CN207958287U - A kind of coolant circulation system - Google Patents

Abstract

A kind of coolant circulation system, including waste liquid recovery apparatus, the waste liquid recovery apparatus is connect with waste collection pond, filter press, a verifying attachment, pre- blend tank, deployment device, secondary check device, fine filter, flow regulator, supply pump, line cutting machine inlet successively；Concentration detection apparatus is equipped between the deployment device and the pre- blend tank；Non-pressure filter is equipped between the supply pump and the flow regulator.The utility model has the beneficial effects that：The rate of recovery of RO water can reach 90% or more, and the rate of recovery of coolant liquid can reach 80% or more, can reduce coolant liquid cost 30% 60%；The secondary filtration of filter press and fine filter can ensure silica flour content in feed flow<1‰.

Description

A kind of coolant circulation system

Technical field

The application belongs to silicon chip cutting technique field, specifically, being related to a kind of coolant circulation system.

Background technology

Silicon wafer is widely used in photovoltaic solar, liquid crystal display and semiconductor applications, therefore is made using cutting silico briquette The technology of silicon chip is also developed.The cutting of crystal silicon chip used in photovoltaic industry at present mainly uses multi-wire cutting technology.It is multi-thread Cutting is the novel silicon slice cutting technique of mature in recent years, and mechanism drives in running at high speed for machine sheave and is wrapped in Steel wire on sheave, to which the mortar that cutting liquid and silicon carbide micro-powder mix is sent to cutting area by steel wire, in the high speed of steel wire Pass through the process for completing to cut that continuously rubs with the workpiece being pressed on gauze in operating.It will produce a large amount of heat in the process Amount, needs constantly to be cooled down.Cooling required consumes a large amount of RO water and coolant liquid in existing silicon chip working process, used Contain large amount of organic in waste liquid, direct emission there is only environment is polluted, can also not cause the waste of resource.

Invention content

In view of this, there is provided a kind of coolant circulation systems for technical problems to be solved in this application, by cutting It cuts devil liquor recovery and utilizes and achieve the effect that reduce cost, economize on resources, environmental protection.

In order to solve the above-mentioned technical problem, this application discloses a kind of coolant circulation systems, and use following technical side Case is realized.

A kind of coolant circulation system, including waste liquid recovery apparatus, described waste liquid recovery apparatus one end and line cutting machine waste liquid Outlet connection, the other end are connect with waste collection pond, and the waste collection pond is connect by immersible pump with filter press, the press filtration Machine is connect with a verifying attachment, and a verifying attachment is connect with pre- blend tank, and the pre- blend tank connects with deployment device It connects；Concentration detection apparatus is equipped between the deployment device and the pre- blend tank；The deployment device and secondary check device Connection, the secondary check device are connect with fine filter, and the fine filter is connect by feed liquid pipeline with supply pump, the supply Flow regulator is equipped with before pump, the supply pump is connect with line cutting machine inlet.

Further, the filter press filtering accuracy is particle of the diameter range between 100 μm~300 μm.

Further, the fine filter filtering accuracy is particle of the diameter range between 50 μm -100 μm.

Further, a verifying attachment and/or the secondary detection device include viscosity tester, conductivity survey Try instrument and pH value tester.

Further, the conductivity measurement setting is in water-bath heater or after water-bath heater.

Preferably, the heating temperature of the water-bath heater is 25 degrees Celsius.

Preferably, keep sample device equipped with liquid after the fine filter.

Further, the flow regulator is suspended body flowmeter.

Further, Non-pressure filter is equipped between the flow regulator and the supply pump.

Preferably, the Non-pressure filter is active carbon filter.

Compared with prior art, the application can be obtained including following technique effect：Remove the damage that silica flour is carried, evaporated It loses, the rate of recovery of RO water can reach 90% or more, and the rate of recovery of coolant liquid can reach 80% or more, can reduce coolant liquid cost 30%-60%；The secondary filtration precision of filter press and fine filter can ensure silica flour content in feed flow<1‰.

Certainly, implementing any product of the application must be not necessarily required to reach all the above technique effect simultaneously.

Description of the drawings

Attached drawing described herein is used for providing further understanding of the present application, constitutes part of this application, this Shen Illustrative embodiments and their description please do not constitute the improper restriction to the application for explaining the application.In the accompanying drawings：

Fig. 1 is the application coolant circulation system structural schematic diagram.

Specific implementation mode

Presently filed embodiment is described in detail below in conjunction with accompanying drawings and embodiments, thereby how the application is applied Technological means solves technical problem and reaches the realization process of technical effect to fully understand and implement.

