CN207685337U - High-accuracy mask plate - Google Patents
High-accuracy mask plate Download PDFInfo
- Publication number
- CN207685337U CN207685337U CN201721741626.3U CN201721741626U CN207685337U CN 207685337 U CN207685337 U CN 207685337U CN 201721741626 U CN201721741626 U CN 201721741626U CN 207685337 U CN207685337 U CN 207685337U
- Authority
- CN
- China
- Prior art keywords
- shaped
- striped
- mask
- piece
- support membrane
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000012528 membrane Substances 0.000 claims abstract description 51
- 238000003466 welding Methods 0.000 claims abstract description 20
- 238000004519 manufacturing process Methods 0.000 abstract description 10
- 239000011521 glass Substances 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- 238000010923 batch production Methods 0.000 abstract description 5
- 238000000034 method Methods 0.000 abstract description 5
- 230000008569 process Effects 0.000 abstract description 3
- 238000005516 engineering process Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000007747 plating Methods 0.000 description 3
- 229910001111 Fine metal Inorganic materials 0.000 description 2
- 241000208340 Araliaceae Species 0.000 description 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 description 1
- 235000003140 Panax quinquefolius Nutrition 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 235000008434 ginseng Nutrition 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
- 238000007665 sagging Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
The utility model discloses a kind of high-accuracy mask plates, including sheet frame, multiple striped-shaped mask pieces and support membrane net, the center of sheet frame forms vacancy section, the periphery of vacancy section forms frame edge, frame is respectively equipped with a bar-shaped trough along the top surface on upper wherein two relative edge edges, has splicing gap between two neighboring striped-shaped mask piece；Each striped-shaped mask piece both ends are welded in frame along the top surface on upper other two relative edge edge, and each striped-shaped mask on piece is equipped with mask pattern；Support membrane net is located at the lower section of multiple striped-shaped mask pieces, and online two opposite side of support membrane each extends over to form a welding edge, and two welding edges are respectively welded in two bar-shaped troughs；Support membrane net supports multiple striped-shaped mask pieces and covers each splicing gap but do not block each mask pattern.It according to high-accuracy mask plate provided by the utility model, can both expire large-sized glass substrate plated film requirement, and realize batch production, and improve production efficiency, yield and required precision of the display in batch production process can also be met.
Description
Technical field
The utility model is related to mask plate more particularly to a kind of high-accuracy mask plates.
Background technology
Organic Light Emitting Diode (Organic Light Emitting Diode, OLED) display is a kind of self luminous
Display device.Because it has many advantages, such as that low in energy consumption, display brightness is high, visible angle is wide and fast response time, OLED display
Increasingly welcome by market.
In the manufacturing technology of OLED display, mask platemaking technology in vacuum evaporation (such as fine metal mask piece
(Fine Metal Mask Sheet, FMM Sheet)) it is an extremely important and crucial technology, directly affect OLED products
Quality and manufacturing cost.In general, there is at least one mask pattern on mask plate, and in order to produce processing, mask in batches
Mask pattern in version is multiple and is in that matrix distribution utilizes these mask patterns when carrying out plated film processing by the mask plate
The film pattern of identical quantity can be formed on the glass substrate, then can shape according to the cutting of film pattern quantity by glass substrate
At multiple display devices.
The size of mask plate is bigger, can produce the display of processing in batches every time to large-sized glass substrate plated film
The quantity of part is more, and still, the size of mask plate is bigger, and precision is difficult to control, and leads to the essence of the display device of production and processing
Expected requirement is not achieved in degree and resolution ratio, and fraction defective is high.Simultaneously as under the premise of ensureing precision, it has to reduce mask
The size of version, then corresponding production efficiency decline.
Utility model content
The utility model is intended to solve at least some of the technical problems in related technologies.For this purpose, this reality
It is to propose a kind of high-accuracy mask plate with novel purpose.
