CN107065122B - A kind of optical main mirror electromagnetism supporting arrangement and its method - Google Patents
A kind of optical main mirror electromagnetism supporting arrangement and its method Download PDFInfo
- Publication number
- CN107065122B CN107065122B CN201710411630.1A CN201710411630A CN107065122B CN 107065122 B CN107065122 B CN 107065122B CN 201710411630 A CN201710411630 A CN 201710411630A CN 107065122 B CN107065122 B CN 107065122B
- Authority
- CN
- China
- Prior art keywords
- electromagnetism
- cylinder body
- electromagnet
- supporting
- supporting mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/183—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors specially adapted for very large mirrors, e.g. for astronomy, or solar concentrators
Landscapes
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Astronomy & Astrophysics (AREA)
- Sustainable Development (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses a kind of optical main mirror electromagnetism supporting arrangement and its methods, are made of electromagnetism supporting part, electromagnetism targeting part and status monitoring part;Electromagnetism supporting part is mainly made of supporting mass, electromagnet, permanent magnet, upper cylinder body, lower cylinder body etc., for providing supporting force needed for optical main mirror;Electromagnetism targeting part is made of electromagnet, permanent magnet, connection bolt, permanent magnet mounting base, connection bolt etc., provides radial rigidity for guiding supporting mass to move along a straight line, and for supporting arrangement;Status monitoring part is made of bearing sensor, laser micrometer and sensor fixture etc., for monitoring and feeding back electromagnetism supporting arrangement state parameter, to real-time control and regulating support device.The optical main mirror electromagnetism supporting arrangement is used in large-aperture optical main mirror process, the equal accurate adjustable supporting load of multiple spot and support height are provided for primary mirror, mechanical resistance existing for being completely eliminated inside traditional supports has many advantages, such as that precision is high, adjustable, zero leakage.
Description
Technical field
The present invention relates to a kind of optical main mirror electromagnetism supporting arrangement and its methods, especially a kind of to make in test room environmental
It is high can to provide high-precision, high rigidity, adjustable supporting force and bearing for processing optical primary mirror for electricity consumption magnetic supporting and constraint
The optical main mirror electromagnetism supporting arrangement of degree.
Background technique
With the development of aerospace and military science and technology, telescope detectivity is continuously improved, and optical main mirror bore is gradually
Increase, processing bearing difficulty is also increase accordingly, although tradition machinery bearing and hydraulic support can be with by various optimization designs
The problems such as meeting certain performance requirement, but more or less generating supporting force error, hydraulic oil leakage there are internal drag.It develops
Using the highly reliable support apparatus of the high-precision of new method, it is of great significance to massive optics working ability is improved.
In some massive optics bearing at present, electromagnetic force has a small amount of application, supporting mass still need to supporting device other
Components are engaged, and only feedback supports force signal mostly in state-detection process, not can be used directly in optical main mirror
The axial bearing of processing.Use electromagnetic force as main supporting force, electromagnetism guiding device constrains supporting mass freedom of motion, cooperates a variety of
Sensor Real-time Feedback supports parameter, so that it is high to provide high rigidity, high-precision, adjustable supporting force and bearing in the axial direction
Degree, provides constraint rigidity appropriate radially, be constrained on supporting mass can on fixed-direction and move and suitably absorb
Partially radially external applied load.Only by magnetic levitation under supporting mass working condition, other components zero are contacted with supporting arrangement, and aneroid
Subsystem is pressed, therefore zero leakage and without lubrication, between ensure that the cleaning of operation simple and reliable, working environment, preventing part completely
The bearing error that the internal drags such as friction generate.
Summary of the invention
Goal of the invention: in order to overcome the deficiencies in the prior art, the present invention provides a kind of optical main mirror electromagnetism bearing
Devices and methods therefor, the inventive structure is compact, and maintenance is simple, reliable operation, and support accuracy is high, solves existing bearing method and deposits
The problem of.
