CN208078372U - A kind of interior exocoel doubling frequency ultraviolet laser - Google Patents
A kind of interior exocoel doubling frequency ultraviolet laser Download PDFInfo
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- CN208078372U CN208078372U CN201820253743.3U CN201820253743U CN208078372U CN 208078372 U CN208078372 U CN 208078372U CN 201820253743 U CN201820253743 U CN 201820253743U CN 208078372 U CN208078372 U CN 208078372U
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- exocoel
- ultraviolet laser
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Abstract
The utility model discloses a kind of interior exocoel doubling frequency ultraviolet laser, including pumping source, collimation focusing system, input mirror, gain media, acousto-optic modulator, two frequency-doubling crystals, outgoing mirror and the frequency tripling crystal with optical axis being arranged successively from left to right；Two frequency-doubling crystals are arranged at the intracavitary locations in front of outgoing mirror to carry out inner cavity frequency-doubling, and frequency tripling crystal is arranged at the chamber external position at outgoing mirror rear；The length of two frequency-doubling crystals and the length of frequency tripling crystal and the Ruili distance equal to fundamental frequency light；The equal length of the length and frequency tripling crystal of two frequency-doubling crystals；The surface of outgoing mirror is provided with film plating layer, and the film plating layer is set as reflecting the structure to two frequency doubled light anti-reflections simultaneously to fundamental frequency light part, and it is 1 to the output power ratio of fundamental frequency light and frequency doubled light that the film plating layer, which is set as outgoing mirror,:2 structure, simplied system structure reduce system debug difficulty, can obtain the ultraviolet light output of efficient, excellent beam quality.
Description
Technical field
The utility model is related to field of laser device technology, and in particular to a kind of interior exocoel doubling frequency ultraviolet laser.
Background technology
Currently, ultraviolet laser increasingly shows its unrivaled advantage since wavelength is short, in field of laser processing,
Since wavelength is short, ultraviolet light can obtain smaller focal beam spot, and processing heat affected area is very little, thus can be surpassed
Fine laser processing.Specifically, ultraviolet light-matter interaction is directly to destroy material using the high feature of UV photon energy
The molecular link for expecting surface, compared to infrared laser processing compared with for, this is a kind of " cold " processing mode, this " cold " processing tool
Have machined surface it is more smooth and the weaker advantage of ablation degree, ultraviolet laser is by more and more extensive pass in recent years
Note.
In general, ultraviolet output, existing frequency multiplication of outer-cavity knot can be obtained by cavity external frequency multiplication or intracavity frequency doubling
Structure realizes efficient frequency multiplication output due to needing that condenser lens is added, and due to the addition of condenser lens, then it exacerbates and walks off
Influence of the effect to output facula quality, the frequency tripling light beam quality for often leading to output are poor.
Utility model content
The purpose of this utility model is to provide a kind of interior exocoel doubling frequency ultraviolet lasers, to solve to be deposited in the prior art
Frequency multiplication of outer-cavity structure realize the output of efficient frequency multiplication due to needing that condenser lens is added, and cause to aggravate walk-off effect pair
The influence of output facula quality, the problem for causing the frequency tripling light beam quality of output poor.
To achieve the above object, the utility model method provides a kind of interior exocoel doubling frequency ultraviolet laser, the interior exocoel
Doubling frequency ultraviolet laser includes the pumping source with optical axis being arranged successively from left to right, collimation focusing system, input mirror, gain Jie
Matter, acousto-optic modulator, two frequency-doubling crystals, outgoing mirror and frequency tripling crystal；The intracavitary in front of outgoing mirror is arranged in two frequency-doubling crystals
To carry out inner cavity frequency-doubling at position, frequency tripling crystal is arranged at the chamber external position at outgoing mirror rear；The length of two frequency-doubling crystals
With the length of frequency tripling crystal and equal to the Ruili distance of fundamental frequency light；The length phase of the length of two frequency-doubling crystals and frequency tripling crystal
Deng；The surface of outgoing mirror is provided with film plating layer, and the film plating layer, which is set as reflecting fundamental frequency light part, simultaneously subtracts two frequency doubled lights
Anti- structure, and it is 1 to the output power ratio of fundamental frequency light and frequency doubled light that the film plating layer, which is set as outgoing mirror,:2 structure.
Optionally, collimation focusing system is provided with collimation lens.
Optionally, the quantity of collimation lens is two, and is set as same plain shaft structure.
