CN207109080U - Mask plate - Google Patents
Mask plate Download PDFInfo
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- CN207109080U CN207109080U CN201721104490.5U CN201721104490U CN207109080U CN 207109080 U CN207109080 U CN 207109080U CN 201721104490 U CN201721104490 U CN 201721104490U CN 207109080 U CN207109080 U CN 207109080U
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Abstract
A kind of mask plate, including：Framework, multiple mask substrates and at least one block bar；Each mask substrate parallel interval is arranged on framework, and per setting between two neighboring mask substrate one to block bar, and each to block bar least partially overlapped between two adjacent mask substrates respectively；Each mask substrate includes an at least masked areas, each masked areas includes mask pattern subregion and without mask pattern subregion, in each masked areas, mask pattern subregion is surrounded without mask pattern subregion, and mask pattern subregion offers multiple pattern openings.Above-mentioned mask plate, by the way that masked areas is divided into mask pattern subregion and without mask pattern subregion, and mask pattern subregion is set to surround without mask pattern subregion, mask pattern subregion opens up multiple pattern openings, i.e. multiple pattern openings surround the region of pattern-free opening so that meet that a part shows the requirement that a part is not shown through display device made from the pattern openings evaporation organic material of mask plate.
Description
Technical field
Display technology field is the utility model is related to, more particularly to a kind of mask plate.
Background technology
OLED (Organic Light-Emitting Diode, Organic Light Emitting Diode) is selfluminous element, it is not necessary to
Backlight, outward appearance is light, thin, and traditional LCD (Liquid Crystal Display, liquid crystal display) needs backlight ability
Work, apparent size are thicker.And the visual angle of OLED display is wide, response is fast, low in energy consumption, can most meet people's future to display
Requirement, have become the main force of third generation display device in display technology field.With continuing to bring out for new technology, OLED
Display is expected to substitute LCD in the near future, has very high market potential.
OLED has anode, organic luminous layer and the negative electrode being sequentially formed on substrate.OLED each function material layer with
Cathodic metal layer film is prepared by vacuum thermal evaporation technique, and mask plate is needed to use in vacuum thermal evaporation technical process
(Mask).The effect of mask plate is OLED material evaporation is arrived default position, and OLED material evaporation is arrived default position
Determined by the aperture pattern on mask plate.Therefore, the position of opening of mask plate, shape and surface smoothness are all quite important.
More ripe technology is to use vacuum evaporation technology at present, and in device fabrication process, organic material can sink through mask plate
Product forms distinctive pattern on the substrate above evaporation source.Mask plate is glued with below substrate, is stayed on mask plate
Have and be pre-designed typesetted pattern openings, final organic material can be deposited on substrate by the pattern openings on mask plate
Face.The shared mask plate etching precision of in general is not high and uncontrollable, and obtained mask plate can not realize sharpness screen
Evaporation, the development of high pixel display screen is limited, so there is fine mask plate.
As demand of the people to electronic product experience sense and the curiosity to new technology are increasing, electronic product shows
Show that region has required the Special display requirement that a part display part is not shown, for example, surrounding is shown, centre does not show
Show, for another example concave shape is shown.Hair cannot be deposited using current overall masking method for this kind of display device
Luminescent material, i.e., existing mask plate can not meet wanting for the particular display device that a part display part is not shown is made
Ask.
Utility model content
Based on this, it is necessary to it is special can not to meet that an obtained part display part is not shown for existing mask plate
A kind of technical problem of the requirement of display device, there is provided mask plate.
A kind of mask plate, including：Framework, multiple mask substrates and at least one block bar；Each parallel of mask substrate
Every setting on said frame, set between every two neighboring mask substrate and bar is blocked described in one, and each bar that blocks divides
It is not least partially overlapped between two adjacent mask substrates；Each mask substrate includes an at least masked areas, each
The masked areas includes mask pattern subregion and without mask pattern subregion, in each masked areas, the mask
Pattern subregion surrounds the no mask pattern subregion, and the mask pattern subregion offers multiple pattern openings.
In one of the embodiments, the multiple pattern openings are evenly distributed on the mask pattern subregion.
In one of the embodiments, the bar that blocks is between the framework and the mask substrate.
In one of the embodiments, the mask plate also includes an at least support bar, and each support bar is set respectively
Put on said frame, each support bar is located between two adjacent masked areas of each mask substrate.
In one of the embodiments, the support bar be located at the framework and it is described block bar between, it is described to block bar
Between the support bar and the mask substrate.
In one of the embodiments, the mask pattern subregion surrounds the no mask pattern subregion completely.
In one of the embodiments, the mask pattern subregion part surrounds the no mask pattern subregion.
In one of the embodiments, the no mask pattern subregion is shaped as ellipse.
In one of the embodiments, the no mask pattern subregion is shaped as circle.
In one of the embodiments, the no mask pattern subregion is shaped as polygon.
Above-mentioned mask plate, by the way that masked areas is divided into mask pattern subregion and without mask pattern subregion, and make
Mask pattern subregion surrounds opens up multiple pattern openings without mask pattern subregion, mask pattern subregion, i.e., multiple patterns
Opening is around the region of pattern-free opening so that expires through display device made from the pattern openings evaporation organic material of mask plate
The requirement that a foot part display part is not shown, preparation method is simple, improves operating efficiency.
