CN108413856A - A kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer - Google Patents
A kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer Download PDFInfo
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- CN108413856A CN108413856A CN201810571854.3A CN201810571854A CN108413856A CN 108413856 A CN108413856 A CN 108413856A CN 201810571854 A CN201810571854 A CN 201810571854A CN 108413856 A CN108413856 A CN 108413856A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
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Abstract
The invention discloses a kind of capacitive displacement sensing devices that transmission is isolated at a distance based on dual transformer, including：Passive device, first transmission line, second transmission line, the second transformer and active device；One end of first transmission line is connected to the first output end of passive device, and the other end of first transmission line is connected to the first input end of the second transformer；One end of second transmission line is connected to the second output terminal of passive device, and the other end of second transmission line is connected to the second input terminal of the second transformer；The input terminal of passive device is for connecting carrier signal, passive device is according to the modulated signal that carrier signal output includes differential capacitance displacement information, modulated signal is transferred to the second transformer and active device by first transmission line and second transmission line, by first transmission line and second transmission line that passive device is separate so that the heat consumption of active device does not have an impact passive device region with active device, active device is used to export the relative position information of inertial mass.
Description
Technical field
The invention belongs to capacitive displacement sensing measurement technical fields, and dual transformer long distance is based on more particularly, to one kind
Capacitive displacement sensing device from isolation transmission.
Background technology
Capacitive Displacement Sensor With High Accuracy is mainly used in as a kind of conventional contactless sensor based on capacitance variations
Inertia measurement device in, such as gyroscope, accelerometer.Capacitive Displacement Sensor With High Accuracy composition mainly include capacitance bridge,
Front-end circuit, phase sensitive detection and low pass circuit etc..Capacitive Displacement Sensor With High Accuracy currently based on transformer bridge is extensive
Applied in space static electricity accelerometer and inertial sensor.Its resolution ratio is up to 10-7pF/Hz1/2Magnitude, corresponding displacement detecting
It is horizontal close to circuit thermal noise up to micromicron magnitude.
It generates heat due to having certain power consumption when capacitive displacement sensing circuit works, and part inertia type instrument is to mechanical sensitivity list
The structure and temperature stability of member propose very high requirement, such as the thermostabilization of sensing probe in space static electricity gravity gradiometer
Hundred micro- K magnitudes need to be reached.Therefore it is required that capacitive displacement detection circuit must be detected far from sensing probe certain distance, simultaneously
Detection resolution still reaches micromicron magnitude.
Invention content
In view of the drawbacks of the prior art, the purpose of the present invention is to provide one kind being isolated transmission at a distance based on dual transformer
Capacitive displacement sensing device, it is intended to solve in the prior art due to the distance between capacitive displacement detection circuit and sensing probe
The technical problem for causing detection resolution low is influenced compared with the heat affecting closely generated and temperature.
The present invention provides a kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer, feature exists
In, including：Passive device, first transmission line, second transmission line, the second transformer and active device；The first transmission line
One end is connected to the first output end of the passive device, and the other end of the first transmission line is connected to second transformer
First input end；One end of second transmission line is connected to the second output terminal of the passive device, second transmission line it is another
End is connected to the second input terminal of second transformer；The first input end of active device is connected to the output of the second transformer
End, the second input terminal of active device is for connecting carrier signal；The input terminal of passive device is passive for connecting carrier signal
Device passes through the first transmission according to the modulated signal that carrier signal output includes differential capacitance displacement information, modulated signal
Line and second transmission line are transferred to the second transformer and active device, by first transmission line and second transmission line by passive device
With active device far from so that the heat consumption of active device does not have an impact passive device region, active device is for exporting inertia
The relative position information of object.
Further, first transmission line and second transmission line are that distance is more than 1 meter of coaxial cable for being less than 10 meters.
Further, passive device includes：Mechanical sensitivity is popped one's head in and the first transformer；The input terminal of mechanical sensitivity probe
As the input terminal of the passive device, the first output end of mechanical sensitivity probe is connected to the first defeated of first transformer
Entering end, the second output terminal of mechanical sensitivity probe is connected to the second input terminal of first transformer, and the of the first transformer
First output end of one output end as passive device, the second output terminal of the first transformer as the passive device second
Output end；The mechanical sensitivity probe is used for defeated according to displacement movement signal for detecting displacement movement signal, the first transformer
Go out differential signal when two bridge imbalances.
Further, mechanical sensitivity probe includes：Inertial mass, the first capacitance and the second capacitance；First capacitance and
Two capacitances are respectively connected to one end of first transmission line and one end of second transmission line, when the size of the first capacitance and the second capacitance not
When equal, the output of the first transformer includes the modulated signal of differential capacitance displacement information.