Technical solution: to achieve the above object, the technical solution adopted by the present invention are as follows:
A kind of optical main mirror electromagnetism supporting arrangement, including electromagnetism supporting arrangement, radial electromagnetism guiding device and state-detection
Device, wherein the electromagnetism supporting arrangement includes cylinder body, axial magnetic guiding device and supporting mass, and the cylinder body is hollow knot
Structure and run through above and below central axis and open up through-hole, the center setting of internal cavities body is in the bearing in " ten " font section
Body, longitudinal axis both ends are protruded in the outside of cavity body;The axial magnetic guiding device is longitudinally arranged at cylinder interior cavity
In, it is correspondingly arranged is formed with one heart by No. two electromagnet and No. two permanent magnets, wherein No. two electromagnet are fixed on the cylinder body
On, No. two permanent magnets are fixed in the transverse ends of the supporting mass;
The radial direction electromagnetism guiding device is fixed on the outside of the cavity body of the cylinder body, including is located at water in same level
The No.1 electromagnet and No.1 permanent magnet of flat setting, the two are correspondingly arranged composition with one heart, and the No.1 electromagnet is fixed on described
On cylinder body, the No.1 permanent magnet is fixed on the longitudinal axis of the supporting mass;
The axial magnetic guiding device and radial electromagnetism guiding device are respectively along the circumferentially symmetrical cloth of cylinder center axis
It sets;
The condition checkout gear includes bearing sensor and laser micrometer, and the bearing sensor is fixed on the branch
The upper end of the longitudinal axis of body is held, the laser micrometer is fixed on the lower outside center of the cylinder body.
Supporting force needed for electromagnetism supporting arrangement provides optical main mirror, electromagnetism guiding device guidance supporting mass move along a straight line and are
Electromagnetism supporting arrangement provides radial rigidity, state monitoring apparatus monitoring and feedback electromagnetism supporting arrangement state parameter, real-time control
With adjusting electromagnetism supporting arrangement.
Further, the No.1 electromagnet and No. two electromagnet are from outside to inside successively by shell, coil and iron core
It forms, magnetic field strength produced by the electromagnet is adjusted according to coil working size of current.Containing cored inside electromagnet
To increase electromagnetism ferromagnetism, the electromagnet generates in energization and generates repulsion between magnetic field and permanent magnet, passes through difference
The interior electromagnet coil current size being distributed of cylinder body is adjusted to adjust generated magnetic field strength in cylinder body, to adjust bearing
The axially and radially support stiffness of body.
Further, the axial magnetic guiding device is arranged symmetrically four groups of No. two electricity circumferentially and in same level
Magnet and No. two permanent magnets, No. two permanent magnets are concentric corresponding respectively with the iron core of described four No. two electromagnet;Described two
Number permanent magnet is mounted in the transverse ends plane of the supporting mass by holding screw.
Further, the radial electromagnetism guiding device is arranged symmetrically four groups of No.1 electricity circumferentially and in same level
Magnet and No.1 permanent magnet, the No.1 permanent magnet are concentric corresponding respectively with the iron core of four No.1 electromagnet;The branch
It holds and permanent magnet mounting base is connected with by connecting pin on the longitudinal axis of body, the No.1 permanent magnet is connected to institute by holding screw
It states in permanent magnet mounting base.
Further, the cylinder body is made of the longitudinal extension connection of upper cylinder body, lower cylinder body and lower cylinder body, the upper cylinder half
It is more than body and the lower cylinder body, lower cylinder body joint face be symmetrical arranged, by connection be bolted together;Upper and lower cylinder body is divided equally
It She Zhi not radial electromagnetism guiding device and axial magnetic guiding device.
Further, the gap of 1-2mm is equipped between the supporting mass and the inboard wall of cylinder block.To avoid supporting mass in diameter
It is directly contacted to cylinder body.
Further, the upper end of the longitudinal axis of the supporting mass has been connected through a screw thread bearing sensor pedestal, leads to thereon
Holding screw is crossed to be connected the bearing sensor;The laser micrometer is connected on laser micrometer connecting plate, the laser
Micrometer connecting plate is connect by connecting bolt with the bottom of the cylinder body.