Brief description of the drawings
Fig. 1 is the structural representation of mask plate in one embodiment；
Fig. 2 is the structural representation of mask plate in another embodiment.
Embodiment
To enable above-mentioned purpose of the present utility model, feature and advantage more obvious understandable, below in conjunction with the accompanying drawings to this
The embodiment of utility model is described in detail.Elaborate many details in order to abundant in the following description
Understand the utility model.But the utility model can be to be much different from other manner described here to implement, this area
Technical staff can do similar improvement in the case of without prejudice to the utility model connotation, therefore the utility model is not by following public affairs
The limitation for the specific embodiment opened.
In the utility model, unless otherwise clearly defined and limited, fisrt feature is "above" or "below" second feature
Can be that the first and second features directly contact, or the first and second features pass through intermediary mediate contact.Moreover, first is special
Sign second feature " on ", " top " and " above " can be fisrt feature directly over second feature or oblique upper, or only
Represent that fisrt feature level height is higher than second feature.Fisrt feature second feature " under ", " lower section " and " below " can be with
Be fisrt feature immediately below second feature or obliquely downward, or be merely representative of fisrt feature level height and be less than second feature.
It should be noted that when element is referred to as " being fixed on " or " being arranged at " another element, it can be directly another
On one element or there may also be element placed in the middle.When an element is considered as " connection " another element, it can be with
It is directly to another element or may be simultaneously present centering elements.Term as used herein " vertically ", " level
", " on ", " under ", "left", "right" and similar statement for illustrative purposes only, be not offered as being uniquely to implement
Mode.
The embodiment of the utility model one discloses a kind of mask plate, including：Framework, multiple mask substrates and at least one are blocked
Bar；Each mask substrate parallel interval is set on said frame, and a screening is set between every two neighboring mask substrate
Blend stop, and each described to block bar least partially overlapped between two adjacent mask substrates respectively；Each mask substrate
Including an at least masked areas, each masked areas includes mask pattern subregion and without mask pattern subregion, described
Mask pattern subregion surrounds the no mask pattern subregion, and the mask pattern subregion offers multiple pattern openings.
For example, described surround surrounds no mask pattern including complete surround with part encirclement, i.e., described mask pattern subregion
Region includes：The mask pattern subregion surrounds the no mask pattern subregion completely, and, the mask pattern sub-district
Domain part surrounds described no two kinds of situations of mask pattern subregion.
The mask plate of the present embodiment, by the way that masked areas is divided into mask pattern subregion and without mask pattern sub-district
Domain, and mask pattern subregion is surrounded without mask pattern subregion, mask pattern subregion opens up multiple pattern openings, i.e., more
Individual pattern openings surround the region of pattern-free opening so that through display made from the pattern openings evaporation organic material of mask plate
Device meets the requirement that a part display part is not shown, preparation method is simple, improves operating efficiency.
Referring to Fig. 1, its structural representation for the mask plate of an embodiment., will in each embodiment preferably to illustrate
Direction of the framework away from mask substrate is defined as lower section, and framework is defined as into top towards the direction of mask substrate.It is for example, a kind of
Mask plate 10, including：Framework 100, multiple mask substrates 200 and at least one block bar 300.Each parallel interval of mask substrate 200
It is arranged on framework 100, sets one to block bar 300 between every two neighboring mask substrate 200, and each bar 300 that blocks is distinguished
It is least partially overlapped between two adjacent mask substrates 200.It is appreciated that multiple splicings of mask substrate 200 are arranged on framework
On 100, and either large or small gap is formed between every two neighboring mask substrate 200, block bar 300 and be arranged on two neighboring cover
It is between ilm substrate 200 and least partially overlapped to block gap completely with mask substrate 200.Specifically, when mask substrate 200
When quantity is two, the quantity for blocking bar 300 is one, when mask substrate 200 quantity for it is more each and every one when, block bar 300
Quantity is multiple, one fewer than the quantity of mask substrate 200.I.e. when the quantity of mask substrate 200 is N number of, bar 300 is blocked
Quantity is N-1, wherein, N is the integer more than or equal to 2.Framework 100 is used to provide support for mask plate, supports mask plate
Each base material.Mask substrate 200 is used for by setting various default patterns, to form the figure that material is deposited on display device
Case.Block on the gap that bar 300 is blocked between two adjacent mask substrates 200, be never pattern for avoiding deposition material
Permeated on gap between two mask substrates 200 of opening.Specifically, each bar 300 that blocks is each parallel to mask substrate 200.
For example, framework 100 is rectangular frame 100.For example, mask substrate 200 is shaped as rectangle.Such as.Block being shaped as bar 300
Rectangle.For example, the both ends of mask substrate 200 are welded on framework 100.For example, the both ends for blocking bar 300 are welded on framework 100
On.Weld together for example, blocking the part overlapping with mask substrate 200 of bar 300.For example, blocking bar 300 is located at mask substrate
200 and the top of framework 100, i.e., be sequentially stacked according to framework 100, mask substrate 200 with the order for blocking bar 300 together with.
