CN103928840B - High purity water cooling device of semiconductor laser unit - Google Patents
High purity water cooling device of semiconductor laser unit Download PDFInfo
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- CN103928840B CN103928840B CN201310014105.8A CN201310014105A CN103928840B CN 103928840 B CN103928840 B CN 103928840B CN 201310014105 A CN201310014105 A CN 201310014105A CN 103928840 B CN103928840 B CN 103928840B
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- water
- electromagnetic valve
- filter
- cooling
- tank
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Abstract
A high purity water cooling device of a semiconductor laser unit is characterized in that a conductivity meter is arranged on a water tank, the water tank is connected with the input end of a water pump, the output end of the water pump is both connected with a first electromagnetic valve and a water filter through a tee joint, a high precision PP folding filter element is arranged in the water filter, the first electromagnetic valve is connected with a resin filter and is connected with a water return tank through the resin filter, the output end of the water filter, used as a cooling water outlet of a water cooling system, is a reserved port connected with the laser unit, cooling water flowing through the laser unit uses an inlet of the water cooling system as a starting point of the cooling water return tank, the inlet of the water cooling system is both connected with a second electromagnetic valve and a flow temperature gauge through a tee joint, then the cooling water returns to the water tank through a third electromagnetic valve, and a one-way valve is connected with the second electromagnetic valve to be used as a blowback air water return port. The high purity water cooling device of the semiconductor laser unit has the function of high purity filtration, the function of rapid ion purification, the function of a blowback air water return loop, and the function of being in communication with an upper computer and controlling the upper computer, and is applied to semiconductor laser unit water cooling systems.
Description
Technical field
The present invention relates to a kind of semiconductor laser, more particularly to a kind of high-purity semiconductor laser water cooling plant.
The high-purity semiconductor laser water cooling plant have high-purity filter, fast ionic purification, blowback air water return loop and with
Upper machine communication and the function of control, apply in semiconductor laser water-cooling system.
Background technology
In semiconductor laser, water-cooling system is the requisite device that cooling is carried out for semiconductor stack.
But current semiconductor laser is all the water-cooling control device using routine, and the water-cooling control device of routine only possesses simply
Filtration and basic temperature control means.Semiconductor laser is a kind of to the exigent equipment of cooling water, its cooling water
Quality will directly affect its service life.At present, not yet there is the dedicated water exclusively for semiconductor laser exploitation on market
Cooling system.And water-cooling system on the market can not all meet needs of the semiconductor laser for water-cooling system, generally
There is problems with.
First, filtering accuracy is relatively low, it is impossible to meet the microchannel water route design that semiconductor laser is adopted, can be because in water
Particulate matter it is excessive and block microchannel, so as to cause the life-span of semiconductor laser.
Second, conventional water-cooling system lacks the control to cooling down water conductivity, conductance of the semiconductor laser to cooling water
Rate has strict requirements, i.e., can not it is too low also can not be too high, even if therefore the water-cooling system of routine possesses the detection to electrical conductivity
But also the control to electrical conductivity cannot be accomplished so as to it is many using bringing to user to the replacing of water and its frequently when using
Trouble, and electrical conductivity is too high will have the certainly possible fatal damage for causing semiconductor laser.
3rd, current water-cooling system does not possess reverse air blowing water return function, brings very to user to a certain extent
More unnecessary trouble.
For this purpose, people are highly desirable a kind of water-cooled that can be good at, be very easily applied to semiconductor laser
Device, can have high filtering precision, fast ionic purification, blowback air backwater and standardized electrical control interface.
The content of the invention
It is an object of the invention to solve problem present in semiconductor laser water cooling plant in the market, there is provided one
Plant reliable, multi-functional, the high-purity semiconductor laser with the suitability water cooling plant.The water cooling plant is used many times
Road control design case, by the control to electrical equipments such as electromagnetic valve, effusion meter, temperature sensor, pressure transducers, realizes one
Plant the high precision closed loop with high-precision filtration, rapid water ion cleaning, blowback air backwater, real-time discharge and monitoring temperature
The water-cooling system of control.
The technical solution used in the present invention is.
This high-purity semiconductor laser water cooling plant, includes electromagnetic valve, water filter, resin filter, flow
Thermometer, gas delivery system, its structural feature is.