Optionally, two collimation lenses are biconvex lens.
Optionally, input mirror is plane mirror.
Optionally, gain media is rare earth or metal-doped crystal or glass.
Optionally, gain media neodymium or contain Yb3+Doped crystal or glass.
Optionally, pumping source is straight cavity laser, folding-cavity laser, Q-switched laser or mode-locked laser.
Optionally, two frequency-doubling crystals are rectangular cylinder.
Optionally, frequency tripling crystal is rectangular cylinder.
The utility model has the following advantages that：
The interior exocoel doubling frequency ultraviolet laser of the utility model, can solve the frequency multiplication of outer-cavity knot in the presence of the prior art
Structure realizes efficient frequency multiplication output due to needing that condenser lens is added, and leads to aggravate walk-off effect to output facula quality
It influences, the problem for causing the frequency tripling light beam quality of output poor, simplied system structure reduces system debug difficulty, energy
Access the ultraviolet light output of efficient, excellent beam quality.
Description of the drawings
Fig. 1 is the structural schematic diagram of the interior exocoel doubling frequency ultraviolet laser of the utility model.
Fig. 2 is the impact effect of the equivalent thermal lens of laser crystal of the interior exocoel doubling frequency ultraviolet laser of the utility model
Schematic diagram.
In figure, 1 is pumping source, and 2 be collimation focusing system, and 3 be input mirror, and 4 be gain media, and 5 be acousto-optic modulator, 6
It is outgoing mirror for two frequency-doubling crystals, 7,8 be frequency tripling crystal, and 9 be the equivalent thermal lens of laser crystal, and 10 be the transmission of fundamental frequency light
Curve.
Specific implementation mode
The following examples illustrate the utility model, but is not intended to limit the scope of the present invention.
Embodiment
A kind of interior exocoel doubling frequency ultraviolet laser, referring to Fig. 1 and Fig. 2, the interior exocoel doubling frequency ultraviolet laser include by
Pumping source 1 that left-to-right with optical axis is arranged successively, collimation focusing system 2, input mirror 3, gain media 4, acousto-optic modulator 5,
Two frequency-doubling crystals 6, outgoing mirror 7 and frequency tripling crystal 8；Two frequency-doubling crystals 6 be arranged at the intracavitary locations in the front of outgoing mirror 7 with into
Row inner cavity frequency-doubling, frequency tripling crystal 8 are arranged at the chamber external position at 7 rear of outgoing mirror；The length and frequency tripling of two frequency-doubling crystals 6
The length of crystal 8 and Ruili distance equal to fundamental frequency light；The equal length of the length and frequency tripling crystal 8 of two frequency-doubling crystals 6；It is defeated
The surface of appearance 7 is provided with film plating layer, and the film plating layer is set as reflecting simultaneously to two frequency doubled light anti-reflections fundamental frequency light part
Structure, and it is 1 to the output power ratio of fundamental frequency light and frequency doubled light that the film plating layer, which is set as outgoing mirror 7,:2 structure.
As it can be seen that the interior exocoel doubling frequency ultraviolet laser of the present embodiment, by simultaneously using two frequency multiplication of inner cavity, exocoel frequency tripling
Mode obtain ultraviolet output efficient, that beam quality is excellent；Its laser cavity parameter, including laser chamber shape parameter, output
Mirror filming parameter, two frequency-doubling crystal length parameters and frequency tripling crystal length parameter.Above-mentioned laser chamber shape parameter, can also lead to
Abcd matrix method is crossed to be calculated.Specific chamber chamber shape parameter refers to the distance between each optical element of laser cavity, passes through control
The distance between each optical element of laser cavity processed can control fundamental frequency optical mode and frequency multiplication optical mode at outgoing mirror, specifically
So that the Ruili length of fundamental frequency light adds 8 length of frequency tripling crystal equal to two frequency-doubling crystals, 6 length.In above-mentioned laser cavity parameter
Outgoing mirror filming parameter can be determined by optimum experimental.Specifically outgoing mirror filming parameter is：It is same to the reflection of fundamental frequency light part
When pair two frequency doubled light anti-reflections, specific partial reflectance reflectivity size need by experimental configuration optimize determine, the reflectivity
Meet this instead so that output fundamental frequency light and the power ratio of frequency doubled light are equal to or approximately equal to 1:2, two above-mentioned frequency-doubling crystals 6
Length is identical with the length of frequency tripling crystal 8, which is equal to the half of the Ruili distance of fundamental frequency light, when meeting the condition at this time
It can obtain efficient frequency multiplication output.Due to the symmetry of Gaussian beam, length and the frequency tripling for choosing two frequency-doubling crystals are brilliant
The length of body is identical.Simultaneously and when frequency, meet following relational expression：
ω3=ω2+ω1
ω in above formula3、ω2、ω1The frequency of frequency tripling light, two frequency doubled lights, fundamental frequency light is respectively represented, a frequency tripling is generated
Light needs a fundamental frequency light and the interaction of two frequency doubled light, in the frequency tripling light formed with frequency, the fundamental frequency light of participation and
The energy ratio of frequency doubled light is 1:2, therefore efficient frequency tripling output in order to obtain, be incident to frequency tripling crystal 8 fundamental frequency light and
The best power ratio of frequency doubled light is 1:2.And in the prior art, in conventional frequency multiplication of outer-cavity or inner cavity frequency-doubling, it is incident to frequency tripling
The fundamental frequency light of crystal and the power ratio of two frequency doubled lights are extremely difficult to 1:2, therefore conventional inner cavity or exocoel frequency tripling efficiency is all
It is relatively low.