A kind of coolant circulation system, including flow spill valve are used for connecting with line cutting machine leakage fluid dram valve, in control container The capacity of cutting liquid.Waste recycling pipeline one end connects flow spill valve, and the other end is connected to waste collection pond, is used for line cutting machine The waste liquid of discharge transports waste collection pond.Waste collection pond is used for collecting waste liquid, is the terminal of waste liquid.As shown in Figure 1.Pressure Filter is connect by immersible pump with waste collection pond, and waste liquid, which is transported to filter press, by the pressure of immersible pump carries out waste liquid filtering. Filter press selects commercially available filter press, can filter out silicon powder particle of the diameter range at 100 μm~300 μm in waste liquid.

The solution filtered by waste liquid is transported to one-time detection device by conveying device and is detected, one end of conveying device It is connect with filter press, the other end is connect with a verifying attachment.Verifying attachment includes viscosity tester, conductivity measurement With pH value tester, it is respectively intended to viscosity number, conductivity and the pH value of detection solution.Wherein electric conductivity detector is arranged in water-bath In heater or after water-bath heater, after solution is heated to set point of temperature by water-bath heater, then examined by electric conductivity detector Survey electrical conductivity of solution.This is because the relationship of conductivity and temperature is very big, so need to set a common reference temperature, this The temperature of the preferred heating water bath of embodiment is 20-30 degrees Celsius.The conductivity value of the present embodiment qualification be less than 80us/cm, Each feed flow periodic amplitude is no more than 10%；Qualified pH range is 6-7.Qualified solution is semi-finished product after once examining, It is contained in semi-finished product flow container.Semi-finished product flow container is semi-finished product liquid transfer tank, also referred to as pre- blend tank.Pre- blend tank entrance with it is primary Verifying attachment connects, and outlet is connect with deployment device entrance.Deployment device is allocated for double of finished fluid, preferably vertical Blend tank.Concentration detection apparatus is equipped between deployment device and pre- blend tank, for detecting the concentration value of semi-finished product solution.

The outlet of deployment device is connect with secondary check device.Secondary check device and a verifying attachment are the same, all wrap Include viscosity tester, conductivity measurement and pH value tester.Wherein electric conductivity detector is arranged in water-bath heater or water After bathing heater, after solution is heated to set point of temperature by water-bath heater, then electrical conductivity of solution detected by electric conductivity detector.

Secondary check device is connect with fine filter entrance, and the solution after secondary check is transported to fine filter and carries out refined filtration. Select filtering accuracy for 50 μm -100 μm of fine filter in the type selecting of fine filter, you can to filter out diameter range at 50 μm -100 μm Silicon powder particle.Solution after refined filtration is known as finished product.Keep sample device it is preferred that being equipped in fine filter exit, be used for this at Product solution keeps sample, and when meeting bad in silicon chip production process, can analyze the solution that keeps sample, bad to help to confirm Reason and follow-up improvement alternative.

Fine filter outlet is connect with one end of feed liquid pipeline, and the other end of feed liquid pipeline is connected to supply pump.Feed liquid pipeline For transporting finished fluid, supply pump is used for providing power is delivered to line cutting machine inlet by finished fluid, and preferred pressure range is 0.2-0.4mbar.Flow regulator is equipped with before supply pump, the present embodiment selects suspended body flowmeter.It is cut according to different silicon chips Technological requirement be adjusted, control into flow quantity, the liquid inlet volume control range of suspended body flowmeter is 100-500L/h.Flow tune Non-pressure filter, the preferred active carbon filter of the present embodiment are equipped between regulating device and supply pump.Meeting in being recycled due to coolant liquid Using to antifoaming agent, and the Composition accumulation of antifoaming agent will produce dope, and feed liquid pipeline is all very long under normal conditions, is used for a long time Inner wall of the pipe easily adheres to these sticky organic matters afterwards, these organic matters are complexed when finished fluid passes through, and can make line cutting machine The phenomenon that disconnected spiral, and activated carbon filtering can effectively filter out these organic matters, be further ensured that the normal work of line cutting machine.It needs It should be noted that the installation position of Non-pressure filter is not certain, it is theoretically better closer to line cutting machine inlet effect, but In practice will according to actual conditions select not only close to inlet again be easy install position.

Described waste liquid refers to RO water and the mixed liquor of coolant liquid in the present embodiment, and the concentration range of wherein coolant liquid is 0.5%-3%.

One-time detection and secondary detection are both needed to viscosity number, conductivity and the pH value of detection solution, if there are one the values measured It is abnormal, then illustrate that the process of cutting operation is faulty, remind staff according to the case where exceptional value to entire cutting machine and cold But fluid circulation carries out malfunction elimination.

