CN207703162U - A kind of elliptical polarization instrument for measuring thickness - Google Patents
A kind of elliptical polarization instrument for measuring thickness Download PDFInfo
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- CN207703162U CN207703162U CN201721851787.8U CN201721851787U CN207703162U CN 207703162 U CN207703162 U CN 207703162U CN 201721851787 U CN201721851787 U CN 201721851787U CN 207703162 U CN207703162 U CN 207703162U
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- laser
- elliptical polarization
- measuring thickness
- polarization instrument
- photodetector
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Abstract
The utility model provides a kind of elliptical polarization instrument for measuring thickness, including testing pedestal, the experiment pedestal is equipped with shaft, the upper end connecting working table of the shaft, laser, the polarizer, sample stage, analyzer, photodetector are equipped on the workbench successively, the front end of the laser is equipped with collimating mirror, and the front end of the polarizer is equipped with beam splitter, the lower section of the analyzer is equipped with photomultiplier, and the experiment pedestal is equipped with switch and USB external tappings.The utility model has the beneficial effects that photomultiplier, which effectively enhances faint optical signal, is converted to electric signal, allow photodetector accurately to read signal data, avoids the error of digital independent, in addition, the collimation of collimating mirror calibration beam enhances incident beam accuracy；And it can quickly show that the analog signal measured is converted into digital data transmission and carries out data processing by A/D conversion modules, obtain accurate measurement result.
Description
Technical field
The utility model belongs to optical measuring apparatus technical field, more particularly, to a kind of elliptical polarization instrument for measuring thickness.
Background technology
Elliptical polarization instrument for measuring thickness utilizes the polarization characteristic of light, that is, upper and lower surface two of the light of a branch of elliptical polarization in plated film
Secondary reflection, its polarization state can turn over certain angle, this turns over the specific and plated film of angle and the refractive index of substrate, and
Coating film thickness is related, and thus characteristic can obtain the thickness i.e. refractive index of measured plated film in the case of known substrate refractive index.
Light extinction method elliptical polarization mode corresponds to different samples and produces after a branch of specific elliptically polarized light makes light beam be reflected on sample
Formed linearly polarized light, detect the polarization direction of the long axis angle of this elliptically polarized light and the linearly polarized light of formation, according to this two
A angle and the refractive index of known substrate can obtain the thickness and refractive index for measuring plated film.
Currently, the elliptical polarization instrument for measuring thickness occurred on the market, device complexity is inconvenient to carry, and the meeting when measuring
The a large amount of time is wasted, the result reliability of measurement is low, and the experimental error of generation is larger.Therefore, there is an urgent need for design one kind to solve
The certainly elliptical polarization instrument for measuring thickness of above-mentioned technical problem.
Utility model content
The purpose of this utility model be to provide it is a kind of it is simple in structure, easy to operate, experimental period is short, Experimental measurement error
Small, elliptical polarization instrument for measuring thickness.
The technical solution of the utility model is：A kind of elliptical polarization instrument for measuring thickness, including pedestal is tested, on the experiment pedestal
Equipped with shaft, the upper end connecting working table of the shaft is equipped with laser, the polarizer, sample stage, inspection on the workbench successively
The front end of inclined device, photodetector, the laser is equipped with collimating mirror, and the front end of the polarizer is equipped with beam splitter, the inspection
The lower section of inclined device is equipped with photomultiplier, and the experiment pedestal is equipped with switch and USB external tappings.
Further, it states the light source that laser is sent out and focal point in collimating mirror is set.
Further, A/D conversion modules are equipped in the photodetector.
Further, the laser uses the He-Ne laser with Brewster window.
Further, the photomultiplier, photodetector are connect by electric wire with the USB external tappings of experiment pedestal.
Further, the bottom of the experiment pedestal is equipped with support leg.
The utility model has the advantages and positive effects of：Due to the adoption of the above technical scheme, photomultiplier is effective
Enhancing faint optical signal is converted to electric signal so that photodetector can accurately read signal data, avoid digital independent
Error enhance incident beam accuracy in addition, the collimation of collimating mirror calibration beam；And it can be with by A/D conversion modules
It quickly show that the analog signal measured is converted into digital data transmission and carries out data processing, obtains accurate measurement result.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model.
In figure：
1, pedestal 2, shaft 3, workbench are tested
4, laser 5, the polarizer 6, sample stage
7, analyzer 8, photodetector 9, collimating mirror
10, beam splitter 11, photomultiplier 12, switch
13, USB external tappings 14, support leg
Specific implementation mode
It elaborates below in conjunction with the accompanying drawings to the utility model.
As shown in Figure 1, a kind of elliptical polarization instrument for measuring thickness of the utility model, including pedestal 1 is tested, on the experiment pedestal 1
Equipped with shaft 2, the upper end connecting working table 3 of the shaft 2 is equipped with laser 4, the polarizer 5, sample on the workbench 3 successively
The front end of sample platform 6, analyzer 7, photodetector 8, the laser 4 is equipped with collimating mirror 9, and the front end of the polarizer 5 is equipped with
The lower section of beam splitter 10, the analyzer 7 is equipped with photomultiplier 11, and the experiment pedestal 1 is equipped with switch 12 and USB is external
Mouth 13.
It states the light source that laser 4 is sent out and focal point in collimating mirror 9 is set.
A/D conversion modules are equipped in the photodetector 8.
The laser 4 uses the He-Ne laser with Brewster window.
The photomultiplier 11, photodetector 8 are connect by electric wire with the USB external tappings 13 of experiment pedestal 1.
The bottom of the experiment pedestal 1 is equipped with support leg 14.
The course of work of this example：In being tested, the light beam that laser 4 is sent out first passes through the progress light beam of collimating mirror 9
Collimation calibration, light beam by the polarizer 5 calibrate through beam splitter 10, be then passed through analyzer 7 and reach in photodetector 8, analyzing
Photomultiplier 11 is carried on device 7, is effectively enhanced faint optical signal and is converted to electric signal, telecommunications is read on photodetector 8
Number, signal can be fed back to external electricity by the A/D conversion modules in photodetector 8 by after data processing by USB external tappings 13
On brain, external computer reprocesses subsequent data.
The effectively enhancing faint optical signal of photomultiplier 11 is converted to electric signal so that photodetector 8 can be accurate
Signal data is read, the error of digital independent is avoided, in addition, the collimation of 9 calibration beam of collimating mirror, enhancing incident beam is accurate
Degree；And it can quickly show that the analog signal measured is converted into digital data transmission and carries out data by A/D conversion modules
Processing, obtains accurate measurement result.
One embodiment of the utility model is described in detail above, but the content is only the utility model
Preferred embodiment should not be considered as limiting the scope of the present invention.It is all to be made according to application scope of the utility model
All the changes and improvements etc., should all still belong within the patent covering scope of the utility model.
Claims (6)
1. a kind of elliptical polarization instrument for measuring thickness, it is characterised in that：Including experiment pedestal (1), the experiment pedestal (1) is equipped with shaft
(2), the upper end connecting working table (3) of the shaft (2) is equipped with laser (4), the polarizer on the workbench (3) successively
(5), sample stage (6), analyzer (7), photodetector (8), the front end of the laser (4) are equipped with collimating mirror (9), described
The front end of inclined device (5) is equipped with beam splitter (10), and the lower section of the analyzer (7) is equipped with photomultiplier (11), the experiment bottom
Seat (1) is equipped with switch (12) and USB external tappings (13).
2. elliptical polarization instrument for measuring thickness according to claim 1, it is characterised in that：The light source that the laser (4) sends out is set
Set the focal point in collimating mirror (9).
3. elliptical polarization instrument for measuring thickness according to claim 1, it is characterised in that：A/D is equipped in the photodetector (8)
Conversion module.
4. elliptical polarization instrument for measuring thickness according to claim 1, it is characterised in that：The laser (4) using band cloth scholar this
The He-Ne laser of special window.
5. elliptical polarization instrument for measuring thickness according to claim 1, it is characterised in that：The photomultiplier (11), photoelectricity are visited
Device (8) is surveyed to connect with the USB external tappings (13) of experiment pedestal (1) by electric wire.
6. elliptical polarization instrument for measuring thickness according to claim 1, it is characterised in that：The bottom of the experiment pedestal (1) is equipped with
Support leg (14).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721851787.8U CN207703162U (en) | 2017-12-26 | 2017-12-26 | A kind of elliptical polarization instrument for measuring thickness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721851787.8U CN207703162U (en) | 2017-12-26 | 2017-12-26 | A kind of elliptical polarization instrument for measuring thickness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207703162U true CN207703162U (en) | 2018-08-07 |
Family
ID=63029010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721851787.8U Active CN207703162U (en) | 2017-12-26 | 2017-12-26 | A kind of elliptical polarization instrument for measuring thickness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207703162U (en) |
-
2017
- 2017-12-26 CN CN201721851787.8U patent/CN207703162U/en active Active
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 300350 Tianjin Jinnan District Binhai Private Economic Growth Demonstration Base Creative Center A Block 12B-117 Patentee after: Tianjin Liangyi Science and Technology Co., Ltd. Address before: 300350 Tianjin Jinnan District Binhai Private Economic Growth Demonstration Base Creative Center A Block 12B-117 Patentee before: TIANJIN LIANGYI TECHNOLOGY CO., LTD. |