CN207787348U - A kind of target flatness correcting device - Google Patents
A kind of target flatness correcting device Download PDFInfo
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- CN207787348U CN207787348U CN201721749276.5U CN201721749276U CN207787348U CN 207787348 U CN207787348 U CN 207787348U CN 201721749276 U CN201721749276 U CN 201721749276U CN 207787348 U CN207787348 U CN 207787348U
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- mounting plate
- base station
- pressure head
- guidance set
- target
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Abstract
The utility model is related to target flatness correcting devices, including base station, the detection device of detection target flatness and the apparatus for correcting for the target progress flatness correction being arranged on the base station after being detected to device after testing on the base station.The target flatness correcting device can detect target flatness and carry out flatness correction to the target after detection, to which discarded target is re-used, the waste for avoiding resource, reduces production cost, also improves uniformity of the target material surface by the plated film of sputtering.
Description
Technical field
The utility model is related to correcting devices, more specifically to a kind of target flatness correcting device.
Background technology
In the prior art, the general method using sputtering plates thin film in target material surface, and target material surface is smooth
Degree will influence the uniformity of plated film, and if target uneven surface is directly listed in waste product and does not use, to make
At the waste of resource, production cost is also increased.
Utility model content
The technical problem to be solved by the present invention is to target material surface unevenness can be solved by providing one kind, be easy to make
At the target correcting device of the target wasting of resources.
Technical solution adopted by the utility model to solve its technical problems is：A kind of correction of target flatness is constructed to set
It is standby, including base station, on the base station detect target flatness detection device and be arranged on the base station to warp
Target after detection device detection carries out the apparatus for correcting of flatness correction.
Preferably, the apparatus for correcting includes at least one correction pressure head being mounted on the base station, mounted on described
For the correction pressure head along the guidance set that Y direction and X-direction move reciprocatingly, mounted on band on the base station on base station
The transmission device and the transmission device that the dynamic correction pressure head moves reciprocatingly in the guidance set upper edge Y direction connect
It connects the driving mechanism for driving the drive and connect drive on the base station and with the correction pressure head
The correction pressure head does the dynamical element moved repeatedly in the guidance set upper edge X-direction.
Preferably, the guidance set includes setting and does reciprocal fortune along X-direction for the correction pressure head on the base station
Dynamic the first guidance set and being arranged on the base station second is led for the correction pressure head along what Y direction moved reciprocatingly
To component.
Preferably, it is equipped with above first guidance set and is driven on first guidance set by the dynamical element
First mounting plate to move reciprocatingly；Second guidance set is equipped with the second installation for installing the correction pressure head
Plate.
Preferably, first guidance set includes the first guide rail being arranged on the base station and is set in described
Drive first mounting plate to be moved back and forth on first guide rail first is connect on one guide rail with first mounting plate
Sliding block；First sliding block is arranged in first mounting plate bottom and is fixedly connected with first mounting plate.
Preferably, second guidance set is arranged on first mounting plate；Second guidance set includes setting
It sets the second guide rail on first mounting plate and is set on second guide rail and is fixed with second mounting plate
Second sliding block of connection.
Preferably, the apparatus for correcting further includes being arranged that the correction pressure head is driven to lift on second mounting plate
Lifting cylinder and with the lifting cylinder and correction pressure head is connect and adjustable connecting rod；The one of the connecting rod
End is flexibly connected by the way that rotating mechanism is arranged with the correction pressure head.
Preferably, the dynamical element is telescopic cylinder；The telescopic cylinder and first guide rail be arranged in parallel and with
The first mounting plate connection drives first mounting plate to move reciprocatingly on first guide rail；
The transmission device includes that setting is connect with the driving mechanism by the driving machine on first mounting plate
The lead screw of structure driving；The lead screw is connect with the detection device drives the detection device to be done on second guide rail back and forth
Movement.
Preferably, the driving mechanism is motor, and the motor is mounted on first mounting plate.
Preferably, the detection device includes infrared detection probe and ultrasonic detecting probe.
The target flatness correcting device for implementing the utility model, has the advantages that：The target flatness is corrected
Equipment by the installation detecting device on base station and setting apparatus for correcting, target flatness can be detected and to detection after
Target carry out flatness correction, to which discarded target is re-used, avoid the waste of resource, reduce generation at
This, also improves uniformity of the target material surface by the plated film of sputtering.
Description of the drawings
Below in conjunction with accompanying drawings and embodiments, the utility model is described in further detail, in attached drawing：
Fig. 1 is the front view of the utility model target flatness correcting device；
Fig. 2 is the partial structural diagram of the detection device of the utility model target flatness correcting device.
Specific implementation mode
For a clearer understanding of the technical features, objectives and effects of the utility model, now control attached drawing is detailed
Illustrate specific embodiment of the present utility model.
Fig. 1 and Fig. 2 shows a preferred embodiments of the utility model target flatness correcting device.
The target that the target flatness correcting device can discard those because of uneven surface carries out flatness and rectifys
Just, so that these targets is re-used, avoid resulting in waste of resources, also reduce production cost.
As shown in Figure 1, the target flatness correcting device, including base station 11, to be mounted on detection target on the base station 11 flat
The detection device 12 of smooth degree and the target being arranged on the base station 11 after being detected to device 12 after testing carry out flatness correction
Apparatus for correcting 13.The base station 11 can fix the detection device 12 and the apparatus for correcting 13, can also be used as the detection device
12 and the apparatus for correcting 13 workbench；The detection device 12 can be detected the flatness of target and feed back testing result
To apparatus for correcting 13；The apparatus for correcting 13 can according to the result that the detection device 12 is fed back to the flatness of the target material surface into
Row correction.
The detection device 12 may be provided on the apparatus for correcting 13, and the quantity of the detection device 12 can be one, two
It is a, three or multiple, in this embodiment, it is preferred that, the quantity of the detection device 12 can be one.The detection device 12
Including infrared detection probe, ultrasonic detecting probe, in this embodiment, it is preferred that, which examines including ultrasonic wave
Probing head.
The apparatus for correcting 13 includes at least one correction pressure head 131 being mounted on the base station 11, is mounted on the base station 11
On for the correction pressure head 131 along the guidance set 132 that Y direction and X-direction move reciprocatingly, be mounted on the base station 11 on band
Move the transmission device 133 and the transmission device that the correction pressure head 131 moves reciprocatingly in the 132 upper edge Y direction of guidance set
133 connections drive the driving mechanism 134 of the transmission device 133 transmission and on the base station 11 and with the correction pressure head
131 connections drive the correction pressure head 131 to do the dynamical element 135 moved repeatedly in the 132 upper edge X-direction of guidance set.It should
Correction pressure head 131 can carry out pressing correction to target material surface lug boss, the guidance set 132 can to the correction pressure head 131 into
Row is oriented to, and so that it is moved on preset direction, which can be driven the correction pressure head 131, the driving
Mechanism 134 can drive the dynamic device 133 to carry out transmission the correction pressure head is driven to do in the 132 upper edge Y direction of guidance set
It moves back and forth；The dynamical element 135 can drive the correction pressure head 131 to be moved in the X-axis direction on guidance set 132.
The guidance set 132 includes being arranged on the base station 11 to move reciprocatingly along X-direction for the correction pressure head 131
First guidance set and be arranged on the base station 11 for the correction pressure head 131 along Y direction move reciprocatingly second be oriented to
Component.First guidance set is arranged along the X-direction of the base station 11, Y direction of second guidance set along the base station 11
Setting；It is equipped with above first guidance set to be driven by the dynamical element 135 and move reciprocatingly on first guidance set
First mounting plate 136；Then first mounting plate 136 can be done in X-direction moves repeatedly；Second guidance set is equipped with peace
The second mounting plate 137 of the correction pressure head 131 is filled, then second mounting plate 137 can be done instead on this second guidance set
Multiple movement.
First guidance set includes the first guide rail 131 being arranged on the base station 11 and is set in first guide rail
Connect with first mounting plate 136 on 1321 drive first mounting plate 136 connection drive first mounting plate 136 this first
The first sliding block 1322 moved back and forth on guide rail 1321；The quantity of first guide rail 1321 can be one, two, three or
It is multiple.In the present embodiment, which includes two the first guide rails for separating and being arranged side by side；First sliding block
1322 are arranged in the bottom of first mounting plate 136 and are fixedly connected with first mounting plate 136, the number of first sliding block 1322
Amount can be one, two or more, and in the present embodiment, which includes being respectively sleeved on two the first guide rails
Two the first sliding blocks.
Second guidance set is arranged on first mounting plate 136；Second guidance set include setting this first
It the second guide rail 1323 on mounting plate 136 and is set on second guide rail 1323 and is fixed with second mounting plate 137 and connect
The second sliding block 1324 connect.The quantity of second guide rail 1323 can be one, two, three or more.In the present embodiment,
Second guide rail 1323 includes two the second guide rails for separating and being arranged side by side；The quantity of second sliding block 1324 can be one
It is a, two or more, in the present embodiment, second sliding block 1324 include be respectively sleeved on two the second guide rails 1323
Two the second sliding blocks.
The transmission device 133 includes that setting is connect with the driving mechanism 134 by the driving machine on first mounting plate 136
The lead screw that structure 134 drives；The lead screw is connect with the detection device 12 drives the detection device 12 to be done on second guide rail 1323
It moves back and forth.The lead screw is fixed on second mounting plate 137, drives second mounting plate 137 at this by the rotation of the lead screw
It moves reciprocatingly on second guide rail.
The driving mechanism 134 can be motor, and it may be mounted on first mounting plate 136, specifically, can pacify
The one side opposite with second guidance set mounted in first mounting plate 136, the motor are connect with the lead screw；Pass through turning for motor
It is dynamic to drive the screw rod transmission.
The dynamical element 135 can be telescopic cylinder；The telescopic cylinder is arranged in parallel with first guide rail 1321, and with this
First mounting plate 136 connects；The telescopic cylinder drives first mounting plate 136 to be done on first guide rail 1321 by stretching
It moves back and forth, to make first mounting plate 136 be moved in X-direction.
The apparatus for correcting 13 further includes that the lifting for driving the correction pressure head 131 to lift on second mounting plate 137 is arranged
Cylinder 138 and with the lifting cylinder 138 and correction pressure head 131 is connect and adjustable connecting rod 139；The lifting cylinder
138 can enable the correction pressure head 132 to move up and down by lifting corrected to target material surface, the connecting rod
139 adjustable in length can also have the position corrected to be adjusted according to the size of target, and one end of the connecting rod 139 passes through
Setting rotating mechanism 140 is flexibly connected with the correction pressure head 131 so that the correction pressure head 131 can adjust the angle as needed.It should
Rotating mechanism 140 can be bearing.
The operation principle of the target flatness correcting device：Under the flexible drive of first mounting plate, 136 telescopic cylinder
It is done on first guide rail 1321 and moves to drive second mounting plate 137 to move reciprocatingly in X-direction repeatedly, and then driven
The correction pressure head 131 moves reciprocatingly in X-direction, and the lead screw drives the second mounting plate second under the driving of motor
1323 upper edge Y direction of guide rail moves, and then the correction pressure head 131 is driven to be moved in Y direction, so that correction pressure head
131 can be by correcting each region on target in Y-axis and in X-axis movement, to make the target that should be discarded again
It is secondary to be re-used, avoid the wasting of resources.
It should be understood that above example only expresses preferred embodiments of the present invention, description is more specific
With it is detailed, but it should not be understood as limiting the scope of the patent of the utility model；It should be pointed out that for this field
Those of ordinary skill for, without departing from the concept of the premise utility, can to above-mentioned technical characterstic carry out freely
Combination, various modifications and improvements can be made, these belong to the scope of protection of the utility model；Therefore, all with this practicality
The equivalents and modification that novel right is done, should all belong to the covering scope of the utility model claims.
Claims (10)
1. a kind of target flatness correcting device, which is characterized in that including base station (11), be mounted on the base station (11) and detect
The detection device (12) of target flatness and the target being arranged on the base station (11) after being detected to device after testing (12)
Carry out the apparatus for correcting (13) of flatness correction.
2. target flatness correcting device according to claim 1, which is characterized in that the apparatus for correcting (13) includes peace
At least one correction pressure head (131) on the base station (11) is mounted on the base station (11) and supplies the correction pressure head
(131) described in being driven along the guidance set (132) that Y direction and X-direction move reciprocatingly, on the base station (11)
The transmission device (133) and the biography that correction pressure head (131) moves reciprocatingly in the guidance set (132) upper edge Y direction
Dynamic device (133) connection drives the driving mechanism (134) of transmission device (133) transmission and is mounted on the base station (11)
It above and with the correction pressure head (131) connect and drives the correction pressure head (131) in the guidance set (132) upper edge X-axis side
To doing the dynamical element (135) moved repeatedly.
