CN207929651U

CN207929651U - A kind of protective device of anti-mechanical arm pressure basket

Info

Publication number: CN207929651U
Application number: CN201721223222.5U
Authority: CN
Inventors: 左国军; 夏傲雪
Original assignee: Changzhou Jiejiachuang Precision Machinery Co Ltd
Current assignee: Changzhou Jiejiachuang Precision Machinery Co Ltd
Priority date: 2017-09-22
Filing date: 2017-09-22
Publication date: 2018-10-02
Anticipated expiration: 2027-09-22

Abstract

The utility model discloses the protective device that a kind of anti-mechanical arm presses basket, the mechanical arm is set to above Wafer Cleaning equipment, and the protective device includes：Multiple sensors on mechanical arm for detecting silicon wafer basket；The PLC controller being electrically connected with the sensor；And the warning device being connect with the PLC controller.The utility model makes mechanical arm be stopped automatically before silicon wafer basket laminates, and silicon wafer basket is effectively prevent to laminate touching, avoids the damage of silicon wafer basket and workpiece.

Description

A kind of protective device of anti-mechanical arm pressure basket

Technical field

The utility model is related to photovoltaic equipment, more particularly to a kind of protective device of anti-mechanical arm pressure basket.

Background technology

In the cleaning for workpiece such as silico briquette, silicon material, silicon chips of cleaning equipment and wet processing apparatus of solar silicon wafers Cheng Zhong is promoted by mechanical arm, is carried cleaning silicon chip basket to realize；Currently, in slot type automatic cleaning equipment, in slot Whether having basket is judged by the motion conditions of PLC controller memory mechanical arm, in mechanical hand basket, in case of de- Hook etc. is abnormal, and silicon wafer basket is made to fail to be suggested, and PLC controller is still to remember silicon wafer basket in slot to be suggested, and is continued to execute normal In the case of program, next basket is put into slot, generate silicon wafer basket laminate, cause the damage of workpiece and silicon wafer basket.

The scheme that the existing patent of Publication No. CN202736897U uses is after pressing basket to occur, and manipulator is also continuing It moves down, silicon wafer basket is made to laminate, jack up the header portion of mechanical arm, header portion rotation is made to touch on mechanical arm stand column The microswitch in portion, manipulator is just out of service, although playing the role of protecting equipment, workpiece and silicon wafer basket may be Through damage.

Therefore, how to prevent silicon wafer basket in advance to laminate to improve the reliability of equipment, be industry technology urgently to be resolved hurrily Problem.

Utility model content

The utility model proposes that a kind of anti-mechanical arm presses basket to solve above-mentioned the technical problems existing in the prior art Protective device.

The technical solution adopted in the utility model is：

A kind of protective device of anti-mechanical arm pressure basket, the mechanical arm are set to above Wafer Cleaning equipment, the guarantor Protection unit includes：Multiple sensors on mechanical arm for detecting silicon wafer basket；The PLC controls being electrically connected with the sensor Device；And the warning device being connect with the PLC controller.

The sensor is mounted on by supporting rod on the side plate of the mechanical arm, and higher than the liquid in Wafer Cleaning equipment Face.

The supporting rod is fixed vertically close to mechanical arm side plate inner wall.

The mechanical arm side plate inner wall is separately installed with two sensors.

Any one sensor detect without silicon wafer basket when trigger alarm signal.

The sensor uses photoelectricity, laser or ultrasonic sensor.

The warning device uses acoustic-optic alarm.

Compared with the prior art, the utility model has the advantage of：

The utility model makes mechanical arm stop automatically by immediately monitoring mechanical arm state before silicon wafer basket laminates Work avoids the damage of silicon wafer basket and workpiece, and be equipped with alarm display apparatus, instant alarm to prevent silicon wafer basket from laminating Notify equipment personnel.

Description of the drawings

Fig. 1 is the front view of the utility model and mechanical arm；

Fig. 2 is to install mechanical arm work flow diagram after the utility model additional.

Specific implementation mode

Below in conjunction with the accompanying drawings and the principles of the present invention and structure are described in detail in embodiment.

Basket protective device against pressure in the prior art is after pressing basket to occur, and manipulator also is continuing to move down, makes silicon Piece basket laminates, and jacks up mechanical arm, touches the microswitch on mechanical arm stand column top, and manipulator is just out of service, although rising The effect of protection equipment is arrived, but workpiece and silicon wafer basket may damage.

