CN113594707A - Tunable terahertz filter based on folded paper metamaterial - Google Patents

Tunable terahertz filter based on folded paper metamaterial Download PDF

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Publication number
CN113594707A
CN113594707A CN202110837663.9A CN202110837663A CN113594707A CN 113594707 A CN113594707 A CN 113594707A CN 202110837663 A CN202110837663 A CN 202110837663A CN 113594707 A CN113594707 A CN 113594707A
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China
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layer
metal
tunable terahertz
filter based
metamaterial
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CN202110837663.9A
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Chinese (zh)
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吴雨思
佟文元
许欣林
宋吉舟
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Zhejiang University ZJU
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Zhejiang University ZJU
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0086—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices having materials with a synthesized negative refractive index, e.g. metamaterials or left-handed materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/002—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices being reconfigurable or tunable, e.g. using switches or diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • H01Q15/0026—Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective said selective devices having a stacked geometry or having multiple layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01Q—ANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00—Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/24—Polarising devices; Polarisation filters 

Abstract

The invention discloses a tunable terahertz filter based on folded paper metamaterial, wherein a basic unit of the filter is a composite structure consisting of a metal layer, a substrate layer and an elastomer layer which are sequentially arranged from top to bottom, the metal layer is two metal rings, a notch is formed in the middle of one side of each metal ring, the notches of the two metal rings are opposite in position, the substrate layer consists of two bonding ends, three creases and two middle parts, the two bonding ends are positioned at the two ends of the substrate layer and bonded on the stretched elastomer layer, a plurality of filter units are periodically and uniformly distributed to form the tunable terahertz filter of an array, and the tunable terahertz filter is provided with staggered and parallel periodic arrangement modes which can respectively regulate and control linearly polarized waves and circularly polarized waves; the invention has simple structure, realizes the deformation of a plane structure into a three-dimensional structure by utilizing a paper folding structure and the mechanical regulation and control of the three-dimensional structure, thereby realizing the characteristic of tuning, being an innovation in the field of controllable three-dimensional deformation structures and having remarkable social and economic benefits.

Description

Tunable terahertz filter based on folded paper metamaterial
Technical Field
The invention belongs to the technical field of electromagnetic functional devices, and particularly relates to a tunable terahertz filter based on a folded paper metamaterial.
Background
Terahertz waves (THz) are located between millimeter waves and light waves, and the frequency range is 0.1THz-10 THz. Terahertz waves have the advantages of coherence, low energy, penetrability, instantaneity and the like, are widely applied to the aspects of medical treatment, detection, communication, safety and the like, but have high requirements on the development and preparation of devices with terahertz control and modulation functions, such as terahertz switches, polaroids, lenses and the like in terahertz technical research.
The metamaterial refers to a class of artificial materials with special properties, which have special properties, such as that light and electromagnetic waves change the general properties of the metamaterial, and the metamaterial has no special features in composition, and the peculiar properties of the metamaterial are derived from the precise geometric structure and the size, wherein the size of a microstructure is smaller than the wavelength of the terahertz wave, so that the terahertz wave band functional material and the terahertz wave band functional device can be influenced. Most of the existing metamaterial filters do not have a tunable function and cannot realize continuous regulation and control of relevant parameters of sound, electricity and magnetic fields.
Controllable three-dimensional deformation structures are widely applied to the design of various micro components such as biomedical devices, microelectronic elements, electromagnetic metamaterials, energy storage units and the like. Compared with the traditional planar structure, the three-dimensional mechanical adjustable structure has a larger application prospect, for example, a functional device unit is added, and the continuous regulation and control of related parameters of sound, electricity and magnetic fields can be realized through some special structural designs, so that the planar material has excellent performance, however, the existing three-dimensional mechanical adjustable structure metamaterial has certain limitation, and has no more competitiveness compared with the existing more advanced and mature semiconductor material.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention provides a tunable terahertz filter based on a folded paper metamaterial.
In order to achieve the purpose, the invention adopts the technical scheme that:
a tunable terahertz filter based on folded paper metamaterial is formed by periodically and uniformly arranging a plurality of filter units, wherein each filter unit is of a composite structure formed by sequentially superposing a metal layer, a substrate layer and an elastomer layer from top to bottom, the metal layer is two metal rings, a notch is formed in the middle of one side of each metal ring, the notches of the two metal rings are opposite in position, the substrate layer is formed by two bonding ends, three crease parts and two middle parts, the two bonding ends are located at the two ends of the substrate layer and bonded on the elastomer after stretching deformation; the two middle parts are connected through one of the crease parts and connected with the bonding ends at the two ends through the other two crease parts; the two metal rings are respectively arranged on the upper surfaces of the two middle parts. A plurality of filter units are periodically and uniformly arranged to form the tunable terahertz filter of the array, wherein two periodic arrangement modes of staggering and paralleling can respectively regulate and control linear polarized waves and circular polarized waves.
The invention principle of the invention is as follows: the paper folding structure is a structure similar to folding paper, can convert a plane material into a three-dimensional form with unique mechanical properties such as stretchability and multiple stability, and designs a folding metamaterial with excellent characteristics according to a paper folding structure prototype. The base layer of the present invention forms a paper-folded structure on the elastomer layer.
The invention has the beneficial effects that: the tunable terahertz filter based on the folded paper metamaterial is simple in structure, the folded paper structure is utilized to deform a plane structure into a three-dimensional structure, and mechanical regulation and control of the three-dimensional structure are achieved, so that the tunable terahertz filter has the characteristic of achieving tuning, is an innovation in the field of controllable three-dimensional deformation structures, and has remarkable social and economic benefits.
Drawings
Fig. 1 is an exploded view of the filter cell structure of the present invention.
Fig. 2 is a side view of the filter cell structure of the present invention.
Fig. 3 is a schematic diagram of a first periodic structure of the filter of the present invention.
Fig. 4 is a schematic diagram of a second periodic structure of the filter of the present invention.
Fig. 5 is an insertion loss curve of a terahertz filter obtained by theoretical calculation in the first periodic structure embodiment of the present invention.
Fig. 6 is an insertion loss curve of the terahertz filter obtained by theoretical calculation in the second periodic structure embodiment of the present invention for the left-handed wave and the right-handed wave at a bending angle of 45 °.
Fig. 7 is a circular dichroism spectrum of a terahertz filter obtained by theoretical calculation in a second periodic structure embodiment of the present invention.
Fig. 8 is a schematic diagram of a bending deformation implementation process of the terahertz filter of the present invention.
Detailed Description
The invention is described in further detail below with reference to the figures and specific examples.
The invention provides a tunable terahertz filter based on a folded paper metamaterial, which has a unit structure shown in figure 1 and comprises a metal layer 1, a substrate layer 2 and an elastomer layer 3 which are sequentially arranged from top to bottom.
The metal layer 1 is two square rings made of Au, the substrate layer 2 is a rectangle made of PI, and the elastomer layer 3 is a rectangle made of polydimethylsiloxane.
The metal layer 1 is two square rings with a gap 101 in the middle, the side length is 120 μm, the width of the ring is 24 μm, and the length of the gap 101 is 16 μm. The notch 101 is oriented parallel to the bending direction of the filter.
The base layer 2 comprises two bonding ends 202, three folds 201 and two middle parts, wherein the bonding ends 202 are rectangles with the width of 60 μm and the length of 213 μm, the folds 201 at the two ends are rectangles with the width of 10 μm and the length of 170 μm, the fold 201 at the middle part is a rectangle with the width of 20 μm and the length of 170 μm, and the fold 201 at the middle part is a rectangle with the length of 205 μm and the width of 170 μm.
The elastomer layer 3 is a pre-stretched and deformed elastomer with a length of 50mm and a width of 30 mm.
The thickness hm of the metal layer 1 is 1 μm, the thickness hp of the bonding end 202 and the middle part of the substrate layer 2 is 10 μm, and the thickness hc of the crease 201 is 5 μm.
The preparation process of the tunable terahertz wave filter comprises the following steps:
step 1, cleaning: washing the round glass with acetone, alcohol and deionized water in sequence, and drying for later use;
step 2, preparing a PI substrate layer 2: spin-coating PI glue at 2000r/min for 60s, and baking at 120 deg.C for 180 min;
step 3, preparing a metal layer 1: adopting positive glue AZ5214 to etch a metal layer pattern on the substrate layer, using an electron beam evaporation method to evaporate metal Au (1um) on the metal layer pattern, then putting the metal Au (1um) into acetone, using a stripping method to strip redundant metal, then washing with deionized water and drying;
step 4, etching the peripheral pattern of the PI substrate layer 2: photoetching a PI peripheral pattern by adopting positive photoresist AZ5214, evaporating a metal shielding layer Al (0.2um) on the PI peripheral pattern by using an electron beam evaporation method, then putting the PI peripheral pattern into acetone, stripping the metal shielding layer by using a stripping method, washing with deionized water, drying, and etching for 4 hours by using a plasma etching process to obtain a peripheral pattern of a PI substrate layer 2;
step 5, etching the crease 201 of the PI substrate layer 2: photoetching a PI crease 201 pattern by using positive photoresist AZ5214, evaporating a metal shielding layer Al (0.2um) on the PI crease 201 pattern by using an electron beam evaporation method, then putting the PI crease into acetone, stripping the metal shielding layer by using a stripping method, then washing with deionized water, drying, and then etching for 2 hours by using a plasma etching process to obtain the crease 201 of the PI substrate layer 2, thereby obtaining two bonding ends 202 and two middle parts;
step 6, preparing a silicon dioxide bonding layer for bonding the base layer 2 and the elastomer layer 3: photoetching a silicon dioxide bonding layer pattern by adopting a positive glue AZ5214, and evaporating a silicon dioxide bonding layer SiO on the pattern by using an electron beam evaporation method2(0.1um), then put into acetone,stripping off redundant silicon dioxide by using a stripping method, washing with deionized water, and drying to obtain a two-dimensional precursor;
and 7, releasing: soaking the obtained two-dimensional precursor in BOE release solution for 6 hours to release the two-dimensional precursor from the glass substrate and transferring the two-dimensional precursor to a water-soluble adhesive tape;
step 8, preparing a polydimethylsiloxane flexible film (elastomer layer 3): the polydimethylsiloxane prepolymer and curative were mixed at a ratio of 15: 1, uniformly mixing and introducing into a mould, heating at 85 ℃ for 240 minutes, and curing to obtain a polydimethylsiloxane flexible film;
and 9, adhering the two-dimensional precursor on the prepared water-soluble adhesive tape to a polydimethylsiloxane flexible film, and heating at 110 ℃ for 10 minutes. And (4) soaking the terahertz wave filter in water to remove the water-soluble adhesive tape, thus obtaining the tunable terahertz wave filter.
Theoretical calculation is carried out on the terahertz filter:
fig. 5 is a simulation result of insertion loss of the terahertz filter with the first periodic arrangement structure (the staggered arrangement manner shown in fig. 3) by using a time-domain finite integration algorithm, and it can be seen that the central frequency of the terahertz filter changes with the change of the bending angle, so that different filtering requirements can be realized by mechanically adjusting the bending angle.
Fig. 6 is a simulation result of the insertion loss of the terahertz filter of the second periodic arrangement structure (the parallel arrangement shown in fig. 4) for the left-handed wave and the right-handed wave when the bending angle (the angle formed by the middle portion and the elastomer layer 3) is 45 ° by the time domain finite integration algorithm, and it can be seen that the structure has a significant difference in the absorption degrees for the left-handed wave and the right-handed wave.
Fig. 7 is a circular dichroism spectrum of a terahertz filter with a second periodic arrangement structure, and continuous control of circular dichroism from absent to present and from small to large can be realized by increasing a bending angle.
The invention has simple structure, realizes the deformation of a plane structure into a three-dimensional structure by utilizing a paper folding structure and the mechanical regulation and control of the three-dimensional structure, thereby realizing the characteristic of tuning, being an innovation in the field of controllable three-dimensional deformation structures and having remarkable social and economic benefits.

