CN207848225U - Mechanical equipment and its workbench - Google Patents

Mechanical equipment and its workbench Download PDF

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Publication number
CN207848225U
CN207848225U CN201721898812.8U CN201721898812U CN207848225U CN 207848225 U CN207848225 U CN 207848225U CN 201721898812 U CN201721898812 U CN 201721898812U CN 207848225 U CN207848225 U CN 207848225U
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CN
China
Prior art keywords
pedestal
loading plate
workbench
workbench according
rotary components
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CN201721898812.8U
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Chinese (zh)
Inventor
张晓辉
杨雪
刘朋飞
黎锦宁
尹建刚
高云峰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shenzhen Hans Semiconductor Equipment Technology Co Ltd
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Han s Laser Technology Industry Group Co Ltd
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Priority to CN201721898812.8U priority Critical patent/CN207848225U/en
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Abstract

The utility model is related to a kind of mechanical equipment and its workbench, the workbench includes pedestal, rotary components and loading plate, the loading plate is set to above the pedestal, and multiple vertically arranged air floating structures are equipped between the pedestal and the loading plate, so that the relatively described pedestal of the loading plate is in suspended state, the rotary components are for driving the relatively described pedestal rotary motion of the loading plate.In the workbench of the utility model, since loading plate is suspended in by air floating structure above pedestal, so that loading plate contactless rotary motion of opposite base under the driving of rotary components, eliminate the friction when movement of loading plate opposite base, so that workbench operation is more steady, running precision is effectively raised.

