CN108328588A - A kind of helium online recycling equipment for purifying - Google Patents
A kind of helium online recycling equipment for purifying Download PDFInfo
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- CN108328588A CN108328588A CN201810355398.9A CN201810355398A CN108328588A CN 108328588 A CN108328588 A CN 108328588A CN 201810355398 A CN201810355398 A CN 201810355398A CN 108328588 A CN108328588 A CN 108328588A
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- helium
- equipment
- recycling
- membrane separator
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- 239000001307 helium Substances 0.000 title claims abstract description 128
- 229910052734 helium Inorganic materials 0.000 title claims abstract description 128
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 title claims abstract description 127
- 238000004064 recycling Methods 0.000 title claims abstract description 55
- 239000007789 gas Substances 0.000 claims abstract description 72
- 239000012528 membrane Substances 0.000 claims abstract description 54
- 239000000428 dust Substances 0.000 claims description 6
- 239000012510 hollow fiber Substances 0.000 claims description 6
- 238000001914 filtration Methods 0.000 claims description 5
- 239000000112 cooling gas Substances 0.000 claims description 4
- 230000008595 infiltration Effects 0.000 claims description 3
- 238000001764 infiltration Methods 0.000 claims description 3
- 238000000746 purification Methods 0.000 abstract description 13
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract description 7
- 239000000203 mixture Substances 0.000 abstract description 6
- 239000012535 impurity Substances 0.000 abstract description 4
- 230000009471 action Effects 0.000 abstract description 3
- 230000007613 environmental effect Effects 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 14
- 230000008901 benefit Effects 0.000 description 10
- 241000196324 Embryophyta Species 0.000 description 7
- 238000012544 monitoring process Methods 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 230000004913 activation Effects 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000011084 recovery Methods 0.000 description 3
- 238000007670 refining Methods 0.000 description 3
- 230000001105 regulatory effect Effects 0.000 description 3
- 238000005204 segregation Methods 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000001816 cooling Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000007710 freezing Methods 0.000 description 2
- 230000008014 freezing Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- 239000003507 refrigerant Substances 0.000 description 2
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007373 indentation Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 230000009965 odorless effect Effects 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 235000009566 rice Nutrition 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000003643 water by type Substances 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
- C01B23/0042—Physical processing only by making use of membranes
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B23/00—Noble gases; Compounds thereof
- C01B23/001—Purification or separation processes of noble gases
- C01B23/0036—Physical processing only
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Analytical Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Abstract
The invention discloses a kind of helium online recycling equipment for purifying, are related to technical field of energy saving and environmental protection.Including retracting device and purifying plant；Retracting device includes recycling gas tank and vacuum pump；Purifying plant includes heat exchanger, filter, level-one membrane separator, two level membrane separator and concentrations of helium detector；The present invention is by recycling and being pressurized by helium under the action of vacuum pump or containing helium gas mixture, after heat exchanger, filter dedusting water removal, it cleans using membrane separator and purification, and detect concentrations of helium by concentrations of helium detector, mass flowmenter MFC is supplied by the paths A and reused with helium equipment after reaching established standards, the helium of established standards is not achieved through being purified again in B path return recycling gas tank, to ensure that equipment purification after helium concentration and impurity content it is up to standard, avoid with helium equipment use underproof helium.
Description
Technical field
The invention belongs to technical field of energy saving and environmental protection, more particularly to a kind of helium online recycling equipment for purifying.
Background technology
Helium is a kind of inert gas of colorless and odorless, is widely used in fiber manufacturing, semiconductor production, made of metal
It many industrial circles such as makes, weld and hunts leak.Although helium purposes is wide, usage amount is big, source is limited, is a kind of scarcity
Strategic resource.Helium content is about 5ppm in air, does not have extraction value substantially, is mainly derived from natural gas extraction at present
Associated gas recycles.Therefore for this scarce resource that should not be obtained of helium, the great meaning of recycling is carried out.The present invention can
Recycling is carried out for the different classes of tail gas containing helium with used in helium equipment.
Invention content
The purpose of the present invention is to provide a kind of helium online recycling equipment for purifying, by under the action of vacuum pump by helium
Or recycled and be pressurized containing helium gas mixture, after heat exchanger, filter dedusting water removal, removed using membrane separator and purification
It is miscellaneous, and concentrations of helium is detected by concentrations of helium detector, reach after established standards by the paths A supply mass flowmenter MFC
It is reused with helium equipment, the helium of established standards is not achieved through being purified again in B path return recycling gas tank, thus
It ensure that the concentration of helium and impurity content are up to standard after equipment purifies, and avoid the problem that using unqualified helium with helium equipment.
