other end be connected to the first input end of second transformer (32);One end of the second transmission line (42) is connected to institute
The second output terminal of passive device is stated, the other end of the second transmission line (42) is connected to the of second transformer (32)
Two input terminals;The first input end of the active device is connected to the output end of second transformer (32), the active device
Second input terminal of part is for connecting carrier signal;
For connecting carrier signal, the passive device is exported according to the carrier signal includes the input terminal of the passive device
There is the modulated signal of differential capacitance displacement information, the modulated signal passes through the first transmission line (41) and second transmission
Line (42) is transferred to second transformer (32) and active device, passes through the first transmission line (41) and second transmission
Line (42) by passive device and active device far from having an impact the heat consumption of active device not to passive device region, it is described
Active device is used to export the relative position information of inertial mass.
2. capacitive displacement sensing device as described in claim 1, which is characterized in that the first transmission line (41) and described
Two transmission lines (42) are that distance is greater than 1 meter of coaxial cable less than 10 meters.
3. capacitive displacement sensing device as described in claim 1, which is characterized in that the passive device includes: mechanical sensitivity
Probe (2) and the first transformer (31);
Input terminal of the input terminal of the mechanical sensitivity probe (2) as the passive device, the mechanical sensitivity probe (2)
First output end is connected to the first input end of first transformer (31), states the second output terminal of mechanical sensitivity probe (2)
It is connected to the second input terminal of first transformer (31), the first output end of first transformer (31) is as the nothing
First output end of source device, second output of the second output terminal of first transformer (31) as the passive device
End;
The mechanical sensitivity probe (2) is used to be transported according to displacement for detecting displacement movement signal, first transformer (31)
Dynamic signal exports differential signal when two bridge imbalances.
4. capacitive displacement sensing device as claimed in claim 3, which is characterized in that the mechanical sensitivity probe (2) includes: used
Property object (21), first capacitor (22) and the second capacitor (23);
The first capacitor (22) and second capacitor (23) are respectively connected to one end of the first transmission line (41) and described
One end of second transmission line (42), it is described when the size of the first capacitor (22) and second capacitor (23) is unequal
First transformer (31) output includes the modulated signal of differential capacitance displacement information.
5. capacitive displacement sensing device according to any one of claims 1-4, which is characterized in that the active device includes:
Sequentially connected preamplifier (5), signal processing circuit (6), phase-sensitive detection circuit (7) and low-pass filter (8), before described
First input end of the input terminal of amplifier (5) as the active device is set, the control terminal of the phase-sensitive detection circuit (7) is made
For the second input terminal of the active device, output end of the output end of the low-pass filter (8) as the active device;
The preamplifier (5) is used to include that the modulated signal of differential capacitance displacement information is converted into voltage signal, institute
Signal processing circuit (6) are stated for being filtered to the voltage signal, the phase-sensitive detection circuit (7) is for detecting difference
Divide the amplitude of capacitance signal, the low-pass filter (8) is for demodulating the gradual relative position information of inertial mass.
6. capacitive displacement sensing device as claimed in claim 4, which is characterized in that when work, be used to when in mechanical sensitivity probe
Property object when being subjected to displacement movement in inertia system, the first capacitor and the second capacitance size formed with frame becomes
Change, by carrier wave by slowly varying first capacitor and the second capacitance modulation in the first transformer, first transmission line and second
Transmission line is used to transmit the differential modulating signal of first capacitor and the second capacitor, and differential modulating signal is measured by the second transformer
It is further amplified afterwards by preamplifier as voltage signal, signal processing circuit improves amplified signal, phase
Quick detecting circuit is for demodulating the differential capacitance signal for isolating slowly varying first capacitor and the second capacitor, low-pass filter
For obtaining low frequency difference capacitance signal after filtering out high-frequency signal, that is, realize capacitive displacement sensing measurement.
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CN108413856A (en) * | 2018-05-30 | 2018-08-17 | 华中科技大学 | A kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer |
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CN108413856A (en) * | 2018-05-30 | 2018-08-17 | 华中科技大学 | A kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer |
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