CN207903281U - A kind of substrate transfer device - Google Patents
A kind of substrate transfer device Download PDFInfo
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- CN207903281U CN207903281U CN201820322664.3U CN201820322664U CN207903281U CN 207903281 U CN207903281 U CN 207903281U CN 201820322664 U CN201820322664 U CN 201820322664U CN 207903281 U CN207903281 U CN 207903281U
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- transfer device
- platform deck
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- lifting
- substrate
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Abstract
The utility model discloses a kind of substrate transfer device, including support base, arrival end compatible with production upstream line, outlet end compatible with downstream production line and horizontal drive mechanism, the horizontal drive mechanism is arranged between the outlet end and the arrival end, the substrate transfer device further includes secondary transmission mechanism, the secondary transmission mechanism includes product platform deck and transfer device, and the substrate transfer device includes the first operating status and the second operating status:In first operating status, the transfer device is realized the first product platform deck positioned at the arrival end and the second product platform deck location swap positioned at the outlet end;In second operating status, the substrate transmitted by the production upstream line is conveyed directly to the downstream production line through the horizontal drive mechanism;The substrate transfer device of the utility model provides two kinds of substrate branch modes, and Lifting Convey efficiency synthesis reduces cost of labor.
Description
Technical field
The utility model is related to machinery equipment field, are provided in particular in a kind of substrate transfer device.
Background technology
Different applications is needed, substrate from production upstream line sometimes for directly downstream production line is sent to, sometimes
It needs just be sent to downstream production line over time.Both of which is two different production lines in the prior art, or
Person is accomplished manually the operation of relevant pattern conversion, inefficiency and labour cost height.
Invention content
In order to overcome the deficiencies of existing technologies, the purpose of this utility model is to provide a kind of substrate transfer device,
Two kinds of substrate branch modes, Lifting Convey efficiency are provided.
A kind of substrate transfer device, the substrate transfer device include support base, entrance compatible with production upstream line
End, outlet end compatible with downstream production line and with the production upstream line and with the matched level of the downstream production line
Transmission mechanism, the arrival end, the outlet end and the horizontal drive mechanism are located on the support base, the horizontal conveyor
Mechanism is arranged between the outlet end and the arrival end, it is characterised in that:The substrate transfer device further includes secondary biography
Motivation structure, the secondary transmission mechanism includes product platform deck and transfer device, and the product platform deck is carried including at least the first product
Platform and the second product platform deck, the substrate transfer device include the first operating status and the second operating status:
In first operating status, first product platform deck is located at the arrival end, second product platform deck
Positioned at the outlet end, the substrate through production upstream line transmission is sent into first product by the production upstream line and is carried
Platform;While first product platform deck is transferred to the outlet end by the transfer device, second product platform deck is turned
The arrival end is moved to, the substrate in first product platform deck is sent to the downstream by the horizontal drive mechanism
Production line;
In second operating status, by the substrate of production upstream line transmission through the horizontal drive mechanism
It is conveyed directly to the downstream production line.
There are two types of operating statuses for substrate transfer device tool in the utility model, realize two different substrate transfer sides
Formula is adapted to the transhipment work of the substrate of different requirements, substantially increases the conevying efficiency of substrate.
Preferably, the transfer device includes rotating mechanism, and the rotating mechanism includes being fixed at the support base
On support column and supporting beam, can be rotatably set on the support column in the middle part of the supporting beam, on the support column also
Equipped with the rotary drive mechanism for driving the supporting beam rotation, first product platform deck and second product platform deck point
It is not fixed in the supporting beam.