In order to solve the above technical problems, the present invention is achieved by the following technical solutions：
The present invention is a kind of helium online recycling equipment for purifying, including retracting device and purifying plant；The retracting device
Including recycling gas tank and vacuum pump；The entrance of the recycling gas tank is fixedly connected with the outlet of helium equipment；It is described to use helium equipment
Entrance by gas piping with mend helium device be fixedly connected；It is described to be fixed with the gas piping week side of the inlet of helium equipment
Mass flowmenter MFC is installed；The outlet of the recycling gas tank is fixedly connected with vacuum pump；The vacuum pump and purifying plant
The entrance of heat exchanger is fixedly connected；
The purifying plant includes heat exchanger, filter, level-one membrane separator, two level membrane separator and concentrations of helium detection
Instrument；The outlet of the heat exchanger is fixedly connected with the entrance of filter；The outlet of the filter enters with level-one membrane separator
Mouth is fixedly connected；The level-one membrane separator outlet respectively with the entrance of two level membrane separator, recycle gas tank entrance and use
The entrance of helium equipment is fixedly connected；The heat exchanger can be by low-temperature receivers such as cold air, refrigerant, cool circulation waters, by vacuum pump
When gas cooling after supercharged is to specific temperature, and remove liquid water；
The infiltration air pipe week side of the level-one membrane separator is installed with a concentrations of helium detector；Described two
Grade membrane separator is fixedly connected by permeating gas piping with the entrance for recycling gas tank；Gas in the two level membrane separator returns
Flowing into the effect recycled in gas tank is, it is possible to reduce needle-valve can be used in the loss of helium, impermeable gas emptying, impermeable gas pipeline
Or back pressure pressure regulating valve.
Further, dust removal filter and cooling gas check valve are installed with inside the recycling gas tank；The gas list
Effect to valve is to prevent gas backstreaming；Due to being had differences with helium equipment, the recycling gas tank is to concentrations of helium in 10-90%
It is recycled in range；I.e. recycling equipment for purifying of the invention can mix the helium that contains of the concentrations of helium within the scope of 10-90%
Gas carries out recycling purification processes.
Further, the filtering accuracy of the filter is 0.01 micron；The filtering accuracy of the filter requires to reach
0.01 micron of effect is can to remove ultrafine dust and a small amount of moisture by failing to completely remove in heat exchanger.
Further, the level-one membrane separator and two level membrane separator use asymmetric hollow fiber membrane；Using non-right
It is that the asymmetric hollow fiber membrane is to containing the segregation ratio in helium mixture, especially air to claim the effect of hollow-fibre membrane
Bigger gas, the refining effect for carrying out helium are better.
Further, the vacuum pump uses oilless vacuum pump；The oilless vacuum pump, which has, prevents oil pollution entire
The advantages of system；The vacuum pump, which to recycle in gas tank, generates negative pressure, will be used with helium equipment by negative pressure nature water conservancy diversion
Helium recovery.
Further, described to be sealing with helium equipment or open use helium equipment, i.e., recycling of the invention purification
Equipment to sealing or open can carry out real-time helium recovery purification processes with helium equipment.
Further, the concentrations of helium detector for detecting concentrations of helium in real time；In the concentrations of helium detector
Purification concentrations of helium threshold value up to standard can be set, such as when given threshold is 99.0%, when concentrations of helium detector monitors
Concentrations of helium>When 99.0%, before helium returns to mass flowmenter MFC according to the paths A, supply is recycled with helium equipment；
Otherwise concentrations of helium<99.0%, it returns in recycling gas tank according to B path and is purified again.
Further, the heat exchanger can also with freezing type drier come instead of using.
Further, it is installed with microprocessor on the vacuum pump；The mass flowmenter MFC and A/D converter
Connection；The A/D converter is connect with microprocessor；The mass flowmenter MFC exports electric signal to A/D converter；It is described
A/D converter is to microprocessor output data information；The microprocessor is according to the data information of reception and the firing level of setting
Value carries out size judgement, and opens or closes order to the output of the switch module of vacuum pump；When the data information of the reception is big
In the activation threshold value of setting, the microprocessor exports to switch module and opens order；It is on the contrary then export shutdown command；With reality
The advantages of existing intelligent operation.
