CN207952170U - A kind of double-station USC cleaning machines - Google Patents

A kind of double-station USC cleaning machines Download PDF

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Publication number
CN207952170U
CN207952170U CN201721805046.6U CN201721805046U CN207952170U CN 207952170 U CN207952170 U CN 207952170U CN 201721805046 U CN201721805046 U CN 201721805046U CN 207952170 U CN207952170 U CN 207952170U
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China
Prior art keywords
double
platen
glass
cleaning head
station
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Application number
CN201721805046.6U
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Chinese (zh)
Inventor
孟月
卢雪艳
尹宗耀
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Tianda Beijing Qing Guang Photoelectric Polytron Technologies Inc
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Tianda Beijing Qing Guang Photoelectric Polytron Technologies Inc
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Abstract

The utility model is related to a kind of double-station USC cleaning machines, including cleaning head part, platen part, double-station lifting support part and interior assembling rack section, cleaning head part, platen part, double-station lifting support part are assemblied on interior assembling rack section;Platen portion is fixed on the lower section of the cleaning head in cleaning head part, and the top in double-station lifting support, cleaning head in cleaning head part can be moved in parallel along the surface direction of platen part to be cleaned to glass, pallet body in platen part is provided with elevating mechanism hole, and the elevating mechanism in double-station lifting support is vertically moved back and forth by elevating mechanism hole.The utility model can realize the lifting respectively of half plate crane part and lift simultaneously, it can complete the placement, positioning and shaping of two blocks of glass, it can detect whether glass has breakage by fragmentation detection sensor, the two blocks of glass whether placed have the part of overlapping, to ensure production efficiency and production safety.