It is further preferred that the lower surface of the supporting beam is equipped with the suspension mechanism for fixing the product platform deck, institute
State first suspension mechanism and the second suspension machine at the both ends that suspension mechanism includes the length direction for being separately positioned on the supporting beam
Structure, each suspension mechanism includes secondary suspension mechanism, and the secondary suspension mechanism includes along the width side of the supporting beam
To telescopic first fixed pin and the second fixed pin, the secondary suspension mechanism further includes the width direction along the supporting beam
Center line symmetrical setting the first supporting walls and the second supporting walls, first fixed pin and second fixed pin are located at institute
State between the first supporting walls and second supporting walls, the product platform deck be equipped with respectively with first supporting walls and described
It is offered on compatible first suspended wall of second supporting walls and the second suspended wall, first supporting walls and first suspended wall and institute
The perforation of the first fixed pin adaptation is stated, second supporting walls and second suspended wall are offered and be adapted to second fixed pin
Trepanning;
When the product platform deck is fixed on the suspension mechanism, first fixed pin is threaded through described first simultaneously
It supports in the perforation of wall and the perforation of first suspended wall, second fixed pin is threaded through second support simultaneously
In the trepanning of wall and the trepanning of the second suspended wall, first supporting walls and first suspended wall are inconsistent, and described
Two supporting walls and second suspended wall are inconsistent;When first fixed pin exits the perforation of first suspended wall, and institute
When stating the second fixed pin and exiting the trepanning of second suspended wall, the product platform deck is detached with the suspension mechanism.
It is further preferred that each suspension mechanism includes what two length directions along the supporting beam were arranged side by side
Two secondary suspension mechanisms, the axial direction of first fixed pin axial conllinear, institute with corresponding second fixed pin
It states the first fixed pin and corresponding second fixed pin is driven by the same suspension driving device.
It is further preferred that the transfer device further includes lifting mechanism, the lifting mechanism include setting it is described enter
First lifting mechanism of the corresponding position at mouthful end and the second lifting mechanism in the corresponding position of the outlet end is set, the lift
The corresponding position of the upper surface of liter mechanism and the lower surface of the product platform deck is respectively provided with the limitation product platform deck and exists
The limit assembly that horizontal direction is subjected to displacement.
It is further preferred that each lifting mechanism includes the guide rail being vertically arranged, is slidably disposed on
Lifting platform on the guide rail and the lift drive mechanism for driving the lifting of lifting table, the lifting platform include wall built-up and
The back side of two lifting support platforms being fixedly connected with the front of the wall built-up, the wall built-up is slidably disposed on described lead
On rail, the both sides of the width direction of two lifting support platform point row wall built-ups, two lifting support platform institutes
Plane it is vertical with the plane where the front of the wall built-up;The upper surface of the lifting support platform is used to support the production
Product microscope carrier.
It is further preferred that the lifting mechanism further includes the lifting cincture being arranged in the lifting support platform,
When second operating status, the lifting cincture is in contact with the both sides of the substrate of corresponding position.
It is further preferred that the limit assembly includes the limit hole being arranged in the product platform deck and is arranged described
The limited post for being plugged in the limit hole in lifting support platform.
Preferably, the horizontal drive mechanism includes two levels being arranged in the both sides of the length direction of the support base
Cincture and the length direction along the support base being arranged between two horizontal cinctures is symmetrically arranged can be driven
Two conveyer belts, the horizontal drive mechanism further include the corresponding position that the outlet end between two conveyer belts is arranged
Ejecting mechanism.
It is further preferred that the ejecting mechanism includes along the telescopic push rod of length direction of the support base, setting
Fixing groove on the push rod and the vertically telescopic catch being arranged in the fixing groove, the ejecting mechanism
For the substrate on the substrate being located in the product platform deck of the outlet end or the conveyer belt to be pushed to
In the downstream production line.
It is further preferred that the product platform deck includes the first reservoir plate being oppositely arranged, the second reservoir plate and connection institute
State the storage top plate of the first reservoir plate and second reservoir plate, the side wall of relatively described second reservoir plate of first reservoir plate
It is arranged in parallel with multiple first reservoir plate steps along its length, the two neighboring first reservoir plate step is formed for supplying
First storage guide rail of the substrate sliding;The side wall of relatively described first reservoir plate of second reservoir plate is along its length
It is arranged in parallel with multiple the second reservoir plate steps being adapted to the first reservoir plate step, two neighboring second reservoir plate
Step is formed for the second storage guide rail for substrate sliding;One end of the first storage guide rail and second storage
One end of guide rail is closed, another end opening of the other end of the first storage guide rail and the second storage guide rail.