To achieve the above object, according to the high-accuracy mask plate of the utility model embodiment, including：
Sheet frame, the center of the sheet frame form vacancy section, and the periphery of the vacancy section forms frame edge, the frame along it is upper wherein
The top surface on two relative edge edges is respectively equipped with a bar-shaped trough, and length direction of the bar-shaped trough along the corresponding edge extends, and institute
The side on bar-shaped trough towards the vacancy section is stated to open wide；
Multiple striped-shaped mask pieces, multiple striped-shaped mask pieces are close to be arranged along longitudinal direction successively, the two neighboring bar shaped
There is splicing gap between mask piece；Each striped-shaped mask piece extends transversely and its both ends is welded in the frame along upper another
The top surface on outer two relative edge edge, each striped-shaped mask on piece are equipped at least one mask pattern；
Support membrane net, the support membrane net are located at the lower section of multiple striped-shaped mask pieces, the online two-phase of support membrane
The side of the back of the body each extends over to form a welding edge, and the two welding edges are respectively welded in two bar-shaped troughs；The support membrane
Net supports multiple striped-shaped mask pieces and covers each splicing gap but do not block each mask pattern.
According to the high-accuracy mask plate that the utility model embodiment provides, multiple striped-shaped mask pieces are close to set along longitudinal direction successively
It sets, there is splicing gap, support membrane net to be located at the lower section of multiple striped-shaped mask pieces, the support between two neighboring striped-shaped mask piece
Film net supports multiple striped-shaped mask pieces and covers each splicing gap but do not block the mask pattern of strip-shaped membrane on piece, in this way, more
A striped-shaped mask piece splicing can meet large-sized glass substrate plated film requirement, realize batch production, improve production efficiency；And
Striped-shaped mask piece is supported using support membrane net so that striped-shaped mask piece holding structure is stablized, and can promote striped-shaped mask piece
The tightly yield on sheet frame, while service precision and the service life of striped-shaped mask piece are improved, and then it is raw in batch to meet display
Yield during production and required precision.In addition, its service life is long, the cost of user terminal is low.
Further, frame is respectively equipped with a bar-shaped trough along the top surface on upper wherein two relative edge edges, and support membrane online two is opposite
Side each extend over to form a welding edge, two welding are along being respectively welded in two bar-shaped troughs, so, it can be ensured that supporting network film
Fixation is more secured, and from outer, the tension using welding along place to support nethike embrane tensioning and holding is horizontal, raising striped-shaped mask piece
Precision.
In addition, can also have following additional technology special according to the high-accuracy mask plate of the utility model above-described embodiment
Sign：
One embodiment according to the present utility model, the width substantially phase of the length of the bar-shaped trough and the vacancy section
Deng.
One embodiment according to the present utility model, the either flush of the upper surface of the support membrane net and the frame edge.
The depth of one embodiment according to the present utility model, the bar-shaped trough is 30 microns to 200 microns.
One embodiment according to the present utility model, the support membrane net include multiple rows of mesh, multiple rows of mesh with it is more
A striped-shaped mask piece corresponds；
Often arrange one a pair of each mask pattern of each mesh and the corresponding striped-shaped mask on piece in the mesh
It answers, and the size of the mesh is more than the size of the mask pattern, so that the mask pattern is emerging in the mesh completely
In.
One embodiment according to the present utility model is formed as bar shaped support portion between the adjacent two rows mesh, described
Bar shaped support portion is bonded with the bottom surface of the two neighboring striped-shaped mask piece, and is covered between the two neighboring striped-shaped mask piece
The splicing gap.
The additional aspect and advantage of the utility model will be set forth in part in the description, partly will be from following description
In become apparent, or recognized by the practice of the utility model.
Description of the drawings
In order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, the structure that can also be shown according to these attached drawings obtains other attached drawings.
Fig. 1 is the structural schematic diagram of the high-accuracy support mask plate of the utility model embodiment；
Fig. 2 is the exploded view of the high-accuracy support mask plate of the utility model embodiment；
Fig. 3 is the vertical view of the high-accuracy support mask plate of the utility model embodiment；
Fig. 4 is the sectional view in the directions A-A in Fig. 3；
Fig. 5 is the partial enlarged view at A in Fig. 4；
Fig. 6 is the partial enlarged view at B in Fig. 4.
