CN207705176U - A kind of graphite boat centralising device - Google Patents
A kind of graphite boat centralising device Download PDFInfo
- Publication number
- CN207705176U CN207705176U CN201721583709.4U CN201721583709U CN207705176U CN 207705176 U CN207705176 U CN 207705176U CN 201721583709 U CN201721583709 U CN 201721583709U CN 207705176 U CN207705176 U CN 207705176U
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- chassis
- cover board
- centering
- graphite
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The utility model is a kind of graphite boat centralising device, including graphite boat cover board, graphite boat chassis, graphite boat cover board centering module, graphite boat chassis centering module and pedestal；Wherein, graphite boat cover board centering module and graphite boat chassis centering mould are fixed on pedestal, and graphite boat cover board is placed on graphite boat chassis, and graphite boat chassis is centered in by graphite boat cover board centering module and graphite boat chassis centering module on pedestal.Advantage：1, do not increase manipulator step reduce production capacity in the case of complete graphite boat in.2, it solves due to ageing equipment, unstable the case where leading to wafer scrap caused by graphite boat shift in position.3, improve graphite boat chamber indoor location stability.
Description
Technical field
The utility model is related to a kind of graphite boat centralising devices, belong to technical field of semiconductors.
Background technology
In semiconductor crystal wafer preparation, device needs that there is the metal electrode of Ohmic contact to complete with external connection,
Therefore short annealing is needed after evaporation of metal to improve metal and semiconductor Ohmic contact.For the processing procedure one of compound wafer
As will at 200 DEG C -900 DEG C, and quick anneal oven be carry out metal electrode alloying core equipment.Due to compound semiconductor
Material cannot fully absorb the energy of light as silicon chip, so in compound semiconductor annealing process, we usually will be brilliant
Piece is placed into graphite boat, then will carry out technique in graphite boat placed cavity room again.
Original structure is due to the use and aging of equipment, and the transmission of manipulator is not necessarily so stablized, or mechanical water
When flat, equipment horizontal generation problem, cover board offset, the chassis offset of graphite boat inevitably occurs.Meeting in this way
The uniformity for seriously affecting alloy, annealed wafer, leads to wafer scrap.What is more that cover board can be caused to fall is broken for offset, or
Person, which is pressed onto chip, leads to wafer breakage.Usual way can do chip one centering, but do not have also do centering to carrier at present
Scheme.
Utility model content
The utility model proposes a kind of graphite boat centralising devices, it is intended to realize graphite boat chassis and lid by structure design
Plate from centering, reduce wafer debris, improve technology stability.
The technical solution of the utility model：
A kind of graphite boat centralising device, structure include graphite boat cover board 1, graphite boat chassis 9, graphite boat cover board centering mould
Block 10, graphite boat chassis centering module 11 and pedestal 6；Wherein, graphite boat cover board centering module 10 and graphite boat chassis centering mould
Block 11 is fixed on pedestal 6, and graphite boat cover board 1 is placed on graphite boat chassis 9, and graphite boat chassis 9 passes through graphite boat cover board centering
Module 10 and graphite boat chassis centering module 11 are centered on pedestal 6.
The beneficial effects of the utility model：
1, do not increase manipulator step reduce production capacity in the case of complete graphite boat in.
2, it solves due to ageing equipment, unstable the case where leading to wafer scrap caused by graphite boat shift in position.
3, improve graphite boat chamber indoor location stability.
Description of the drawings
Fig. 1 is the explosive view of graphite boat centralising device structure.
Fig. 2 is the composite diagram of graphite boat centralising device structure.
Fig. 3 is the vertical view on chassis.
Fig. 4 is the front view of graphite boat cover board centering module.
Fig. 5 is the front view of graphite boat chassis centering module.
1 is graphite boat cover board in figure；2 be chip；6 be pedestal；9 be graphite boat chassis；10 be graphite boat cover board centering mould
Block；11 be graphite boat chassis centering module；12 be graphite boat cover board centering module preformed groove；13 be graphite boat cover board sampling groove；
14 be graphite boat cover board side slot；15 be chip side slot；16 be to take chip preformed groove；17 be graphite boat cover board guide-track groove；18 be stone
Black boat cover plate support face；19 be wafer support piece；20 be that graphite boat chassis declines guide post；21 be that the decline centering of graphite boat chassis is oblique
Face；22 be graphite boat chassis supports face.
Specific implementation mode
A kind of graphite boat centralising device, including graphite boat cover board 1, graphite boat chassis 9, graphite boat cover board centering module 10,
Graphite boat chassis centering module 11 and pedestal 6；Wherein, graphite boat cover board centering module 10 and graphite boat chassis centering module 11 are solid
Due on pedestal 6, graphite boat cover board 1 is placed on graphite boat chassis 9, and graphite boat chassis 9 passes through graphite boat cover board centering module 10
It is centered on pedestal 6 with graphite boat chassis centering module 11.
The graphite boat cover board centering module 10 has 3.
The graphite boat chassis centering module 11 has 3.
There are through-hole 8, centering module preformed groove 12, graphite boat cover board sampling groove 13, graphite boat lid on the graphite boat chassis 9
Edges of boards slot 14, chip side slot 15 and takes chip preformed groove 16；Wherein, 9 circumferential upper surface of graphite boat chassis has graphite boat cover board side
Slot 14, graphite boat cover board sampling groove 13 are located at 9 upper surface of graphite boat chassis, and graphite boat cover board sampling groove 13 connects graphite boat cover board
There are chip side slot 15 in the slot 15 in slot 14 and chip, 9 middle part upper surface of graphite boat chassis, chip preformed groove 16 are taken to be located at chip side
On slot 15, centering module preformed groove 12 is located at 9 circumference side of graphite boat chassis, and through-hole 8 is located at 9 center upper table of graphite boat chassis
Face.
The through-hole 8 has 3.
The centering module preformed groove 12 has 3.
The graphite boat cover board centering module 10 includes graphite boat cover board guide-track groove 17 and graphite boat cover plate support face 18；Stone
Black boat cover board guide-track groove 17 is connected with graphite boat cover plate support face 18, and graphite boat cover plate support face 18 is fixed on pedestal 6.
The graphite boat chassis centering module 11 includes wafer support piece 19, graphite boat chassis decline guide post 20, graphite boat
Chassis declines centering inclined-plane 21 and graphite boat chassis supports face 22；Wafer support piece 19 connects graphite boat chassis and declines guide post 20,
Graphite boat chassis declines guide post 20 and connects graphite boat chassis decline centering inclined-plane 21, and graphite boat chassis declines centering inclined-plane 21 and connects
Graphite boat chassis supports face 22, graphite boat chassis supports face 22 are fixed on pedestal 6.
The technical solution of the utility model is further illustrated below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, graphite boat centralising device, including graphite boat cover board 1, graphite boat chassis 9, graphite boat cover board
Centering module 10, graphite boat chassis centering module 11 and pedestal 6；Wherein, graphite boat cover board centering module 10 and graphite boat chassis
Centering module 11 is fixed on pedestal 6, and graphite boat cover board 1 is placed on graphite boat chassis 9, and graphite boat chassis 9 passes through graphite boat lid
Plate centering module 10 and graphite boat chassis centering module 11 are centered on pedestal 6.
As shown in figure 3, have 3 through-holes 8 on graphite boat chassis 9, and centering module preformed groove 12, graphite boat cover board sampling groove
13, graphite boat cover board side slot 14 and takes chip preformed groove 16 at chip side slot 15；9 circumferential upper surface of graphite boat chassis has graphite boat
Cover board side slot 14, graphite boat cover board sampling groove 13 are located at 9 upper surface of graphite boat chassis, and graphite boat cover board sampling groove 13 connects graphite
There are chip side slot 15 in boat cover board slot 15 in slot 14 and chip, 9 middle part upper surface of graphite boat chassis, chip preformed groove 16 are taken to be located at
On chip side slot 15, centering module preformed groove 12 is located at 9 circumference side of graphite boat chassis, and through-hole 8 is located at 9 center of graphite boat chassis
Upper surface.
As shown in figure 4, graphite boat cover board centering module 10 includes graphite boat cover board guide-track groove 17 and graphite boat cover plate support
Face 18；Graphite boat cover board guide-track groove 17 is connected with graphite boat cover plate support face 18, and pedestal 6 is fixed in graphite boat cover plate support face 18
On.
As shown in figure 5, graphite boat chassis centering module 11 include wafer support piece 19, graphite boat chassis decline guide post 20,
Graphite boat chassis declines centering inclined-plane 21 and graphite boat chassis supports face 22；Wafer support piece 19 connects the decline of graphite boat chassis and leads
Column 20, graphite boat chassis decline guide post 20 and connect graphite boat chassis decline centering inclined-plane 21, and graphite boat chassis declines centering inclined-plane
21 connection graphite boat chassis supports faces 22, graphite boat chassis supports face 22 is fixed on pedestal 6.