Further, level-one oil-free vacuum can be installed between the level-one membrane separator and two level membrane separator
Pump, for make up vacuum pump supercharging it is limited and the problem of lead to insufficient pressure, so that it is guaranteed that two level membrane separator can maintain one
A higher separative efficiency.
Further, it can be equipped on the gas piping between each component in recycling equipment for purifying of the invention multiple
The components such as check valve, pressure sensor, flowmeter, temperature sensor, for monitoring and recording each section parameter values in real time,
The control switch of the check valve is connect with microprocessor；The pressure sensor, flowmeter, temperature sensor are turned by A/D
Parallel operation is to microprocessor output data information；The data information that the microprocessor receives is real by GPS module and system terminal
Existing remote data transmission has real time monitoring, facilitates management, and when there is abnormal data, can find, locate in time in time
The advantages of reason.
The invention has the advantages that：
1, the helium when the detection of concentrations of helium detector may be implemented by the effect of retracting device and purifying plant in the present invention
Gas concentration supplies mass flowmenter MFC by the paths A after reaching established standards and is reused with helium equipment, setting is not achieved
The helium of standard through B path return recycling gas tank in purified again, to ensure that equipment purification after helium concentration and
Impurity content is up to standard, has the advantages that avoid using unqualified helium with helium equipment.
2, the present invention enters to recycle the effect in gas tank by the gas backflow in two level membrane separator, it is possible to reduce helium
Needle-valve or back pressure pressure regulating valve can be used in loss, impermeable gas emptying, impermeable gas pipeline.
3, the present invention uses asymmetric hollow fiber membrane by level-one membrane separator and two level membrane separator；With to containing helium
The bigger gas of segregation ratio in mixed gas, especially air, carries out the better advantage of the refining effect of helium.
It 4, can be under the action of the present invention is by that can set purification concentrations of helium threshold value up to standard in concentrations of helium detector
Standard according to demand purifies to the helium of prescribed concentration, has the advantages that production chains and Multiple strategies.
Certainly, it implements any of the products of the present invention and does not necessarily require achieving all the advantages described above at the same time.
Description of the drawings
In order to illustrate the technical solution of the embodiments of the present invention more clearly, will be described below to embodiment required
Attached drawing is briefly described, it should be apparent that, drawings in the following description are only some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is a kind of structural schematic diagram of helium online recycling equipment for purifying of the present invention；
In attached drawing, parts list represented by the reference numerals are as follows：
1- retracting devices, 2- purifying plants, 3- helium equipment, 4- mass flowmenters MFC, 5- mend helium device, 101- recycling
Gas tank, 102- vacuum pumps, 201- heat exchangers, 202- filters, 203- level-one membrane separators, 204- two level membrane separators, 205-
Concentrations of helium detector.
Specific implementation mode
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation describes, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained all other without creative efforts
Embodiment shall fall within the protection scope of the present invention.
In the description of the present invention, it is to be understood that, term " trepanning ", "upper", "lower", " thickness ", "top", " in ",
Indicating positions or the position relationship such as " length ", "inner", " surrounding ", are merely for convenience of description of the present invention and simplification of the description, without
It is that the component of instruction or hint meaning or element must have a particular orientation, with specific azimuth configuration and operation, therefore not
It can be interpreted as limitation of the present invention.
Refering to Figure 1, the present invention is a kind of helium online recycling equipment for purifying, including retracting device 1 and purification fill
Set 2；Retracting device 1 includes recycling gas tank 101 and vacuum pump 102；The entrance for recycling gas tank 101 is consolidated with the outlet of helium equipment 3
Fixed connection；It is fixedly connected by gas piping with helium device 5 is mended with the entrance of helium equipment 3；With the gas of the inlet of helium equipment 3
Pipeline week, side was installed with mass flowmenter 4；The outlet of recycling gas tank 101 is fixedly connected with vacuum pump 102；Vacuum pump
102 are fixedly connected with the entrance of the heat exchanger 201 of purifying plant 2；
Purifying plant 2 includes heat exchanger 201, filter 202, level-one membrane separator 203, two level membrane separator 204 and helium
Gas concentration detector 205；The outlet of heat exchanger 201 is fixedly connected with the entrance of filter 202；The outlet of filter 202 and one
The entrance of grade membrane separator 203 is fixedly connected；Level-one membrane separator 203 outlet respectively with the entrance of two level membrane separator 204,
The entrance of recycling gas tank 101 is fixedly connected with the entrance of helium equipment 3；Heat exchanger 3 can by cold air, refrigerant, cold follow
The low-temperature receivers such as ring water when by 2 gas cooling after supercharged of vacuum pump to specific temperature, and remove liquid water；
The infiltration air pipe week side of level-one membrane separator 203 is installed with a concentrations of helium detector 205；Two level
Membrane separator 204 is fixedly connected by permeating gas piping with the entrance for recycling gas tank 101；Gas in two level membrane separator 6
The effect backflowed in recycling gas tank 101 is, it is possible to reduce the loss of helium, impermeable gas emptying, impermeable gas pipeline can be adopted
With needle-valve or back pressure pressure regulating valve.