The interior exocoel doubling frequency ultraviolet laser of the utility model, improves the coating structure of outgoing mirror 7, film plating layer is to base
Frequency light part reflection simultaneously to fundamental frequency light anti-reflection, in experiment, by the filming parameter of control selections outgoing mirror to fundamental frequency light
Reflectivity so that the power ratio of fundamental frequency light and two frequency doubled lights that outgoing mirror 7 exports is 1:2 or be approximately 1:2, to reach best
Frequency tripling efficiency.As shown in Fig. 2, the fundamental frequency light beam Propagation pattern of the interior exocoel doubling frequency ultraviolet laser of the utility model, is adopted
With abcd matrix method, gain media is equivalent to thermal lens 9 in design simulation, the transmission curve 10 of fundamental frequency light is illustrated in figure
Pattern, the waist spot of fundamental frequency light is located at outgoing mirror 7, for the Ruili length thereof for making full use of fundamental frequency light and best fundamental frequency
Two frequency-doubling crystals 6 are positioned over progress inner cavity frequency-doubling at intracavitary outgoing mirror 7, by frequency tripling crystal 8 by light and two frequency multiplication optical power ratios
It is positioned over place outside the outer outgoing mirror 7 of chamber.
The interior exocoel doubling frequency ultraviolet laser of the utility model, can meet several optimum conditions with frequency simultaneously：Two times
Frequency crystal 6 and frequency tripling crystal 8 make full use of the waist spot part of fundamental frequency light and two frequency doubled lights, while frequency tripling structure has most preferably
Fundamental frequency light and frequency multiplication optical power ratio.When its frequency multiplication of outer-cavity compared with the prior art, due to needing that condenser lens is added
It realizes efficient frequency multiplication output, due to the addition of condenser lens, exacerbates influence of the walk-off effect to output facula quality, often
The frequency tripling light beam quality of output is poor, the interior exocoel doubling frequency ultraviolet laser of the utility model without condenser lens,
Have and the analogous excellent beam quality of inner cavity frequency tripling.
The interior exocoel doubling frequency ultraviolet laser of the utility model, can further include such as lower structure, collimation focusing system
System 2 is provided with collimation lens.The quantity of collimation lens is two, and is set as same plain shaft structure.Two collimation lenses are double
Convex lens.Input mirror 3 is plane mirror.Gain media 4 is rare earth or metal-doped crystal or glass.4 neodymium of gain media contains
Yb3+Doped crystal or glass.Pumping source 1 is straight cavity laser, folding-cavity laser, Q-switched laser or mode-locked laser.Two
Frequency-doubling crystal 6 is rectangular cylinder.Frequency tripling crystal 8 is rectangular cylinder.