Description

A kind of double-station USC cleaning machines
【Technical field】
The utility model belongs to microelectronics technology semiconductor and FPD industry, specifically discloses a kind of double-station USC cleaning machines.
【Background technology】
In liquid crystal display production process, in order to improve the yield of product, need to clean glass substrate, USC Supersonic wave cleaning machine is exactly the equipment specially cleaned to glass substrate.Glass size to be cleaned is to determine cleaning machine size The key of size, the size of platen can be designed according to the size of glass to be cleaned and arrange reshaping device, gear glass blocks and The position of various sensors, is confined to this, and a cleaning machine often can only all clean a kind of monolithic glass of size.With liquid crystal The development of display industry, glass to be cleaned are divided into two, and dry cleaning processes need while cleaning two blocks of glass, due to common USC cleaning machines can not accurately place glass and position glass shaping, common cleaning machine just can not be competent at such work, Double-station USC cleaning machines can solve this difficult point.
【Utility model content】
The utility model is related to a kind of double-station USC cleaning machines, and the glass of cleaning is divided into two, and once place two pieces of glass Glass is realized on platen and is carried out at the same time shaping positioning to two blocks of glass, need double-station while lifting, once need two pieces of cleaning Glass.
The technical solution adopted in the utility model is:The utility model is related to a kind of double-station USC cleaning machines, including cleaning Head point, platen part, double-station lifting support part and interior assembling rack section, cleaning head part, platen part, double-station Lifting support part is assemblied on interior assembling rack section;Platen portion is fixed on the cleaning head in cleaning head part Lower section, and the top in double-station lifting support, wherein the cleaning head in the cleaning head part can be along platen part Surface direction is moved in parallel to be cleaned to glass, and the pallet body in platen part is provided with elevating mechanism hole, double-station liter Elevating mechanism in descending branch frame is vertically moved back and forth by elevating mechanism hole.
In the present invention:The cleaning head part includes cleaning head, cleaning head bracket, section material frame, bend pipe, bend pipe Fixed frame, cleaning head motor and speed reducer, the cleaning head are connected to interior assembling by cleaning head bracket and section material frame On the guide rail of rack, the power of cleaning head walking is provided by motor, and power transmission is carried out by speed reducer and idler wheel rackwork, To drive cleaning head to be moved along guide rail direction;The bend pipe connects air source, and air pressure is provided for the cleaning function of cleaning head, curved Tube fixing device is used for fixed bending tube;Wherein cleaning head is located at the top of platen part, plays the cleaning head of connection and fixed function Holder is in the both sides of interior assembled part with section material frame.
In the present invention:The platen part is the part being in direct contact with glass, for carrying and adsorbing glass, There are adsorption tank, cloudy cutting and glass block slot in the pallet body of platen part, the adsorption tank is for providing absorption glass Suction;The cloudy cutting, reduces the contact area of glass and platen;The glass block slot, for placing glass Block, to be limited to glass;Wherein the pallet body is equipped with several through-holes, the number of openings and the duplex The quantity of various kinds of sensors on the lifting support part of position is identical.
In the present invention:Double-station lifting support part include two be symmetrical set it is mutually isostructural Half plate crane part, is equipped with cylinder below each half plate crane part, two cylinders can individually control with The individual rise and fall action for realizing half block crane part, since two cylinders can be controlled individually, it is possible to carry out The individual rise and fall in half block crane part can also carry out the synchronous of entire double-station lifting support part and rise under Drop acts;Fragmentation detection sensor, fibre optical sensor and electrostatic are installed to pass on the lifting frame body of the half plate crane part Sensor;Wherein whether glass is broken or overlapping, guarantee are safe for detecting for fragmentation detection sensor;Fibre optical sensor is for detecting The presence or absence of glass, to control lifting action;Electrostatic transducer is used to detect the size of static content, ensures that static content is in reasonable Range;Limited block and buffer are also added on the lifting frame body of the half plate crane part, is risen in lifting frame body Play the role of limit and buffering in the process, ensures that direct collision does not occur with platen part in it;It lifts frame body and is equipped with ion Stick, and under platen part, it is used for minimizing electrostatic amount;The position of wherein each sensor and platen part are appeared on the stage plate body Position of opening is corresponding, and for different process requirements, the position of trepanning and sensing station are adjustable in pallet body;Position It is equipped with reshaping device in the adjacent side of fragmentation detection sensor, the reshaping device is fixed on shaping cylinder, described The installation site of shaping cylinder position of opening equally corresponding in pallet body is corresponding.
In the present invention:The interior assembling rack section includes weld holder, and the both sides of the weld holder, which are equipped with, leads Rail, the weld holder are equipped with guiding axis and support shaft, and the guiding axis is fixed on weld holder, and branch is lifted in double-station Guiding role is played during the rise and fall of frame part;The support shaft is assemblied on weld holder, upper end and platen portion Split-phase connects, and is used to support platen part;The side of the weld holder is equipped with electrical cabinet, and the inside has the electrical of electric plates to set It is standby, it is used for the electrical control of whole cleaning machine.
In the present invention:Reshaping device in double-station lifting support part uses different diameters, big straight Diameter reshaping device is installed on the external side of crane, and minor diameter reshaping device is installed on side in crane body, can effectively save Space.
In the present invention:Glass block is equipped on the quadrangle of pallet body on the platen part, it is described Each angle of pallet body is equipped with 2 corresponding glass blocks, and the glass block is placed in the glass on platen part It in block slot, is connect with platen part, pallet body plane is highly higher than after installation, constraint glass can be positioned and fixed.
In the present invention:The fragmentation detection sensor is connected by fragmentation detection sensor installation axle and lifting frame body It connects, is respectively distributed to four corner locations of two halves plate crane part, four fragmentation inspections are installed in every piece of half plate crane part Sensor is surveyed, glass integrated degree can be detected with position.
Through the above technical solutions, the beneficial effects of the utility model are:The utility model simple structure and reasonable design, It can realize in double-station cleaning machine the lifting respectively of half plate crane part and lift simultaneously, putting for two blocks of glass can be completed It sets, position and shaping, can detect whether glass has breakage by fragmentation detection sensor, if two blocks of glass of placement have weight Folded part, to ensure production efficiency and production safety.
【Description of the drawings】
Attached drawing described herein is to be used to provide a further understanding of the present invention, and constitutes one of the application Point, but do not constitute improper limits to the present invention, in the accompanying drawings:
Fig. 1 is the utility model structure diagram;
Fig. 2 is the schematic diagram of cleaning head part in the utility model;
Fig. 3 is the schematic diagram of interior assembling rack section in the utility model;
Fig. 4 Fig. 5 is the schematic diagram of double-station lifting support part in the utility model;
Fig. 5 is the schematic diagram of half plate crane part of double-station lifting support part in the utility model;
Fig. 6 is the schematic diagram of platen part in the utility model;
Fig. 7 is the schematic top plan view of the utility model.
In figure:Wherein, 1, cleaning head part;2, platen part;3, double-station lifting support part;4, interior assembling framework portion Point;5, reshaping device;5-1, major diameter reshaping device;5-2, minor diameter reshaping device;6, glass block;7, fragmentation detection sensing Device;8, cylinder;9, cleaning head motor;10, guide rail;11, shaping cylinder;12, speed reducer;13, elevating mechanism;14, fragmentation is examined Survey sensor installation axle;15, fibre optical sensor;16, electrostatic detection sensor;17, limited block;18, buffer;19, ion Stick;20, adsorption tank;21, cloudy cutting;22, glass block slot;23, elevating mechanism hole;24, weld holder;25, guiding axis;26, it props up Support axis;27, electrical cabinet;28, idler wheel rackwork;29, cleaning head;30, head bracket is cleaned;31, section material frame;32, bend pipe;33、 Bend pipe fixed frame.
【Specific implementation mode】
Be described in detail the utility model below in conjunction with attached drawing and specific embodiment, illustrative examples therein with And explanation is only used for explaining the utility model, but be not intended to limit the scope of the present invention.
As shown in figs. 1-7, a kind of double-station USC cleaning machines, including cleaning head part 1, platen part 2, double-station lifting Holder part 3 and interior assembling rack section 4, the cleaning head part 1, platen part 2, double-station lifting support part 3 are equal It is assemblied on interior assembling rack section 4;The lower section of the cleaning head 29 in cleaning head part 1 is fixed in 2 position of platen part, and locates Top in double-station lifting support part 3, wherein the cleaning head 29 in the cleaning head part 1 can be along platen part 2 Surface direction is moved in parallel to be cleaned to glass, and the pallet body in platen part 2 is provided with elevating mechanism hole 23, double-station Elevating mechanism 13 in lifting support part 3 is vertically moved back and forth by elevating mechanism hole 23.
As shown in Fig. 2, the cleaning head part 1 include cleaning head 29, cleaning head bracket 30, section material frame 31, bend pipe 32, Bend pipe fixed frame 33, cleaning head motor 9 and speed reducer 12, the cleaning head 29 is by cleaning head bracket 30 and section material frame 31 are connected on the guide rail 10 of interior assembling rack section 4, and the power that cleaning head 29 is walked is provided by cleaning head motor 9, power Transmission is carried out by speed reducer 12 and idler wheel rackwork 28, roller portion and speed reducer 12 in the idler wheel rackwork 28 It is connected, section of rack is installed on weld holder 24, and idler wheel rackwork 28 is for driving cleaning head 29 to move, to drive cleaning First 29 move along 10 direction of guide rail;The bend pipe 32 connects air source, provides air pressure for the cleaning function of cleaning head 29, bend pipe is solid Determine frame 33 and is used for fixed bending tube 32;Wherein cleaning head 29 is located at the top of platen part 2, plays connection and the cleaning of fixed function Head bracket 30 is in the both sides of interior assembling rack section 4 with section material frame 31.
As shown in fig. 6, the platen part 2 is the part being in direct contact with glass, for carrying and adsorbing glass, platen There are adsorption tank 20, cloudy cutting 21 and glass block slot 22 in the pallet body of part 2, the adsorption tank 20 is for providing absorption The suction of glass;The cloudy cutting 21, reduces the contact area of glass and pallet body;The glass block slot 22, For placing glass block 6, to be limited to glass;Wherein the pallet body is equipped with several through-holes, the through-hole Quantity is identical as the quantity of various kinds of sensors on double-station lifting support part 3.Platen on the platen part 2 Glass block 6 is equipped on the quadrangle of main body, each angle of the pallet body is equipped with 2 corresponding glass blocks 6, described Glass block 6 be placed in the glass block slot 22 on platen part 2, connect with platen part 2, after installation highly be higher than platform Plate body plane can position and fix constraint glass.
As illustrated in figures 4-5, double-station lifting support part 3 include two be symmetrical set mutually isostructural half Plate crane part, is equipped with cylinder 8 below each half plate crane part, two cylinders 8 can individually control with The individual rise and fall action for realizing half block crane part, since two cylinders 8 can be controlled individually, it is possible to carry out The individual rise and fall in half block crane part, can also carry out entire double-station lifting support part 2 it is synchronous rise with Lowering action;Be equipped on the lifting frame body of the half plate crane part fragmentation detection sensor 7, fibre optical sensor 15 with it is quiet Electric transducer 16;Wherein whether glass is broken or overlapping, guarantee are safe for detecting for fragmentation detection sensor 7;Fibre optical sensor 15 for detecting the presence or absence of glass, to control lifting action;Electrostatic transducer 16 is used to detect the size of static content, ensures quiet Electricity is in zone of reasonableness;Limited block 17 and buffer 18 are also added on the lifting frame body of the half plate crane part, Play the role of limit and buffering during lifting frame body and rising, ensures that direct collision does not occur with platen part 2 in it;It rises It drops frame body and is equipped with ion bar 19, and under platen part 2, be used for minimizing electrostatic amount;The position of wherein each sensor with Platen part 2 appear on the stage plate body position of opening it is corresponding, for different process requirements, in pallet body the position of trepanning with Sensing station is adjustable;The side adjacent with fragmentation detection sensor 7 is equipped with reshaping device 5, the shaping Mechanism 5 is fixed on shaping cylinder 11, the installation site trepanning equally corresponding in pallet body of the shaping cylinder 11 Position corresponds to.The fragmentation detection sensor 7 is connect by fragmentation detection sensor installation axle 14 with lifting frame body, is distributed respectively Four fragmentation detection sensors 7 are installed in four corner locations in two halves plate crane part, every piece of half plate crane part, can To be detected with position to glass integrated degree.As shown in fig. 7, the reshaping device 5 in double-station lifting support part 2 Using different diameters, major diameter reshaping device 5-1 is installed on the external side of crane, and minor diameter reshaping device 5-2 is installed on liter It drops on the inside of frame body, can effectively save space.
As shown in figure 3, the interior assembling rack section 4 includes weld holder 24, the both sides of the weld holder 24, which are equipped with, leads Rail 10, the weld holder 24 are equipped with guiding axis 25 and support shaft 26, and the guiding axis 25 is fixed on weld holder 24, Guiding role is played during 3 rise and fall of double-station lifting support part;The support shaft 26 is assemblied in weld holder On 24, upper end is connected with platen part 2, is used to support platen part 2;The side of the weld holder 24 is equipped with electrical cabinet 27, institute There are the electrical equipments such as electric plates in the inside stated, is used for the electrical control of whole cleaning machine.
The above description is only a preferred embodiment of the present invention, therefore all according to described in the utility model patent application range The equivalent change or modification done of structure, feature and principle, be included in the scope of the utility model patent application.