Further, active device includes：Sequentially connected preamplifier, signal processing circuit, phase sensitive detection electricity
Road and low-pass filter, the first input end of the input terminal of preamplifier as the active device, phase-sensitive detection circuit
Second input terminal of the control terminal as the active device, the output end of the output end of low-pass filter as active device；Before
Amplifier is set for will include that the modulated signal of differential capacitance displacement information is converted into voltage signal, signal processing circuit is used for
Voltage signal is filtered, phase-sensitive detection circuit is used to detect the amplitude of differential capacitance signal, and low-pass filter is used for
Demodulate the gradual relative position information of inertial mass.
Further, when work, when inertial mass is subjected to displacement movement in inertia system in mechanical sensitivity probe,
Its first capacitance and the second capacitance size for being formed with frame change, by carrier wave by slowly varying the first capacitance and the
For two capacitance modulations in the first transformer, first transmission line and second transmission line are used for transmitting the difference of the first capacitance and the second capacitance
Divide modulated signal, differential modulating signal is further amplified after the measurement of the second transformer by preamplifier to be believed for voltage
Number, signal processing circuit improves amplified signal, and phase-sensitive detection circuit, which is used to demodulate, isolates slowly varying the
The differential capacitance signal of one capacitance and the second capacitance, low-pass filter after filtering out high-frequency signal for obtaining low frequency differential capacitance letter
Number, that is, realize capacitive displacement sensing measurement.
Passive mechanical sensitivity probe is kept apart one section by the present invention by remote transmission line with active detection circuit
Distance has power sense circuit to influence the heat affecting of passive mechanical sensing probe and temperature, it is remote to meet needs to reduce
In capacitive displacement sensing measurement or the measuring system having higher requirements to thermal coupling.
Description of the drawings
Fig. 1 is a kind of showing for capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer provided by the invention
It is intended to.
Wherein 1 is carrier signal；2 be mechanical sensitivity probe, and 21 be the inertial reference object in mechanical sensitivity probe, and 22 are
First capacitance, 23 be the second capacitance, and 22 and 23 form a pair of of capacitance；31 be the first transformer, and 32 be the second transformer；41 be
One transmission line, 42 be second transmission line；5 be preamplifier；6 be signal processing circuit；7 be phase-sensitive detection circuit；8 be low pass
Filter；9 be passive (not generating heat) region；10 be active (fever) region.
Specific implementation mode
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, right
The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and
It is not used in the restriction present invention.
The present invention provides a kind of remote capacitive displacement sensing devices, are suitable for demand high-accuracy capacitor displacement sensing electricity
Each application field on road, such as accelerometer, space inertial sensor inertia type instrument or geophysical survey and observation instrument
In.The present invention combines mechanical sensing probe to realize high precision displacement detection, while not generating larger temperature to mechanical sensitivity probe
Degree influences, to ensure the very-high performance of complete machine.
Fig. 1 shows that a kind of capacitive displacement that transmission is isolated at a distance based on dual transformer provided in an embodiment of the present invention is passed
The structure of induction device, for convenience of description, illustrate only with the relevant part of the embodiment of the present invention, details are as follows：
Capacitive displacement sensing device provided in an embodiment of the present invention includes：Passive device, first transmission line 41, the second transmission
Line 42, the second transformer 32 and active device；The input terminal of passive device is for connecting carrier signal, the output end of passive device
For export include differential capacitance displacement information modulated signal, the first input end of active device includes difference for receiving
The modulated signal of capacitive displacement information, one end of first transmission line 41 is divided to be connected to the first output end of passive device, first passes
The other end of defeated line 41 is connected to the first input end of the second transformer 32；One end of second transmission line 42 is connected to passive device
Second output terminal, the other end of second transmission line 42 is connected to the second input terminal of the second transformer 32；First transmission line 41
It is used for second transmission line 42 passive device is separate with active device, reaches the heat consumption of active device to passive device region not
The purpose having an impact, while reaching and connecting the output end signal of passive device to the input terminal of the second transformer, and second
Transformer output end connects the first input end of active device, and then can realize subsequent circuit function, specifically, of the invention
Medium and long distance transmission line is placed on the centre of isolation transmission front end transformer and the second transformer, is conducive to further suppress the external world
Interference improves detectability；The output end of active device is used to export the relative position information of inertial mass.
