CN207834541U - A kind of adjustable Meta Materials filter based on mechanical adjustment - Google Patents
A kind of adjustable Meta Materials filter based on mechanical adjustment Download PDFInfo
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- CN207834541U CN207834541U CN201820228238.3U CN201820228238U CN207834541U CN 207834541 U CN207834541 U CN 207834541U CN 201820228238 U CN201820228238 U CN 201820228238U CN 207834541 U CN207834541 U CN 207834541U
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Abstract
The utility model discloses a kind of adjustable Meta Materials filter based on mechanical adjustment.The plane Meta Materials that filter is mutually parallel by two form.The two plane Meta Materials resonance structure distribution period having the same and arragement direction.When changing the relative position between them using mechanical structure, the couple state between resonance structure will change, so as to cause the variation of resonant frequency.Processing and assembly can be completed using Conventional microstructure processing technology in the utility model, is not necessarily to the support of MEMS technology, thus significantly reduces processing cost.The tunable range of the utility model filter is larger simultaneously, and quality factor changes smaller during tuning.The utility model is suitable for microwave, THz wave and light-wave band.
Description
Technical field
The utility model is related to a kind of adjustable Meta Materials filters of frequency based on mechanical adjustment, belong to tunable metamaterial
Technical field.
Background technology
Meta Materials（Metamaterial）It is the function element being made of the sub-wavelength micro structure of periodic arrangement.Its electromagnetism is special
Property it is only related with the micro-structure for constituting it, therefore corresponding electromagnetic property can be obtained by different structure designs.While by
In its small volume, only very thin one layer, therefore there is huge application prospect.Wherein use Meta Materials as filter just
It is an example.Currently, a variety of filters based on Meta Materials have been applied to the fields such as imaging, sensing.But relative to only
The filter of filter with fixed frequency, adjustable frequency obviously more adapts to complicated application demand.It is general common
Meta-material resonant frequency regulative mode mainly has the light-operated adjusting based on semi-conducting material, the automatically controlled adjusting based on grapheme material
With the mechanical adjustment etc. based on structural remodeling.Wherein, although mechanical adjustment mode governing speed is slow, its frequency is adjusted
Range is wide, and the variation of the quality factor of resonance is smaller in frequency-modulating process.
Mechanical adjustment mode is generally required is processed as fixed and movable two parts by each resonant element of Meta Materials, leads to
The relative distance for overregulating the two realizes the adjusting of frequency.Therefore the Meta Materials for using mechanical adjustment mode at present, such as article A
Micromachined Reconfigurable Metamaterial via Reconfiguration of Asymmetric
Split-Ring Resonators （Advanced Functional Materials, 21,3589-3594,2011）And article
Pneumatically Actuated Tunable Terahertz Metamaterial Absorber With Dual-Side
Tuning Capability （IEEE Photonics Journal, 9, 4600409, 2017）In tunable metamaterial,
Rely primarily on MEMS（MEMS, Micro-Electro-Mechanical System）Related processing technology is added
Work.Its processing technology is complicated, and generally requires to carry out three-dimensional multilayer processing or three-dimension process using sacrifice layer process, therefore
The adjustable Meta Materials of mechanical adjustment are often with high costs, are unfavorable for its practical application.How the adjustable super material of mechanical adjustment is reduced
The processing cost of material is the problem that current researcher is faced.
Invention content
In order to solve the above technical problems, the utility model provides a kind of adjustable Meta Materials filtering based on mechanical adjustment
The fixation of resonant element and movable two parts are machined in the identical period on two substrates by device respectively, then again side by side
It is combined as a tunable Meta Materials filter.
The utility model provides following technical solution：A kind of adjustable Meta Materials filter based on mechanical adjustment, it is special
Sign is：Including the first plane Meta Materials, the second plane Meta Materials, horizontal mobile mechanism and pedestal；The super material of first plane
Material is fixed on the pedestal, and the second plane Meta Materials are fixed on the horizontal mobile mechanism, described to move horizontally machine
Structure is fixed on the pedestal；The first plane Meta Materials are put with the second plane Meta Materials with a small spacing is parallel
It sets；The first plane Meta Materials are by substrate and over the substrate surface in the first metal resonant element structure of two-dimensional and periodic distribution
At the second plane Meta Materials are by substrate and over the substrate surface in the second metal resonant element structure of two-dimensional and periodic distribution
At；The first metal resonant element and the second metal resonant element distribution period p having the same and arragement direction.
Further, the first metal resonant element is the split-ring resonator of "u"-shaped, the "u"-shaped
Two-arm along vertical direction；The second metal resonant element by the first metal resonant element "u"-shaped bottom edge
Center is constituted after adding an opening around "u"-shaped geometric center rotation 180 degree.