Reference numeral：
Sheet frame 10；
Frame is along 101；
Bar-shaped trough 1011；
Vacancy section P10；
Support membrane net 20；
Welding is along 201；
Mesh 202；
Bar shaped support portion 203；
Striped-shaped mask piece 30；
Mask pattern 301；
Splice gap X30.
The embodiments will be further described with reference to the accompanying drawings for the realization, functional characteristics and advantage of the utility model aim.
Specific implementation mode
The embodiments of the present invention are described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning
Same or similar element or element with the same or similar functions are indicated to same or similar label eventually.Below by ginseng
The embodiment for examining attached drawing description is exemplary, it is intended to for explaining the utility model, and should not be understood as to the utility model
Limitation, be based on the embodiments of the present invention, those of ordinary skill in the art are without creative efforts
The every other embodiment obtained, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be understood that term "center", " longitudinal direction ", " transverse direction ", " length ", " width
Degree ", " thickness ", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom" "inner", "outside", " suitable
The orientation or positional relationship of the instructions such as hour hands ", " counterclockwise " " axial direction ", " circumferential direction ", " radial direction " is orientation based on ... shown in the drawings
Or position relationship, be merely for convenience of describing the present invention and simplifying the description, do not indicate or imply the indicated device or
Element must have a particular orientation, with specific azimuth configuration and operation, therefore should not be understood as the limit to the utility model
System.
In addition, term " first ", " second " are used for description purposes only, it is not understood to indicate or imply relative importance
Or implicitly indicate the quantity of indicated technical characteristic.Define " first " as a result, the feature of " second " can be expressed or
Implicitly include one or more this feature.The meaning of " plurality " is two or two in the description of the present invention,
More than, unless otherwise specifically defined.
In the present invention unless specifically defined or limited otherwise, term " installation ", " connected ", " connection ", " Gu
It is fixed " etc. terms shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or be integrally connected；It can
Can also be electrical connection to be mechanical connection；It can be directly connected, can also indirectly connected through an intermediary, Ke Yishi
Connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood as the case may be
Concrete meaning in the present invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature the "upper" of second feature or it
"lower" may include that the first and second features are in direct contact, and can also not be to be in direct contact but lead to including the first and second features
Cross the other characterisation contact between them.Moreover, fisrt feature second feature " on ", " top " and " above " include the
One feature is right over second feature and oblique upper, or is merely representative of fisrt feature level height and is higher than second feature.First is special
Sign second feature " under ", " lower section " and " below " include fisrt feature immediately below second feature and obliquely downward, or only
Indicate that fisrt feature level height is less than second feature.
The high-accuracy mask plate of the utility model embodiment is described in detail with reference to the accompanying drawings.
Shown in Fig. 6, according to the high-accuracy mask plate that the utility model embodiment provides, including it is sheet frame 10, more
A striped-shaped mask piece 30 and support membrane net 20.
Specifically, the center of sheet frame 10 forms vacancy section P10, the periphery formation frame of the vacancy section P10 is described along 101
Frame top surface on wherein two relative edge edges along 101 is respectively equipped with a bar-shaped trough 1011, and the bar-shaped trough 1011 is along the correspondence side
The length direction on edge extends, and is opened wide towards the side of the vacancy section P10 on the bar-shaped trough 1011.
That is, bar-shaped trough 1011 is length direction or the width direction extension along sheet frame 10, and the bar-shaped trough
1011 inside is unlimited, and then is penetrated through with vacancy section P10.
Multiple striped-shaped mask pieces 30 are close to be arranged along longitudinal direction successively, have between the two neighboring striped-shaped mask piece 30
There is splicing gap X30；Each striped-shaped mask piece 30 extends transversely and its both ends is welded in the frame other two along 101
The top surface on relative edge edge, each striped-shaped mask piece 30 are equipped at least one mask pattern 301.