The product platform deck includes that multilayer is used to store the step of substrate, stores the number of plies of substrate by control to realize pair
The control of time of repose promotes the efficiency of the entire production line.Meanwhile substrate multilayer can be arranged and be stored by product platform deck, relatively
It is cached in belt-type single layer, significantly reduces floor space.
It is further preferred that the product platform deck further includes reinforcing rib, one end of the reinforcing rib and the storage top plate
It is fixedly connected, the other end of the reinforcing rib is fixedly connected with first reservoir plate or second reservoir plate.
The beneficial effects of the utility model have:
Compared with prior art, there are two types of operating statuses for the substrate transfer device tool in the utility model, realize two kinds
Different substrate branch modes is adapted to the transhipment work of the substrate of different requirements, substantially increases the conevying efficiency of substrate.
Description of the drawings
Fig. 1 is the substrate transfer device overall structure diagram in the utility model;
Fig. 2 is that the substrate transfer device in the utility model hangs portion structure schematic diagram;
Fig. 3 is that the substrate professional device in the utility model hangs position side view;
Fig. 4 is the structural schematic diagram of the substrate professional device lifting mechanism in the utility model;
Fig. 5 is the horizontal drive mechanism structural schematic diagram of the substrate professional device in the utility model;
Fig. 6 is the product platform deck structure structural schematic diagram of the substrate professional device in the utility model.
In attached drawing, 1- horizontal drive mechanisms;The horizontal cinctures of 12-;131- push rods;132- fixing grooves;133- catch;21- branch
Support beam;The first fixed pins of 211-;The second fixed pins of 212-;The first supporting walls of 213-;The second supporting walls of 214-;215- suspension drivings
Mechanism;22- rotary drive mechanisms;23- support columns;3- product platform decks;The first reservoir plates of 31-;The second reservoir plates of 32-;33- is stored
Top plate;The first suspended walls of 331-;The second suspended walls of 332-;34- reinforcing ribs;41- guide rails;42- lifting platforms;421- wall built-ups;422- is lifted
Support platform;43- lift drive mechanisms;44- is lifted cincture;The upper protecting bins of 51-;52- workbench;Storehouse is accommodated under 53-.
The utility model is described further below in conjunction with the drawings and specific embodiments.
Specific implementation mode
The utility model can further be well understood by specific embodiment of the utility model given below, but
They are not the restrictions to the utility model.
As shown in figures 1 to 6, a kind of substrate transfer device, the substrate transfer device includes support base, and support base contains work
Make platform 52, the lower section of workbench 52 is equipped with lower receiving storehouse 53, and the top of workbench 52 is equipped with upper protecting bin 51.The substrate transfer
Device further includes arrival end compatible with production upstream line, outlet end compatible with downstream production line and is given birth to the upstream
Producing line and with the matched horizontal drive mechanism 1 of the downstream production line, production upstream line and downstream production line are located at Fig. 1
In substrate transfer device left side and/or right side, the arrival end, the outlet end and horizontal drive mechanism 1 are located at described
On support base, horizontal drive mechanism 1 is arranged between the outlet end and the arrival end, and the substrate transfer device further includes
Secondary transmission mechanism, the secondary transmission mechanism includes product platform deck 3 and transfer device, and the product platform deck 3 includes at least the
One product platform deck and the second product platform deck, the substrate transfer device include the first operating status and the second operating status:
In first operating status, first product platform deck is located at the arrival end, second product platform deck
Positioned at the outlet end, the substrate 6 through production upstream line transmission is sent into first product by the production upstream line and is carried
Platform;While first product platform deck is transferred to the outlet end by the transfer device, second product platform deck is turned
The arrival end is moved to, the substrate in first product platform deck is sent to the downstream by the horizontal drive mechanism
Production line;
In second operating status, by the substrate of production upstream line transmission through the horizontal drive mechanism
It is conveyed directly to the downstream production line.
Transfer device in the present embodiment includes the rotating mechanism being arranged in upper protecting bin 51 and is arranged in lower receiving storehouse
Lifting mechanism in 53.Specifically, the rotating mechanism includes the support column 23 being fixed on the support base and support
The middle part of beam 21, supporting beam 21 can be rotatably set on the support column 23, is additionally provided on support column 23 for driving support
The rotary drive mechanism 22 that beam 21 rotates, rotary drive mechanism 22 include an electric machine, are realized and are supported by belt transmission
The rotation of beam 21.First product platform deck and second product platform deck are respectively fixedly disposed at the length direction of supporting beam 21
Both ends.
As Figure 2-3, the lower surface of supporting beam 21 is equipped with the suspension mechanism for fixing the product platform deck, described outstanding
Suspension mechanism includes first suspension mechanism and the second suspension mechanism at the both ends for the length direction for being separately positioned on supporting beam 21, each
The suspension mechanism includes secondary suspension mechanism, the secondary suspension mechanism include along supporting beam 21 width direction it is telescopic
First fixed pin 211 and the second fixed pin 212, have the first supporting walls along the center line symmetrical setting of the width direction of supporting beam 21
213 and second supporting walls 214, the first fixed pin 211 and the second fixed pin 212 are located at the first supporting walls 213 and the second supporting walls
Between 214, product platform deck 3 is equipped with first suspended wall compatible with first supporting walls, 213 and second supporting walls 214 respectively
331 and second suspended wall 332, the perforation being adapted to the first fixed pin 211 is offered on the first supporting walls 213 and the first suspended wall 331,
Second supporting walls 214 and the second suspended wall 332 offer the trepanning being adapted to the second fixed pin 212;
Each suspension mechanism includes that two length directions along supporting beam 21, two secondary arranged side by side are outstanding
Suspension mechanism, the axial direction of the first fixed pin 211 is conllinear with the axial direction of corresponding second fixed pin 212, the first fixed pin 211 and correspondence
The second fixed pin 212 driven by the same suspension driving device 215, the suspension driving device 215 in the present embodiment be cylinder;
When product platform deck 3 is fixed on the supporting beam 21, the first fixed pin 211 is threaded through the first supporting walls 213 simultaneously
The perforation and the first suspended wall 331 the perforation in, the second fixed pin 212 is threaded through the institute of the second supporting walls 214 simultaneously
It states in trepanning and the trepanning of the second suspended wall 332, the first supporting walls 213 and the first suspended wall 331 are inconsistent, the second supporting walls
214 is inconsistent with the second suspended wall 332;When the first fixed pin 211 exits the perforation of the first suspended wall 331, and the second fixed pin
212 when exiting the trepanning of the second suspended wall 332, and product platform deck 3 is detached with the suspension mechanism.
The transfer device further includes lifting mechanism, as shown in Fig. 1 and 4, the lifting mechanism include setting it is described enter
First lifting mechanism of the corresponding position at mouthful end and the second lifting mechanism in the corresponding position of the outlet end is set, the lift
The corresponding position for rising the upper surface of mechanism and the lower surface of product platform deck 3 is respectively provided with limitation product platform deck 3 in level side
To the limit assembly being subjected to displacement, the limit assembly in the present embodiment include the limit hole being arranged in product platform deck 3 and
The limited post for being plugged in the limit hole being arranged on the lifting mechanism.
Each lifting mechanism includes the guide rail 41 being vertically arranged, the liter being slidably disposed on guide rail 41
Platform 42 and the lift drive mechanism 43 for driving the lifting of lifting table drop, lifting platform 42 include wall built-up 421 and with wall built-up 421
The lifting support platform 422 that is fixedly connected of front, two lifting support platforms 422 are divided to the two of the width direction of row wall built-up 421
The back side of side, wall built-up 421 is slidably disposed on guide rail 41, the plane where two lifting support platforms 422 and wall built-up 421
Front where plane it is vertical;The upper surface of lifting support platform 422 is used to support product platform deck 3.
The lifting mechanism further includes the lifting cincture 44 being arranged in lifting support platform 422, in second operation
When state, lifting cincture 44 is in contact with the both sides of the substrate 6 of corresponding position, for preventing substrate 6 during horizontal transport
Lateral offset occurs.
As shown in figure 5, horizontal drive mechanism 1 includes two levels being arranged in the both sides of the length direction of the support base
Cincture 12 and the length direction along the support base being arranged between two horizontal cinctures 12 is symmetrically arranged can be driven
Two conveyer belts, the horizontal drive mechanism further include the corresponding position that the outlet end between two conveyer belts is arranged
Ejecting mechanism.In the second operating status, horizontal cincture 12 is located at sustained height with lifting cincture 44, a little higher than conveyer belt
Highly, for preventing substrate 6 from lateral offset occurring during horizontal transport.The driving mechanism of every conveyer belt includes three
Fixed pulley and the motor being arranged on support base realize that it recycles stepless operation.
The ejecting mechanism include along the support base the telescopic push rod 131 of length direction, be arranged on push rod 131
Fixing groove 132 and the vertically telescopic catch 133 being arranged in fixing groove 132, the ejecting mechanism be used for will
The substrate 6 on the substrate 6 or conveyer belt in the product platform deck 3 of the outlet end is pushed to the downstream production
On line.When push rod 131 is located at contraction state, catch 133 is located in fixing groove 132, is pushed when needing the substrate 6 by corresponding position
When to downstream production line, catch 133 stretches out fixing groove 132, and the rear of catch 133 and substrate 6 contradicts, by push rod 133 by base
Plate 6 is pushed in downstream production line.Downstream production line and the transmission speed and frictional force of the conveyer belt in horizontal drive mechanism 1 are normal
Chang Butong can be very good solution substrate 6 using ejecting mechanism and be produced with downstream by the substrate transfer device in the utility model
Synchronous problem between line.
As shown in Figure 3 and Figure 6, product platform deck 3 includes the first reservoir plate 31 being oppositely arranged, the second reservoir plate 32 and connection
The storage top plate 33 of first reservoir plate 31 and the second reservoir plate 31, the side wall of 31 opposite second reservoir plate 32 of the first reservoir plate is along it
Length direction is arranged in parallel with multiple first reservoir plate steps, and the two neighboring first reservoir plate step, which is formed, is used for substrate
6 the first storage guide rails slid in and out;The side wall of second reservoir plate, 32 opposite first reservoir plate 31 is parallel along its length
It is provided with multiple the second reservoir plate steps being adapted to the first reservoir plate step, the two neighboring second reservoir plate step
Form the second storage guide rail for being slid in and out for the substrate;One end of the first storage guide rail and second storage
Another end opening for depositing one end closing of guide rail, the other end of the first storage guide rail and the second storage guide rail, works as institute
When stating substrate transfer device and being located at first operating status, it is located at the product platform deck 3 of arrival end towards the one of production upstream line
Side and product platform deck 3 positioned at outlet end towards the side of downstream production line are storage guide openings end, are located at the production of arrival end
Product microscope carrier 3 and positioned at the opposite side of the product platform deck 3 of outlet end be storage guide rail blind end, constitute the tail of product platform deck 3
Portion prevents substrate 6 from skidding off product platform deck 3.
In the present embodiment, product platform deck 3 further includes reinforcing rib 34, and one end of reinforcing rib 34 is fixed with storage top plate 33 to be connected
It connects, the other end of reinforcing rib 34 is fixedly connected with first reservoir plate, 31 or second reservoir plate 32, it is ensured that product platform deck 3 is passed through
Being used for a long time will not deform.
