CN208140247U - A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave - Google Patents
A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave Download PDFInfo
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- CN208140247U CN208140247U CN201820392897.0U CN201820392897U CN208140247U CN 208140247 U CN208140247 U CN 208140247U CN 201820392897 U CN201820392897 U CN 201820392897U CN 208140247 U CN208140247 U CN 208140247U
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- probe
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- piezoelectric detector
- surface wave
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Abstract
The utility model relates to a kind of dual probe Piezoelectric detectors for measuring surface wave velocity of wave, including Piezoelectric detector main body and probe, it is characterized in that, parallel through-hole there are two being opened up in main body, the probe is dual probe, the dead ring matched with clear size of opening is provided in through-hole, two probes are separately fixed in each dead ring, and the end of probe is provided with splitter.The accuracy of surface wave wave speed measurement can be improved in the utility model.
Description
Technical field
The utility model belongs to non-destructive testing and ultrasonic surface wave technical field, is related to a kind of Piezoelectric detector.
Background technique
The fast development of super large-scale integration proposes bigger challenge to ULSI interconnection wiring system.International half
Conductor technology way for development line chart middle finger goes out, in order to correctly characterize the parameters such as mechanical property, adhesion characteristics of low-k interconnection film,
Need to develop advanced measuring technology.Traditional method has scarification, four-point bending method, glues and take off method, pulling method etc..But these sides
Method all can cause to damage to film, and the poor reliability of measurement result.Surface wave method is with lossless, experimental system is easy to operate, inspection
It surveys and quick and precisely waits outstanding advantages, can be applied to the on-line checking of thin film study and preparation process.Surface wave method is real by matching
Test the relevant parameter that thin-film material is obtained with theoretical dispersion curve v (f).Wherein experiment dispersion curve is by measuring different frequency
Propagation phase velocity of the surface wave in film substrate structure obtains, and is the core of surface wave characterization technology.
At present, it is common to use the basic principle of single probe Piezoelectric detector measurement surface phase velocity of wave be：Such as Fig. 1 institute
Show, surface wave signal is excited by brief pulse UV laser 1, and broadband line responds Piezoelectric detector 2 and detects.Print 3 and piezoelectricity
It presses, is fixed on mobile platform 4 together between detector 2.The moving direction and brief pulse UV laser 1 of mobile platform 4
Position it is vertical.By the movement of mobile platform 4, surface wave is excited in two different positions.When exciting twice, short pulse
The distance between ultraviolet laser 1 and Piezoelectric detector 2 are respectively x1And x2, the phase velocity of surface wave can obtain by formula (1)：
Wherein Φ1(f) and Φ2(f) the phase phase angle of the surface wave signal measured by two positions is respectively represented.
Due to the limitation of measurement method, at present this singly probe Piezoelectric detector in measurement accuracy there is also certain deficiency,
In measurement process, mobile platform 4 is from position x1It is moved to position x2When inevitably there is certain displacement error, cause
Make distance x2-x1Generate certain measurement error.And the calculating of phase velocity and distance x in formula (1)2-x1It is directly related.Cause
This can make the calculating of surface phase velocity of wave generate corresponding miss in such a way that mobile platform 4 measures different location surface wave signal
Difference.
Utility model content
In view of the above-mentioned problems, the purpose of the utility model is to overcome the deficiencies in the prior art, to existing single probe piezoelectricity
Detector improves promotion, provides a kind of dual probe Piezoelectric detector that surface wave wave speed measurement accuracy can be improved.
The dual probe Piezoelectric detector of a measurement surface wave velocity of wave, including Piezoelectric detector main body and probe, feature
It is, is opened up in main body there are two parallel through-hole, the probe is dual probe, is provided in through-hole and clear size of opening
The dead ring matched, two probes are separately fixed in each dead ring, and the end of probe is provided with splitter.
