CN208037500U - Transition trolley and light shield check machine - Google Patents
Transition trolley and light shield check machine Download PDFInfo
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- CN208037500U CN208037500U CN201721923202.9U CN201721923202U CN208037500U CN 208037500 U CN208037500 U CN 208037500U CN 201721923202 U CN201721923202 U CN 201721923202U CN 208037500 U CN208037500 U CN 208037500U
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- light shield
- transition
- transition trolley
- mechanical arm
- trolley
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- 230000007704 transition Effects 0.000 title claims abstract description 56
- 238000007689 inspection Methods 0.000 claims abstract description 30
- 230000007246 mechanism Effects 0.000 claims description 15
- 230000005611 electricity Effects 0.000 claims description 2
- 238000000034 method Methods 0.000 description 7
- 230000003028 elevating effect Effects 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 5
- 230000008569 process Effects 0.000 description 5
- 239000000463 material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 230000003319 supportive effect Effects 0.000 description 1
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Abstract
The utility model discloses a kind of transition trolley and light shield check machines.For carrying light shield between inspection desk and light shield carrier, transition trolley includes transition bench vehicle：Ontology, mechanical arm and bogey.Ontology includes opposite the first side wall and second sidewall, and the first side wall and second sidewall surround accommodating chamber.Mechanical arm is set in accommodating chamber, and can be moved along first direction being taken light shield to transition trolley from light shield carrier.Bogey can be moved along the second direction vertical with first direction light shield is transmitted to inspection desk for carrying the light shield for being carried to transition trolley.The transition trolley and light shield check machine of the utility model embodiment, for the fixed light shield carrier of height, carrying light shield completion between inspection desk and light shield carrier is may be implemented in by adjustable for height transition trolley to interact, and can cope with the demand of the exposure machine of a variety of different models.
Description
Technical field
The utility model is related to haulage equipment, especially a kind of transition trolley and light shield check machine.
Background technology
For the exposure machine of certain model, need using specific light shield carrier carrying light shield, however specific light shield
Carrier can not be interacted with current light shield check machine, can not be detected to light shield.
Utility model content
The utility model aims to solve at least one of the technical problems existing in the prior art.For this purpose, the utility model needs
A kind of transition trolley and light shield check machine are provided.
The transition trolley of the utility model embodiment, for carrying light shield between inspection desk and light shield carrier, institute
The height for stating light shield carrier is fixed, and the transition trolley includes：
Ontology, the ontology include opposite the first side wall and second sidewall, and the first side wall and second sidewall surround
Accommodating chamber；
Mechanical arm, the mechanical arm are set in the accommodating chamber, and can be moved along first direction with will be described
Light shield takes from the light shield carrier to the transition trolley；With
Bogey, for carrying the light shield for being carried to the transition trolley, and can along with the first direction
Vertical second direction is moved so that light shield is transmitted to the inspection desk.
The light shield check machine of the utility model embodiment, the light shield check machine include transition trolley and inspection desk, institute
It states transition bench vehicle and carries height for carrying light shield, the light shield between inspection desk and light shield carrier and fix, the mistake
Crossing trolley includes:
Ontology, the ontology include opposite the first side wall and second sidewall, and the first side wall and second sidewall surround
Accommodating chamber；
Mechanical arm, the mechanical arm are set in the accommodating chamber, and can be moved along first direction with will be described
Light shield takes from the light shield carrier to the transition trolley；With
Bogey, for carrying the light shield for being carried to the transition trolley, and can along with the first direction
Vertical second direction is moved so that light shield is transmitted to the inspection desk.
The transition trolley and light shield check machine of the utility model embodiment lead to the fixed light shield carrier of height
Cross adjustable for height transition trolley may be implemented between inspection desk and light shield carrier carry light shield completion interact, can cope with a variety of
The demand of the exposure machine of different model.
The additional aspect and advantage of the utility model will be set forth in part in the description, partly will be from following description
In become apparent, or recognized by the practice of the utility model.