That is, multiple striped-shaped mask pieces 30 are close to successively along longitudinal direction, also, the both ends weldering of each striped-shaped mask piece 30
It is connected to the top surface of sheet frame 10, in this way, multiple striped-shaped mask pieces 30 can form plain splice structure.
It should be noted that although multiple striped-shaped mask pieces 30 are close to successively, due to striped-shaped mask piece 30
The factors such as machining accuracy and rigging error limit, so, there are still between splicing between two neighboring striped-shaped mask piece 30
Gap X30.
In addition, the size and quantity of striped-shaped mask piece 30 can be according to configurations such as the size of display screen requirements, for example, when should
When high-accuracy mask plate is used to manufacture the display screen of large-size, greater number of striped-shaped mask version can be configured, and works as the height
Relatively few number of striped-shaped mask piece 30 of the accurate mask plate for that when manufacturing smaller size display screen, can configure.
Support membrane net 20 is located at the lower section of multiple striped-shaped mask pieces 30, two opposite sides on the support membrane net 20
It each extends over and to form a welding and be respectively welded in two bar-shaped troughs 1011 along 201 along 201, two welding；The support
Film net 20 supports multiple striped-shaped mask pieces 30 and covers each splicing gap X30 but do not block each mask figure
Case 301.
That is, support membrane net 20 is located at 30 lower section of striped-shaped mask piece, also, the welding of the both sides of support membrane net 20
Frame is respectively welded at along 101 two sides along two upper welding grooves along 201, and then is realized and be welded and fixed with sheet frame 10.The branch
Supportting 20 tool of film net, there are two the effects of aspect, first, the support membrane net 20 can support striped-shaped mask piece 30, due to striped-shaped mask
Piece 30 can let droop under self gravitation effect, corresponding since size is larger especially for large-sized mask plate, item
The length of shape mask piece 30 is longer, then its striped-shaped mask piece 30 is easier to occur due to gravity sag, so, pass through the support membrane
Net 20 supports striped-shaped mask piece 30, can so that 30 holding of striped-shaped mask piece is horizontal, and then improve its precision；Secondly, the branch
Support film net 20 can cover each splicing gap X30, due in coating process, in the presence of splicing gap X30, then and gas phase
Luminescent material can by splice gap X30 be plating on base material, cause product bad, so, pass through the support membrane net 20
Each splicing gap X30 is covered, then can be ensured in coating process, the luminescent material of gas phase has and can only be by mask figure
Case 301301 is plating on base material, ensures product reliably and effectively plated film.
According to the high-accuracy mask plate that the utility model embodiment provides, multiple striped-shaped mask pieces 30 are close to successively along longitudinal direction
It is arranged, there is splicing gap X30, support membrane net 20 to be located at multiple striped-shaped mask pieces 30 between two neighboring striped-shaped mask piece 30
Lower section, the support membrane net 20 support multiple striped-shaped mask pieces 30 and cover each splicing gap X30 but do not block strip-shaped membrane on piece
Mask pattern 301, in this way, multiple striped-shaped mask pieces 30 splicing can meet large-sized glass substrate plated film requirement, realize
Batch production improves production efficiency；And support membrane net 20 is utilized to support striped-shaped mask piece 30 so that striped-shaped mask piece 30 keeps knot
Structure is stablized, and can promote the yield that striped-shaped mask piece 30 is stretched on sheet frame 10, while improving making for striped-shaped mask piece 30
With precision and service life, and then meet yield and required precision of the display in batch production process.In addition, its service life
Long, the cost of user terminal is low.
Further, frame top surface on wherein two relative edge edges along 101 is respectively equipped with a bar-shaped trough 1011, support membrane net 20
Upper two opposite sides, which each extend over, to be formed a welding and is respectively welded in two bar-shaped troughs 1011 along 201 along 201, two welding, such as
This, it can be ensured that support nethike embrane fix it is more secured, from outer, to support nethike embrane tensioning using tension of the welding at 201 and
It keeps horizontal, improves the precision of striped-shaped mask piece 30.
It should be noted that the application utility model people find, can also frame along 101 two relative edge edges top surface
It is respectively equipped with groove of multiple edges perpendicular to edge, multiple grooves are arranged along the length direction interval at edge；It is corresponding, it is supporting
Opposite sides is respectively formed with multiple weld parts on film net 20, and multiple weld parts are set along the edge interval of support membrane net 20
It sets, multiple weld parts are welded in correspondingly in multiple grooves.It is this to be welded and fixed mode, it can also realize support membrane net 20
With the fixation of sheet frame 10, still, this fixed form, when supporting nethike embrane tensioning, at each weld part of support nethike embrane both sides
Tensile force is concentrated, and then it is uneven to may result in the tensile force that is subject to of support nethike embrane, in this way, levelness and precision are relatively
It is low.
In the utility model, welded along 201 bar-shaped trough 1011 with frame along 101 both sides using the welding of 20 both sides of support membrane net
It connects, entire welding is welded more than point and is evenly distributed with bar-shaped trough 1011 along 201, can to disperse tensile force so that prop up
The tensile force that support nethike embrane is subject to is more uniform, in this way, levelness and precision are relatively higher.
Illustratively, in Fig. 2 examples, multiple striped-shaped mask pieces 30 are close to be arranged along longitudinal direction successively, striped-shaped mask piece 30
Both ends be welded in the lateral both sides of sheet frame 10, the two sides of support membrane net 20 are along being fixed on the longitudinal both sides of sheet frame 10.
It is understood that multiple striped-shaped mask pieces 30 can also be transversely close to be arranged successively, striped-shaped mask piece 30
Both ends are also welded in the longitudinal both sides of sheet frame 10, and the two sides of support membrane net 20 are along the both sides for being fixed on 10 transverse direction of sheet frame.
It should be noted that the utility model people of the application has found, it can also be by being arranged below multiple strip-shaped membrane pieces
Multiple support bars, each support bar correspond to one splicing gap X30 of covering, and this mode can also covered bar shaped to a certain degree
Diaphragm 30 is played a supporting role, it is also possible to cover splicing gap X30.However, the utility model people of the applicant passes through one
The experiment of section time finds that this mode still has certain defect：Such as multiple support bars are difficult to keep in same plane,
In turn so that its support each striped-shaped mask piece 30 be also difficult to keep in same plane, and then the precision of its mask plate without
Method ensures.In addition, its support effect of multiple support bars is longer, the stability of multiple striped-shaped mask pieces 30 of support is relative to branch
Support that film net 20 is poor, especially closer to intermediate position on each striped-shaped mask piece 30, however it remains relatively large sagging.
With reference to shown in Fig. 2, in one embodiment of the utility model, the length of bar-shaped trough 1011 and the vacancy section
The width of P10 is generally equalized, in this way, can make the both sides of entire support membrane net 20 are welded can be welded along 201 each position
It is connected in bar-shaped trough 1011, it is ensured that 20 fixation of support membrane net is reliable, and keeps better levelness and precision.
It is advantageous with reference to shown in Fig. 5 to Fig. 6, in an example of the utility model, the upper surface of support membrane net 20 with
The frame along 101 either flush.So, on the one hand, the welding of support membrane net 20 will not cause striped-shaped mask piece 30 along 201
It hinders, the both ends for being convenient to striped-shaped mask piece 30 are soldered to frame along 101 top surface；On the other hand, when striped-shaped mask piece 30 welds
When to frame along 101 top surface, then the bottom surface of striped-shaped mask piece 30 is just bonded with the top surface of support membrane net 20, in this way, can profit
Striped-shaped mask piece 30 is provided a supporting role with support membrane net 20.
Optionally, the depth of bar-shaped trough is 30 microns to 200 microns, and the upper surface of support membrane net 20 is with the frame along 101
Either flush, then the thickness of support membrane net 20 also be 30 microns to 200 microns, under this size, support membrane net 20 have it is good
Good support effect.