Wherein, it recycles inside gas tank 101 and is installed with dust removal filter and cooling gas check valve；The effect of cooling gas check valve
It is to prevent gas backstreaming；Due to being had differences with helium equipment 3, recycling gas tank 101 carries out concentrations of helium within the scope of 10-90%
Recycling；Recycling equipment for purifying i.e. of the invention can to concentrations of helium being recycled containing helium gas mixture within the scope of 10-90%
Purification processes.
Wherein, the filtering accuracy of filter 202 is 0.01 micron；It is micro- that the filtering accuracy requirement of filter 202 reaches 0.01
The effect of rice is can to remove ultrafine dust and a small amount of moisture by failing to completely remove in heat exchanger 201.
Wherein, level-one membrane separator 203 and two level membrane separator 204 use asymmetric hollow fiber membrane；Using asymmetric
The effect of hollow-fibre membrane is that asymmetric hollow fiber membrane is bigger to containing the segregation ratio in helium mixture, especially air
Gas, the refining effect for carrying out helium are better.
Wherein, vacuum pump 102 uses oilless vacuum pump；Oilless vacuum pump have prevent the excellent of oil pollution whole system
Point；Vacuum pump 2 generates negative pressure so that recycling in gas tank 1,8 used helium of helium equipment will be used to return by negative pressure nature water conservancy diversion
It receives.
Wherein, with helium equipment 3 can be sealing or it is open use helium equipment, i.e. recycling equipment for purifying of the invention can be with
To sealing or open carry out real-time helium recovery purification processes with helium equipment.
Wherein, concentrations of helium detector 205 for detecting concentrations of helium in real time；It can be set in concentrations of helium detector 205
Surely concentrations of helium threshold value up to standard is purified, such as when given threshold is 99.0%, when concentrations of helium detector 205 monitors helium
Concentration>When 99.0%, before helium returns to mass flowmenter MFC4 according to the paths A, supply is recycled with helium equipment 3；It is no
Then concentrations of helium<99.0%, it returns in recycling gas tank 101 according to B path and is purified again.
Wherein, heat exchanger 3 can also with freezing type drier come instead of using.
Wherein, it is installed with microprocessor on vacuum pump 102；Mass flowmenter MFC4 is connect with A/D converter；A/D
Converter is connect with microprocessor；Mass flowmenter MFC4 exports electric signal to A/D converter；A/D converter is to microprocessor
Output data information；Microprocessor carries out size judgement according to the data information of reception and the activation threshold value of setting, and to vacuum
The switch module output of pump 102 opens or closes order；When the data information of reception is more than the activation threshold value of setting, microprocessor
It is exported to switch module and opens order；It is on the contrary then export shutdown command；Have the advantages that realize intelligent operation.
Wherein, it can be installed with level-one oilless vacuum pump between level-one membrane separator 5 and two level membrane separator 6, be used for
Make up vacuum pump 2 be pressurized it is limited and the problem of lead to insufficient pressure, so that it is guaranteed that two level membrane separator 6 can maintain it is one higher
Separative efficiency.
Wherein, it can be equipped on the gas piping between each component in recycling equipment for purifying of the invention multiple unidirectional
The components such as valve, pressure sensor, flowmeter, temperature sensor, for monitoring in real time and recording each section parameter values, unidirectionally
The control switch of valve is connect with microprocessor；Pressure sensor, flowmeter, temperature sensor are by A/D converter to microprocessor
Device output data information；The data information that microprocessor receives realizes remote data transmission, tool by GPS module and system terminal
Have real time monitoring, facilitate management, and when there is abnormal data, can find in time, timely processing the advantages of.
