CN208136319U - A kind of cooling tube external optical coating cavity - Google Patents
A kind of cooling tube external optical coating cavity Download PDFInfo
- Publication number
- CN208136319U CN208136319U CN201820417393.XU CN201820417393U CN208136319U CN 208136319 U CN208136319 U CN 208136319U CN 201820417393 U CN201820417393 U CN 201820417393U CN 208136319 U CN208136319 U CN 208136319U
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- cavity
- water pipe
- cooling
- cooling water
- top plate
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- 238000001816 cooling Methods 0.000 title claims abstract description 48
- 239000011248 coating agent Substances 0.000 title claims abstract description 12
- 238000000576 coating method Methods 0.000 title claims abstract description 12
- 230000003287 optical effect Effects 0.000 title claims abstract description 12
- 239000000498 cooling water Substances 0.000 claims abstract description 56
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 21
- 239000007787 solid Substances 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 14
- 208000002925 dental caries Diseases 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 238000001771 vacuum deposition Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 230000008020 evaporation Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Abstract
The utility model discloses a kind of cooling tube external optical coating cavitys, including cavity top plate, well floor and cavity side plate, cavity top plate and well floor are horizontally disposed with and are oppositely arranged, cavity side plate is between cavity top plate and well floor, cavity side plate is vertically arranged and in half-round tubular, a hinged chamber door in side of cavity side plate；Cooling water pipe is fixedly installed in the outer surface of cavity top plate, well floor and cavity side plate, and setting increases the branched structure of water pipe specific surface area on cooling water pipe.The utility model is by the design of branched structure so that its cooling effect of optically coated vacuum cavity is more preferable, extend the service life of vacuum cavity, the design of branched structure is almost not take up the space of chamber outer surface, does not increase the cooling capacity that whole volume has but greatly reinforced the cooling tube of cavity.
Description
Technical field
The utility model relates to a kind of cooling tube external optical coating cavitys.
Background technique
OLED, i.e. Organic Light Emitting Diode (Organic Light-Emitting Diode), also known as organic electric laser
It shows (Organic Electroluminesence Display, OLED).Because having the characteristics such as frivolous, power saving,
Digital product it is aobvious do not shield be widely applied, and have biggish market potential, OLED is answered in the world at present
With all focusing on the aobvious not device of plate, because OLED is the technology that uniquely can above mention in the same breath with TFT-LCD in application, OLED is
In current all display technologies, can uniquely make the display technology of the soft screen of large scale, high brightness, high-resolution, can be made and
The same thickness of paper；Wherein, in the production process of OLED, technique for vacuum coating be in OLED production process one it is critically important
Technique, vacuum coating refer in vacuum cavity evaporation source heating evaporation or with accelerate ion bombardment sputtering, deposit to base
Piece surface forms single-layer or multi-layer film.Prisoner be it be related to OLED quality height and service life length most important factor it
One, so the various equipment being applied on technique for vacuum coating must satisfy the required precision of technique for vacuum coating.
Present evaporation process requires experience and vacuumizes, heats and a series of processes such as plated film, and since heating is deposited
Material needs very high temperature, and current plated film vacuum cavity is all provided with cooling water pipe and is passed through cooling water circulation to reduce cavity table
The temperature rise in face, but coiling or the circling ring number of cooling water pipe must be increased to reinforce cooling effect just, and the sky of housing surface
Between limited, mode this for external cooling tube, too many too thick cooling water pipe cannot be set, entire cavity otherwise can be made
Volume increase it is too many.
Utility model content
The purpose of this utility model is that overcoming defect existing in the prior art, a kind of cooling tube external light is provided
Plated film cavity is learned, its cooling effect of vacuum cavity is more preferable, extends the service life of vacuum cavity, is almost not take up cavity appearance
The space in face does not increase the cooling capacity that whole volume has but greatly reinforced the cooling tube of cavity.
To achieve the above object, the technical solution of the utility model is to design a kind of cooling tube external optics plating membrane cavity
Body, including cavity top plate, well floor and cavity side plate, cavity top plate and well floor are horizontally disposed and are oppositely arranged, cavity
Between cavity top plate and well floor, cavity side plate is vertically arranged and in half-round tubular, a side of cavity side plate side plate
The hinged chamber door in side；Cooling water pipe is fixedly installed in the outer surface of cavity top plate, well floor and cavity side plate, sets on cooling water pipe
Set the branched structure for increasing water pipe specific surface area.The specific surface area of cooling water pipe is increased by the setting of branched structure, in this way
Power is more given when cooling cycle, cooling effect is more preferable, but enhances cooling effect while not increasing how many cooling waters.
Further technical solution is the branch water pipe that branched structure is arranged between adjacent cooling water pipe, branch water pipe
It being vertically arranged with cooling water pipe, branch water pipe communicates to form branch's cooling water channel with cooling water pipe, branch water pipe and cavity top plate,
Well floor or cavity side plate are fixedly connected.Setting takes full advantage of cooling without occupying other spaces of chamber outer surface in this way
Space between water pipe, and cooling water pipe specific surface area is increased in this way, enhance cooling effect.
Further technical solution is that branched structure is the radiating block for being fixedly connected on cooling water pipe two sides, radiating block
Thermal coefficient is higher than the thermal coefficient of cavity top plate, well floor and cavity side plate, and radiating block is fixedly connected on cavity top plate, chamber
On body bottom plate or cavity side plate.It is also taken full advantage of between cooling water pipe without occupying other spaces of chamber outer surface in this way
Space, and due to the setting of radiating block, the specific surface area of cavity itself is enhanced, and can also when cooling water temperature is excessively high
A part of heat of cooling water to be radiated away by radiating block, cooling effect is enhanced.
Further technical solution is that branched structure is branch's cooling chamber, and branch's cooling chamber communicates and consolidates with cooling water pipe
Surely it is connected on cavity top plate, well floor or cavity side plate.So also without occupying other spaces of chamber outer surface, sufficiently benefit
With the space between cooling water pipe, and due to the setting of cooling chamber, cooling water pipe specific surface area is increased, is enhanced
Cooling effect.
Further technical solution is that branched structure is that the branch communicated above cooling water pipe with cooling water pipe is arranged in
Pipe, branched pipe and cooling water pipe are integrally formed.The height (or saying thickness) for increasing cooling water pipe in this way, increases cooling water pipe
Specific surface area enhances cooling effect.
Further technical solution is that form is arranged in chamber door；Hole for hoist is set on the cavity top plate.
The advantages of the utility model and beneficial effect are：By the design of branched structure so that optically coated vacuum chamber
Its cooling effect of body is more preferable, extends the service life of vacuum cavity, and the design of branched structure is almost not take up chamber outer surface
Space, do not increase the cooling capacity that whole volume has but greatly reinforced the cooling tube of cavity.Pass through setting for branched structure
Set the specific surface area for increasing cooling water pipe, when such cooling cycle more gives power, and cooling effect is more preferable, increases how many cooling
But cooling effect is enhanced while water.The setting of branch water pipe does not occupy other spaces of chamber outer surface, takes full advantage of
Space between cooling water pipe, and cooling water pipe specific surface area is increased in this way, enhance cooling effect.Due to heat dissipation
The setting of block enhances the specific surface area of cavity itself, and can also be by one of cooling water when cooling water temperature is excessively high
Divide heat to radiate away by radiating block, enhances cooling effect.
Detailed description of the invention
Fig. 1 is a kind of schematic diagram of cooling tube external optical coating cavity embodiment one of the utility model；
Fig. 2 is the schematic diagram of cavity top plate in Fig. 1；
Fig. 3 is the schematic diagram of cavity top plate；
Fig. 4 is the schematic diagram of cavity top plate in the utility model embodiment two；
Fig. 5 is the schematic diagram of cavity top plate in the utility model embodiment three；
Fig. 6 is the schematic diagram of cavity top plate in the utility model embodiment four；
Fig. 7 is the bottom view of cooling water pipe and branch's tube portion in Fig. 6.
In figure：1, cavity top plate；2, well floor；3, cavity side plate；4, chamber door；5, cooling water pipe；6, branch water pipe；
7, radiating block；8, branch's cooling chamber；9, branched pipe；10, hole for hoist；11, form.
Specific embodiment
With reference to the accompanying drawings and examples, specific embodiment of the present utility model is further described.Implement below
Example is only used for clearly illustrating the technical solution of the utility model, and cannot be used as a limitation the protection model of limitation the utility model
It encloses.
Embodiment one：
As shown in Figure 1 to Figure 3 (for convenient for diagram, cooling water pipe 5 is not shown in Fig. 1, branch water pipe 6 is not shown in Fig. 2), this reality
With it is novel be a kind of cooling tube external optical coating cavity, including cavity top plate 1, well floor 2 and cavity side plate 3, cavity
Top plate 1 and well floor 2 are horizontally disposed with and are oppositely arranged, and cavity side plate 3 is between cavity top plate 1 and well floor 2, cavity
Side plate 3 is vertically arranged and in half-round tubular, the hinged chamber door 4 in a side of cavity side plate 3；Cavity top plate 1, well floor 2
Cooling water pipe 5 is fixedly installed with the outer surface of cavity side plate 3, setting increases branch's knot of water pipe specific surface area on cooling water pipe 5
Structure.The branch water pipe 6 that branched structure is arranged between adjacent cooling water pipe 5, branch water pipe 6 are vertically arranged with cooling water pipe 5, point
Branching pipe 6 communicates to form branch's cooling water channel with cooling water pipe 5, branch water pipe 6 and cavity top plate 1, well floor 2 or cavity side
Plate 3 is fixedly connected.Form 11 is set in chamber door 4；Hole for hoist 10 is set on the cavity top plate 1.
Embodiment two：
It is with the difference of embodiment one, as shown in Figure 4 (to illustrate only left-hand component radiating block 7 convenient for diagram), point
Branch structure is the radiating block 7 for being fixedly connected on 5 two sides of cooling water pipe, and the thermal coefficient of radiating block 7 is higher than cavity top plate 1, cavity
The thermal coefficient of bottom plate 2 and cavity side plate 3, radiating block 7 are fixedly connected on cavity top plate 1, well floor 2 or cavity side plate 3.
Embodiment three：
It is with the difference of embodiment one, as shown in Figure 5 (to illustrate only left-hand component branch cooling chamber convenient for diagram
8), branched structure is branch's cooling chamber 8, and branch's cooling chamber 8 communicates with cooling water pipe 5 and is fixedly connected on cavity top plate 1, cavity
On bottom plate 2 or cavity side plate 3.
Example IV：
Be with the difference of embodiment one, as shown in Figure 6, Figure 7, branched structure be arranged above cooling water pipe 5 with it is cold
But the branched pipe 9 that water pipe 5 communicates, branched pipe 9 and cooling water pipe 5 are integrally formed.
The above is only the preferred embodiment of the utility model, it is noted that for the common skill of the art
For art personnel, without deviating from the technical principle of the utility model, several improvements and modifications can also be made, these change
It also should be regarded as the protection scope of the utility model into retouching.
Claims (6)
1. a kind of cooling tube external optical coating cavity, which is characterized in that including cavity top plate, well floor and cavity side
Plate, cavity top plate and well floor are horizontally disposed and are oppositely arranged, and cavity side plate is between cavity top plate and well floor, chamber
Side plate is vertically arranged and in half-round tubular, a hinged chamber door in side of cavity side plate；Cavity top plate, well floor and chamber
Cooling water pipe is fixedly installed in the outer surface of side plate, and setting increases the branched structure of water pipe specific surface area on cooling water pipe.
2. cooling tube external optical coating cavity according to claim 1, which is characterized in that the branched structure is phase
The branch water pipe being arranged between adjacent cooling water pipe, branch water pipe are vertically arranged with cooling water pipe, branch water pipe and cooling water pipe phase
Logical to form branch's cooling water channel, branch water pipe is fixedly connected with cavity top plate, well floor or cavity side plate.
3. cooling tube external optical coating cavity according to claim 1, which is characterized in that the branched structure is solid
Surely it is connected to the radiating block of cooling water pipe two sides, the thermal coefficient of radiating block is higher than cavity top plate, well floor and cavity side plate
Thermal coefficient, radiating block is fixedly connected on cavity top plate, well floor or cavity side plate.
4. cooling tube external optical coating cavity according to claim 1, which is characterized in that the branched structure is point
Branch cooling chamber, branch's cooling chamber are communicated and are fixedly connected on cooling water pipe on cavity top plate, well floor or cavity side plate.
5. cooling tube external optical coating cavity according to claim 1, which is characterized in that the branched structure is to set
The branched pipe communicated above cooling water pipe with cooling water pipe is set, branched pipe and cooling water pipe are integrally formed.
6. cooling tube external optical coating cavity according to any one of claims 2 to 5, which is characterized in that the chamber
Form is set on the door of room；Hole for hoist is set on the cavity top plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820417393.XU CN208136319U (en) | 2018-03-27 | 2018-03-27 | A kind of cooling tube external optical coating cavity |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820417393.XU CN208136319U (en) | 2018-03-27 | 2018-03-27 | A kind of cooling tube external optical coating cavity |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208136319U true CN208136319U (en) | 2018-11-23 |
Family
ID=64290955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820417393.XU Active CN208136319U (en) | 2018-03-27 | 2018-03-27 | A kind of cooling tube external optical coating cavity |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208136319U (en) |
-
2018
- 2018-03-27 CN CN201820417393.XU patent/CN208136319U/en active Active
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee after: JIANGYIN GKVAC MACHINERY Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GUANGKE VACUUM MACHINERY Co.,Ltd. |
|
| CP01 | Change in the name or title of a patent holder | ||
| CP03 | Change of name, title or address |
Address after: 225400 He Han 1 and 6 Groups, Hanzhuang Village, Huangqiao Town, Taixing City, Taizhou City, Jiangsu Province Patentee after: Jiangsu Guangke Precision Equipment Co.,Ltd. Address before: 214400 Changshan Road, Jiangyin High-tech Park, Wuxi City, Jiangsu Province Patentee before: JIANGYIN GKVAC MACHINERY Co.,Ltd. |
|
| CP03 | Change of name, title or address |