Embodiment 1
When manipulator places the graphite boat with chip from top to down, graphite boat cover board centering module 10 is worn first
The preformed groove 12 for crossing the graphite boat cover board centering module on graphite boat chassis 9, can be along graphite if graphite boat cover board 1 deviates
The guide-track groove 17 of boat cover board moves downward, and finally stops on graphite boat cover plate support face 18.
Manipulator continues to move downward, and graphite boat cover board can be separated from chassis, and graphite boat chassis centering module 11 passes through stone
The through-hole 8 of the short thimble in graphite boat chassis on the chassis Mo Zhou 9, ejects chip 2 at the support chip 19 of chip, solid on vertical direction
It is fixed.Graphite boat chassis 9 is initially separated with chip 2 at this time, and then graphite boat chassis 9 along graphite boat chassis decline guide post 20 to
Lower movement declines the centering that graphite plate is completed on centering inclined-plane 21 by graphite boat chassis, finally falls in graphite boat chassis supports face
22, complete centering process.
Claims (8)
1. a kind of graphite boat centralising device, it is characterized in that including graphite boat cover board, graphite boat chassis, graphite boat cover board centering mould
Block, graphite boat chassis centering module and pedestal；Wherein, graphite boat cover board centering module and graphite boat chassis centering module are fixed on
On pedestal, graphite boat cover board is placed on graphite boat chassis, and graphite boat chassis passes through graphite boat cover board centering module and graphite boat bottom
Disk centering module is centered in the center of pedestal.
2. a kind of graphite boat centralising device according to claim 1, it is characterised in that：The graphite boat cover board centering module
There are 3.
3. a kind of graphite boat centralising device according to claim 1, it is characterised in that：The graphite boat chassis centering module
There are 3.
4. a kind of graphite boat centralising device according to claim 1, it is characterised in that：Have on the graphite boat chassis logical
Hole, centering module preformed groove, graphite boat cover board sampling groove, graphite boat cover board side slot and take chip preformed groove at chip side slot；Its
In, the circumferential upper surface on graphite boat chassis has graphite boat cover board side slot, graphite boat cover board sampling groove to be located at graphite boat chassis upper table
Face, graphite boat cover board sampling groove connect graphite boat cover board slot in slot and chip, and there is chip side in upper surface in the middle part of graphite boat chassis
Slot takes chip preformed groove to be located on the slot of chip side, and centering module preformed groove is located at graphite boat chassis circumference side, and through-hole is located at stone
Black boat center chassis upper surface.
5. a kind of graphite boat centralising device according to claim 4, it is characterised in that：The through-hole has 3.
6. a kind of graphite boat centralising device according to claim 4, it is characterised in that：The centering module preformed groove has 3
It is a.
7. a kind of graphite boat centralising device according to claim 1, it is characterised in that：The graphite boat cover board centering module
Including graphite boat cover board guide-track groove and graphite boat cover plate support face；Wherein, graphite boat cover board guide-track groove and graphite boat cover plate support
Face is connected, and graphite boat cover plate support face is fixed on pedestal.
8. a kind of graphite boat centralising device according to claim 1, it is characterised in that：The graphite boat chassis centering module
Decline guide post including wafer support piece, graphite boat chassis, graphite boat chassis declines centering inclined-plane and graphite boat chassis supports face；Its
In, wafer support piece connects graphite boat chassis and declines guide post, and graphite boat chassis declines guide post connection graphite boat chassis and declines centering
Inclined-plane, graphite boat chassis decline centering inclined-plane connection graphite boat chassis supports face, and graphite boat chassis supports face is fixed on pedestal.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721583709.4U CN207705176U (en) | 2017-11-23 | 2017-11-23 | A kind of graphite boat centralising device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721583709.4U CN207705176U (en) | 2017-11-23 | 2017-11-23 | A kind of graphite boat centralising device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207705176U true CN207705176U (en) | 2018-08-07 |
Family
ID=63023505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721583709.4U Active CN207705176U (en) | 2017-11-23 | 2017-11-23 | A kind of graphite boat centralising device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207705176U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108039336A (en) * | 2017-11-23 | 2018-05-15 | 中国电子科技集团公司第五十五研究所 | A kind of graphite boat centralising device |
-
2017
- 2017-11-23 CN CN201721583709.4U patent/CN207705176U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108039336A (en) * | 2017-11-23 | 2018-05-15 | 中国电子科技集团公司第五十五研究所 | A kind of graphite boat centralising device |
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