The operation principle of the present embodiment is：Mass flowmenter MFC is to the microprocessor feedback data information of vacuum pump, micro- place
Manage the start and stop that device controls vacuum pump by given threshold；Vacuum pump generates negative pressure in recycling gas tank, passes through negative-pressure guide effect
It will use in the used helium indentation recycling gas tank of helium equipment institute, and be pressurized by vacuum pump；Recycling helium after supercharged passes through
Heat exchanger, filter etc. remove the impurity such as dust, moisture, then detach and obtain in level-one membrane separator and two level membrane separator
The helium of required concentration, and monitor and show in real time by concentrations of helium detector；By the way that the paths A and B path is arranged, realize
With concentrations of helium detector data locking, reused with helium equipment by the supply of the paths A when concentrations of helium is met the requirements, it is no
Then by B path return as recycling gas tank purify again, so that it is guaranteed that purification after helium quality.
In the description of this specification, the description of reference term " one embodiment ", " example ", " specific example " etc. means
Particular features, structures, materials, or characteristics described in conjunction with this embodiment or example are contained at least one implementation of the present invention
In example or example.In the present specification, schematic expression of the above terms may not refer to the same embodiment or example.
Moreover, particular features, structures, materials, or characteristics described can be in any one or more of the embodiments or examples to close
Suitable mode combines.
Present invention disclosed above preferred embodiment is only intended to help to illustrate the present invention.There is no detailed for preferred embodiment
All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification,
It can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to preferably explain the present invention
Principle and practical application, to enable skilled artisan to be best understood by and utilize the present invention.The present invention is only
It is limited by claims and its full scope and equivalent.
Claims (5)
1. a kind of helium online recycling equipment for purifying, it is characterised in that：Including retracting device (1) and purifying plant (2)；
The retracting device (1) includes recycling gas tank (101) and vacuum pump (102)；The entrance and use of the recycling gas tank (101)
The outlet of helium equipment (3) is fixedly connected；The entrance with helium equipment (3) fixes company by gas piping with helium device (5) is mended
It connects；It is described to be installed with mass flowmenter MFC (4) with the gas piping week side of the inlet of helium equipment (3)；The recycling
The outlet of gas tank (101) is fixedly connected with vacuum pump (102)；The heat exchanger of the vacuum pump (102) and purifying plant (2)
(201) entrance is fixedly connected；
The purifying plant (2) includes heat exchanger (201), filter (202), level-one membrane separator (203), two level membrane separator
(204) and concentrations of helium detector (205)；The outlet of the heat exchanger (201) is fixedly connected with the entrance of filter (202)；
The outlet of the filter (202) is fixedly connected with the entrance of level-one membrane separator (203)；The level-one membrane separator (203)
Outlet consolidate respectively with the entrance of two level membrane separator (204), the entrance of recycling gas tank (101) and with the entrance of helium equipment (3)
Fixed connection；
The infiltration air pipe week side of the level-one membrane separator (203) is installed with a concentrations of helium detector (205)；
The two level membrane separator (204) is fixedly connected by permeating gas piping with the entrance for recycling gas tank (101).
2. a kind of helium online recycling equipment for purifying according to claim 1, which is characterized in that the recycling gas tank
(101) internal to be installed with dust removal filter and cooling gas check valve.
3. a kind of helium online recycling equipment for purifying according to claim 1, which is characterized in that the filter (202)
Filtering accuracy be 0.01 micron.
4. a kind of helium online recycling equipment for purifying according to claim 1, which is characterized in that the level-one membrane separator
(203) and two level membrane separator (204) uses asymmetric hollow fiber membrane.
5. a kind of helium online recycling equipment for purifying according to claim 1, which is characterized in that the vacuum pump (102)
Using oilless vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810355398.9A CN108328588A (en) | 2018-04-19 | 2018-04-19 | A kind of helium online recycling equipment for purifying |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810355398.9A CN108328588A (en) | 2018-04-19 | 2018-04-19 | A kind of helium online recycling equipment for purifying |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108328588A true CN108328588A (en) | 2018-07-27 |
Family
ID=62933832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810355398.9A Pending CN108328588A (en) | 2018-04-19 | 2018-04-19 | A kind of helium online recycling equipment for purifying |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111573643A (en) * | 2020-06-09 | 2020-08-25 | 安徽中科皖能科技有限公司 | Helium recovery and purification device and method |
| CN114115083A (en) * | 2022-01-26 | 2022-03-01 | 南通西屋智能科技有限公司 | Automatic control method and system for improving helium gas recovery quality |
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| CN111573643A (en) * | 2020-06-09 | 2020-08-25 | 安徽中科皖能科技有限公司 | Helium recovery and purification device and method |
| CN114115083A (en) * | 2022-01-26 | 2022-03-01 | 南通西屋智能科技有限公司 | Automatic control method and system for improving helium gas recovery quality |
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