A kind of control method of substrate transfer device described in the utility model, includes the following steps:
S1, the first product platform deck are located on the lifting platform 42 of the first lifting mechanism of the arrival end of substrate transfer device, the
Two product platform decks are fixed on the outlet of the substrate transfer device by the supporting beam 21 of the rotating mechanism of the substrate transfer device
It holds, the highest first storage guide rail in position and the second storage guide rail are located in first product platform deck mutually fits with production upstream line
The position matched, the substrate 6 through production upstream line transmission are sent into first product platform deck by the production upstream line;
S2, the production upstream line remain operational, and the lifting platform 42 of the arrival end is lifted, and first product carries
The slightly lower first storage guide rail in position and the second storage guide rail are located at compatible with the production upstream line in platform
Position, the substrate through production upstream line transmission are sent into first product platform deck by the production upstream line;
S3 repeats step S2, until all first storage guide rails of first product platform deck and second storage
The corresponding position for depositing guide rail is filled substrate 6, the production upstream line operation suspension, the storage top plate of first product platform deck
It is fixed in the supporting beam 21 of the rotating mechanism;
S4, supporting beam 21 rotate 180 ° under the driving of rotary drive mechanism 23 around support column 22, at this point, fully loaded is described
First product platform deck is located at the corresponding position of outlet end, and unloaded second product platform deck is located at the correspondence position of the arrival end
It sets;
S5, second product platform deck detach with the supporting beam 21 and by the lifting platforms of first lifting mechanism 42
Support, first lifting mechanism decline so that the highest first storage guide rail in position and institute in second product platform deck
It states the second storage guide rail and is located at position compatible with the production upstream line;The production upstream line resumes operation, through described
The substrate 6 of production upstream line transmission is sent into second product platform deck by the production upstream line;Starting to execute step S5's
Meanwhile the process that the first substrate 6 in product platform deck is stood.
S6, the production upstream line remain operational, the lifting platform lifting of the arrival end, second product platform deck
The slightly lower first storage guide rail in middle position and the second storage guide rail are located at position compatible with production upstream line, pass through
The substrate 6 of the production upstream line transmission is sent into second product platform deck by the production upstream line;
S7 repeats step S6, until all first storage guide rails of second product platform deck and second storage
The corresponding position for depositing guide rail is filled substrate 6, the production upstream line operation suspension, the storage top plate of second product platform deck
33 are fixed in the supporting beam 21 of the rotating mechanism;
S8, after step S4, first product platform deck detaches with supporting beam 21 and by positioned at the second of the outlet end
Lifting mechanism supports, and second lifting mechanism declines so that minimum first storage in position in first product platform deck
Guide rail and the second storage guide rail are located at position compatible with horizontal drive mechanism, and the catch 133 of ejecting mechanism stretches out admittedly
Determine slot 132, the push rod 131 of the ejecting mechanism pushes catch 133 to be pushed to the substrate 6 in second product platform deck
In downstream production line;
S9, second lifting mechanism decline, slightly lower the first storage guide rail in position in first product platform deck
And the second storage guide rail is located at position compatible with the ejecting mechanism, the push rod 131 of the ejecting mechanism pushes institute
It states catch 133 substrate 6 of the corresponding position in second product platform deck is pushed in the downstream production line;
S10 repeats step S9, until all substrates 6 of second product platform deck are pushed to the downstream production line
On;
S11, the second lifting mechanism lifting, first product platform deck are fixed in supporting beam 21;
S12, when step S7 and step S11 all after the completion of, the supporting beam is under the driving of rotary drive mechanism around support
Column rotates 180 °, and first product platform deck is detached with the supporting beam, executes step S1.
Another control method of substrate transfer device described in the utility model, includes the following steps:Positioned at substrate
The arrival end of transfer device and the lifting cincture 44 of outlet end are located at the respective heights of the horizontal cincture 12 of horizontal drive mechanism 1,
Substrate 6 is sent to by production upstream line on the conveyer belt of horizontal drive mechanism 1, is lifted cincture 44 and horizontal cincture 12 to substrate 6
Width direction limited, the substrate 6 for being transported to the outlet end is pushed to downstream production line by ejecting mechanism.