Description of the drawings
In description of the above-mentioned and/or additional aspect and advantage of the utility model from combination following accompanying drawings to embodiment
It will be apparent and be readily appreciated that, wherein：
Fig. 1 is the floor map of the light shield check machine of the utility model embodiment.
Fig. 2 is the floor map of the mechanical arm of the utility model embodiment.
Fig. 3 is the floor map of the transition trolley of the utility model embodiment.
Specific implementation mode
The embodiment of the utility model is described below in detail, the example of the embodiment is shown in the accompanying drawings, wherein
Same or similar label indicates same or similar element or element with the same or similar functions from beginning to end.Lead to below
It crosses the embodiment being described with reference to the drawings to be exemplary, is only used for explaining the utility model, and should not be understood as to this practicality
Novel limitation.
In the description of the present invention, it should be understood that term "center", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outside",
The orientation or positional relationship of the instructions such as " clockwise ", " counterclockwise " be based on the orientation or positional relationship shown in the drawings, be only for
Described convenient for description the utility model and simplifying, do not indicate or imply the indicated device or element must have it is specific
Orientation, with specific azimuth configuration and operation, therefore should not be understood as limiting the present invention.In addition, term " first ",
" second " is used for description purposes only, and is not understood to indicate or imply relative importance or implicitly indicates indicated technology
The quantity of feature.Define " first " as a result, the feature of " second " can explicitly or implicitly include it is one or more
The feature.The meaning of " plurality " is two or more in the description of the present invention, unless otherwise clearly specific
It limits.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " is pacified
Dress ", " connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally
Connection；It can be mechanical connection, can also be to be electrically connected or can mutually communicate；It can be directly connected, it can also be in
Between medium be indirectly connected, can be the interaction relationship of the connection or two elements inside two elements.For this field
For those of ordinary skill, the concrete meaning of above-mentioned term in the present invention can be understood as the case may be.
In the present invention unless specifically defined or limited otherwise, fisrt feature the "upper" of second feature or it
"lower" may include that the first and second features are in direct contact, and can also not be to be in direct contact but lead to including the first and second features
Cross the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " above " include the
One feature is right over second feature and oblique upper, or is merely representative of fisrt feature level height and is higher than second feature.First is special
Sign second feature " under ", " lower section " and " below " include fisrt feature immediately below second feature and obliquely downward, or only
Indicate that fisrt feature level height is less than second feature.
Following disclosure provides many different embodiments or example is used for realizing the different structure of the utility model.
In order to simplify the disclosure of the utility model, hereinafter the component of specific examples and setting are described.Certainly, they are only
Example, and purpose does not lie in limitation the utility model.In addition, the utility model can in different examples repeat reference numerals
And/or reference letter, this repetition are for purposes of simplicity and clarity, itself not indicate discussed various embodiments
And/or the relationship between setting.In addition, the example for the various specific techniques and material that the utility model provides, but this
Field those of ordinary skill can be appreciated that the application of other techniques and/or the use of other materials.
It please refers to Fig.1 to Fig.3, the light shield check machine 1000 of the utility model embodiment includes transition trolley 100 and inspection
Look into platform.Transition trolley 100 is used to light shield being carried to inspection desk from light shield carrier.Inspection desk includes clamping part and tipper
Structure.Clamping part can carry out light shield the overturning of different angle, operation for the light shield being carried on inspection desk, switching mechanism to be clamped
Personnel check the particle on light shield using major light, meanwhile, it is cleaned with air gun, prevents particle from existing and light shield is caused to damage.
Because the room area for placing light shield check machine is limited, it is more than in room places light shield cabinet, thus inspection desk greatly
Floor space is smaller, and room utilization is higher；Meanwhile light shield front and back is required for carrying out particle cleaning, then requires equipment
Ability cleaning range is the bigger the better；In addition, working condition is very high to photomask clean degree and quality requirements, any wiping not may occur in which
Trace and damage, otherwise the light shield will be unable to use, the production of entire factory can be influenced, which then requires equipment to facilitate behaviour
Make, reduction personnel accidentally touch the risk of light shield.