Further, the first metal resonant element in the same distribution period and the second metal resonant element
Geometric center is in same level.
Further, the spacing of the first plane Meta Materials and the second plane Meta Materials fixes and is less than p/4.
It is possible to further change the first plane Meta Materials and second plane by the horizontal mobile mechanism
The relative position of Meta Materials, to realize the adjusting of resonant frequency；When the first metal resonance structure geometric center and described
When level interval between two metal resonance structure geometric centers increases, the frequency values of the lower LC resonance of frequency are got higher, frequency
The frequency values of higher LC resonance are lower.
This filter is only parallel to polarization direction the linear polarization electromagnetic wave of the vertical direction where the two-arm of "u"-shaped
It works.In use, electromagnetic wave passes through the region that the first plane Meta Materials and the second plane Meta Materials are overlapped in a manner of normal incidence,
It can realize filtering operation.
Compared with prior art, the utility model has the following advantages：
A kind of adjustable Meta Materials filter based on mechanical adjustment provided by the utility model, can with tradition machinery adjusting
It adjusts Meta Materials to compare, simplifies processing technology, significantly reduce processing cost.The utility model filter is super using two plate planes
Material parallel is composed, and can be only processed by the conventional two-dimentional micro-structure processing technology such as photoetching or laser ablation.By
The required MEMS processing technologys of Meta Materials processing are adjusted in avoiding tradition machinery, particularly without use multilayer processing or are stood
The Three-dimension process techniques such as body processing, thus significantly reduce processing cost.
Adjustable Meta Materials filter provided by the utility model, there are two bands to hinder resonance, and two band resistance resonance for tool
Centre frequency can be carried out adjusting.Wherein low-frequency resonant is the LC resonance of the first metal resonance structure（Inductor-capacitor is humorous
It shakes）, but its resonant frequency is influenced by the second metal resonance structure.High-frequency resonant is that the LC of the second metal resonance structure is humorous
It shakes, equally, resonant frequency is influenced by the first metal resonance structure.Change the super material of the first plane using horizontal mobile mechanism
The relative position of material and the second plane Meta Materials, you can change the electromagnetic coupling state between two metal resonance structures, to real
The adjusting of existing two resonant frequencies.
Description of the drawings
Fig. 1 is adjustable Meta Materials filter construction schematic diagram of the utility model based on mechanical adjustment；
Fig. 2 is the first plane metamaterial structure schematic diagram；
Fig. 3 is the second plane metamaterial structure schematic diagram；
Fig. 4 is in the opposite position of the first plane Meta Materials and the second plane Meta Materials on the direction of plane Meta Materials
Set schematic diagram；
Fig. 5 is frequency response curve of the utility model filter within the scope of 0-1 Terahertzs；
Fig. 6 is the relation curve of low-frequency resonant frequency and relative position dx；
Fig. 7 is the relation curve of high-frequency resonant frequency and relative position dx.
Specific implementation mode
Below in conjunction with attached drawing, by taking the adjustable Meta Materials filter based on mechanical adjustment for working in terahertz wave band as an example,
Specific embodiment of the present utility model is described in detail.
Fig. 1 is the structural schematic diagram of the utility model filter.As shown in Figure 1, filter is by the first plane Meta Materials
（1）, the second plane Meta Materials（2）, horizontal mobile mechanism（3）And pedestal（4）It constitutes.First plane Meta Materials（1）It is vertical fixed
In pedestal（4）On.Second plane Meta Materials（2）It is vertically fixed on horizontal mobile mechanism（3）On, horizontal mobile mechanism（3）It is fixed
In pedestal（4）On.First plane Meta Materials（1）With the second plane Meta Materials（2）It is placed with a small spacing keeping parallelism.This
Utility model is to horizontal mobile mechanism（3）Specific implementation form do not provide, motorized precision translation stage, piezoelectricity may be used in practice
Driver or closely-pitched screw driver etc..Positioning accuracy is used to make for 0.1 micron of Piezoelectric Driving translation stage in the present embodiment
For horizontal mobile mechanism（3）.
As shown in Fig. 2, the first plane Meta Materials（1）By substrate（11）With in substrate（11）In two-dimensional and periodic point on surface
First metal resonant element of cloth（12）It constitutes.Substrate（11）The Kapton for being 12.5 microns for a layer thickness.Due to
Kapton is flexible material, itself can not be placed vertically.Therefore it needs at film dorsal edge, pastes a rectangle
Metal frame, so that Kapton can be placed entirely vertically.First metal resonant element（12）It is humorous for " u "-shaped split ring
Shake device, and the two-arm of "u"-shaped is along vertical direction.The rectangular " u "-shaped that bottom edge shown in Fig. 2 is straight is selected in the present embodiment
Split-ring resonator.The arc-shaped " u "-shaped split-ring resonator in bottom edge also is used as the first metal resonant element（12）.This implementation
In example, the length of "u"-shaped periphery and it is wide be all 100 microns, the width on two-arm and bottom edge is all 10 microns.First metal resonance
Unit（12）Distribution period in horizontal and vertical both direction is all 200 microns.
As shown in figure 3, the second plane Meta Materials（2）By substrate（21）With in substrate（21）In two-dimensional and periodic point on surface
Second metal resonant element of cloth（22）It constitutes.Substrate（21）The Kapton for being 12.5 microns for a layer thickness.To make
It is fixed vertically, at film dorsal edge, is adhesive with rectangular metal frame.Second metal resonant element（22）It is humorous by the first metal
Shake unit（12）"u"-shaped bottom edge center add after the opening that width is 10 microns in the geometry of "u"-shaped
The heart rotates 180 degree and constitutes.I.e. the two-arm of the second metal resonant element and the first metal resonant element is in the opposite direction.Second
Metal resonant element（22）With the first metal resonant element（12）Distribution period p and arragement direction having the same.That is the second gold medal
Belong to resonant element（22）Distribution period in horizontal and vertical both direction is all 200 microns.
First plane Meta Materials（1）With the second plane Meta Materials（2）Spacing needs immobilize and be less than p/4.This reality
It applies a medium spacing and is selected as 1 microns, be less than p/4（50 microns）.When filter assembles, by the second plane Meta Materials（2）Installation
In horizontal mobile mechanism（3）Mobile station side, and in the first plane Meta Materials（1）With the second plane Meta Materials（2）Between add 1
The thick interval film of micron.It waits for the first plane Meta Materials（1）Fixed to pedestal（4）Afterwards, finally interval film is taken away again.Such as
Fruit uses not to be had to absorb to THz wave and the smaller material of refractive index is as interval film, after finally fixed, can be protected
Stay in two plane Meta Materials（1 and 2）It is intermediate.
As shown in figure 4, the first metal resonant element in the same distribution period（12）With the second metal resonant element（22）
Geometric center in same level.Two metal resonant elements（12 and 22）Throwing of the geometric center in Meta Materials plane
Shadow distance is denoted as dx.Obviously, using horizontal mobile mechanism（3）The value of dx can be changed.
Horizontal mobile mechanism（3）The second plane Meta Materials can be carried（2）It moves in the horizontal direction, to realize to resonance frequency
The adjusting of rate.When relative distance d x is zero, the lower LC resonance of frequency has minimum frequency values, the higher LC resonance of frequency
With highest frequency values.When relative distance d x increases, no matter increase towards that direction, the frequency of the lower LC resonance of frequency
Rate value is got higher, and the frequency values of the higher LC resonance of frequency are lower.
In use, THz wave is overlapped perpendicular to plane Meta Materials by the first plane Meta Materials and the second plane Meta Materials
Region.THz wave needs for linear polarization THz wave.The polarization direction of THz wave is vertically.THz wave can be with
The first plane Meta Materials are first passed through, the second plane Meta Materials can also be first passed through.
The present embodiment filter is as shown in Figure 5 to the filter effect of THz wave.Three curves in Fig. 5 are respectively dx=0
When micron, dx=10 micron, dx=20 micron, pass through the frequency response song for the present embodiment filter that finite element algorithm is calculated
Line.As can be seen from Figure 5, there are two resonant frequencies within the scope of 0.1-0.9 Terahertzs for the present embodiment filter.The two resonant frequencies
It is respectively derived from the LC resonance of metal resonance structure in two plane Meta Materials, and simultaneously by another plane in same period
The influence of metal resonance structure in Meta Materials.Therefore two metal resonant elements couple state directly influence two response
Frequency values.The relative position for changing two plane Meta Materials by horizontal mobile mechanism, will have a direct impact on to two metal resonance
The couple state of unit, to change resonant frequency.
Wherein low-frequency resonant frequency is as shown in Figure 6 with the variation relation of relative position dx.Low-frequency resonant frequency is micro- in dx=0
There is minimum 0.319 Terahertz of frequency values at rice, there is 0.374 Terahertz of highest frequency values at dx=± 44 microns.Its
Opposite adjustable extent（2(fmax-fmin)/(fmax+fmin)）It is 15.9%.Adjustable range is smaller but quality in adjustment process
The factor is held essentially constant.
High-frequency resonant frequency is as shown in Figure 7 with the variation relation of relative position dx.High-frequency resonant frequency is at dx=0 micron
With 0.853 Terahertz of highest frequency values, there is minimum 0.540 Terahertz of frequency values at dx=± 50 microns.It is opposite
Adjustable extent is 44.9%.Adjustable range is larger, but is gradually reduced with the increase quality factor of frequency in adjustment process.
Since the adjusting of two resonant frequencies is all by changing the first metal resonance structure and the second gold medal in same period
Belong to the phase position between resonance structure and realized to change its electromagnetic coupling state, therefore, not only such as the utility model institute
It states, relative position in the horizontal direction changes the adjusting that resonant frequency may be implemented, and changes in the relative position of vertical direction
The adjusting of resonant frequency can be realized by changing with the spacing of two plane Meta Materials.
In the utility model, the material of metal resonance structure can be gold, silver, copper, aluminium, nickel, zinc, molybdenum, iron, magnesium etc., this reality
This is not limited with novel.
In summary, there are two tunable humorous for the adjustable Meta Materials filter tool based on mechanical adjustment of the utility model
Vibration frequency.Filter is processed and only designs conventional lithographic or laser etching process in assembling process, is supported without MEMS technology,
Thus its processing technology is simple, and processing cost is low, easy to spread.The utility model can be applied to microwave section, terahertz wave band,
Even optical band.
Claims (5)
1. a kind of adjustable Meta Materials filter based on mechanical adjustment, it is characterised in that：Including the first plane Meta Materials, second flat
Face Meta Materials, horizontal mobile mechanism and pedestal；The first plane Meta Materials are fixed on the pedestal, and second plane is super
Material is fixed on the horizontal mobile mechanism, and the horizontal mobile mechanism is fixed on the pedestal；First plane is super
Material and the second plane Meta Materials are placed in parallel with a small spacing；The first plane Meta Materials are by substrate and in base
It is constituted in the first metal resonant element of two-dimensional and periodic distribution on piece surface, the second plane Meta Materials are by substrate and in base
It is constituted in the second metal resonant element of two-dimensional and periodic distribution on piece surface；The first metal resonant element and described second
Metal resonant element distribution period p having the same and arragement direction.
2. the adjustable Meta Materials filter according to claim 1 based on mechanical adjustment, which is characterized in that same distribution week
The geometric center of the first metal resonant element and the second metal resonant element in phase is in same level.
3. the adjustable Meta Materials filter according to claim 1 based on mechanical adjustment, which is characterized in that described first is flat
The spacing of face Meta Materials and the second plane Meta Materials fixes and is less than p/4.
4. the adjustable Meta Materials filter according to claim 1 based on mechanical adjustment, which is characterized in that first gold medal
Belong to the split-ring resonator that resonant element is "u"-shaped, the two-arm of the "u"-shaped is along vertical direction；Described second
Metal resonant element by the first metal resonant element "u"-shaped bottom edge center add one opening after around " U "
Shape construction geometry center rotates 180 degree and constitutes.
5. the adjustable Meta Materials filter according to claim 4 based on mechanical adjustment, which is characterized in that institute can be passed through
The relative position that horizontal mobile mechanism changes the first plane Meta Materials and the second plane Meta Materials is stated, to realize resonance
The adjusting of frequency；When between the first metal resonance structure geometric center and the second metal resonance structure geometric center
When level interval increases, the frequency values of the lower LC resonance of frequency are got higher, and the frequency values of the higher LC resonance of frequency are lower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820228238.3U CN207834541U (en) | 2018-02-09 | 2018-02-09 | A kind of adjustable Meta Materials filter based on mechanical adjustment |
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| CN201820228238.3U CN207834541U (en) | 2018-02-09 | 2018-02-09 | A kind of adjustable Meta Materials filter based on mechanical adjustment |
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| CN207834541U true CN207834541U (en) | 2018-09-07 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108123192A (en) * | 2018-02-09 | 2018-06-05 | 中国计量大学 | A kind of adjustable Meta Materials wave filter based on mechanical adjustment |
| CN113594707A (en) * | 2021-07-23 | 2021-11-02 | 浙江大学 | Tunable terahertz filter based on folded paper metamaterial |
-
2018
- 2018-02-09 CN CN201820228238.3U patent/CN207834541U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108123192A (en) * | 2018-02-09 | 2018-06-05 | 中国计量大学 | A kind of adjustable Meta Materials wave filter based on mechanical adjustment |
| CN108123192B (en) * | 2018-02-09 | 2020-06-30 | 中国计量大学 | Adjustable metamaterial filter based on mechanical adjustment |
| CN113594707A (en) * | 2021-07-23 | 2021-11-02 | 浙江大学 | Tunable terahertz filter based on folded paper metamaterial |
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