CN207908828U - High speed travelling-wave electrooptic modulator based on graphene-micro-nano fiber - Google Patents

High speed travelling-wave electrooptic modulator based on graphene-micro-nano fiber Download PDF

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Publication number
CN207908828U
CN207908828U CN201820191993.9U CN201820191993U CN207908828U CN 207908828 U CN207908828 U CN 207908828U CN 201820191993 U CN201820191993 U CN 201820191993U CN 207908828 U CN207908828 U CN 207908828U
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China
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graphene
micro
nano fiber
high speed
electrode
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CN201820191993.9U
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Chinese (zh)
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徐科
谢永强
谢虎成
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Shenzhen Graduate School Harbin Institute of Technology
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Shenzhen Graduate School Harbin Institute of Technology
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  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The utility model provides a kind of high speed travelling-wave electrooptic modulator based on graphene micro-nano fiber, including micro-nano fiber, top layer graphene, right electrodes, basal layer, left electrodes, dielectric layer, bottom graphene;Left electrodes and the traveling wave electrode that right electrodes are coplanar band structure, on the base layer, the micro-nano fiber brings to Front between graphene and bottom graphene, and among coplanar belt electrode, the dielectric layer isolation top layer graphene and bottom graphene.The utility model has many advantages, such as the operation is stable, easy of integration, low in energy consumption.It is compared with existing lump type graphene micro-nano fiber, the traveling wave electrode in the utility model significantly improves modulation bandwidth.It is prepared simply, and can be efficiently connected standard single-mode fiber communication network and be can be widely applied to light intensity modulation by the methods of interferometer or directional couple, can play huge effect in optical communication field.