The interior exocoel doubling frequency ultraviolet laser of the utility model can also include further such as lower structure, frequency tripling crystalline substance
Body 8 is arranged in package shelf.Package shelf includes shell.Pedestal is provided below in shell.It is set on the leading flank of shell and trailing flank
It is equipped with open type window.Pedestal includes upper plate and lower plate.At least three adjusting bolts are connected between upper plate and lower plate.Adjust spiral shell
The upper end of bolt is respectively arranged with bull stick.The end of bull stick is respectively arranged with draw ring.It is respectively arranged on the side wall of shell inclined
Heat emission hole.Air Filter is respectively arranged in heat emission hole.The edge of Air Filter is respectively arranged with screen frame.On the side wall of screen frame respectively
At least two cushion chambers are evenly distributedly provided with, are respectively arranged with thimble in cushion chamber, the inner face of thimble and cushion chamber
Spring is connected separately between inner face, the outer end face of thimble is respectively set to arcwall face.
It should be noted that the interior exocoel doubling frequency ultraviolet laser of the utility model, mainly changes above structure
Into other unmentioned function, component and structures, when needed, may be used can realize corresponding function in the prior art
Component and structure are implemented.
Although above having made detailed description to the utility model with generality explanation and specific embodiment,
On the basis of the utility model, it can be made some modifications or improvements, this is apparent to those skilled in the art
's.Therefore, these modifications or improvements on the basis of without departing from the spirit of the present invention, belong to the utility model and want
Seek the range of protection.
Claims (10)
1. a kind of interior exocoel doubling frequency ultraviolet laser, the interior exocoel doubling frequency ultraviolet laser includes same optical axis successively from left to right
The pumping source of ground setting（1）, collimation focusing system（2）, input mirror（3）, gain media（4）, acousto-optic modulator（5）, two frequencys multiplication
Crystal（6）, outgoing mirror（7）With frequency tripling crystal（8）；It is characterized in that, two frequency-doubling crystals（6）It is arranged in outgoing mirror（7）Front
Intracavitary locations to carry out inner cavity frequency-doubling, frequency tripling crystal（8）It is arranged in outgoing mirror（7）At the chamber external position at rear；Two times
Frequency crystal（6）Length and frequency tripling crystal（8）Length and Ruili distance equal to fundamental frequency light；Two frequency-doubling crystals（6）Length
Degree and frequency tripling crystal（8）Equal length；Outgoing mirror（7）Surface be provided with film plating layer, the film plating layer is set as to base
The reflection of frequency light part is simultaneously to the structure of two frequency doubled light anti-reflections, and the film plating layer is set as outgoing mirror（7）To fundamental frequency light and again
The output power ratio of frequency light is 1:2 structure.
2. exocoel doubling frequency ultraviolet laser in as described in claim 1, which is characterized in that collimation focusing system（2）It is provided with
Collimation lens.
3. exocoel doubling frequency ultraviolet laser in as claimed in claim 2, which is characterized in that the quantity of collimation lens is two,
And it is set as same plain shaft structure.
4. exocoel doubling frequency ultraviolet laser in as claimed in claim 3, which is characterized in that two collimation lenses are lenticular
Mirror.
5. exocoel doubling frequency ultraviolet laser in as described in claim 1, which is characterized in that input mirror（3）For plane mirror.
6. exocoel doubling frequency ultraviolet laser in as described in claim 1, which is characterized in that gain media（4）For rare earth or gold
Belong to doped crystal or glass.
7. exocoel doubling frequency ultraviolet laser in as claimed in claim 6, which is characterized in that gain media（4）Neodymium contains Yb3+It mixes
Miscellaneous crystal or glass.
8. exocoel doubling frequency ultraviolet laser in as described in claim 1, which is characterized in that pumping source（1）For straight cavity laser,
Folding-cavity laser, Q-switched laser or mode-locked laser.
9. exocoel doubling frequency ultraviolet laser in as described in claim 1, which is characterized in that two frequency-doubling crystals（6）For rectangular column
Body.
10. exocoel doubling frequency ultraviolet laser in as described in claim 1, which is characterized in that frequency tripling crystal（8）For rectangular column
Body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820253743.3U CN208078372U (en) | 2018-02-13 | 2018-02-13 | A kind of interior exocoel doubling frequency ultraviolet laser |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820253743.3U CN208078372U (en) | 2018-02-13 | 2018-02-13 | A kind of interior exocoel doubling frequency ultraviolet laser |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208078372U true CN208078372U (en) | 2018-11-09 |
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ID=64036304
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820253743.3U Active CN208078372U (en) | 2018-02-13 | 2018-02-13 | A kind of interior exocoel doubling frequency ultraviolet laser |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208078372U (en) |
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2018
- 2018-02-13 CN CN201820253743.3U patent/CN208078372U/en active Active
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