Claims (6)

1. A tunable terahertz filter based on folded paper metamaterial is formed by periodically and uniformly arranging a plurality of filter units, and is characterized in that the filter units are of a composite structure consisting of a metal layer (1), a base layer (2) and an elastomer layer (3) which are sequentially arranged from top to bottom; the metal layer (1) comprises two metal rings, a gap (101) is formed in the middle of one side of each metal ring, and the positions of the gaps of the two metal rings are opposite; the base layer (2) is composed of two bonding ends (202), three crease portions (201) and two middle portions, wherein the two bonding ends (202) are positioned at two ends of the base layer and bonded on the elastic body layer (3) after stretching deformation, and the two middle portions are connected through one crease portion and connected with the bonding ends at the two ends through the other two crease portions; the two metal rings are respectively arranged on the upper surfaces of the two middle parts.
2. The tunable terahertz filter based on the origami metamaterial according to claim 1, wherein the filter unit adopts two periodic arrangement modes of interleaving and parallel arrangement, and is respectively used for regulating and controlling linearly polarized waves and circularly polarized waves.
3. The tunable terahertz filter based on origami metamaterial according to claim 1, wherein the metal ring is a square ring made of Au, the base layer (2) is made of PI, and the material of the elastomer layer (3) is polydimethylsiloxane.
4. The tunable terahertz filter based on origami metamaterial according to claim 3, wherein the side length of the metal layer (1) is 120 μm, the annular width of the metal ring is 24 μm, and the length of the notch (101) is 16 μm.
5. The tunable terahertz filter based on origami metamaterial according to claim 1, wherein the elastomer layer (3) is rectangular, and the connection direction of the structures of the base layer (2) is parallel to the long side of the elastomer layer (3); the bonding end (202) is a rectangle with the width of 60 μm and the length of 213 μm, the folds (201) at the two ends are rectangles with the width of 10 μm and the length of 170 μm, the fold (201) at the middle is a rectangle with the width of 20 μm and the length of 170 μm, and the fold (201) at the middle is a rectangle with the length of 205 μm and the width of 170 μm.
6. The tunable terahertz filter based on origami metamaterial according to claim 1, wherein the thickness of the metal layer (1) is 1 μm, the thickness of the bonding end (202) and the middle part of the substrate layer (2) are equal and 10 μm, and the thickness of the crease part (201) is 5 μm.
CN202110837663.9A 2021-07-23 2021-07-23 Tunable terahertz filter based on folded paper metamaterial Pending CN113594707A (en)

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Application publication date: 20211102