Conductivity meter 17 is arranged on water tank 1, and water tank 1 is connected with the input of water pump 2, and the outfan of water pump 2 passes through
Threeway connects respectively the first electromagnetic valve 3 and water filter 5, folds filter element equipped with high accuracy PP in water filter 5, the first electromagnetic valve
3 are connected with resin filter 4, and the connection recovery tank 1 of Jing resin filters 4, used as the water of the coolant outlet 6 of water cooling plant
The outfan of filter 5 for connecting laser spare interface, the cooling water of flowing through laser via water cooling plant the conduct of entrance 7
Cooling water returns the starting point of water tank, and the entrance 7 of water cooling plant connects respectively the second electromagnetic valve 10 and flow temperature by threeway
Meter 8, by the 3rd electromagnetic valve 9 water tank is returned to, and check valve 11 is connected with the second electromagnetic valve 10, used as connecing for blowback air backwater
Mouthful.
Described gas delivery system is by electromagnetic valve, super oil mist separator, pressure transducer, check valve and gas point
Road device composition, gas delivery system entrance 16 is communicated by super oil mist separator 15 with gas shunt device 12, gas shunt device
12 are communicated respectively by pipeline with the 4th electromagnetic valve 14 and pressure transducer 1, and gas shunt device 12 passes through check valve 11, second
The entrance 7, laser instrument of electromagnetic valve 10, water cooling plant, the coolant outlet 6 of water cooling plant, water filter 5, water pump 2 and water tank 1
Communicate.During work, the 4th electromagnetic valve 14（It is normally closed）Close, pressure transducer 13 starts detected gas pressure, when pressure reaches pre-
When ordering value, the second electromagnetic valve 10（It is normally closed）Open, the 3rd electromagnetic valve 9（It is normally opened）Close, gas is via air transporting arrangement entrance
The super oil mist separators 15 of 16 Jing, gas circuit segmenting device 12, check valve 11, the entrance 7, laser of the second electromagnetic valve 10, water cooling plant
Cooling water is blown back water tank 1 by device, the coolant outlet 6 of water cooling plant, water filter 5, water pump 2.
Above-mentioned electromagnetic valve, water filter, conductivity meter, resin filter, flow thermometer is in the main of water cooling plant
Miscellaneous function is.
Water filter is filtration impurities in water in water cooling plant, and filter element has selected PP to fold filter element, more traditional cotton thread
Filter element has the filtering accuracy of higher service life, lower water resistance and Geng Gao.
Conductivity meter, resin filter are to remove the zwitterion included in cooling water in water cooling plant, to reach
To the purpose of ion cleaning.
Flow thermometer is that the flow to cooling water and temperature are detected in real time, to ensure a whole set of water cooling plant just
Often operation.
Described gas delivery system is by electromagnetic valve, super oil mist separator, pressure transducer, check valve and gas circuit point
Cutter is constituted.The device can provide the pure gas of high-purity and use for Laser Processing, meanwhile, via electromagnetic valve, pressure
The control unit function that can provide reverse air blowing backwater for above-mentioned water cooling plant of sensor and check valve composition, can be with
The cooling water remained in water equipment is blown back in water tank.
Above-mentioned system provides comprehensive electric interfaces, can be controlled according to corresponding logical relation by host computer
System.And the system can accordingly be changed according to the requirement of laser instrument to the trend in water route, bore.The all metal portions of the system
Part employs food stage 316L stainless steel material, and connecting line has selected the pvc pipe fittings of high-quality to carry out between each part
Interface channel.So as to ensure that the operation reliably and with long-term of system.
High-purity semiconductor laser water cooling plant key work.
When system works, cooling water is input into semiconductor laser by the cooling water after ion cleaning by water pump via water filter
Device, Jing flows thermometer is returned to and complete in water tank circulation after flowing through laser.When needing to dismantle laser instrument, conveyed by gas
The cooling water that system is responsible for remain in laser instrument inversely blows back water tank to facilitate the storage of laser instrument.Whole device is by host computer
It is controlled, all of control point is carried out by the logic for designing, to guarantee the stable operation of device.
Compared with prior art, the invention has the beneficial effects as follows.
（1）The water cooling plant has good adaptability, in being integrated in any laser instrument water cooling plant.
（2）Using high accuracy PP foldable filter element, filtering accuracy is ensureing that its flow is impregnable same up to more than 1um
When make granularity in water less than per square meter 10, and granule maximum gauge is not more than 0.5um.