Compared with prior art, there are two types of operating statuses for the substrate transfer device tool in the utility model, realize two kinds
Different substrate branch modes is adapted to the transhipment work of the substrate of different requirements, substantially increases the conevying efficiency of substrate.
Above disclosed is only the preferred embodiment in the utility model, cannot limit the utility model with this certainly
Interest field, therefore equivalent variations made according to the patent scope of the utility model still belong to what the utility model was covered
Range.
Claims (11)
1. a kind of substrate transfer device, the substrate transfer device include support base, arrival end compatible with production upstream line,
Outlet end compatible with downstream production line and with the production upstream line and with the downstream production line is matched horizontal passes
Motivation structure, the arrival end, the outlet end and the horizontal drive mechanism are located on the support base, the horizontal conveyor machine
Structure is arranged between the outlet end and the arrival end, it is characterised in that:The substrate transfer device further includes secondary transmission
Mechanism, the secondary transmission mechanism includes product platform deck and transfer device, and the product platform deck includes at least the first product platform deck
And second product platform deck, the substrate transfer device include the first operating status and the second operating status:
In first operating status, first product platform deck is located at the arrival end, and second product platform deck is located at
The outlet end, the substrate through production upstream line transmission are sent into first product platform deck by the production upstream line;Institute
While stating transfer device first product platform deck is transferred to the outlet end, second product platform deck is transferred to institute
Arrival end is stated, the substrate in first product platform deck is sent to the downstream by the horizontal drive mechanism and produces
Line;
In second operating status, the substrate transmitted by the production upstream line is direct through the horizontal drive mechanism
It is sent to the downstream production line.
2. substrate transfer device according to claim 1, it is characterised in that:The transfer device includes rotating mechanism, institute
It includes the support column being fixed on the support base and supporting beam to state rotating mechanism, and the middle part of the supporting beam is rotatably
It is arranged on the support column, the rotary drive mechanism for driving the supporting beam rotation, institute is additionally provided on the support column
It states the first product platform deck and second product platform deck is respectively fixedly disposed in the supporting beam.
3. substrate transfer device according to claim 2, it is characterised in that:The lower surface of the supporting beam is equipped with for solid
The suspension mechanism of the fixed product platform deck, the suspension mechanism includes the both ends for the length direction for being separately positioned on the supporting beam
The first suspension mechanism and the second suspension mechanism, each suspension mechanism includes secondary suspension mechanism, the secondary suspension machine
Structure includes along telescopic first fixed pin of width direction of the supporting beam and the second fixed pin, along the width of the supporting beam
The center line symmetrical setting in direction has the first supporting walls and the second supporting walls, first fixed pin and described second to fix pins position
Between first supporting walls and second supporting walls, the product platform deck be equipped with respectively with first supporting walls and
Compatible first suspended wall of second supporting walls and the second suspended wall offer on first supporting walls and first suspended wall
The perforation being adapted to first fixed pin, second supporting walls and second suspended wall offer and second fixed pin
The trepanning of adaptation;
When the product platform deck is fixed on the suspension mechanism, first fixed pin is threaded through first supporting walls simultaneously
The perforation and first suspended wall the perforation in, second fixed pin is threaded through second supporting walls simultaneously
In the trepanning and the trepanning of second suspended wall, first supporting walls and first suspended wall are inconsistent, and described
Two supporting walls and second suspended wall are inconsistent;When first fixed pin exits the perforation of first suspended wall, and institute
When stating the second fixed pin and exiting the trepanning of second suspended wall, the product platform deck is detached with the suspension mechanism.
4. substrate transfer device according to claim 3, it is characterised in that:Each suspension mechanism includes two along institute
State two arranged side by side secondary suspension mechanisms of the length direction of supporting beam, the axial direction of first fixed pin with it is corresponding
The axial direction of second fixed pin is conllinear, and first fixed pin and corresponding second fixed pin are driven by the same suspension
Device drives.