A kind of method of optical main mirror electromagnetism supporting arrangement, comprising the following steps:
1) axial rigidity is adjusted by adjusting the operating current size of No. two electromagnet, supporting mass is made to rise or decline fortune
It is dynamic;
2) by adjusting the big minor adjustment radial rigidity of operating current of No.1 electromagnet, supporting mass is constrained, makes supporting mass only
There are two directions of motion of axial raising and lowering;
3) laser micrometer positioned at bottom is to supporting mass lower end axis surface-emitting laser, and laser micrometer is by receiving branch
The laser that body lower end axis surface is reflected is held to measure laser micrometer at a distance from supporting mass lower end surface, to measure supporting mass
Displacement.
Supporting mass and upper cylinder body, lower cylinder body etc. occur not contact directly between the components of relative displacement, and supporting mass exists
Without other external resistances in addition to restraining force generated between borne load, self weight and magnetic field and permanent magnet in motion process
Power.
The utility model has the advantages that optical main mirror electromagnetism supporting arrangement provided by the invention and its method are, it can be achieved that large-scale optical main mirror
The adjustment of position and posture in process is supported using this multiple device parallel way, provides the branch of multi-support point for primary mirror
Load, bearing supporting mass are moved up and down by electromagnetic confinement, and supporting mass part does not generate the components of relative motion with other
It directly contacts, has many advantages, such as that precision is high, controllability is strong, easy to operate, effectively eliminate the error of traditional constraints method generation.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention;
Fig. 2 is schematic top plan view of the invention.
Specific embodiment
The present invention is a kind of optical main mirror electromagnetism supporting arrangement and its method, in particular to a kind of large-aperture optical main mirror electricity
Magnetic-type axial direction bearing method can provide accurate adjustable supporting load and support height for processing large-aperture optical main mirror.Optics master
Mirror electromagnetism supporting arrangement is mainly made of electromagnetism supporting part, electromagnetism targeting part and status monitoring part;Electromagnetism supporting part
It is mainly made of supporting mass, electromagnet, permanent magnet, upper cylinder body, lower cylinder body etc., for providing supporting force needed for optical main mirror;Electricity
The compositions such as magnetic steering part major electromagnetic iron, permanent magnet, connection bolt, permanent magnet mounting base, connection bolt, for guiding bearing
Body linear motion, and radial rigidity is provided for supporting arrangement;Status monitoring part mainly by bearing sensor, laser micrometer with
And the composition such as sensor fixture to real-time control and adjusts branch for monitoring and feeding back electromagnetism supporting arrangement state parameter
Bearing apparatus.The optical main mirror electromagnetism supporting arrangement is used in large-aperture optical main mirror process, provides multiple spot phase for primary mirror
Deng accurate adjustable supporting load and support height, be completely eliminated inside traditional supports existing for mechanical resistance, there is essence
The advantages that spending high, adjustable, zero leakage.
The present invention will be further explained with reference to the accompanying drawing.
It is as shown in Figure 1 a kind of optical main mirror electromagnetism supporting arrangement, including electromagnetism supporting arrangement, axial magnetic guiding device
And condition checkout gear, electromagnetism supporting arrangement is by upper cylinder body 12,20, No. two electromagnet of lower cylinder body, No. two permanent magnets 17, supporting masses
19, attachment screw 13 etc. forms, and supporting mass 19 is mounted on upper cylinder body 12 and the connection closure of lower cylinder body 20 is formed by cavity, and
There are certain gap, 19 axis both ends part of supporting mass and upper cylinder body 12 and lower cylinder bodies for 19 circumferential surface of supporting mass and inboard wall of cylinder block
There are certain gaps between 20 centre bores, directly contact in radial direction with cylinder body to avoid supporting mass 19.No. two electromagnet are by outer
Shell 16, coil 15, iron core 14 form, and No. two electromagnet are connected to upper cylinder body 12 and lower cylinder body 20 by attachment screw 13
On, No. two electromagnet are evenly arranged four on upper cylinder body 12 and lower cylinder body 20 respectively with circumferential arrangement, No. two permanent magnets
17 are mounted on two surfaces up and down of supporting mass 19 by holding screw 18, and No. two permanent magnets 17 are respectively in about 19 supporting mass
Two surfaces are four uniformly distributed with circumferential arrangement, correspond with No. two electromagnet, by adjusting upper cylinder body 12 and lower cylinder body
In 20 bodies the operating current size of No. two electromagnet come make supporting mass 19 make rise or descending motion, by No. two electromagnet with
Active force between No. two permanent magnets 17 constrains the movement that supporting mass 19 only has raising and lowering direction, excludes supporting mass 19 and exists
Unnecessary spinning movement occurs and causes to cause to damage to by supporting mass in the bearing course of work.