Passive device includes：Mechanical sensitivity probe 2 and the first transformer 31, mechanical sensitivity probe are machinery biographies physically
Feel unit, the first transformer 31 is mainly used for exporting differential signal when two bridge imbalances, wherein mechanical sensitivity probe 2
Including：Inertial mass 21, the first capacitance 22 and the second capacitance 23, the first capacitance 22 and the second capacitance 23 are respectively connected to the first transformation
Two input terminals of device 31, when the first capacitance 22 and unequal the second capacitance 23, the output of the first transformer 31 includes difference
The modulated signal of capacitive displacement information.
One end of first transmission line 41 is connected to the first output end of the first transformer 31, the other end of first transmission line 41
It is connected to the first input end of the second transformer 32, one end of second transmission line 42 is connected to the second output of the first transformer 31
End, the other end of second transmission line 42 are connected to the second input terminal of the second transformer 32, the first output of the second transformer 32
End is connected to the first input end of active device, the second output terminal ground connection of the second transformer 32；Second input of active device
End connection carrier signal 1.
First transmission line 41 and second transmission line 42 specifically refer to distance and are more than 1 meter less than 10 meters in the embodiment of the present invention
Transmission line generally can be coaxial cable.
Active device includes：Preamplifier 5, signal processing circuit 6, phase-sensitive detection circuit 7 and low-pass filter 8, it is preceding
First input end of the input terminal as active device of amplifier 5 is set, the input terminal of signal processing circuit 6 is connected to preposition amplification
The output end of device 5, the second input terminal of the first input end of phase-sensitive detection circuit 7 as active device, phase-sensitive detection circuit 7
Second input terminal is connected to the output end of signal processing circuit 6, and the input terminal of low-pass filter 8 is connected to phase-sensitive detection circuit 7
Output end, the output end of the output end of low-pass filter 8 as active device；Preamplifier 5 will include mainly difference
The modulated signal of capacitive displacement information is converted into voltage signal, and signal processing circuit 6 mainly carries out voltage signal further
Filtering, phase-sensitive detection circuit 7 and low-pass filter 8 constitute lock-in amplifier；Finally demodulate the gradual opposite position of inertial mass
Confidence ceases, i.e. the output end of active device.
As an embodiment of the present invention, preamplifier 5 can be the operational amplifier of low noise high bandwidth, signal
Processing circuit 6 can be the multi-stage filter based on operational amplifier, and phase-sensitive detection circuit 7 can be switch demodulation or simulation
Multiplier, low-pass filter 8 can be the multiple order low pass filter based on operational amplifier.
The present invention separates passive device and active device by using remote transmission line, to realize active device
Heat consumption, which does not generate passive device heat affecting and temperature, to be influenced, and can finally solve to need high-accuracy capacitor displacement detecting, Huo Zhexu
Active circuit heat consumption is wanted not generated to machine assembly in the engineer application of heat affecting.
In embodiments of the present invention, when mechanical sensitivity probe 2 in inertial reference object 21 be subjected to displacement in inertia system
When movement, the first capacitance 22 and 23 size of the second capacitance that are formed with frame change, will be slowly varying by carrier wave 1
First capacitance 22 and the second capacitance 23 are modulated in the first transformer 31, and remote transmission line 4 is used for transmitting 22 He of the first capacitance
The differential modulating signal of second capacitance 23, isolation the second transformer 32 of transmission are used for measuring differential modulating signal, preamplifier 5
Differential modulating signal is further amplified as voltage signal, signal processing circuit 6 further improves amplified signal,
It such as filters, phase-sensitive detection circuit 7 is mainly used for demodulation and isolates slowly varying 23 difference of the first capacitance 22 and the second capacitance
Capacitance signal, low-pass filter 8 finally filter out high-frequency signal, to obtain low frequency difference capacitance signal, that is, realize capacitance
Displacement sensing measures, and due to the effect of remote transmission line 4, entire capacitive displacement sensing circuit can be divided into passive (not generating heat)
Region 9 and active (fever) region 10, and finally realize the heat for reducing active (fever) region 10 to passive (not generating heat) region 9
It influences and temperature influences, need the capacitive displacement sensing measurement being spaced a distance from suitable for sensing probe and detection circuit,
Or active device requires in relatively high capacitive displacement sensing measurement system the heat affecting of passive device.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to
The limitation present invention, all within the spirits and principles of the present invention made by all any modification, equivalent and improvement etc., should all include
Within protection scope of the present invention.
Claims (6)
1. a kind of capacitive displacement sensing device that transmission is isolated at a distance based on dual transformer, which is characterized in that including：Passive device
Part, first transmission line (41), second transmission line (42), the second transformer (32) and active device；
One end of the first transmission line (41) is connected to the first output end of the passive device, the first transmission line (41)
The other end be connected to the first input end of second transformer (32)；One end of the second transmission line (42) is connected to institute
The second output terminal of passive device is stated, the other end of the second transmission line (42) is connected to the of second transformer (32)
Two input terminals；The first input end of the active device is connected to the output end of second transformer (32), the active device
Second input terminal of part is for connecting carrier signal；
For connecting carrier signal, the passive device is exported according to the carrier signal includes the input terminal of the passive device
There are the modulated signal of differential capacitance displacement information, the modulated signal to pass through the first transmission line (41) and second transmission
Line (42) is transferred to second transformer (32) and active device, passes through the first transmission line (41) and second transmission
Line (42) by passive device and active device far from so that the heat consumption of active device does not have an impact passive device region, it is described
Active device is used to export the relative position information of inertial mass.
2. capacitive displacement sensing device as described in claim 1, which is characterized in that the first transmission line (41) and described
Two transmission lines (42) are that distance is more than 1 meter of coaxial cable for being less than 10 meters.
3. capacitive displacement sensing device as described in claim 1, which is characterized in that the passive device includes：Mechanical sensitivity
Probe (2) and the first transformer (31)；
Input terminal of the input terminal of the mechanical sensitivity probe (2) as the passive device, the mechanical sensitivity probe (2)
First output end is connected to the first input end of first transformer (31), states the second output terminal of mechanical sensitivity probe (2)
It is connected to the second input terminal of first transformer (31), the first output end of first transformer (31) is as the nothing
The second output terminal of first output end of source device, first transformer (31) is exported as the second of the passive device
End；
The mechanical sensitivity probe (2) is for detecting displacement movement signal, and first transformer (31) according to displacement for transporting
Dynamic signal exports differential signal when two bridge imbalances.
4. capacitive displacement sensing device as claimed in claim 3, which is characterized in that mechanical sensitivity probe (2) includes：It is used
Property object (21), the first capacitance (22) and the second capacitance (23)；
First capacitance (22) and second capacitance (23) are respectively connected to one end of the first transmission line (41) and described
One end of second transmission line (42), it is described when the size of first capacitance (22) and second capacitance (23) is unequal
First transformer (31) output includes the modulated signal of differential capacitance displacement information.
5. capacitive displacement sensing device according to any one of claims 1-4, which is characterized in that the active device includes：
Sequentially connected preamplifier (5), signal processing circuit (6), phase-sensitive detection circuit (7) and low-pass filter (8), before described
First input end of the input terminal of amplifier (5) as the active device is set, the control terminal of the phase-sensitive detection circuit (7) is made
For the second input terminal of the active device, the output end of the output end of the low-pass filter (8) as the active device；
The preamplifier (5) is used to include that the modulated signal of differential capacitance displacement information is converted into voltage signal, institute
Signal processing circuit (6) is stated for being filtered to the voltage signal, the phase-sensitive detection circuit (7) is for detecting difference
Divide the amplitude of capacitance signal, the low-pass filter (8) is for demodulating the gradual relative position information of inertial mass.
6. capacitive displacement sensing device as claimed in claim 4, which is characterized in that when work, be used to when in mechanical sensitivity probe
Property object when being subjected to displacement movement in inertia system, the first capacitance and the second capacitance size that are formed with frame become
Change, by carrier wave by slowly varying the first capacitance and the second capacitance modulation in the first transformer, first transmission line and second
Transmission line is used for transmitting the differential modulating signal of the first capacitance and the second capacitance, and differential modulating signal is measured by the second transformer
It is further amplified afterwards as voltage signal by preamplifier, signal processing circuit improves amplified signal, phase
Quick detecting circuit is for demodulating the differential capacitance signal for isolating the first slowly varying capacitance and the second capacitance, low-pass filter
For obtaining low frequency difference capacitance signal after filtering out high-frequency signal, that is, realize capacitive displacement sensing measurement.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810571854.3A CN108413856B (en) | 2018-05-30 | 2018-05-30 | Capacitance displacement sensing device based on double-transformer remote isolation transmission |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810571854.3A CN108413856B (en) | 2018-05-30 | 2018-05-30 | Capacitance displacement sensing device based on double-transformer remote isolation transmission |
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| CN108413856A true CN108413856A (en) | 2018-08-17 |
| CN108413856B CN108413856B (en) | 2020-07-10 |
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Cited By (1)
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| CN114598303A (en) * | 2022-03-17 | 2022-06-07 | 中国工程物理研究院流体物理研究所 | Pulse high-voltage or large-current detector and passive differential circuit and working method thereof |
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2018
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| CN114598303A (en) * | 2022-03-17 | 2022-06-07 | 中国工程物理研究院流体物理研究所 | Pulse high-voltage or large-current detector and passive differential circuit and working method thereof |
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