（3）Resin is polished using high-purity, using solenoid valve control point water loop, can at short notice by electrical conductivity 20 with
Under deionization electrical conductivity of water be down to 1um.
（4）The device devises the waterway circulating design of exquisiteness, possesses reverse air blowing water return function, will can be set with water
Water blowback recovery tank in standby, facilitates the dismounting of water equipment.
（5）The device employs the electric interfaces design of international standard, can easily be embedded in the control such as various host computers system
System.
Description of the drawings
Fig. 1 is the equipment connection diagram of the present invention.
Labelling in figure：1. water tank, 2. water pump, 3. the first electromagnetic valve, 4. resin filter, 5. water filter, 6. water-cooled
The coolant outlet of device, the 7. entrance of water cooling plant, 8. flow thermometer, 9. the 3rd electromagnetic valve, 10. the second electromagnetic valve,
11. check valves, 12. gas shunt devices, 13. pressure transducers, 14. the 4th electromagnetic valves 15. surpass oil mist separator, 16. gases
Induction system entrance, 17. conductivity meters.
Specific embodiment
Embodiment.
High-purity semiconductor laser water cooling plant include electromagnetic valve, water filter, resin filter, flow thermometer,
Gas delivery system, wherein being equipped with conductivity meter 17 on water tank 1, the input of water pump 2 is connected with water tank, its outfan connection
Threeway connects respectively the first electromagnetic valve 3 and water filter 5, folds filter element equipped with high accuracy PP in water filter 5, the first electromagnetic valve
3 are connected with resin filter 4, and Jing resin filters 4 are linked back water tank 1, and the outfan of water filter 5 is that connecting laser is reserved to be connect
Mouthful and as the coolant outlet 6 of water cooling plant, the cooling water of flowing through laser is via the entrance 7 of water cooling plant as cooling water
The starting point of water tank 1 is returned, the entrance 7 of water cooling plant is connected in threeway and connects the second electromagnetic valve 10 and flow thermometer respectively
8, water tank is returned to by the 3rd electromagnetic valve 9, check valve 11 is connected with the second electromagnetic valve 10, is for the interface of blowback air backwater.
Described gas delivery system is by electromagnetic valve, super oil mist separator, pressure transducer, check valve and gas point
Road device composition, gas delivery system entrance 16 is communicated by super oil mist separator 15 with gas shunt device 12, gas shunt device 12
Communicated with the 4th electromagnetic valve 14 and pressure transducer 1 respectively by pipeline, gas shunt device 12 is electric by check valve 11, second
The entrance 7, laser instrument of magnet valve 10, water cooling plant, the coolant outlet 6 of water cooling plant, water filter 5, water pump 2 and the phase of water tank 1
It is logical.
Working method.
Can first have before device work in the detection water tank 1 of conductivity meter 17 and cool down electrical conductivity of water, such as electrical conductivity exceedes default
It is worth, then the first electromagnetic valve 3（It is normally closed）Open, the 3rd electromagnetic valve 9（It is normally opened）Close, cooling water is by the first electromagnetic valve 3 via tree
Grease filter 4 returns to water tank 1 and starts the cycle over, until the cooling electrical conductivity of water in water tank 1 is down to after preset value, then the first electromagnetism
Valve 3（It is normally closed）Close, the 3rd electromagnetic valve 9（It is normally opened）Open, cooling water Jing water pumps 2 flow through water filter 5, water cooling plant cooling water
The outlet 6, entrance 7 of water cooling plant, flow thermometer 8, the 3rd electromagnetic valve 9 return to water tank, start normal cooling circulation.
When water cooling plant needs to clear up the cooling water remained in laser instrument, the 4th electromagnetic valve 14（It is normally closed）Close, pressure
Sensor 13 starts detected gas pressure, when pressure reaches reservation value, the second electromagnetic valve 10（It is normally closed）Open, the 3rd electromagnetic valve
9（It is normally opened）Close, gas via the super oil mist separators 15 of the Jing of gas delivery system entrance 16, gas shunt device 12, check valve 11,
The entrance 7, laser instrument of the second electromagnetic valve 10, water cooling plant, the coolant outlet 6 of water cooling plant, water filter 5, water pump 2 will be cold
But water blows back water tank 1.