After finished fluid carries out cooling and lubricating in line cutting machine, the residual silica flour of silicon chip cutting, then the conveying of recovered pump are taken away To coolant liquid bucket, then waste liquid recovery apparatus is discharged into after flow spill valve, to recycling for waste liquid of completion.

The beneficial effects of the invention are as follows：Remove silica flour carry, the loss of evaporation, the rate of recovery of RO water can reach 90% with On, the rate of recovery of coolant liquid can reach 80% or more, can reduce coolant liquid cost；The secondary filtration of filter press and fine filter can Ensure silica flour content in feed flow<1‰.

A kind of coolant circulation system provided above the embodiment of the present application, is described in detail.It is above to implement The explanation of example is merely used to help understand the structure and its core concept of the application；Meanwhile for the general technology people of this field Member, according to the thought of the application, there will be changes in the specific implementation manner and application range, in conclusion this explanation Book content should not be construed as the limitation to the application.

Some vocabulary has such as been used to censure specific components in specification and claims.Those skilled in the art , it is to be appreciated that different manufacturers may call the same component with different nouns.Present specification and claims are simultaneously Not in such a way that the difference of title is used as and distinguishes component, but it is used as the criterion of differentiation with the difference of component functionally. Be an open language in "comprising" of the specification and claims in the whole text mentioned in, thus should be construed to " include but not It is defined in "." substantially " refer in receivable error range, those skilled in the art can solve within a certain error range The technical problem basically reaches the technique effect.Specification subsequent descriptions are to implement the better embodiment of the application, so The description is not limited to scope of the present application still for the purpose of the rule for illustrating the application.The protection of the application Range is when subject to the appended claims institute defender.

It should also be noted that, the terms "include", "comprise" or its any other variant are intended to nonexcludability Including so that commodity or system including a series of elements include not only those elements, but also include not clear The other element listed, or further include for this commodity or the intrinsic element of system.In the feelings not limited more Under condition, the element that is limited by sentence "including a ...", it is not excluded that including the element commodity or system in also There are other identical elements.

Several preferred embodiments of the application have shown and described in above description, but as previously described, it should be understood that the application Be not limited to form disclosed herein, be not to be taken as excluding other embodiments, and can be used for various other combinations, Modification and environment, and by the technology of above-mentioned introduction or related field or can know in the application contemplated scope described herein Knowledge is modified.And changes and modifications made by those skilled in the art do not depart from spirit and scope, then all Ying Ben In the protection domain for applying for the appended claims.

Claims (10)

1. a kind of coolant circulation system, it is characterised in that：Including waste liquid recovery apparatus, described waste liquid recovery apparatus one end and line The connection of machine waste liquid outlet is cut, the other end is connect with waste collection pond, and the waste collection pond is connect by immersible pump with filter press, The filter press is connect with a verifying attachment, and a verifying attachment is connect with pre- blend tank, the pre- blend tank and tune It is connected with device；Concentration detection apparatus is equipped between the deployment device and the pre- blend tank；The deployment device with it is secondary Verifying attachment connects, and the secondary check device is connect with fine filter, and the fine filter is connect by feed liquid pipeline with supply pump, Flow regulator is equipped with before the supply pump, the supply pump is connect with line cutting machine inlet.

2. coolant circulation system according to claim 1, it is characterised in that：The filter press filtering accuracy is diameter range Particle between 100 μm~300 μm.

3. coolant circulation system according to claim 1, it is characterised in that：The fine filter filtering accuracy is diameter range Particle between 50 μm -100 μm.

4. according to any coolant circulation systems of claim 1-3, it is characterised in that：Verifying attachment and/or The secondary check device includes viscosity tester, conductivity measurement and pH value tester.

5. coolant circulation system according to claim 4, it is characterised in that：The conductivity measurement setting adds in water-bath In hot device or after water-bath heater.

6. coolant circulation system according to claim 5, it is characterised in that：The heating temperature of the water-bath heater is 20-30 degrees Celsius.

7. according to any coolant circulation system of claim 1-3,5-6, it is characterised in that：Liquid is equipped with after the fine filter Body keeps sample device.

8. coolant circulation system according to claim 7, it is characterised in that：The flow regulator is float-type Meter.

9. according to claim 1-3,5-6,8 any coolant circulation systems, it is characterised in that：The flow regulator Non-pressure filter is equipped between the supply pump.

10. coolant circulation system according to claim 9, it is characterised in that：The Non-pressure filter filters for activated carbon Device.