As shown in Figure 1 and Figure 2, the utility model proposes a kind of anti-mechanical arm press the protective device of basket, the cross of mechanical arm 1 Beam portion is divided into the top of Wafer Cleaning equipment, and the header portion of mechanical arm 1 is equipped with the manipulator 11 of crossbeam downward vertically, machinery It is equipped with 4 sensors 2 on hand, detects corresponding 4 monitoring points respectively for detecting silicon wafer basket, and the lower section of each sensor 2 Equipped with supporting rod 3, sensor 2 is fixed on supporting rod 3, and the side plate of 3 perpendicular robotic 11 of supporting rod is simultaneously solid by screw It is fixed, and 4 sensors 2 all with PLC controller connection.PLC controller is also connected with warning device and provides alarm function.

In the utility model, when manipulator 11 need to capture the silicon wafer basket 4 in cleaning equipment liquid, sensor 2 is mounted on Manipulator 11 is located at the position on liquid level, and the opposite inner wall of 11 side plate of manipulator on 1 both sides of mechanical arm installs two respectively Sensor 2.

Installing the mechanical arm workflow after the utility model additional is：The decline of manipulator 11 takes silicon wafer basket 4, and manipulator 11 is made to connect Nearly silicon wafer basket 4 until being caught on by manipulator 11 with silicon wafer basket 4, then rises to designated position, passes through 2 electric eye of sensor and detect silicon Whether piece basket is raised, and 2 state of sensor is normally opened signal when on manipulator 11 without basket, and 4 sensors 2 there are one or with On state be normally opened signal, PLC controller judges mechanical arm 1 for light condition；When having basket on manipulator 11, sensor is Closure signal, and the state of 4 sensors 2 is all closure signal, has basket on PLC controller judgement mechanical arm 1.If manipulator 11 It is abnormal completing the when of taking basket to act, fails to propose silicon wafer basket 4 in time, the state there are one sensors 2 or more is normally opened Signal, the normally opened signal that the sensor 2 that PLC controller receives is sent out, which with memory is determined with basket signal and has, to conflict, then with sensing Subject to the signal of device 2, judge to be abnormal without basket, equipment on mechanical arm 1, and by under the execution of PLC controller limit mechanical arm 1 One order, is simultaneously emitted by signal to warning device, alarm is sent out by warning device, enable equipment personnel's timely processing, and keep away Exempt from laminating for silicon wafer basket.

Photoelectricity, laser or ultrasonic sensor may be used in sensor 2 in the utility model；Warning device uses sound Light warning device, is within the protection scope of the utility model.

The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this All any modification, equivalent and improvement etc., should be included in the utility model made by within the spirit and principle of utility model Protection domain within.

Claims

1. a kind of protective device of anti-mechanical arm pressure basket, the mechanical arm are set to above Wafer Cleaning equipment, which is characterized in that The protective device includes：Multiple sensors on mechanical arm for detecting silicon wafer basket, for whether detecting silicon wafer basket It is raised, sensor states are normally opened signal, the sensor shape when there is basket on manipulator when on the manipulator of mechanical arm without basket State is normally closed signal；The PLC controller being electrically connected with the sensor judges machinery for the signal that receiving sensor is sent Whether arm is light condition；And the warning device being connect with the PLC controller.

2. the protective device of anti-mechanical arm pressure basket as described in claim 1, which is characterized in that the sensor passes through supporting rod On the side plate of the mechanical arm, and higher than the liquid level in Wafer Cleaning equipment.

3. the protective device of anti-mechanical arm pressure basket as claimed in claim 2, which is characterized in that the supporting rod is close to mechanical arm Side plate inner wall is fixed vertically.

4. the protective device of anti-mechanical arm pressure basket as claimed in claim 3, which is characterized in that the mechanical arm side plate inner wall point It An Zhuan not be there are two sensor.

5. the protective device of anti-mechanical arm pressure basket as claimed in claim 4, which is characterized in that any one sensor detected Alarm signal is triggered when no silicon wafer basket.

6. the protective device of anti-mechanical arm pressure basket as described in claim 1, which is characterized in that the sensor using photoelectricity, Laser or ultrasonic sensor.

7. the protective device of anti-mechanical arm pressure basket as described in claim 1, which is characterized in that the warning device uses acousto-optic Warning device.