Inspection desk with switching mechanism can it is nearly 360 degree overturning, personnel are easy to operate, cleaning range it is wide, in operating process
Special transition trolley and guide rail need to be designed, light shield is transferred to transition trolley from light shield carrier, transition trolley passes through guide rail
It runs to below switching mechanism, the position of neighbouring switching mechanism will be moved on light shield, then carry out light shield with switching mechanism and exchange.One
As, the height of transition trolley is fixed, and there is light shield carrier elevating mechanism to be transferred to for that will take out light shield from cabinet
On transition trolley.However, for the exposure machine of certain new models, since its corresponding light shield size changes, existing light
Cover carrier is no longer suitable, therefore, for the new light shield carrier of novel mask set.Newly-designed light shield carrier
Height is fixed, and is mismatched with existing transition bench height, thus can not complete the operation for the inspection desk for going to light shield.
The transition trolley 100 of the utility model embodiment, including ontology 10, mechanical arm 20 and bogey 30.This
Body 10 includes the first side wall 11 and second sidewall 12, and the first side wall 11 and second sidewall 12 are opposite, and surround accommodating chamber.Machinery
Arm 20 is set in accommodating chamber, and can be moved along first direction being taken light shield to transition trolley from light shield carrier.
Specifically, light shield carrier takes out light shield from light shield storage cabinet, is carried out with transition trolley 100 after taking-up pair
It connects.Light shield in this example is carried height and is fixed, and less than the height of inspection desk, can not directly be interacted with inspection desk.
Light shield carrier upper surface is provided with carrying baffle, carries and is provided with cushion block on baffle, for carrying carried light shield, and will
The light shield carried is padded, is inserted into convenient for mechanical arm 20 when taking light shield with the gap formed with carrying baffle.To ensure
The stabilization of mechanical arm 20 in 100 walking process of transition trolley, does not slip from accommodating chamber.Mechanical arm 20 may include having tight
It is fixedly mounted with and sets, such as mechanical arm 20 can be fixed by rotary plunger, and rotated and clamped by cylinder.Certainly, clamp device is not
The disclosed mode of limitation, all elements that can ensure its stability in 100 walking process of transition trolley, structure or its
Combination.
After transition trolley 100 is docked with light shield carrier, knob plunger, which releases, to be fixed, and mechanical arm 20 is along first party
To light shield bottom is stretched into the space stretching formed by front surface.First direction that is to say towards light shield direction, usually,
Towards light shield carrier, the first side wall 11 and second sidewall 12 are respectively the left and right sides wall of ontology 10 in the front of ontology 10.
The stability during light shield is fetched and delivered for guarantee, one end of mechanical arm 20 is provided with blocking portion, it should be noted that blocking portion
Height should ensure that mechanical arm 20 can stretch at a distance from the gap between carrier less than light shield.Mechanical arm 20
It can also include directive wheel, after extending to precalculated position, mechanical arm 20 can control to rise to be bonded completely with light shield bottom, and
It is fixed by blocking portion, edge gets back to transition trolley with first party in the opposite direction.
Bogey 30 is carried out for carrying the light shield for being carried to transition trolley 100 to inspection desk, is handed over inspection desk
Mutually complete the transmission of light shield.Second direction is perpendicular with first direction, that is to say along short transverse.
In conclusion the transition trolley 100 and light shield check machine 1000 of the utility model embodiment, fix height
Light shield carrier, by adjustable for height transition trolley 100, it can be achieved that carrying light shield between inspection desk and light shield carrier
Interaction is completed, the demand of the exposure machine of a variety of different models can be coped with.
In some embodiments, mechanical arm 20 is movable is set on bogey 30, and mechanical arm can 20 enough edges
First direction is moved being taken light shield to bogey 30 from light shield carrier.
Specifically, in 100 walking process of transition trolley, mechanical arm 20 is contained in host cavity, in the handling process,
It is stretched out from host cavity.When in housed state, mechanical arm 20 is located on bogey 30, can be connected by sliding track mechanism.