Description

High speed travelling-wave electrooptic modulator based on graphene-micro-nano fiber
Technical field
The utility model is related to optical signal modulation technical fields, and in particular to the high speed row based on graphene-micro-nano fiber Wave electrooptic modulator.
Background technology
High performance modulator is to realize that electric signal is loaded into the important hardware of light wave, it has also become the core of Networks of Fiber Communications The heart.Currently, using the lithium niobate modulator of linear electro-optic effect, size of devices has reached centimetres, still cannot be satisfied on piece It is integrated to require;Using the silicon substrate optical modulator of plasma dispersion effect, rate is primarily limited to the resistance and capacitor strap of device The time constant come, existing optical modulator are also insufficient for information processing capability highly integrated and high-speed harshness and want It asks.
The New Two Dimensional material that graphene is made of multiple hexagonal network structure carbon atoms.Utilize its special light The mechanism of the physical attributes such as, electricity, energy band feature and it and transmission signal light interaction, can work out high bandwidth, sound The photoelectric device for the characteristics such as answer speed fast.The theoretical value of its frequency response can reach 500GHz, it is considered to be most promising to answer The material integrated for silicon substrate.
Micro-nano fiber is the waveguide that fusion drawn obtains by standard single-mode fiber under oxyhydrogen flame.It has mechanical strength High, simple, the stronger evanscent field of processing, higher numerical aperture, the advantages that optical transmission loss is relatively low.And micro-nano fiber can be with Efficiently it is connected with standard single-mode fiber.
Utility model content
In order to solve the problems, such as in the prior art, the utility model provides a kind of high speed based on graphene-micro-nano fiber Travelling-wave electrooptic modulator, including micro-nano fiber, top layer graphene, right electrodes, basal layer, left electrodes, dielectric layer, bottom stone Black alkene;Left electrodes and the traveling wave electrode that right electrodes are coplanar band structure, on the base layer, the micro-nano fiber brings to Front Between graphene and bottom graphene, and among coplanar belt electrode, the dielectric layer isolation top layer graphene and bottom stone Black alkene.
The right electrodes are signal electrode, high-speed radio-frequency signal propagation side as a further improvement of the utility model, Xiang Yuguang is consistent in a fiber, and left electrodes are grounding electrode.
The dielectric layer is that the alundum (Al2O3) that thickness is 6nm ± 10% is situated between as a further improvement of the utility model, Matter layer.
The basal layer is magnesium fluoride basal layer as a further improvement of the utility model,.
As a further improvement of the utility model, the top layer graphene and bottom graphene be thickness be 0.7nm ± 10% single-layer graphene.
A diameter of 2.2 μm ± 10% of the micro-nano fiber as a further improvement of the utility model,.
The refractive index of the basal layer is 1.378 as a further improvement of the utility model,.
The travelling wave electric pole structure parameter is as a further improvement of the utility model,:Thickness of electrode is 2 μm, electrode Width is 176 μm, and electrode spacing is 12 μm, realizes that optical speed matches with electrical signal rate using travelling wave electric pole structure.
The utility model has the beneficial effects that:
High speed travelling-wave electrooptic modulator based on graphene-micro-nano fiber, utilizes the evanscent field of graphene and micro-nano fiber Interaction, pass through change graphene fermi level, regulate and control device effective refractive index real part, to change the phase of light The modulation to light is realized in position.The group-velocity mismatch of optical signal and high-speed radio-frequency signal is overcome using travelling wave electric pole structure, preferably Ground improves bandwidth.
The utility model has the advantages that the operation is stable, easy of integration, low in energy consumption and modulation bandwidth are big, prepares simple, phase Than existing lump type graphene/micro-nano fiber modulator, modulation bandwidth is significantly increased, and the optical fiber that can be suitably used for higher speed is logical Communication network can be widely applied to light intensity modulation by the methods of interferometer or directional couple, can be sent out in optical communication field Wave huge effect.
Description of the drawings
Fig. 1 is three dimensional structure diagram of the utility model based on graphene-micro-nano fiber high speed travelling-wave electrooptic modulator;
Fig. 2 is two-dimensional cross sectional signal of the utility model based on graphene-micro-nano fiber high speed travelling-wave electrooptic modulator Figure;
Fig. 3 be application voltage of the utility model based on graphene-micro-nano fiber high speed travelling-wave electrooptic modulator respectively with The relationship of fermi level and light phase variation;
Fig. 4 is electricity bandwidth and electric light of the utility model based on graphene-micro-nano fiber high speed travelling-wave electrooptic modulator Modulation bandwidth.
Wherein:1- micro-nano fibers, 2- signal sources, 3- top layer graphenes, 4- terminal impedances, 5- right electrodes, 6- basal layers, 7- left electrodes, 8- dielectric layers, 9- bottom graphenes.
Specific implementation mode
The utility model is described further below in conjunction with the accompanying drawings.
High speed travelling-wave electrooptic modulator of the utility model based on graphene-micro-nano fiber is mainly by graphene, micro-nano light It is fine to be formed with traveling wave electrode;
Wherein the high speed travelling-wave electrooptic modulator structure of graphene-micro-nano fiber is as shown in Figure 1, electrode material is metal Silver, left electrodes 7 and right electrodes 5 use coplanar band structure;In magnesium fluoride substrate 6, by a diameter of 2.2 μm of micro-nano fiber 1 is placed in up and down between the graphene of single layer, and among coplanar belt electrode;Dielectric layer 8 is three oxidations two that thickness is 6nm Top layer graphene 3 and bottom graphene 9 has been isolated in aluminium;
The dielectric layer 8 is the capacitance structure for being used to form regulation and control graphene fermi level;
Wherein micro-nano fiber is passed through the continuous signal light that wavelength is 1550nm, light input end and signal source end homonymy;
It is interacted using micro-nano fiber and graphene, obtains the effective refractive index of device.Pass through the reality of effective refractive index Portion changes lambda1-wavelength, by formulaWavelength is calculated in 1550nm, group's folding of device light It is 1.38 to penetrate rate;
The fermi level of graphene is adjusted by changing voltage, changes effective refractive index real part, to realize optics phase Position modulation.Relationship between them is as shown in Figure 3.
Variation of the fermi level of graphene from 0.5eV to 0.9eV, it is only necessary to the voltage of 4.95V;Realizing a π phase When position changes, by formulaThe minimum length that device can be calculated is 1.372 μm, at this time device Insertion loss be only 1.6dB.The application voltage of the device, is by formulaIt is calculated; Wherein VFFor Fermi velocity, value is 3 × 106m/s, ε0For the dielectric constant of air,For reduced Planck constant, εrIt is equivalent Dielectric permittivity between tablet, value 10.8.
It is 50 ohm that wherein coplanar strip electrode structure, which uses traveling wave electrode, termination impedance value, it is connected to the another of electrode End (corresponding light output end), signal source loads the signal input part in electrode.The electrode structure parameter is:Thickness of electrode is 2 μ M, electrode width are 176 μm, and electrode spacing is 12 μm, this electrode structure parameter preferably meets traveling wave matching condition.
The frequency response of the device of the travelling wave electric pole structure is as shown in Figure 4.At this point, velocity mismatch rate is 7.38%, spy Levy impedance be 54 Ω, microwave attenuation 0.967dB/mm, obtained graphene-micro-nano fiber electric light tune with analog network analyzer The three dB bandwidth of device processed, value have reached 82GHz.It is almost the same with the electricity bandwidth of 6.4dB, shows RF and the light velocity generally Matching is preferable.
The utility model includes magnesium fluoride substrate, the micro-nano fiber for drawing cone to handle, single-layer graphene, metallic silver electricity Pole, alundum (Al2O3) dielectric layer.The device substrate material is magnesium fluoride, refractive index value 1.378, closer to micro-nano fiber Refractive index, reduce wiener optical fiber in light leakage.The micro-nano fiber is layered on the fluorination magnesium-based covered by single-layer graphene On bottom, blend compounds hydropexis;The graphene is single-layer graphene, and wiener optical fiber is placed among upper layer and lower layer graphene;Institute The alundum (Al2O3) stated as dielectric layer is used for that upper layer and lower layer graphene is isolated, and always guarantees to form capacitance, and its is larger Dielectric constant can reduce the application voltage of device;The silver electrode uses travelling-wave type structure, is used for after applying electric signal Regulate and control the fermi level of graphene.
The utility model adopts the following technical solution prepares:
1) a diameter of 125 μm of single mode optical fiber is heated first by oxyhydrogen flame, carries out that cone is drawn to handle using stepper motor, Obtain the micro-nano fiber that diameter is about 2.2 μm;
2) single-layer graphene that thickness is 0.7nm is transferred in magnesium fluoride substrate using wet method transfer techniques;
3) three oxidations two that a layer thickness is 6nm are plated in specific region using uv-exposure and physical gas phase deposition technology Aluminium;
4) then drawing cone, treated that wiener optical fiber is layered in substrate, blend compounds hydropexis;
5) it is 2 μm, width to plate thickness in specific region using EBL, ICP lithographic technique and physical gas phase deposition technology For 176 μm and spacing be 12 μm metallic silver as electrode;
6) it retransfers one layer of single-layer graphene to be covered on micro-nano fiber, blend compounds hydropexis.
It, cannot the above content is specific preferred embodiment further detailed description of the utility model is combined Assert that the specific implementation of the utility model is confined to these explanations.For the ordinary skill of the utility model technical field For personnel, without departing from the concept of the premise utility, a number of simple deductions or replacements can also be made, should all regard To belong to the scope of protection of the utility model.