The utility model passes through the design of dual probe Piezoelectric detector, eliminates distance x2-x1Measurement error, improve surface
The accuracy of wave wave speed measurement.The technical solution of the utility model is as follows：
Detailed description of the invention
The mono- probe Piezoelectric detector of Fig. 1 detects surface acoustic wave schematic diagram in different location
Fig. 2 dual probe Piezoelectric detector schematic diagram
Explanation is numbered in figure：1 brief pulse UV laser；2 single probe Piezoelectric detectors；3 prints；4 mobile platforms；5 red coppers
Probe；6 splitters；7 dead rings；8 signal wires；9 Piezoelectric detector main body, 10 Piezoelectric detector fixing piece.
Specific embodiment
As shown in Fig. 2, being opened up in Piezoelectric detector main body there are two the through-hole being parallel to each other, diameter 1cm, length are
The lower end of the red copper probe 5 of 3 cm is processed to splitter 6.It is polytetrafluoroethylene (PTFE) in external nested the material of red copper probe 5
Dead ring 7, dead ring 7 internal diameter 1cm, outer diameter 1.4cm.Dead ring 7 plays the role of insulation, and red copper probe 5 is avoided to visit with piezoelectricity
It surveys device main body 9 to be connected, causes the interference of signal.The upper end of red copper probe 5 is connected with signal wire 8, and signal wire 8 will be for that will visit
First 5 surface wave signals detected are transferred in oscillograph.Two parallelism structurals by 5,6,7,8 compositions are placed in piezoelectricity and visit in figure
It surveys in device main body 9 and forms dual probe, the distance of two splitters 6 is accurately set as 1.6cm.So using this Piezoelectric detector
When measuring the surface wave signal of two positions, distance x2-x1It is fixed to 1.6cm.Therefore this dual probe Piezoelectric detector makes
The error caused by avoidable mobile platform 4 improves the accuracy of surface phase velocity of wave measurement.
1, on the splitter 6 that PVDF piezoelectric membrane is invested to two probes, which has very high piezoelectric modulus can be by machine
Tool vibration signal is converted into electric signal.
2, detector is fixed on sample by the cylindrical connecting rods in Piezoelectric detector main body 9, guarantees two splitters 6
Compacting is adjacent to sample.
3, by linear pulse laser projection on sample, adjustment laser position makes itself and two splitters, 6 keeping parallelism, right
Together.
4, the surface wave signal that two red copper probes 5 detect is input in oscillograph and is saved, and pass through computer pair
Two signals carry out Fourier transformation and obtain respective phase phase angle Φ1(f) and Φ2(f)。
5, by the phase phase angle Φ of two positions1(f), Φ2(f) and apart from the x for being 1.6cm2-x1It is brought into formula (1)
In, surface phase velocity of wave can be calculated.
Claims (1)
1. a kind of dual probe Piezoelectric detector for measuring surface wave velocity of wave, including Piezoelectric detector main body and probe, feature exist
In being opened up in main body there are two parallel through-hole, the probe is dual probe, is provided in through-hole and clear size of opening phase
The dead ring of cooperation, two probes are separately fixed in each dead ring, and the end of probe is provided with splitter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820392897.0U CN208140247U (en) | 2018-03-22 | 2018-03-22 | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820392897.0U CN208140247U (en) | 2018-03-22 | 2018-03-22 | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208140247U true CN208140247U (en) | 2018-11-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820392897.0U Expired - Fee Related CN208140247U (en) | 2018-03-22 | 2018-03-22 | A kind of dual probe Piezoelectric detector measuring surface wave velocity of wave |
Country Status (1)
| Country | Link |
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| CN (1) | CN208140247U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507661A (en) * | 2018-03-22 | 2018-09-07 | 天津大学 | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave |
-
2018
- 2018-03-22 CN CN201820392897.0U patent/CN208140247U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108507661A (en) * | 2018-03-22 | 2018-09-07 | 天津大学 | Dual probe piezoelectric transducer for fast and accurate measurement surface wave velocity of wave |
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Legal Events
| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20181123 Termination date: 20190322 |