With reference to shown in Fig. 2, in one embodiment of the utility model, support membrane net 20 includes multiple rows of mesh 202, multiple rows of
The mesh 202 is corresponded with multiple striped-shaped mask pieces 30；Often arrange each mesh 202 in the mesh 202 with it is right
Each mask pattern 301 on the striped-shaped mask piece 30 answered corresponds, and the size of the mesh 202 is more than described cover
The size of film figure 301, so that the mask pattern 301 is emerging in completely in the mesh 202.
That is, each mesh 202 is with each mask pattern 301 on each striped-shaped mask piece 30 on support membrane net 20
Correspondingly, also, the size of mesh 202 be more than mask pattern 301 size so that mask pattern 301 can be shown completely
It is exposed in mesh 202, avoids being supported nethike embrane and block, it is ensured that when plated film is processed, the Coating Materials of gas phase passes through mask pattern
301 are plating on glass substrate so that the film pattern consistent with mask pattern 301 is formed on glass substrate.
Shown in Fig. 2, more specifically, be formed as bar shaped support portion between the adjacent two rows mesh 202
203, the bar shaped support portion 203 is bonded with the bottom surface of the two neighboring striped-shaped mask piece 30, and is covered two neighboring described
The splicing gap X30 between striped-shaped mask piece 30.
It should be noted that these bar shaped support portions 203 are integral structures, for example, by providing a diaphragm, then film
On piece processes each mesh 202 by techniques such as etchings, and the part finally retained can form above-mentioned bar shaped support portion
203。
That is, bar shaped support portion 203 is corresponded with splicing gap X30, each bar shaped support portion 203 can cover
Corresponding splicing gap X30 is covered, but does not block mask pattern 301, so, it can be ensured that each splicing gap X30 is by quilt
Cover, it is ensured that mask plate performance it is reliable.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is contained at least one embodiment or example of the utility model.In the present specification, to the schematic table of above-mentioned term
It states and is necessarily directed to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be with
It can be combined in any suitable manner in any one or more of the embodiments or examples.In addition, without conflicting with each other, this field
Technical staff can by the feature of different embodiments or examples described in this specification and different embodiments or examples into
Row combines and combination.
The above is only the preferred embodiment of the present invention, and it does not limit the scope of the patent of the present invention,
Under every utility model in the utility model is conceived, equivalent structure made based on the specification and figures of the utility model
Transformation, or directly/be used in other related technical areas indirectly and be included in the scope of patent protection of the utility model.
Claims (6)
1. a kind of high-accuracy mask plate, which is characterized in that including：
The center of sheet frame, the sheet frame forms vacancy section, and the periphery of the vacancy section forms frame edge, and the frame is along upper wherein two-phase
One bar-shaped trough is respectively equipped with to the top surface at edge, length direction of the bar-shaped trough along the corresponding edge extends, and the item
It is opened wide towards the side of the vacancy section on shape slot；
Multiple striped-shaped mask pieces, multiple striped-shaped mask pieces are close to be arranged along longitudinal direction successively, the two neighboring striped-shaped mask
There is splicing gap between piece；Each striped-shaped mask piece extends transversely and its both ends is welded in the frame along upper other two
The top surface on relative edge edge, each striped-shaped mask on piece are equipped at least one mask pattern；
Support membrane net, the support membrane net are located at the lower section of multiple striped-shaped mask pieces, and the support membrane online two is opposite
Side each extends over to form a welding edge, and the two welding edges are respectively welded in two bar-shaped troughs；The support membrane net branch
It supports multiple striped-shaped mask pieces and covers each splicing gap but do not block each mask pattern.
2. high-accuracy mask plate according to claim 1, which is characterized in that the length of the bar-shaped trough and the vacancy section
Width it is generally equalized.
3. high-accuracy mask plate according to claim 1, which is characterized in that the upper surface of the support membrane net and the frame
The either flush on edge.
4. high-accuracy mask plate according to claim 3, which is characterized in that the depth of the bar-shaped trough be 30 microns extremely
200 microns.
5. high-accuracy mask plate according to claim 1, which is characterized in that the support membrane net includes multiple rows of mesh, more
The mesh is arranged to correspond with multiple striped-shaped mask pieces；
The each mesh often arranged in the mesh is corresponded with each mask pattern of the corresponding striped-shaped mask on piece, and
The size of the mesh is more than the size of the mask pattern, so that the mask pattern is emerging in completely in the mesh.