When stretching state, knob plunger, which releases, to be fixed, and is released mechanical arm 20 along sliding rail by cylinder, when recycling state, is received along sliding rail
It returns.After withdrawal, there is rotary plunger to fix herein, rotated and clamped by cylinder so that light shield is fixed on mechanical arm 20.
In some embodiments, bogey 30 is arranged in 12 inner wall of 11 inner wall of the first inner wall and the second inner wall.
It is to be appreciated that light shield is usually rectangular, the size of transition trolley 100 is according to light shield size design, bogey
30 should be positioned at the two sides of light shield width direction, thus are arranged close to the first side wall 11 and 12 inner wall of second sidewall, can be
So that light shield carrying is more stablized.
Further, in some embodiments, bogey 30 includes multiple lead screw guide rails, and multiple lead screw guide rails are symmetrical
It is set to 12 inner wall of 11 inner wall of the first side wall and second sidewall.
Specifically, bogey 30 includes elevating mechanism and load carrier, and load carrier is set at the top of elevating mechanism,
Elevating mechanism plays a supportive role to load carrier.Elevating mechanism is used to support load carrier lifting, so that transition trolley 100 can
Accurately to be docked in different height with light shield carrier and inspection desk.Load carrier can be mechanical arm 20, can also be
Other structures for carrying.The multifunctional multiplexing of mechanism may be implemented as load carrier for mechanical arm 20, facilitate manufacture.It rises
Descending mechanism can be lead screw guide rail, and the precision of lead screw guide rail can meet the requirement of light shield carrying, and specifically, light shield is removed with light shield
The gap for transporting vehicle is 40mm, and 20 front end of mechanical arm includes blocking portion, when mechanical arm 20 takes light shield, is stretched by the gap
Enter, it is ensured that blocking portion avoids light shield.Multi-filament rod guide can symmetrically be distributed in the inner wall of the first side wall 11 and second sidewall 12.
In some instances, lead screw guide rail may include 4, and 11 side of the first side wall is arranged two, and 12 side of second sidewall is arranged two, makes
It is firm to the support of load carrier to obtain elevating mechanism.
In some embodiments, bogey 30 further includes having motor, and motor is for driving the lead screw guide rail along the
Two directions rise or fall.
Specifically, second direction is vertical with first direction, that is to say the short transverse along side wall.Motor can be stepping electricity
Machine, stepper motor have higher stepping accuracy, and cooperation lead screw guide rail to load carrier, implemented precisely in other words by mechanical arm 20
Positioning.
In the description of this specification, reference term " embodiment ", " certain embodiments ", " schematically implementation
What the description of mode ", " example ", " specific example " or " some examples " etc. meant to describe in conjunction with the embodiment or example
Particular features, structures, materials, or characteristics are contained at least one embodiment or example of the utility model.In this explanation
In book, schematic expression of the above terms are not necessarily referring to identical embodiment or example.Moreover, the specific spy of description
Sign, structure, material or feature can be combined in any suitable manner in any one or more embodiments or example.
While there has been shown and described that the embodiment of the utility model, those skilled in the art can manage
Solution：A variety of to the progress of these embodiments can change in the case where not departing from the principles of the present invention and objective, change,
It replaces and modification, the scope of the utility model is limited by claim and its equivalent.
Claims (12)
1. a kind of transition trolley, for carrying light shield between inspection desk and light shield carrier, which is characterized in that the light shield is removed
The height of fortune vehicle is fixed, and the transition trolley includes：
Ontology, the ontology include opposite the first side wall and second sidewall, and the first side wall and second sidewall surround receiving
Chamber；
Mechanical arm, the mechanical arm are set in the accommodating chamber, and can be moved along first direction with by the light shield
It is taken from the light shield carrier to the transition trolley；With
Bogey, for carrying the light shield for being carried to the transition trolley, and can be along vertical with the first direction
Second direction move light shield is transmitted to the inspection desk.
2. transition trolley as described in claim 1, which is characterized in that the bogey is arranged in the first side wall inner wall
With the second sidewall inner wall.
3. transition trolley as claimed in claim 2, which is characterized in that the bogey includes multiple lead screw guide rails, described
Multiple lead screw guide rails are symmetrically disposed on the first side wall inner wall and the second sidewall inner wall.
4. transition trolley as claimed in claim 3, which is characterized in that the bogey further includes having motor, the motor
For driving the lead screw guide rail to be risen or fallen along the second direction.
5. transition trolley as described in claim 1, which is characterized in that the mechanical arm is movable to be set to the carrying dress
It sets, the mechanical arm can be moved along first direction to be filled with being taken the light shield to the carrying from the light shield carrier
It sets.
6. a kind of light shield check machine, which is characterized in that the light shield check machine includes transition trolley and inspection desk, the transition bench
Vehicle is carried height and is fixed for carrying light shield, the light shield between inspection desk and light shield carrier, the transition trolley packet
It includes:
Ontology, the ontology include opposite the first side wall and second sidewall, and the first side wall and second sidewall surround receiving
Chamber；
Mechanical arm, the mechanical arm are set in the accommodating chamber, and can be moved along first direction with by the light shield
It is taken from the light shield carrier to the transition trolley；With
Bogey, for carrying the light shield for being carried to the transition trolley, and can be along vertical with the first direction
Second direction move light shield is transmitted to the inspection desk.
7. light shield check machine as claimed in claim 6, which is characterized in that the bogey is arranged in the first side wall
Wall and the second sidewall inner wall.
8. light shield check machine as claimed in claim 7, which is characterized in that the bogey includes multiple lead screw guide rails, institute
It states multiple lead screw guide rails and is symmetrically disposed on the first side wall inner wall and the second sidewall inner wall.
9. light shield check machine as claimed in claim 8, which is characterized in that the bogey further includes having motor, the electricity
Machine is for driving the lead screw guide rail to be risen or fallen along the second direction.
10. light shield check machine as claimed in claim 6, which is characterized in that the mechanical arm is movable to be set to described hold
It carries and sets, the mechanical arm can be moved along first direction to be held with being taken the light shield to described from the light shield carrier
It carries and sets.
11. light shield check machine as claimed in claim 6, which is characterized in that the inspection desk includes clamping part, is removed for being clamped
It is transported to the light shield of the inspection desk.
12. light shield check machine as claimed in claim 11, which is characterized in that the inspection desk includes switching mechanism, and being used for will
Light shield clamped by the clamping part is overturn to be checked.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721923202.9U CN208037500U (en) | 2017-12-29 | 2017-12-29 | Transition trolley and light shield check machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721923202.9U CN208037500U (en) | 2017-12-29 | 2017-12-29 | Transition trolley and light shield check machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208037500U true CN208037500U (en) | 2018-11-02 |
Family
ID=63955899
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721923202.9U Active CN208037500U (en) | 2017-12-29 | 2017-12-29 | Transition trolley and light shield check machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208037500U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109298603A (en) * | 2018-11-20 | 2019-02-01 | 深圳市华星光电半导体显示技术有限公司 | A kind of integration of exposure light shield unpacks and cleaning systems |
-
2017
- 2017-12-29 CN CN201721923202.9U patent/CN208037500U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109298603A (en) * | 2018-11-20 | 2019-02-01 | 深圳市华星光电半导体显示技术有限公司 | A kind of integration of exposure light shield unpacks and cleaning systems |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Transition platform truck and light shield inspection machine Effective date of registration: 20200723 Granted publication date: 20181102 Pledgee: CITIC Bank Limited by Share Ltd. Shenzhen branch Pledgor: SHENZHEN ROYOLE DISPLAY TECHNOLOGY Co.,Ltd. Registration number: Y2020980004337 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PP01 | Preservation of patent right |
Effective date of registration: 20240123 Granted publication date: 20181102 |
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| PP01 | Preservation of patent right |