Description

Mechanical equipment and its workbench
Technical field
The utility model belongs to machinery equipment field more particularly to a kind of mechanical equipment and its workbench.
Background technology
With the development of industrial technology, the requirement for workbench positioning accuracy is higher and higher.Workbench is main at present It by worm-drive, and needs that such as running track supporting structure is arranged between table top and pedestal, in table top with respect to base motions When will appear larger friction, to which this mode error is big, and be difficult to avoid that;It is for mechanical equipment of today and uncomfortable With.In order to improve running precision, in a few thing platform, indexing positioning, this side are carried out using the gear in fluted disc turntable Although formula is improving workbench running precision to a certain degree, control cost is higher, and required technology is more difficult.And current Numerical control rotary table mostly uses semi-closed loop system, and detecting element multidigit is stable on driving motor, certainly existing error Property is poor.
Utility model content
Based on this, it is necessary to provide workbench a kind of stable and that running precision can be effectively improved and including the work Make the mechanical equipment of platform.
A kind of workbench, including pedestal, rotary components and loading plate, the loading plate are set to above the pedestal, and Multiple vertically arranged air floating structures are equipped between the pedestal and the loading plate, so that the relatively described pedestal of the loading plate In suspended state, the rotary components are for driving the relatively described pedestal rotary motion of the loading plate.
In a wherein embodiment, the rotary components include fixed seat, rotation sliding sleeve and rotating member, the fixation Seat is set on the pedestal, and the rotation sliding sleeve is set to the fixed seat, and one end of the rotating member is slidably inserted in institute Rotation sliding sleeve is stated, the other end is connected with the loading plate.
In a wherein embodiment, the rotation sliding sleeve includes rolling bearing, the lubrication groove hub sleeve of the rolling bearing Set on the rotating member, the outer wheel hub of the rolling bearing is set to the fixed seat.
In a wherein embodiment, the workbench is set to mechanical equipment, and the mechanical equipment includes for guiding The guide frame of the workbench translational motion, the pedestal are equipped with sliding part and drive component, and the sliding part is set to institute The both sides of pedestal are stated, and under the driving of the driving component, the sliding part can be slided along the guide frame.
In a wherein embodiment, the driving component includes linear motor, and the linear motor is set to the base The bottom of seat, and it is equipped with sensing element in the side of the linear motor on the pedestal, the sensing element is for monitoring institute State the operating condition of linear motor.
In a wherein embodiment, the bottom of the pedestal also is provided with multiple vertically arranged air floating structures.
In a wherein embodiment, the bottom of the pedestal is additionally provided with multiple air floating structures being laterally arranged, The bottom difference of the pedestal is vertically arranged and/or multiple magnet are laterally arranged.
In a wherein embodiment, the air floating structure includes floating cushion and air inlet pipe, the air inlet pipe with it is described Floating cushion is connected, and is connected with the pedestal.
In a wherein embodiment, there are annular groove, the floating cushion in the end face of the floating cushion along edge Side be equipped with the escape pipe that is connected with the annular groove.
Correspondingly, the utility model additionally provides a kind of mechanical equipment, including above-mentioned workbench.
Mechanical equipment and its workbench provided by the utility model, the loading plate in the workbench are suspended by air floating structure Above pedestal, so that loading plate contactless rotary motion of opposite base under the driving of rotary components, eliminates load Friction when flitch opposite base moves so that workbench operation is more steady, effectively raises running precision.
Description of the drawings
Fig. 1 is the structural schematic diagram of workbench in an embodiment;
Fig. 2 is the side view of workbench shown in Fig. 1;
Fig. 3 is the rotary components of workbench and the assembling schematic diagram of pedestal shown in Fig. 1;
Fig. 4 is the partial enlarged view of circle part A structure in Fig. 3;
Fig. 5 is another viewing angle constructions schematic diagram of an embodiment workbench;
Fig. 6 is the partial enlarged view of circle part B structure in Fig. 5.
Specific implementation mode
The utility model is more fully retouched below with reference to relevant drawings for the ease of understanding the utility model, It states.The better embodiment of the utility model is given in attached drawing.But the utility model can come in many different forms It realizes, however it is not limited to embodiments described herein.On the contrary, the purpose of providing these embodiments is that making new to this practicality The disclosure of type understands more thorough and comprehensive.
It should be noted that when element is referred to as " being fixed on " another element, it can be directly on another element Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it can be directly connected to To another element or it may be simultaneously present centering elements.Term as used herein "inner", "outside", "left", "right" and Similar statement for illustrative purposes only, is not offered as being unique embodiment.