6. high-accuracy mask plate according to claim 5, which is characterized in that be formed as item between the adjacent two rows mesh
Shape support portion, the bar shaped support portion are bonded with the bottom surface of the two neighboring striped-shaped mask piece, and are covered two neighboring described
The splicing gap between striped-shaped mask piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721741626.3U CN207685337U (en) | 2017-12-13 | 2017-12-13 | High-accuracy mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721741626.3U CN207685337U (en) | 2017-12-13 | 2017-12-13 | High-accuracy mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207685337U true CN207685337U (en) | 2018-08-03 |
Family
ID=62997546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721741626.3U Active CN207685337U (en) | 2017-12-13 | 2017-12-13 | High-accuracy mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207685337U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815642A (en) * | 2017-12-13 | 2018-03-20 | 唐军 | High-accuracy mask plate |
| CN114686136A (en) * | 2020-12-28 | 2022-07-01 | 利诺士尖端材料有限公司 | Mask sheet for packaging flat semiconductor without pins on four sides |
-
2017
- 2017-12-13 CN CN201721741626.3U patent/CN207685337U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107815642A (en) * | 2017-12-13 | 2018-03-20 | 唐军 | High-accuracy mask plate |
| CN114686136A (en) * | 2020-12-28 | 2022-07-01 | 利诺士尖端材料有限公司 | Mask sheet for packaging flat semiconductor without pins on four sides |
| CN114686136B (en) * | 2020-12-28 | 2023-11-03 | 利诺士尖端材料有限公司 | Mask for four-side pin-free flat semiconductor packaging |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN107815642A (en) | High-accuracy mask plate | |
| CN103451598B (en) | A kind of OLED display panel is produced by novel fine metal mask version and making method | |
| CN207685337U (en) | High-accuracy mask plate | |
| CN102881652B (en) | Segmentation mask framework components manufactured by AMOLED panel manufacturing | |
| KR102537761B1 (en) | Frame and mask integrated frame and producing method thereof | |
| CN207109080U (en) | Mask plate | |
| KR20180057495A (en) | Mask integrated frame and producing method thereof | |
| US20220064780A1 (en) | Mask assembly | |
| WO2022068379A1 (en) | Mask, and mask assembly and manufacturing method therefor | |
| CN204529949U (en) | Mask plate | |
| CN110629156B (en) | Mask plate and preparation method thereof | |
| CN105586568A (en) | Mask frame assembly, evaporation method and array substrate | |
| CN110343999A (en) | Mask set and its manufacturing method, evaporation coating method | |
| CN207685336U (en) | High-accuracy support mask plate | |
| CN108193168A (en) | Mask plate and preparation method thereof | |
| CN118600493A (en) | Frame-integrated mask and method for manufacturing frame-integrated mask | |
| CN107723658B (en) | Mask frame and evaporation system | |
| CN107841710A (en) | High-accuracy support mask plate | |
| CN111357129B (en) | Frame-integrated mask | |
| KR102357802B1 (en) | Mask integrated frame and producing method of mask integrated frame | |
| US20210207257A1 (en) | Mask sheet, mask plate and assembling method thereof | |
| KR101266489B1 (en) | Shadow mask apparatus and organic electroluminescent display manufacturing method using the same | |
| KR102371176B1 (en) | Method for separating mask adhere to frame | |
| CN203241662U (en) | Supporting structure and supporting device | |
| JP2005353510A (en) | Vacuum deposition mask, its fixing method, and manufacturing method of organic el display panel using the mask |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20181106 Address after: 435000 66 Hexi Avenue, Huangshi, Hubei Patentee after: Hubei Jun Shan photoelectric Co., Ltd. Address before: 518000 Shenzhen, Guangdong, Pingshan New District, Jinlong Road, Ma Luan Chuang 1 Building 3 and 2 2 buildings. Patentee before: Tang Jun |