Claims (8)

1. a kind of high speed travelling-wave electrooptic modulator based on graphene-micro-nano fiber, it is characterised in that:Including micro-nano fiber(1)、 Top layer graphene(3), right electrodes(5), basal layer(6), left electrodes(7), dielectric layer(8), bottom graphene(9);Left side Electrode(7)And right electrodes(5)For the traveling wave electrode of coplanar band structure, in basal layer(6)On, the micro-nano fiber(1)It is placed in Top layer graphene(3)With bottom graphene(9)Between, and among coplanar belt electrode, the dielectric layer(8)Top layer stone is isolated Black alkene(3)With bottom graphene(9).
2. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The right electrodes(5)For signal electrode, high-speed radio-frequency signal propagation direction and light are consistent in a fiber, left electrodes(7)For Grounding electrode.
3. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The dielectric layer(8)For the alundum (Al2O3) dielectric layer that thickness is 6nm ± 10%.
4. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The basal layer(6)For magnesium fluoride basal layer.
5. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The top layer graphene(3)With bottom graphene(9)For the single-layer graphene that thickness is 0.7nm ± 10%.
6. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The micro-nano fiber(1)A diameter of 2.2 μm ± 10%.
7. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The basal layer(6)Refractive index be 1.378.
8. the high speed travelling-wave electrooptic modulator according to claim 1 based on graphene-micro-nano fiber, it is characterised in that: The travelling wave electric pole structure parameter is:Thickness of electrode is 2 μm, and electrode width is 176 μm, and electrode spacing is 12 μm, using traveling wave electricity Pole structure realizes that optical speed matches with electrical signal rate.
CN201820191993.9U 2018-02-02 2018-02-02 High speed travelling-wave electrooptic modulator based on graphene-micro-nano fiber Expired - Fee Related CN207908828U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110510865A (en) * 2019-08-29 2019-11-29 上海理工大学 A kind of single layer two-dimensional material and its photoactivation method in the preparation of micro-nano fiber surface

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110510865A (en) * 2019-08-29 2019-11-29 上海理工大学 A kind of single layer two-dimensional material and its photoactivation method in the preparation of micro-nano fiber surface
CN110510865B (en) * 2019-08-29 2022-01-25 上海理工大学 Single-layer two-dimensional material prepared on surface of micro-nano optical fiber and photoactivation method thereof

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