Claims (1)
1. a kind of high-purity semiconductor laser water cooling plant, includes conductivity meter, electromagnetic valve, water filter, resin filter
Device, flow thermometer, gas delivery system, it is characterised in that：
Conductivity meter（17）It is arranged on water tank（1）On, water tank（1）With water pump（2）Input be connected, water pump（2）Output
End connects respectively the first electromagnetic valve by threeway（3）With water filter（5）, water filter（5）In fold filter equipped with high accuracy PP
Core, the first electromagnetic valve（3）With resin filter（4）It is connected, and Jing resin filters（4）Connection recovery tank（1）, as water-cooled
The coolant outlet of system（6）Water filter（5）Outfan for connecting laser spare interface, the cooling of flowing through laser
Water via water-cooling system entrance（7）The starting point of water tank, the entrance of water-cooling system are returned as cooling water（7）By three reduction of fractions to a common denominators
Do not connect the second electromagnetic valve（10）With flow thermometer（8）, by the 3rd electromagnetic valve（9）Return to water tank, check valve（11）With
Two electromagnetic valves（10）It is connected, as the interface of blowback air backwater；
The gas delivery system is made up of electromagnetic valve, super oil mist separator, pressure transducer, check valve and gas shunt,
Gas delivery system entrance（16）By super oil mist separator（15）With gas shunt device（12）Communicate, gas shunt device（12）
By pipeline respectively with the 4th electromagnetic valve（14）And pressure transducer（13）Communicate, gas shunt device（12）By check valve
（11）, the second electromagnetic valve（10）, water cooling plant entrance（7）, laser instrument, the coolant outlet of water cooling plant（6）, water filter
（5）, water pump（2）And water tank（1）Communicate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310014105.8A CN103928840B (en) | 2013-01-15 | 2013-01-15 | High purity water cooling device of semiconductor laser unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310014105.8A CN103928840B (en) | 2013-01-15 | 2013-01-15 | High purity water cooling device of semiconductor laser unit |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103928840A CN103928840A (en) | 2014-07-16 |
| CN103928840B true CN103928840B (en) | 2017-05-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310014105.8A Expired - Fee Related CN103928840B (en) | 2013-01-15 | 2013-01-15 | High purity water cooling device of semiconductor laser unit |
Country Status (1)
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| CN (1) | CN103928840B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107754433B (en) * | 2017-11-23 | 2023-09-01 | 昌微系统科技(上海)有限公司 | Filtering device for micro device |
| EP4112218A1 (en) | 2021-06-30 | 2023-01-04 | FRONIUS INTERNATIONAL GmbH | Welding component cooling system with a device for deionising the cooling liquid, and welding component comprising such a welding component cooling system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3721717B2 (en) * | 1997-06-03 | 2005-11-30 | 株式会社明電舎 | Semiconductor element cooling structure |
| JP2004122038A (en) * | 2002-10-04 | 2004-04-22 | Orion Mach Co Ltd | Water cooling apparatus having water quality control unit |
| US6998567B2 (en) * | 2003-01-31 | 2006-02-14 | Trimedyne, Inc. | Generation and application of efficient solid-state laser pulse trains |
| CN2922220Y (en) * | 2006-04-29 | 2007-07-11 | 北京工业大学 | Low conductivity rate circulate water cooling device |
| CN100511883C (en) * | 2006-09-29 | 2009-07-08 | 武汉楚天激光（集团）股份有限公司 | High-precision water cooling system and control method thereof |
| CN201240887Y (en) * | 2008-05-29 | 2009-05-20 | 国网武汉高压研究院 | Water treatment apparatus for power cable test terminal |
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2013
- 2013-01-15 CN CN201310014105.8A patent/CN103928840B/en not_active Expired - Fee Related
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| Publication number | Publication date |
|---|---|
| CN103928840A (en) | 2014-07-16 |
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| TR01 | Transfer of patent right |
Effective date of registration: 20181213 Address after: 110136 Shenbei Road 29-3, Shenbei New District, Shenyang City, Liaoning Province Patentee after: SHENYANG DALU LASER ENGINEERING CO.,LTD. Address before: 110136 No. 29 Shenbei Road, Deyi Economic Development Zone, Shenyang New District, Shenyang City, Liaoning Province Patentee before: SHENYANG DALU LASER FLEXIBLE MANUFACTURE TECHNOLOGY Co.,Ltd. |
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| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20170517 Termination date: 20220115 |