Radial electromagnetism guiding device is by No.1 electromagnet, No.1 permanent magnet 10, permanent magnet mounting base 8, connecting pin 11, connection
Bolt 1 forms, and No.1 electromagnet is made of shell 2, coil 3, iron core 4, and No.1 electromagnet is connected to by connecting bolt 1
On the connecting hole of upper cylinder body 12 and lower cylinder body 20, No.1 electromagnet is uniform on upper cylinder body 12 and 20 circumferencial direction of lower cylinder body respectively
Arrangement four, permanent magnet mounting base 8 are connected to 19 axis both ends of supporting mass by connecting pin 11, and No.1 permanent magnet 10 passes through clamp screw
Nail 9 is connected in permanent magnet mounting base 8, two permanent magnets installation that No.1 permanent magnet 10 is installed on 19 axis of supporting mass respectively
Four are evenly arranged on the circumferencial direction of seat 8, is corresponded respectively with the No.1 electromagnet being evenly arranged, No.1 electromagnet and one
Repulsion is generated between number permanent magnet, to adjust the radial rigidity of supporting mass 19, passes through and adjusts the big of No.1 work of electromagnet electric current
It is small to adjust radial rigidity size, by the constraint relationship between No.1 electromagnet and No.1 permanent magnet 10, permanent magnet always to
It is mobile by the maximum position of magnetic flux, two directions of motion of the only axial raising and lowering of supporting mass 19 are ensured with this
Freedom degree, play the role of with the constraint relationship of No. two electromagnet consistent, further enhance the constraint relationship.
State detection portion is connected by bearing sensor 5, bearing sensor pedestal 7, laser micrometer 21, laser micrometer
The equal components composition of plate 22, bearing sensor pedestal 7, which is connected through a screw thread, to be mounted on 19 top shaft part of supporting mass, bearing sensor
5 are connected on bearing sensor pedestal 7 by holding screw 6, and large-scale optical main mirror is needed in process using multiple electricity
Magnetic bearing device is supported, and bearing sensor 7 can measure the axial supporting force of each supporting arrangement, thus quantitative analysis quilt
Supporting member state.Laser micrometer 21 is connected on laser micrometer connecting plate 22 by connecting bolt 23, and laser micrometer connects
Fishplate bar 22 is connected on lower cylinder body 20 by connecting bolt 23.Laser micrometer 21 swashs to the transmitting of 19 axis lower end surface of supporting mass
Light, laser micrometer 21 measure laser micrometer 21 and bearing by receiving the laser that 19 lower end axis surface of supporting mass is reflected
The distance of body 19, thus the displacement of real-time measurement supporting mass 19.
Containing cored to increase electromagnetism ferromagnetism inside No. two electromagnet, No. two electromagnet generate magnetic field in energization
Repulsion is generated between No. two permanent magnets 17, by adjusting separately No. two electromagnetism being distributed on the inside of upper cylinder body 12 and lower cylinder body 20
15 size of current of iron coil adjusts generated magnetic field strength in upper cylinder body 12 and lower cylinder body 20, to adjust supporting mass 19
Axial support stiffness.
Containing cored to increase electromagnetism ferromagnetism inside No.1 electromagnet, No.1 electromagnet generates magnetic field in energization
Repulsion is generated between No.1 permanent magnet 10, and one be distributed on the outside of upper cylinder body 12 and lower cylinder body 20 is adjusted separately in the course of work
Number 3 size of current of magnet spool adjusts magnetic field strength caused by No.1 electromagnet, to adjust the radial direction of electromagnetism cylinder
Support stiffness.