A kind of mechanical equipment of one embodiment of the utility model, the workbench for carrying workpiece pass through workbench Translation and/or rotary motion, it would be desirable to which the workpiece of processing moves on to suitable position and carries out operation.
In conjunction with shown in Fig. 1 and Fig. 2, workbench includes pedestal 10, rotary components 20 and loading plate 30.Loading plate 30 is set to 10 top of pedestal, and multiple vertically arranged air floating structures 12 are equipped between pedestal 10 and loading plate 30, so that 30 phase of loading plate Suspended state is in pedestal 10.It should be noted that in the embodiment, rotary components 20 are for driving loading plate 30 opposite 10 rotary motion of pedestal is in suspended state, and then loading plate 30 is in phase since loading plate 30 is under the action of air floating structure 12 It when to 10 rotary motion of pedestal, will not be in direct contact with pedestal 10, to reduce 30 opposite base of loading plate, 10 rotary motion Resistance, and then loading plate 30 can be improved in the precision of 20 opposite base of rotary components, 10 rotary motion, while loading plate 30 It is not in contact with frictional force between pedestal 10 so that workbench operation is more stable.
In conjunction with shown in Fig. 3 and Fig. 4, rotary components 20 include fixed seat 21, rotation sliding sleeve 22 and rotating member 23, fixed seat 21 On pedestal 10, rotation sliding sleeve 22 is set to fixed seat 21, and one end 23a of rotating member 23 is slidably inserted in rotation sliding sleeve 22, other end 23b is connected with loading plate 30;Loading plate 30 can be relatively fixed seat 21 by rotating member 23 and move in this way, the reality It applies in mode, fixed seat 21 is set on pedestal 10, thus when 23 opposite base 10 of rotating member moves, loading plate 30 is with rotating member 23 opposite bases 10 move.In the embodiment, since rotating member 23 is slidably plugged in rotation sliding sleeve 22, thus, turn Moving part 23 can not only be relatively fixed 21 pivoting movement of seat, while can also move up and down in an axial direction;That is, material containing Plate 30 between pedestal 10 with not having axial constraint power so that multiple vertically arranged air floating structures 12 can be reasonably by material containing Plate 30 is suspended in 10 top of pedestal, thus when rotating member 23 is relatively fixed the rotation of seat 21 by rotating sliding sleeve 22, loading plate 30 The rotary motion of opposite base 10 is smaller in the retardance around rotation axis direction, and then loading plate 30 can obtain preferable rotation Stability and kinematic accuracy have effectively ensured machining accuracy of the mechanical equipment to workpiece.
In the above embodiment, rotation sliding sleeve 22 includes rolling bearing, and the inner wheel hub of rolling bearing is sheathed on rotating member 23, The outer wheel hub of rolling bearing is set to fixed seat 21.In this way, the ball between inner wheel hub and outer wheel hub makes rotating member 23 relatively solid The rotary damping of reservation 21 is smaller, so that loading plate 30 is more smoothly with rotating member 23 opposite base, 10 rotary motions. It should be noted that rotating member 23 can be the more regular central rotating body of shaft one kind, can also be irregular cylinder knot Structure can be equally not limited thereto by rotating the rotary motion between the realization loading plate 30 of sliding sleeve 22 and pedestal 10.
In a wherein embodiment, mechanical equipment includes for guiding the guide frame of workbench translational motion (figure In be not shown).Pedestal 10 is equipped with sliding part 13 and drive component, and sliding part 13 is set to the both sides of pedestal 10, and in driving group Under the driving of part, sliding part 13 can be slided along guide frame.It should be noted that sliding part 13 can be provided in 10 phase of pedestal To the sliding block of both sides, guide frame can be sliding slot, and sliding block coordinates with the sliding slot, thus when sliding block is slided along sliding slot, pedestal The 10 just translational motions in mechanical equipment.Certainly, in some embodiments, translational motion of the pedestal 10 in mechanical equipment It can be realized by the linear guide, further, it is also possible to coat protective shell 14 in the side of pedestal 10, protective shell 14 can coat In the opposite sides of pedestal 10 in the direction of movement, it is of course also possible to which the surrounding for being coated on pedestal 10 only exposes sliding part 13 Coordinate with guide frame, to be protected to the component on pedestal 10 by protective shell 14, it is mechanical because occurring when operation to avoid Interference is impaired between failure leads to structure.
In conjunction with shown in Fig. 5, drive component includes linear motor 15, and linear motor 15 is set to the bottom of pedestal 10, and pedestal It is equipped with sensing element 17 in the side of linear motor 15 on 10, sensing element 17 is used to monitor the operating condition of linear motor 15, So that it is guaranteed that precision and the safety of operation.Linear motor 15 can be arranged by mounting plate 15a along the traffic direction of pedestal 10 In the bottom of pedestal 10, and the quantity of linear motor 15 is unrestricted, can be configured as needed, for example, in some realities It applies in mode, two linear motors 15 disposed in parallel may be used and distinguish support in the bottom of pedestal 10, so that pedestal 10 at runtime, and the driving force of both sides is suitable, keeps the movement of pedestal 10 more steady.
In the above embodiment, sensing element 17 can be photoelectric sensor, which is arranged in pedestal 10 At the position of sliding part 13, to which when linear motor 15 drives 10 translational motion of pedestal, sliding part 13 is along guide frame Moving process in can trigger the photoelectric sensor, to realize monitoring to 15 operating condition of linear motor.It needs to illustrate It is that in other embodiments, sensing element 17 may not be photoelectric sensor, the mode that electromagnetic induction may be used is come The operation conditions of monitoring linear motor 15 can be set according to actual needs more in addition, the quantity of sensing element 17 is unrestricted It is a, the both sides of pedestal 10 are separately positioned on, then this is no longer repeated one by one.
For another example shown in Fig. 2, Fig. 3 and Fig. 5, in some embodiments, with vertically arranged between pedestal 10 and loading plate 30 Air floating structure 12 as, in the bottom of pedestal 10 also vertical multiple air floating structures 12, to which pedestal 10 can also be made to be in outstanding Floating state, and then pedestal 10, in mechanical equipment when translational motion, sliding part 13 will be because outstanding with the abutting force between guide frame Reduce under the action of buoyancy, to reduce the friction of motion between sliding part 13 and guide frame, improves the translation of pedestal 10 The stability and kinematic accuracy of movement.It should be noted that in the embodiment, can also be arranged in the bottom of pedestal 10 Shock-damping structure 18 is positioned close to the ground that drive component drives 10 translational motion of pedestal by the shock-damping structure 18 of damper one kind Side, to reduce the vibrations generated on pedestal 10 when drive component work, so that it is guaranteed that the stationarity that pedestal 10 moves.
In the above embodiment, the bottom of pedestal 10 is additionally provided with multiple air floating structures 12 being laterally arranged, should to utilize The multiple air floating structures 12 being laterally arranged form recoil strength in the horizontal direction, specifically, the multiple air supportings being laterally arranged Structure 12 is formed by recoil strength and drives the power being applied to when 30 rotary motion of loading plate on pedestal 10 to constitute with rotary components 20 Reaction force, disturbance when to reduce by 30 10 rotary motion of opposite base of loading plate to pedestal 10 in the horizontal plane maintain base The stability of seat 10.
It should be noted that in the above embodiment, the global shape of pedestal 10 is can be according to workbench in practical life In production configure, for example, pedestal 10 is square, air floating structure 12 is respectively arranged on the four corners of pedestal 10 so that gas The recoil air pressure active force that floating structure 12 is formed is more balanced, and pedestal 10 and loading plate 30 are smoothly maintained at suspended state, It realizes contactless suspension movement, reduces moving resistance, improve operation stability and precision.
It in some embodiments, can also be in the bottom of pedestal 10 by the place setting magnetic structure of proximal edge, magnetic Structure can form magnetic attraction, be applied on pedestal 10 with forming equilibrant force with the lift of gas of air floating structure 12.In this embodiment party In formula, magnetic structure can be magnet 16, magnet 16 can be it is multiple, can according to actual needs, multiple magnet 16 erect respectively To setting and/or laterally setting, in above-below direction and/or horizontal direction plays the role of good magnetic;Due to magnet 16 Magnetic attraction with above-mentioned air floating structure 12 air supporting force direction on the contrary, to make lift of gas and magnetic attraction reach a balance, with Reduce the disturbance in workbench operational process.
In conjunction with shown in Fig. 6, in some embodiments, above-mentioned air floating structure 12 includes floating cushion 121 and air inlet pipe 122. Air inlet pipe 122 is connected with floating cushion 121, and is connected with pedestal 10.It is offered on the pedestal 10 for installation air floating structure 12 Mounting hole 11, the mode that air inlet pipe 122 can be connected through a screw thread are fixed in the mounting hole 11, can also be by being fixed on this Above-mentioned air floating structure 12 is fixed in the mounting base 12a realizations of mounting hole 11.For example, through-hole is offered on mounting base 12a, and External screw thread is set in the one end of air inlet pipe 122 far from floating cushion 121, and then air inlet pipe 122 can pass through the through-hole and nut 12b Screw-thread fit is carried out, and then is locked on pedestal 10.It should be noted that the end face of floating cushion 121 has along edge Annular groove 121a, the side of floating cushion 121 are equipped with the escape pipe 121b being connected with annular groove 121a.Using recessed with annular Timely excessive gas can be discharged by the escape pipe 121b that slot 121a is connected, while can be with while excessive gas is discharged The impurity that operation generates is taken away, so that it is guaranteed that the cleanliness factor of the stability of workbench operation and operating environment.
Each technical characteristic of embodiment described above can be combined arbitrarily, to keep description succinct, not to above-mentioned The all possible combination of each technical characteristic in embodiment is all described, as long as however, the combination of these technical characteristics There is no contradictions, are all considered to be the range of this specification record.
Embodiment described above only expresses the several embodiments of the utility model, and description is more specific and detailed Carefully, but can not the limitation to utility model patent range therefore be interpreted as.It should be pointed out that for the common of this field For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to In the scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.

Claims (10)

1. a kind of workbench, which is characterized in that including pedestal, rotary components and loading plate, the loading plate is set to the base Seat top, and multiple vertically arranged air floating structures are equipped between the pedestal and the loading plate, so that the loading plate phase Suspended state is in the pedestal, the rotary components are for driving the relatively described pedestal rotary motion of the loading plate.
2. workbench according to claim 1, which is characterized in that the rotary components include fixed seat, rotation sliding sleeve and Rotating member, the fixed seat are set on the pedestal, and the rotation sliding sleeve is set to the fixed seat, and one end of the rotating member can Sliding is inserted in the rotation sliding sleeve, and the other end is connected with the loading plate.
3. workbench according to claim 2, which is characterized in that the rotation sliding sleeve includes rolling bearing, the rotation The inner wheel hub of bearing is sheathed on the rotating member, and the outer wheel hub of the rolling bearing is set to the fixed seat.
4. workbench according to claim 1, which is characterized in that the workbench is set to mechanical equipment, and the machinery is set Standby includes the guide frame for guiding the workbench translational motion, and the pedestal is equipped with sliding part and drive component, institute The both sides that sliding part is set to the pedestal are stated, and under the driving of the driving component, the sliding part can be tied along the guiding Structure slides.
5. workbench according to claim 4, which is characterized in that the driving component includes linear motor, the straight line Motor is set to the bottom of the pedestal, and is equipped with sensing element, the induction in the side of the linear motor on the pedestal Element is used to monitor the operating condition of the linear motor.
6. workbench according to claim 4 or 5, which is characterized in that the bottom of the pedestal also is provided with multiple vertically setting The air floating structure set.
7. workbench according to claim 6, which is characterized in that the bottom of the pedestal, which is additionally provided with, multiple to be laterally arranged The bottom difference of the air floating structure, the pedestal is vertically arranged and/or multiple magnet are laterally arranged.
8. workbench according to claim 7, which is characterized in that the air floating structure includes floating cushion and air inlet pipe, institute It states air inlet pipe with the floating cushion to be connected, and is connected with the pedestal.
9. workbench according to claim 8, which is characterized in that the end face of the floating cushion has annular recessed along edge Slot, the side of the floating cushion are equipped with the escape pipe being connected with the annular groove.
10. a kind of mechanical equipment, which is characterized in that including such as claim 1-9 any one of them workbench.
CN201721898812.8U 2017-12-29 2017-12-29 Mechanical equipment and its workbench Active CN207848225U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201721898812.8U CN207848225U (en) 2017-12-29 2017-12-29 Mechanical equipment and its workbench

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Application Number Priority Date Filing Date Title
CN201721898812.8U CN207848225U (en) 2017-12-29 2017-12-29 Mechanical equipment and its workbench

Publications (1)

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CN207848225U true CN207848225U (en) 2018-09-11

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CN201721898812.8U Active CN207848225U (en) 2017-12-29 2017-12-29 Mechanical equipment and its workbench

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110370352A (en) * 2019-05-31 2019-10-25 大族激光科技产业集团股份有限公司 A kind of correction platform

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110370352A (en) * 2019-05-31 2019-10-25 大族激光科技产业集团股份有限公司 A kind of correction platform

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Effective date of registration: 20220727

Address after: 518000 101, building 6, Wanyan Industrial Zone, Qiaotou community, Fuhai street, Bao'an District, Shenzhen City, Guangdong Province

Patentee after: Shenzhen Han's Semiconductor Equipment Technology Co.,Ltd.

Address before: 518051 Dazu laser building, 9 new West Road, North Nanshan District high tech park, Shenzhen, Guangdong

Patentee before: HAN'S LASER TECHNOLOGY INDUSTRY GROUP Co.,Ltd.