Claims (8)

1. a kind of double-station USC cleaning machines, it is characterised in that:Including cleaning head part, platen part, double-station lifting support portion Point and interior assembling rack section, cleaning head part, platen part, double-station lifting support part are assemblied in interior assembling framework portion On point;Platen portion is fixed on the lower section of the cleaning head in cleaning head part, and the top in double-station lifting support, Cleaning head in the wherein described cleaning head part can be moved in parallel along the surface direction of platen part to be cleaned to glass, Pallet body in platen part is provided with elevating mechanism hole, and the elevating mechanism in double-station lifting support passes through elevating mechanism hole edge Vertical direction moves back and forth.
2. a kind of double-station USC cleaning machines according to claim 1, it is characterised in that:The cleaning head part includes Cleaning head, cleaning head bracket, section material frame, bend pipe, bend pipe fixed frame, cleaning head motor and speed reducer, the cleaning head are logical Over cleaning head bracket and section material frame are connected on the guide rail of interior assembling rack, and the power of cleaning head walking is provided by motor, is moved Power transmission is carried out by speed reducer and idler wheel rackwork, to drive cleaning head to be moved along guide rail direction;The bend pipe connects Air source is connect, provides air pressure for the cleaning function of cleaning head, bend pipe fixed frame is used for fixed bending tube;Wherein cleaning head is located at platen portion Point top, play the cleaning head bracket of connection and fixed function and section material frame be in the both sides of interior assembled part.
3. a kind of double-station USC cleaning machines according to claim 1, it is characterised in that:The platen part is and glass There are adsorption tank, cloudy cutting and glass gear in the part being in direct contact for carrying and adsorbing glass in the pallet body of platen part Block slot, the adsorption tank are used to provide the suction of absorption glass;The cloudy cutting, reduces the contact surface of glass and platen Product;The glass block slot, for placing glass block, to be limited to glass;Wherein the pallet body is equipped with Several through-holes, the number of openings are identical as the quantity of various kinds of sensors on double-station lifting support part.
4. a kind of double-station USC cleaning machines according to claim 1, it is characterised in that:Double-station lifting support portion It is divided to the mutually isostructural half plate crane part being symmetrical set including two, the lower section of each half plate crane part It is equipped with cylinder, two cylinders can be controlled individually to realize the individual rise and fall action of half block crane part, by It can individually be controlled in two cylinders, it is possible to carry out the individual rise and fall in half block crane part, can also carry out whole The synchronization rise and fall of a double-station lifting support part act;It is equipped on the lifting frame body of the half plate crane part Fragmentation detection sensor, fibre optical sensor and electrostatic transducer;Wherein fragmentation detection sensor is for detecting whether glass is crushed Or overlapping, ensure safety;Fibre optical sensor is for detecting the presence or absence of glass, to control lifting action;Electrostatic transducer is used for The size of static content is detected, ensures that static content is in zone of reasonableness;It is also installed additional on the lifting frame body of the half plate crane part Have limited block and buffer, lift frame body rise during play the role of limit and buffering, ensure its not with platen Direct collision occurs for part;It lifts frame body and is equipped with ion bar, and under platen part, be used for minimizing electrostatic amount;Wherein The position of each sensor and platen the part position of opening of plate body of appearing on the stage are corresponding, for different process requirements, platen master The position of trepanning and sensing station are adjustable on body;The side adjacent positioned at fragmentation detection sensor is equipped with reshaping device, The reshaping device is fixed on shaping cylinder, and the installation site of the shaping cylinder is equally corresponding in pallet body Position of opening corresponds to.
5. a kind of double-station USC cleaning machines according to claim 1, it is characterised in that:The interior assembling rack section packet Weld holder is included, the both sides of the weld holder are equipped with guide rail, and the weld holder is equipped with guiding axis and support shaft, and described leads It is fixed on weld holder to axis, guiding role is played during the part rise and fall of double-station lifting support;Described Support shaft is assemblied on weld holder, and upper end is connected with platen part, is used to support platen part;The side of the weld holder is equipped with Electrical cabinet, the weld holder are internally provided with electric plates, are used for the electrical control of whole cleaning machine.
6. a kind of double-station USC cleaning machines according to claim 4, it is characterised in that:Double-station lifting support portion Reshaping device in point uses different diameters, major diameter reshaping device to be installed on the external side of crane, minor diameter reshaping device It is installed on side in crane body, can effectively save space.
7. a kind of double-station USC cleaning machines according to claim 3, it is characterised in that:Platform on the platen part Glass block is equipped on the quadrangle of plate body, each angle of the pallet body is equipped with 2 corresponding glass blocks, described Glass block be placed in the glass block slot on platen part, connect with platen part, after installation highly be higher than platen master Body plane can position and fix constraint glass.
8. a kind of double-station USC cleaning machines according to claim 4, it is characterised in that:The fragmentation detection sensor is logical It crosses fragmentation detection sensor installation axle to connect with lifting frame body, is respectively distributed to four corners position of two halves plate crane part It sets, four fragmentation detection sensors are installed in every piece of half plate crane part, can be detected with position to glass integrated degree.
CN201721805046.6U 2017-12-21 2017-12-21 A kind of double-station USC cleaning machines Active CN207952170U (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109761003A (en) * 2019-03-12 2019-05-17 无锡奥威赢科技有限公司 Device for transporting objects, material cleaning equipment and method
CN109940014A (en) * 2017-12-21 2019-06-28 北京清大天达光电科技股份有限公司 A kind of double-station USC cleaning machine
CN111330929A (en) * 2018-12-18 2020-06-26 北京清大天达光电科技股份有限公司 Platen type high-pressure ultrasonic dry cleaning machine with low contact area
CN111703836A (en) * 2020-06-16 2020-09-25 上海明略人工智能(集团)有限公司 Cleaning equipment

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109940014A (en) * 2017-12-21 2019-06-28 北京清大天达光电科技股份有限公司 A kind of double-station USC cleaning machine
CN109940014B (en) * 2017-12-21 2024-01-12 北京清大天达光电科技股份有限公司 Duplex position USC cleaning machine
CN111330929A (en) * 2018-12-18 2020-06-26 北京清大天达光电科技股份有限公司 Platen type high-pressure ultrasonic dry cleaning machine with low contact area
CN109761003A (en) * 2019-03-12 2019-05-17 无锡奥威赢科技有限公司 Device for transporting objects, material cleaning equipment and method
CN111703836A (en) * 2020-06-16 2020-09-25 上海明略人工智能(集团)有限公司 Cleaning equipment
CN111703836B (en) * 2020-06-16 2022-06-14 上海明略人工智能(集团)有限公司 Cleaning equipment

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