Supporting mass 19 and upper cylinder body 12, lower cylinder body 20 etc. occur not contact directly between the components of relative displacement, prop up
Body is held during the motion in addition to restraining force generated between borne load and magnetic field and permanent magnet without outside other
Resistance.
Fig. 2 specifically indicates that bearing electromagnetism cylinder upper cylinder body 12 and lower cylinder body 20 link together by connecting bolt 24.
The above is only a preferred embodiment of the present invention, it should be pointed out that: for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (8)
1. a kind of optical main mirror electromagnetism supporting arrangement, it is characterised in that: including electromagnetism supporting arrangement, radial electromagnetism guiding device and
Condition checkout gear, wherein the electromagnetism supporting arrangement includes cylinder body, axial magnetic guiding device and supporting mass (19), described
Cylinder body is hollow structure and runs through above and below central axis and open up through-hole, and the center setting of internal cavities body is in " ten " word
The supporting mass (19) in type section, longitudinal axis both ends are protruded in the outside of cavity body;The axial magnetic guiding device is set along longitudinal direction
It sets in cylinder interior cavity, is correspondingly arranged is formed with one heart by No. two electromagnet and No. two permanent magnets (17), wherein described No. two
Electromagnet is fixed on the cylinder body, and No. two permanent magnets (17) are fixed in the transverse ends of the supporting mass (19);
The radial direction electromagnetism guiding device is fixed on the outside of the cavity body of the cylinder body, including is located at level in same level and is set
The No.1 electromagnet and No.1 permanent magnet (10) set, the two are correspondingly arranged composition with one heart, and the No.1 electromagnet is fixed on described
On cylinder body, the No.1 permanent magnet (10) is fixed on the longitudinal axis of the supporting mass (19);
The axial magnetic guiding device and radial electromagnetism guiding device are respectively circumferentially arranged symmetrically along cylinder center axis;
The condition checkout gear includes bearing sensor (5) and laser micrometer (21), and the bearing sensor (5) is fixed on
The upper end of the longitudinal axis of the supporting mass (19), the laser micrometer (21) are fixed on the lower outside centre bit of the cylinder body
It sets.
2. a kind of optical main mirror electromagnetism supporting arrangement according to claim 1, it is characterised in that: the No.1 electromagnet and two
Number electromagnet is successively to be made of from outside to inside shell, coil and iron core, and magnetic field strength produced by the electromagnet is according to line
Circle operating current size is adjusted.
3. a kind of optical main mirror electromagnetism supporting arrangement according to claim 1, it is characterised in that: the axial magnetic guiding dress
It sets and is arranged symmetrically four groups of No. two electromagnet and No. two permanent magnets (17), No. two permanent magnets circumferentially and in same level
(17) concentric corresponding respectively with the iron core of described four No. two electromagnet;No. two permanent magnets (17) are installed by holding screw
In the transverse ends plane of the supporting mass (19).
4. a kind of optical main mirror electromagnetism supporting arrangement according to claim 1, it is characterised in that: the radial direction electromagnetism guiding dress
It sets and is arranged symmetrically four groups of No.1 electromagnet and No.1 permanent magnet (10), the No.1 permanent magnet circumferentially and in same level
(10) concentric corresponding respectively with the iron core of four No.1 electromagnet;Pass through connecting pin on the longitudinal axis of the supporting mass (19)
(11) it is connected with permanent magnet mounting base (8), the No.1 permanent magnet (10) is connected to the permanent magnet by holding screw and installs
On seat (8).
5. a kind of optical main mirror electromagnetism supporting arrangement according to claim 1, it is characterised in that: the cylinder body is by upper cylinder body
(12), the longitudinal extension of lower cylinder body (20) and lower cylinder body connection composition, the upper cylinder body (12) and the lower cylinder body (20) with
Upper and lower cylinder body joint face is symmetrical arranged, and is bolted together by connection;Upper and lower cylinder body is respectively set radial electromagnetism and leads
To device and axial magnetic guiding device.