5. substrate transfer device according to claim 2, it is characterised in that:The transfer device further includes lifting mechanism,
The lifting mechanism include be arranged the corresponding position of the arrival end the first lifting mechanism and be arranged in the outlet end
The corresponding position of the lower surface of second lifting mechanism of corresponding position, the upper surface of the lifting mechanism and the product platform deck point
The limit assembly that She You not be in the horizontal direction subjected to displacement for limiting the product platform deck.
6. substrate transfer device according to claim 5, it is characterised in that:Each lifting mechanism includes along vertical side
To the guide rail of setting, the lifting platform that is slidably disposed on the guide rail and for driving the lifting of the lifting of lifting table to drive
Motivation structure, the lifting platform include wall built-up and two lifting support platforms being fixedly connected with the front of the wall built-up, the extension
The back side of wall is slidably disposed on the guide rail, the width direction of two lifting support platform point row wall built-ups
Both sides, the plane where two lifting support platforms are vertical with the plane where the front of the wall built-up;The lifting branch
The upper surface of support platform is used to support the product platform deck.
7. substrate transfer device according to claim 6, it is characterised in that:The lifting mechanism further includes being arranged described
Lifting cincture in lifting support platform, in second operating status, the base of the lifting cincture and corresponding position
The both sides of plate are in contact.
8. substrate transfer device according to claim 1, it is characterised in that:The horizontal drive mechanism includes being arranged in institute
State two horizontal cinctures of the both sides of the length direction of support base and be arranged between two horizontal cinctures along the branch
Support seat length direction it is symmetrically arranged can driven two conveyer belts, the horizontal drive mechanism further include be arranged at two
The ejecting mechanism of the corresponding position of the outlet end between the conveyer belt.
9. substrate transfer device according to claim 8, it is characterised in that:The ejecting mechanism includes along the support base
The telescopic push rod of length direction, the fixing groove that is arranged on the push rod and vertically telescopic be arranged described
Catch in fixing groove, the ejecting mechanism will be for that will be located at the substrate in the product platform deck of the outlet end or institute
The substrate stated on conveyer belt is pushed in the downstream production line.
10. according to any substrate transfer devices of claim 1-9, it is characterised in that:The product platform deck includes opposite
The first reservoir plate, the second reservoir plate and the storage top plate for connecting first reservoir plate and second reservoir plate being arranged, institute
The side wall for stating relatively described second reservoir plate of the first reservoir plate is arranged in parallel with multiple first reservoir plate steps along its length,
The two neighboring first reservoir plate step is formed for the first storage guide rail for substrate sliding;Second reservoir plate
The side wall of relatively described first reservoir plate is arranged in parallel with along its length multiple to be adapted to the first reservoir plate step
Second reservoir plate step, the two neighboring second reservoir plate step is formed leads for the second storage for substrate sliding
Rail;One end closing of one end of the first storage guide rail and the second storage guide rail, described first stores the another of guide rail
Another end opening of end and the second storage guide rail.
11. substrate transfer device according to claim 10, it is characterised in that:The product platform deck further includes reinforcing rib,
One end of the reinforcing rib is fixedly connected with the storage top plate, the other end of the reinforcing rib and first reservoir plate or institute
The second reservoir plate is stated to be fixedly connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201820322664.3U CN207903281U (en) | 2018-03-08 | 2018-03-08 | A kind of substrate transfer device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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CN201820322664.3U CN207903281U (en) | 2018-03-08 | 2018-03-08 | A kind of substrate transfer device |
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CN207903281U true CN207903281U (en) | 2018-09-25 |
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CN108438703A (en) * | 2018-03-08 | 2018-08-24 | Aem科技(苏州)股份有限公司 | A kind of substrate transfer device and substrate transfer method |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN108438703A (en) * | 2018-03-08 | 2018-08-24 | Aem科技(苏州)股份有限公司 | A kind of substrate transfer device and substrate transfer method |
CN108438703B (en) * | 2018-03-08 | 2023-12-26 | Aem科技(苏州)股份有限公司 | Substrate transfer device and substrate transfer method |
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