3. target flatness correcting device according to claim 2, which is characterized in that the guidance set (132) includes
Be arranged on the base station (11) for correction pressure head (131) first guidance set that moves reciprocatingly along X-direction and
The second guidance set to move reciprocatingly along Y direction for the correction pressure head (131) is set on the base station (11).
4. target flatness correcting device according to claim 3, which is characterized in that set above first guidance set
Have and the first mounting plate (136) to move reciprocatingly on first guidance set is driven by the dynamical element (135)；It is described
Second guidance set is equipped with the second mounting plate (137) for installing the correction pressure head (131).
5. target flatness correcting device according to claim 4, which is characterized in that first guidance set includes setting
It sets the first guide rail (1321) on the base station (11) and is set on first guide rail (1321) and first peace
Loading board (136) connection drives the first sliding block that first mounting plate (136) moves back and forth on first guide rail (1321)
(1322)；First sliding block (1322) setting the first mounting plate (136) bottom and with first mounting plate (136)
It is fixedly connected.
6. target flatness correcting device according to claim 5, which is characterized in that the second guidance set setting exists
On first mounting plate (136)；Second guidance set includes that second be arranged on first mounting plate (136) is led
Rail (1323) and the second cunning for being set on second guide rail (1323) and being fixedly connected with second mounting plate (137)
Block (1324).
7. target flatness correcting device according to claim 6, which is characterized in that the apparatus for correcting (13) further includes
Be arranged driven on second mounting plate (137) it is described correction pressure head (131) lift lifting cylinder (138) and with institute
State lifting cylinder (138) and the correction pressure head (131) connection and adjustable connecting rod (139)；The connecting rod (139)
One end is flexibly connected by the way that rotating mechanism (140) is arranged with the correction pressure head (131).
8. target flatness correcting device according to claim 7, which is characterized in that the dynamical element (135) is to stretch
Contracting cylinder；The telescopic cylinder and first guide rail (1321) be arranged in parallel and with the first mounting plate (136) connect band
First mounting plate (136) is moved to move reciprocatingly on first guide rail (1321)；
The transmission device (133) include be arranged on first mounting plate (136) connect with the driving mechanism (134) by
The lead screw of driving mechanism (134) driving；The lead screw is connect with the detection device (12) drives the detection device
(12) it moves reciprocatingly on second guide rail (1323).
9. target flatness correcting device according to claim 4, which is characterized in that the driving mechanism (134) is electricity
Machine, the motor are mounted on first mounting plate (136).
10. target flatness correcting device according to claim 1, which is characterized in that the detection device (12) includes
Infrared detection is popped one's head in and ultrasonic detecting probe.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721749276.5U CN207787348U (en) | 2017-12-14 | 2017-12-14 | A kind of target flatness correcting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721749276.5U CN207787348U (en) | 2017-12-14 | 2017-12-14 | A kind of target flatness correcting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207787348U true CN207787348U (en) | 2018-08-31 |
Family
ID=63284189
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721749276.5U Active CN207787348U (en) | 2017-12-14 | 2017-12-14 | A kind of target flatness correcting device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207787348U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109940066A (en) * | 2019-03-18 | 2019-06-28 | 东莞市欧莱溅射靶材有限公司 | A kind of semi-automatic aligning method of high purity copper rotary target welding end |
| CN115371625A (en) * | 2022-10-25 | 2022-11-22 | 湖南隆深氢能科技有限公司 | Flatness detection equipment of electrolytic cell |
-
2017
- 2017-12-14 CN CN201721749276.5U patent/CN207787348U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109940066A (en) * | 2019-03-18 | 2019-06-28 | 东莞市欧莱溅射靶材有限公司 | A kind of semi-automatic aligning method of high purity copper rotary target welding end |
| CN115371625A (en) * | 2022-10-25 | 2022-11-22 | 湖南隆深氢能科技有限公司 | Flatness detection equipment of electrolytic cell |
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| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 518000 1st floor, No.16, second industrial zone, Xiacun community, Gongming street, Guangming District, Shenzhen City, Guangdong Province Patentee after: Shenzhen Zhongchengda Applied Materials Co.,Ltd. Address before: 518000, 1st floor, building 39, Liantang Industrial City, Shangcun community, Gongming street, Guangming New District, Shenzhen City, Guangdong Province Patentee before: SHENZHEN APG MATERIAL TECHNOLOGY Co.,Ltd. |