6. a kind of optical main mirror electromagnetism supporting arrangement according to claim 1, it is characterised in that: the supporting mass (19) and institute
State the gap that 1-2mm is equipped between inboard wall of cylinder block.
7. a kind of optical main mirror electromagnetism supporting arrangement according to claim 1, it is characterised in that: the supporting mass (19) is indulged
Bearing sensor pedestal (7) have been connected through a screw thread to the upper end of axis, have been connected the bearing sensor by holding screw thereon
(5);The laser micrometer (21) is connected on laser micrometer connecting plate (22), and the laser micrometer connecting plate (22) is logical
Connection bolt is crossed to connect with the bottom of the cylinder body.
8. a kind of method using such as the described in any item optical main mirror electromagnetism supporting arrangements of claim 1-7, it is characterised in that:
The following steps are included:
1) axial rigidity is adjusted by adjusting the operating current size of No. two electromagnet, supporting mass (19) is made to rise or decline fortune
It is dynamic;
2) it by adjusting the big minor adjustment radial rigidity of operating current of No.1 electromagnet, constrains supporting mass (19), makes supporting mass
(19) two directions of motion of only axial raising and lowering;
3) for the laser micrometer (21) positioned at bottom to supporting mass (19) lower end axis surface-emitting laser, laser micrometer (21) is logical
The laser that reception supporting mass (19) lower end axis surface is reflected is crossed to measure laser micrometer (21) and supporting mass (19) lower end surface
Distance, to measure the displacement of supporting mass (19).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710411630.1A CN107065122B (en) | 2017-06-05 | 2017-06-05 | A kind of optical main mirror electromagnetism supporting arrangement and its method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710411630.1A CN107065122B (en) | 2017-06-05 | 2017-06-05 | A kind of optical main mirror electromagnetism supporting arrangement and its method |
Publications (2)
Publication Number | Publication Date |
---|---|
CN107065122A CN107065122A (en) | 2017-08-18 |
CN107065122B true CN107065122B (en) | 2019-02-19 |
Family
ID=59616395
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201710411630.1A Active CN107065122B (en) | 2017-06-05 | 2017-06-05 | A kind of optical main mirror electromagnetism supporting arrangement and its method |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN107065122B (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109531343A (en) * | 2018-10-19 | 2019-03-29 | 山东中衡光电科技有限公司 | A kind of optical mirror plane magnetic suspension support device |
CN109630495A (en) * | 2018-10-19 | 2019-04-16 | 中国矿业大学 | A kind of diaphragm support cylinder for large optical mirror processing |
CN111337644B (en) * | 2019-12-31 | 2022-04-08 | 三峡大学 | Tunnel stepwise excavation analogue means |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU943626A1 (en) * | 1980-12-17 | 1982-07-15 | Предприятие П/Я А-1705 | Device for fixation of optical mirror in cell |
CN1105467A (en) * | 1992-06-12 | 1995-07-19 | 欧林巴斯光学工业股份有限公司 | Pre-objective scanner with flexible optical support |
JPH0815629A (en) * | 1994-06-30 | 1996-01-19 | Canon Inc | Light deflector |
JP2008245464A (en) * | 2007-03-28 | 2008-10-09 | Hitachi Via Mechanics Ltd | Elecromagnetic actuator, and laser machining equipment |
CN103399389A (en) * | 2013-07-30 | 2013-11-20 | 中国科学院长春光学精密机械与物理研究所 | Primary mirror floating support mechanism with positioning film |
CN103986299A (en) * | 2014-05-04 | 2014-08-13 | 中国科学院长春光学精密机械与物理研究所 | Extrusion type magneto-rheological elastomer force actuator |
CN105182502A (en) * | 2015-07-22 | 2015-12-23 | 中国科学院西安光学精密机械研究所 | Micro stress supporting structure of satellite-borne space reflector |
CN106646817A (en) * | 2016-12-08 | 2017-05-10 | 中国科学院长春光学精密机械与物理研究所 | Telescope main lens mandrel mechanism based on static pressure principle and oiling method |
CN106772917A (en) * | 2016-12-08 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of primary mirror flexible support mechanism |
-
2017
- 2017-06-05 CN CN201710411630.1A patent/CN107065122B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SU943626A1 (en) * | 1980-12-17 | 1982-07-15 | Предприятие П/Я А-1705 | Device for fixation of optical mirror in cell |
CN1105467A (en) * | 1992-06-12 | 1995-07-19 | 欧林巴斯光学工业股份有限公司 | Pre-objective scanner with flexible optical support |
JPH0815629A (en) * | 1994-06-30 | 1996-01-19 | Canon Inc | Light deflector |
JP2008245464A (en) * | 2007-03-28 | 2008-10-09 | Hitachi Via Mechanics Ltd | Elecromagnetic actuator, and laser machining equipment |
CN103399389A (en) * | 2013-07-30 | 2013-11-20 | 中国科学院长春光学精密机械与物理研究所 | Primary mirror floating support mechanism with positioning film |
CN103986299A (en) * | 2014-05-04 | 2014-08-13 | 中国科学院长春光学精密机械与物理研究所 | Extrusion type magneto-rheological elastomer force actuator |
CN105182502A (en) * | 2015-07-22 | 2015-12-23 | 中国科学院西安光学精密机械研究所 | Micro stress supporting structure of satellite-borne space reflector |
CN106646817A (en) * | 2016-12-08 | 2017-05-10 | 中国科学院长春光学精密机械与物理研究所 | Telescope main lens mandrel mechanism based on static pressure principle and oiling method |
CN106772917A (en) * | 2016-12-08 | 2017-05-31 | 中国科学院长春光学精密机械与物理研究所 | A kind of primary mirror flexible support mechanism |
Also Published As
Publication number | Publication date |
---|---|
CN107065122A (en) | 2017-08-18 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN107065122B (en) | A kind of optical main mirror electromagnetism supporting arrangement and its method | |
CN106989078B (en) | The optical main mirror support hydraulic cylinder and its method that a kind of electromagnetism is oriented to | |
CN107238457B (en) | A kind of low thrust measuring device | |
CN203053702U (en) | Dynamic and static stiffness testing device for angular contact ball bearing | |
CN103790895B (en) | Hydraulic cylinder side force assay device | |
CN110864077B (en) | Motor-driven automatic balancing system with autonomous regulation and control capability | |
CN103063392B (en) | Ultra-low frequency modal test gravitational equilibrium system | |
CN204422209U (en) | Thrust hydrodynamic journal liquid polymers reliability test bench | |
CN102436054A (en) | Composite primary reflector supporting device for large telescope | |
CN109765002B (en) | Combined static pressure air bearing supporting mechanism | |
CN109707786B (en) | Electromagnetic type positive and negative rigidity parallel low-frequency vibration isolation device | |
CN108425990B (en) | Three-way adjusting type damper for damping equipment and working method thereof | |
CN103426345B (en) | A kind of experimental provision of compact magnetic levitation worktable | |
CN202938765U (en) | Tool for measuring axial clearance of gear box gear shaft bearing | |
CN101394122B (en) | High-speed main shaft electromagnetic type on-line dynamic balancing method | |
CN103143971A (en) | Pre-drawing structure of ball screw | |
CN110594294A (en) | Magnetic suspension bearing system with detachable thrust disc | |
CN110102764B (en) | Printer support and 3D biological printer based on electromagnetism suspension | |
CN205036663U (en) | Two dimension force feedback formula electro hydraulic servo valve based on case two freedoms | |
CN206160980U (en) | Servo mechanism displacement sensor mounting structure | |
CN107389448B (en) | Guidance set, vertical loading device and Plumb load method | |
CN203197647U (en) | Ball screw prestretching structure | |
US20230025483A1 (en) | Material testing machine | |
CN103234667A (en) | Test method of air-suspending frictionless cylinder | |
CN105150795B (en) | A kind of magnetic levitation balanced axle system |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant |