CN208140247U - A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave - Google Patents
A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave Download PDFInfo
- Publication number
- CN208140247U CN208140247U CN201820392897.0U CN201820392897U CN208140247U CN 208140247 U CN208140247 U CN 208140247U CN 201820392897 U CN201820392897 U CN 201820392897U CN 208140247 U CN208140247 U CN 208140247U
- Authority
- CN
- China
- Prior art keywords
- probe
- piezoelectric detector
- surface wave
- measuring surface
- main body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000000523 sample Substances 0.000 title claims abstract description 42
- 230000009977 dual effect Effects 0.000 title claims 3
- 238000005259 measurement Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 239000010949 copper Substances 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- 239000002033 PVDF binder Substances 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000001066 destructive effect Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000009659 non-destructive testing Methods 0.000 description 1
- 238000013001 point bending Methods 0.000 description 1
- -1 polytetrafluoroethylene Polymers 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 239000004810 polytetrafluoroethylene Substances 0.000 description 1
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
Abstract
本实用新型涉及一种测量表面波波速的双探头压电探测器，包括压电探测器主体和探头，其特征在于，在主体上开设有两个平行的通孔，所述的探头为双探头，在通孔内设置有与通孔尺寸相配合的绝缘环，两个探头分别固定在每个绝缘环内，探头的端部设置有劈尖。本实用新型可以提高表面波波速测量的准确性。
The utility model relates to a double-probe piezoelectric detector for measuring surface wave velocity, which includes a piezoelectric detector main body and a probe, and is characterized in that two parallel through holes are opened on the main body, and the probe is a double probe , an insulating ring matching the size of the through hole is arranged in the through hole, two probes are respectively fixed in each insulating ring, and a wedge is arranged at the end of the probe. The utility model can improve the accuracy of surface wave velocity measurement.
Description
技术领域technical field
本实用新型属于无损检测和超声表面波技术领域，涉及一种压电探测器。The utility model belongs to the technical field of nondestructive testing and ultrasonic surface waves, and relates to a piezoelectric detector.
背景技术Background technique
超大规模集成电路的快速发展对ULSI互连布线系统提出了更大的挑战。在国际半导体技术发展路线图中指出，为了正确表征low-k互连薄膜的机械特性、粘附特性等参数，需要发展先进的测试技术。传统的方法有划痕法、四点弯曲法、粘揭法、拉伸法等。但这些方法都会对薄膜造成损伤，且测量结果的可靠性差。表面波法具有无损、实验系统易操作、检测快速准确等突出优势，可应用于薄膜研究和制备过程的在线检测。表面波法通过匹配实验与理论频散曲线v(f)获得薄膜材料的相关参数。其中实验频散曲线是通过测量不同频率表面波在薄膜基底结构中的传播相速度获得，是表面波表征技术的核心。The rapid development of VLSI poses a greater challenge to the ULSI interconnect wiring system. It is pointed out in the international semiconductor technology development roadmap that in order to correctly characterize parameters such as mechanical properties and adhesion properties of low-k interconnect films, it is necessary to develop advanced testing technologies. The traditional methods include scratch method, four-point bending method, sticking and peeling method, stretching method and so on. However, these methods will cause damage to the film, and the reliability of the measurement results is poor. The surface wave method has outstanding advantages such as non-destructive, easy-to-operate experimental system, fast and accurate detection, etc. It can be applied to thin film research and online detection in the preparation process. The surface wave method obtains the relevant parameters of the thin film material by matching the experimental and theoretical dispersion curve v(f). Among them, the experimental dispersion curve is obtained by measuring the propagation phase velocity of surface waves of different frequencies in the film substrate structure, which is the core of surface wave characterization technology.
目前，普遍使用的单探头压电探测器测量表面波相速度的基本原理是：如图1所示，表面波信号通过短脉冲紫外激光1激发，宽频带线响应压电探测器2检测。样片3与压电探测器2之间压合，一起固定在移动平台4之上。移动平台4的移动方向与短脉冲紫外激光1的位置垂直。通过移动平台4的移动，表面波在两个不同的位置被激发。两次激发时，短脉冲紫外激光1和压电探测器2之间的距离分别为x1和x2,表面波的相速度可以由公式(1) 获得：At present, the basic principle of the commonly used single-probe piezoelectric detector to measure the phase velocity of surface waves is as follows: as shown in Figure 1, the surface wave signal is excited by a short-pulse ultraviolet laser 1 and detected by a broadband line-response piezoelectric detector 2. The sample 3 and the piezoelectric detector 2 are pressed together and fixed on the mobile platform 4 together. The moving direction of the mobile platform 4 is perpendicular to the position of the short pulse ultraviolet laser 1 . Through the movement of the mobile platform 4, surface waves are excited at two different positions. During the two excitations, the distances between the short-pulse ultraviolet laser 1 and the piezoelectric detector 2 are x 1 and x 2 respectively, and the phase velocity of the surface wave can be obtained by formula (1):
其中Φ1(f)和Φ2(f)分别代表在两个位置所测得的表面波信号的相位相角。Among them, Φ 1 (f) and Φ 2 (f) respectively represent the phase angles of the surface wave signals measured at two positions.
由于测量方式的限制，目前该单探头压电探测器在测量精度上还存在一定不足，在测量过程中，移动平台4从位置x1移动到位置x2时不可避免的会存在一定的位移误差，致使距离x2－x1产生一定测量误差。而在公式(1)中相速度的计算与距离x2－x1直接相关。因此采用移动平台4测量不同位置表面波信号的方式会使表面波相速度的计算产生相应的误差。Due to the limitations of the measurement method, the current single-probe piezoelectric detector still has some shortcomings in the measurement accuracy. During the measurement process, there will inevitably be a certain displacement error when the mobile platform 4 moves from position x1 to position x2 , resulting in a certain measurement error in the distance x 2 -x 1 . In the formula (1), the calculation of the phase velocity is directly related to the distance x 2 -x 1 . Therefore, using the mobile platform 4 to measure surface wave signals at different positions will cause corresponding errors in the calculation of the surface wave phase velocity.
实用新型内容Utility model content
针对上述问题，本实用新型的目的是克服现有技术的不足，对现有的单探头压电探测器进行改进提升，提供一种可以提高表面波波速测量准确性的双探头压电探测器。In view of the above problems, the purpose of this utility model is to overcome the deficiencies of the prior art, improve the existing single-probe piezoelectric detector, and provide a dual-probe piezoelectric detector that can improve the accuracy of surface wave velocity measurement.
一款测量表面波波速的双探头压电探测器，包括压电探测器主体和探头，其特征在于，在主体上开设有两个平行的通孔，所述的探头为双探头，在通孔内设置有与通孔尺寸相配合的绝缘环，两个探头分别固定在每个绝缘环内，探头的端部设置有劈尖。A dual-probe piezoelectric detector for measuring surface wave velocity, including a piezoelectric detector main body and a probe, is characterized in that two parallel through holes are opened on the main body, and the probes are double probes. An insulating ring matching the size of the through hole is arranged inside, two probes are respectively fixed in each insulating ring, and a wedge is arranged at the end of the probe.
本实用新型通过双探头压电探测器的设计，消除距离x2－x1的测量误差，提高表面波波速测量的准确性。本实用新型的技术方案如下：The utility model eliminates the measurement error of the distance x2 - x1 through the design of the double-probe piezoelectric detector, and improves the accuracy of surface wave velocity measurement. The technical scheme of the utility model is as follows:
附图说明Description of drawings
图1单探头压电探测器在不同位置检测声表面波示意图Fig.1 Schematic diagram of single-probe piezoelectric detector detecting SAW at different positions
图2双探头压电探测器示意图Figure 2 Schematic diagram of a dual-probe piezoelectric detector
图中编号说明：1短脉冲紫外激光；2单探头压电探测器；3样片；4移动平台；5紫铜探头；6劈尖；7绝缘环；8信号线；9压电探测器主体10压电探测器固定件。Description of numbers in the figure: 1 short-pulse ultraviolet laser; 2 single-probe piezoelectric detector; 3 sample; 4 mobile platform; 5 copper probe; Electrical detector mounts.
具体实施方式Detailed ways
如图2所示，在压电探测器主体上开设有两个相互平行的通孔，直径为1cm、长度为3 cm的紫铜探头5的下端被加工成劈尖6。在紫铜探头5的外部嵌套着材料为聚四氟乙烯的绝缘环7，绝缘环7内径1cm，外径1.4cm。绝缘环7起到绝缘的作用，避免紫铜探头5 与压电探测器主体9相连，造成信号的干扰。紫铜探头5的上端与信号线8相连接，信号线 8用于将探头5检测到的表面波信号传输到示波器中。图中两个由5，6，7，8组成的结构平行置于压电探测器主体9中组成双探头，两个劈尖6的距离被精确的设定为1.6cm。所以使用本压电探测器测量两个位置的表面波信号时，距离x2－x1被固定为1.6cm。因此本双探头压电探测器的使用可避免移动平台4造成的误差，提高表面波相速度测量的准确性。As shown in Figure 2, two parallel through holes are opened on the main body of the piezoelectric detector, and the lower end of the copper probe 5 with a diameter of 1 cm and a length of 3 cm is processed into a wedge 6 . An insulating ring 7 made of polytetrafluoroethylene is nested outside the copper probe 5 , the inner diameter of the insulating ring 7 is 1 cm, and the outer diameter is 1.4 cm. The insulating ring 7 plays the role of insulation and prevents the copper probe 5 from being connected to the piezoelectric detector main body 9 to cause signal interference. The upper end of the copper probe 5 is connected to the signal line 8, and the signal line 8 is used to transmit the surface wave signal detected by the probe 5 to the oscilloscope. In the figure, two structures composed of 5, 6, 7, and 8 are placed in parallel in the piezoelectric detector main body 9 to form a double probe, and the distance between the two wedges 6 is precisely set to 1.6 cm. Therefore, when the piezoelectric detector is used to measure surface wave signals at two positions, the distance x 2 -x 1 is fixed at 1.6cm. Therefore, the use of the dual-probe piezoelectric detector can avoid errors caused by the moving platform 4 and improve the accuracy of surface wave phase velocity measurement.
1、将PVDF压电薄膜附于两个探头的劈尖6上，该薄膜具有很高的压电系数可将机械振动信号转化为电信号。1. Attach the PVDF piezoelectric film to the wedges 6 of the two probes. The film has a high piezoelectric coefficient and can convert mechanical vibration signals into electrical signals.
2、通过压电探测器主体9上的圆柱形连杆将探测器固定在样品之上，保证两劈尖6与样品贴紧压实。2. The detector is fixed on the sample through the cylindrical connecting rod on the main body 9 of the piezoelectric detector, so as to ensure that the two wedges 6 are tightly pressed against the sample.
3、将线性的脉冲激光投射与样品之上，调整激光位置使其与两劈尖6保持平行，对齐。3. Project the linear pulsed laser onto the sample, and adjust the position of the laser to keep it parallel and aligned with the two wedges 6 .
4、将两个紫铜探头5探测到的表面波信号输入到示波器中保存，并通过计算机对两信号进行傅里叶变换得到各自的相位相角Φ1(f)和Φ2(f)。4. Input the surface wave signals detected by the two copper probes 5 into an oscilloscope for storage, and perform Fourier transform on the two signals by a computer to obtain their respective phase angles Φ 1 (f) and Φ 2 (f).
5、将两个位置的相位相角Φ1(f)，Φ2(f)和距离为1.6cm的x2－x1带入到公式(1)中，即可计算出表面波相速度。5. Put the phase angles Φ 1 (f) and Φ 2 (f) of the two positions and x 2 -x 1 with a distance of 1.6cm into the formula (1) to calculate the surface wave phase velocity.
Claims (1)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820392897.0U CN208140247U (en) | 2018-03-22 | 2018-03-22 | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820392897.0U CN208140247U (en) | 2018-03-22 | 2018-03-22 | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208140247U true CN208140247U (en) | 2018-11-23 |
Family
ID=64289912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820392897.0U Expired - Fee Related CN208140247U (en) | 2018-03-22 | 2018-03-22 | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208140247U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507661A (en) * | 2018-03-22 | 2018-09-07 | 天津大学 | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave |
-
2018
- 2018-03-22 CN CN201820392897.0U patent/CN208140247U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507661A (en) * | 2018-03-22 | 2018-09-07 | 天津大学 | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108507661A (en) | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave | |
| CN106813819B (en) | A kind of method of supercritical ultrasonics technology measurement curve surface work pieces residual stress | |
| CN103245311B (en) | With the thickness measuring method of Ultrasonic Detection Multilayer Absorbing Material Coating measuring thickness device | |
| CN103344934B (en) | The detection check method and system of Partial Discharge in Power Transformer sonac | |
| CN106989703A (en) | A kind of gamut lubrication film thickness supersonic detection device and method | |
| CN201408181Y (en) | Ultrasonic probe of pressure pipeline elbow with dome-shaped wedge block | |
| CN102853791A (en) | Method for scanning ultrasonic microscope and measuring thickness, sound velocity, density and attenuation of thin material simultaneously | |
| CN106802202B (en) | A method of measurement anisotropic material plane stress | |
| CN103353553B (en) | The dielectric coefficient microwave measurement system of dielectric coefficient MMU microwave measurement unit and formation thereof | |
| CN107063145B (en) | Incident drift angle in ultrasonic thickness measurement recognizes automatically and error compensating method | |
| CN104458910A (en) | Nondestructive testing method for bonding defects of shell of wind turbine blade and web plate | |
| CN107478728A (en) | A kind of lossless detection method of composite insulator | |
| CN101256171B (en) | Method and system for real time monitoring ultrasound wave during composite material curing process | |
| CN103033153B (en) | Method for scanning ultrasonic microscope and meanwhile measuring mechanical property parameter of lamina material | |
| CN109341912B (en) | A kind of ultrasonic wave plane voussoir is used for the residual stress measuring method of curve surface work pieces | |
| CN113654702A (en) | Method for detecting residual stress of GIS basin-type insulator | |
| CN208140247U (en) | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave | |
| CN108802202A (en) | A kind of ultrasonic wave tandem probe apparatus and method | |
| CN104776819A (en) | Ultrasonic thickness measuring method | |
| CN103822968B (en) | Pressure-ultrasonic reflection rate curve construction method towards the detection of faying face pressure | |
| CN103075981A (en) | Ultrasonic thickness measuring method | |
| CN205786484U (en) | A kind of test device of composite sound wave attenuation coefficient | |
| CN206563728U (en) | A kind of multidirectional controllable male part detects the device of surface of solids defect | |
| CN106680821A (en) | Ultrasonic damage-free method for detecting thickness of NiCoCrAlYTa hexabasic coating plasma spraying coating | |
| CN207571080U (en) | Ultrasonic detector test device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181123 Termination date: 20190322 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |