CN208125612U - Surface defect detection apparatus based on laser diffusing scattering - Google Patents
Surface defect detection apparatus based on laser diffusing scattering Download PDFInfo
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- CN208125612U CN208125612U CN201820749325.3U CN201820749325U CN208125612U CN 208125612 U CN208125612 U CN 208125612U CN 201820749325 U CN201820749325 U CN 201820749325U CN 208125612 U CN208125612 U CN 208125612U
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Abstract
The utility model relates to the surface defect detection apparatus based on laser diffusing scattering, including laser, beam expander, the first adjustment mirror, second adjustment mirror, third adjustment mirror, octahedral prism, telecentric scan lens, interior integrating sphere, measured surface and the first photoelectric sensor；The first adjustment mirror, second adjustment mirror and third adjustment mirror are set in turn in after beam expander, the octahedral prism is set to above third adjustment mirror, the octahedral prism centers are equipped with drive shaft, the interior integrating sphere bottom is equipped with the first opening, top is equipped with the second opening, is equipped with the first photoelectric sensor in the interior integrating sphere.The surface defect detection apparatus based on laser diffusing scattering of the utility model uses laser scanning and scattering detection technique, can detect and determine to a smooth surface specific location of defect in a short period of time, and preliminary treatment can be carried out to defect image, visualized operation is realized, has many advantages, such as that fast scanning speed, detection efficiency, precision are high.
Description
Technical field
The utility model relates to technical field of laser detection, and in particular to the surface defects detection dress based on laser diffusing scattering
It sets.
Background technique
With the progress of science and technology, many very complicateds and strong work of repeatability is gradually machine by manual operation development
Toolization operation, that is, can avoid in manual operation operator because of operation error caused by certain factors, by operator from complicated
Work in free, also can be improved working efficiency and accuracy, save human cost.
Currently, removing the defects detection to smooth surface of manual operation, there is also the detection modes of some mechanizations, compare
Representative and utility ratio is higher predominantly based on the optical detecting method of Machine Vision (machine vision), this method
It can detect and determine the parameters such as the type of defect, size simultaneously, but the disadvantage is that this method needs scan full hard disk measured surface, and root
According to empirical discovery, there is no defects for most of measured surface, even if having, quantity is also seldom, and are regarded based on machine
The detection method of feel must carry out nondistinctive detection to whole surface, thus, regardless of whether measured surface is defective, when detection
Between be the same, and the most of the time is used in and carries out Image Acquisition and processing, this indistinction to flawless surface
It detects its resolution ratio and detection speed is all relatively slow, the usual detection and analysis time at tens seconds to a few minutes, is unable to satisfy high speed
The demand of efficient on-line checking.
Utility model content
To overcome the above-mentioned deficiency in the presence of the prior art, the utility model provides the surface based on laser diffusing scattering
Defect detecting device.The surface defect detection apparatus based on laser diffusing scattering can in a short period of time to a smooth surface into
Row detects and determines the specific location of defect, and can carry out preliminary treatment to defect image, is point defect or threadiness with determination
Defect improves detection efficiency and accuracy.
Technical solutions of the utility model：Based on the surface defect detection apparatus of laser diffusing scattering, including laser, expand
Device, the first adjustment mirror, second adjustment mirror, third adjustment mirror, octahedral prism, telecentric scan lens, interior integrating sphere, measured surface and
First photoelectric sensor；After the lasing beam diameter that the beam expander is used to launch in laser expands, exported with collimated light beam；
The first adjustment mirror, second adjustment mirror and third adjustment mirror are set in turn in after beam expander, are expanded to adjust beam expander
Beam direction afterwards is mapped to it on octahedral prism；The octahedral prism is set to above third adjustment mirror, is used for third tune
Laser after the expanding of whole mirror reflection secondary reflection again, is run through telecentric scan lens into interior integrating sphere；The octahedral prism
Center is equipped with drive shaft, and when detection, octahedral prism does fixed-axis rotation with drive shaft；The interior integrating sphere bottom is equipped with first and opens
Mouthful, the light beam injected by telecentric scan lens reaches measured surface by the first opening, is again introduced into interior integrating sphere by reflection；
The interior integrating sphere is equipped with the second opening, and when measured surface does not have defect, the reflected beams directly pass through the second opening and leave；
It is equipped with the first photoelectric sensor in the interior integrating sphere, is scattered due to caused by the defect on measured surface for precise measurement
Light.
Compared with prior art, the surface defect detection apparatus based on laser diffusing scattering of the utility model have below into
Step：
(1) detection speed is fast, and detection efficiency is high, and the table of the scanning sample of high-precision quickly and accurately may be implemented
Area scattering situation, and show in host computer the dark field situation of tested sample；
(2) there is difference scanning, it is with strong points, it is fast for zero defect sample detection speed, to defective sample detection
Speed is slow, and can determine the type and specific location of defect, and accuracy is high.
(3) versatile, adapt to various measured surfaces.
As optimization, in the aforementioned surface defect detection apparatus based on laser diffusing scattering, first opening is rounded, directly
Diameter is greater than the length of scanning.The circular open length at interior integrating sphere bottom is greater than the length of scanning, convenient for detection laser beam transformation position
It can be smoothly reflected back interior integrating sphere when scanning measured surface, do not omit detection position.
As optimization, in the aforementioned surface defect detection apparatus based on laser diffusing scattering, second opening is in long strip.
To, it is convenient for reflected light when measured surface zero defect to project by the opening of strip second, is not captured by the first photoelectric sensor,
Impact analysis speed.
As optimization, in the aforementioned surface defect detection apparatus based on laser diffusing scattering, the octahedral prism and third tune
The second photoelectric sensor is equipped between whole mirror, for detecting the light and laser that are scattered through telecentric scan lens out of interior integrating sphere
The light that device reflection comes, measures the intensity of light.User can according to circumstances adjust incident intensity and bore.
As optimization, in the aforementioned surface defect detection apparatus based on laser diffusing scattering, the drive shaft is by control system
Revolving speed is adjusted in control.It defines the octahedral prism rotation speed and is set as ω, the movement velocity V of measured surface, scanning light spot
Size is φ, wherein the vertical scan direction time T of the direction of motion of the measured surface is T=ω/(2 π * 8), it is described tested
Apparent motion direction scanning speed is V=φ/T, and the movement velocity V and octahedral rib of measured surface can be calculated from above formula
Relationship between the rotation speed ω of mirror, thus according to control system to the whether defective feedback of measured surface, to adjust quilt
Survey the movement velocity on surface and the rotation speed of octahedral prism.
Detailed description of the invention
Fig. 1 is the surface defect detection apparatus index path based on laser diffusing scattering of the utility model；
Fig. 2 is under the octahedral prism turn state of the surface defect detection apparatus based on laser diffusing scattering of the utility model
Index path；
Fig. 3 is the control flow chart of the surface defect detection apparatus based on laser diffusing scattering of the utility model.
Appended drawing reference：1- laser；2- beam expander；3- the first adjustment mirror；4- second adjustment mirror；5- third adjusts mirror；6-
Octahedral prism, 61- drive shaft；7- telecentric scan lens；Integrating sphere in 8-, 81- first are open, and 82- second is open；9- is tested table
Face；The first photoelectric sensor of 10-；The second photoelectric sensor of 11-.
Specific embodiment
(embodiment) is further described the utility model with reference to the accompanying drawings and detailed description, this place is retouched
The specific embodiment stated is only used to explain the utility model, but is not intended as the foundation limited the utility model.
Referring to Fig. 1, the surface defect detection apparatus based on laser diffusing scattering of the utility model, including laser 1, expand
Device 2, the first adjustment mirror 3, second adjustment mirror 4, third adjust mirror 5, octahedral prism 6, telecentric scan lens 7, interior integrating sphere 8, quilt
Survey surface 9 and the first photoelectric sensor 10；After the lasing beam diameter that the beam expander 2 is used to launch in laser 1 expands, with
Collimated light beam output；The first adjustment mirror 3, second adjustment mirror 4 and third adjustment mirror 5 are set in turn in after beam expander 2, are used
To adjust the beam direction after beam expander 2 expands, it is mapped to it on octahedral prism 6；The octahedral prism 6 is adjusted set on third
The top of mirror 5, laser after being expanded for reflect third adjustment mirror 5 secondary reflection again, be run through telecentric scan lens 7 into
Enter interior integrating sphere 8；6 center of octahedral prism is equipped with drive shaft 61, and when detection, octahedral prism 6 does dead axle with drive shaft 61 and turns
It is dynamic that (the octahedral prism 6, which rotates, will affect the angles and positions that incident light reaches telecentric scan lens 7, sweep according to telecentricity is injected
7 design feature of lens is retouched, no matter incident light is with what angle directive telecentric scan lens 7, and outgoing beam is all perpendicular to focal plane；By
Difference in the position, bore for injecting light beam, irradiant position, bore can change；Adjust 6 reflecting surface of octahedral prism
It can change scan position with third adjustment 5 reflecting surface angle of mirror, but not change scanning angle)；8 bottom of interior integrating sphere
Portion is equipped with the first opening 81, and the light beam injected by telecentric scan lens 7 reaches measured surface 9 by the first opening 81, by anti-
It penetrates and is again introduced into interior integrating sphere 8；The interior integrating sphere 8 is equipped with the second opening 82, when measured surface 9 does not have defect, reflection
Light beam directly passes through the second opening 82 and leaves；The first photoelectric sensor 10 is equipped in the interior integrating sphere 8, for precise measurement by
Light is scattered caused by the defect on measured surface 9.
As optimization, first opening 81 is rounded, and diameter is greater than the length of scanning.The circle at interior 8 bottom of integrating sphere is opened
Mouth length is greater than the length of scanning, convenient for can smoothly be reflected back interior integrating sphere when the scanning measured surface 9 of detection laser beam transformation position,
Do not omit detection position.
As optimization, second opening 82 is in long strip, passes through strip convenient for reflected light when 9 zero defect of measured surface
Second opening 82 projects, and is not captured by the first photoelectric sensor 10, impact analysis speed.
Referring to fig. 2, as optimization, it is equipped with the second photoelectric sensor 11 between the octahedral prism 6 and third adjustment mirror 5,
The light of coming is reflected for detecting the light for being scattered through telecentric scan lens 7 out of interior integrating sphere 8 and laser 1, measures the strong of light
Degree.User can according to circumstances adjust incident intensity and bore.
As optimization, the aforementioned surface defect detection apparatus based on laser diffusing scattering, the drive shaft 61 is by control system
The revolving speed of octahedral prism 6 is adjusted in control.It defines 6 rotation speed of octahedral prism and is set as ω, the movement speed of measured surface 9
V is spent, the size of scanning light spot is φ, wherein the vertical scan direction time T of the direction of motion of the measured surface 9 is T=ω
/ (2 π * 8), 9 direction of motion scanning speed of measured surface are V=φ/T, can calculate measured surface 9 from above formula
Movement velocity V and octahedral prism 6 rotation speed ω between relationship, thus according to control system to measured surface 9 whether
Defective feedback, to adjust the movement velocity of measured surface 9 and the rotation speed of octahedral prism 6.
Surface is carried out to measured surface 9 using the surface defect detection apparatus based on laser diffusing scattering of the utility model to lack
When falling into detection：
(1) laser beam is issued from laser 1, expands parallel diameter by beam expander 2；
(2) light beam after expanding adjusts the reflection of mirror 5, directive eight by the first adjustment mirror 3, second adjustment mirror 4 and third
Face prism 6；
(3) 6 light beam of directive octahedral prism is through reflecting directive telecentric scan lens 7；
(4) it passes through 7 light of telecentric scan lens and passes through interior 8 lower end first of integrating sphere 81 directive measured surfaces 9 of opening；
(5) light beam of directive measured surface 9 is reflected back interior integrating sphere, the revolution of octahedral prism 6 and quilt by the first opening 81
Surveying the cooperation translation of surface 9 makes complete scan measured surface 9, and when 9 zero defect of measured surface, the reflected beams are from interior integrating sphere 8
The second opening 82 of end is left, and will not be sensed by the first photoelectric sensor 10；When 9 existing defects of measured surface, fault location is anti-
Irradiating light beam generates diffusing reflection, injects in interior integrating sphere 8, the first photoelectric sensor 10 is transferred to after coated inside reflects, this
Surface defect will generate apparent speck under the background of a dark field, to show the size and shape of defect；
(6) light that the light and laser reflection that telecentric scan lens are scattered through in interior integrating sphere 8 come can be by the
Two photoelectric sensors 11 capture, to detect scattering light and incident intensity, to adjust incident intensity and bore.
Referring to Fig. 3, signal acquisition process is as follows：There are two the surface defect detection apparatus based on laser diffusing scattering is set
Photoelectric sensor, i.e. the first photoelectric sensor 10 and the second photoelectric sensor 11, first photoelectric sensor 10 are mounted on interior
Integrating sphere inner wall upper end is responsible for detecting the optical signal that light source scattering generates when acquisition measured surface 9 is defective, the second photoelectric sensing
The setting of device 11 is responsible for acquisition incident intensity and the scattered light intensity back through telecentric scan lens 7 in transmission optical path,
Two signals need to accurately amplify required numerical value (selection U1A- by making operational amplifier circuit by oneself since simulation discharge amplitude is too small
TLV2451 and U2A-TLV2451 amplifier is simultaneously amplified using second level enlarged structure), amplified signal passes through wiring
Device inputs A/D sensor and carries out analog-to-digital conversion, and control system carries out double-channel signal acquisition, at collected signal
The scan image of a plane is obtained after reason, by image feedback to user interface, user interface passes through the detection to measured surface 9
As a result defect is judged whether there is, to adjust the speed of service of measured surface 9 and rotational speed (the change scanning position of octahedral prism
Set and frequency).
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (5)
1. the surface defect detection apparatus based on laser diffusing scattering, it is characterised in that：Including laser (1), beam expander (2),
One adjustment mirror (3), second adjustment mirror (4), third adjust mirror (5), octahedral prism (6), telecentric scan lens (7), interior integrating sphere
(8), measured surface (9) and the first photoelectric sensor (10)；
After the lasing beam diameter that the beam expander (2) is used to launch in laser (1) expands, exported with collimated light beam；
The first adjustment mirror (3), second adjustment mirror (4) and third adjustment mirror (5) are set in turn in after beam expander (2), are used
To adjust the beam direction after beam expander (2) expands, it is mapped to it on octahedral prism (6)；
The octahedral prism (6) is above third adjustment mirror (5), swashing after expanding for reflect third adjustment mirror (5)
Light secondary reflection again is run through telecentric scan lens (7) and enters interior integrating sphere (8)；
Octahedral prism (6) center is equipped with drive shaft (61), and when detection, octahedral prism (6) does dead axle with drive shaft (61) and turns
It is dynamic；
Interior integrating sphere (8) bottom is equipped with the first opening (81), and the light beam injected by telecentric scan lens (7) is opened by first
Mouth (81) reaches measured surface (9), is again introduced into interior integrating sphere (8) by reflection；The interior integrating sphere (8) is equipped with second and opens
Mouth (82), when measured surface (9) does not have defect, the reflected beams directly pass through the second opening (82) and leave；The interior integrating sphere
(8) the first photoelectric sensor (10) are equipped in, for precise measurement due to scattering light caused by the defect on measured surface (9).
2. the surface defect detection apparatus according to claim 1 based on laser diffusing scattering, it is characterised in that：Described first
Being open, (81) are rounded, and diameter is greater than the length of scanning.
3. the surface defect detection apparatus according to claim 1 based on laser diffusing scattering, it is characterised in that：Described second
Opening (82) is in long strip.
4. the surface defect detection apparatus according to claim 1 based on laser diffusing scattering, it is characterised in that：The octahedral
The second photoelectric sensor (11) are equipped between prism (6) and third adjustment mirror (5), for detecting the scattering out of interior integrating sphere (8)
The light that light and laser (1) reflection across telecentric scan lens (7) comes, measures the intensity of light.
5. the surface defect detection apparatus according to claim 1 based on laser diffusing scattering, it is characterised in that：The driving
Axis (61) is controlled by control system, and revolving speed is adjusted.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820749325.3U CN208125612U (en) | 2018-05-18 | 2018-05-18 | Surface defect detection apparatus based on laser diffusing scattering |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820749325.3U CN208125612U (en) | 2018-05-18 | 2018-05-18 | Surface defect detection apparatus based on laser diffusing scattering |
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| Publication Number | Publication Date |
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| CN208125612U true CN208125612U (en) | 2018-11-20 |
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| CN201820749325.3U Active CN208125612U (en) | 2018-05-18 | 2018-05-18 | Surface defect detection apparatus based on laser diffusing scattering |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108444949A (en) * | 2018-05-18 | 2018-08-24 | 杭州智谷精工有限公司 | Surface defect detection apparatus based on laser diffusing scattering |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108444949A (en) * | 2018-05-18 | 2018-08-24 | 杭州智谷精工有限公司 | Surface defect detection apparatus based on laser diffusing scattering |
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