Preferably, bar 300 is blocked between framework 100 and mask substrate 200.I.e. according to framework 100, block bar 300, mask substrate
200 order is sequentially stacked together.In an assembling process, bar 300 will be first blocked to be stacked on framework 100, then by mask base
Plate 200, which is stacked in, to be blocked on bar 300 and framework 100.
Each mask substrate 200 includes an at least masked areas 210.For example, masked areas 210 is rectangle.Each mask
Region 210 includes mask pattern subregion 211 and surrounded without mask pattern subregion 212, mask pattern subregion 211 without mask
Pattern subregion 212, mask pattern subregion 211 offer multiple pattern openings 2101.I.e. mask pattern subregion 211 is to cover
The region of multiple pattern openings 2101 is offered on diaphragm area, no mask pattern subregion 212 is that pattern-free is opened in masked areas
The region of mouth, pattern openings 2101 are surrounded and set without mask pattern subregion 212.Due to only having on mask pattern subregion 211
The pattern openings 2101 opened up allow luminescent material during evaporation to pass through formation viewing area.So, by using the mask plate energy
Enough produce the display device that non-integral is shown, viewing area is irregular, a part display part is not shown, preparation method letter
List, improve operating efficiency.For example, pattern openings 2101 are circle.In another example pattern openings 2101 are rectangle.Need to illustrate
, shape including but not limited to circle, the rectangle of pattern openings 2101.For example, multiple pattern openings 2101 are evenly distributed on
On mask pattern subregion 211.I.e. pattern openings 2101 are set evenly around without mask pattern subregion 212.So, by this
The organic material of mask plate evaporation is formed uniformly on substrate.
In one of the embodiments, mask pattern subregion 211 is surrounded without mask pattern subregion 212 completely, i.e., without
Mask pattern subregion 212 is provided entirely in mask pattern subregion 211 and sealed, and no mask pattern subregion 212 is appointed
Surrounded on one side by mask pattern subregion 211.In another embodiment, the part of mask pattern subregion 211 surrounds nothing and covered
Film figure subregion 212, i.e., it is provided entirely in without mask pattern subregion 212 in mask pattern subregion 211 but there is opening,
Not surrounded on one side by mask pattern subregion 211 at least without mask pattern subregion 212.According to display needs, no mask figure
Case subregion 212 can be designed to variously-shaped.I.e. the shape size in pattern-free region can according to display product size and
Design determines.For example, ellipse is shaped as without mask pattern subregion 212, for example, the shape without mask pattern subregion 212
Shape is circle.For example, polygon is shaped as without mask pattern subregion 212, for example, the shape without mask pattern subregion 212
Shape is rectangle, for example, triangle is shaped as without mask pattern subregion 212, for example, the shape without mask pattern subregion 212
Shape is pentalpha.It should be noted that the shape without mask pattern subregion 212 illustrates at this, however it is not limited to
This.By formed different shape without mask pattern subregion 212, add the diversity of display effect.
In order to avoid mask substrate 200 due to fixed both ends span is larger and flexural deformation, referring to Fig. 2, it is another
The structural representation of the mask plate of one embodiment.For example, mask plate also includes an at least support bar 400, each support bar 400 divides
It is not arranged on framework 100, each support bar 400 is located between two adjacent masked areas of each mask substrate 200.For example,
Each support bar 400 is vertical with each mask substrate 200 respectively.It is appreciated that support bar 400 is by the overall whole on mask plate
Masked areas is divided into the small masked areas of multiple identicals, and mask pattern subregion is set in each small masked areas
211 and without mask pattern subregion 212.Due to when masked areas is more in a mask substrate 200, mask substrate 200
Longer dimension, and if only both ends are fixed on framework 100, under long-term Action of Gravity Field, easy sagging generation Curved
Become, influence the machining accuracy of display device.And set support bar 400 that mask substrate 200 can be supported to avoid covering on framework 100
Ilm substrate 200 bends deformation, and support bar 400 and the intersection location of mask substrate 200 is arranged between masked areas,
Support bar 400 is avoided to block masked areas.For example, the both ends of support bar 400 are welded on framework 100.For example, support bar
400 between framework 100 and mask substrate 200, blocks bar 300 and also is located between framework 100 and mask substrate 200.Support
Bar 400, which can be located at, blocks the top of bar 300, can also be located at and block the lower section of bar 300.Can be according to framework 100, support bar
400th, block together with bar 300 is sequentially stacked with the order of mask substrate 200, can also according to framework 100, block bar 300, branch
Together with stay 400 is sequentially stacked with the order of mask substrate 200.Preferably, support bar 400 is located at framework 100 and blocks bar
Between 300, bar 300 is blocked between support bar 400 and mask substrate 200.So, support bar 400 can simultaneously carriage
Bar 300 and mask substrate 200 are blocked on frame 100.
For example, mask substrate 200, blocking bar 300, support bar 400 and framework 100 and can use identical or different material
Matter.For example, mask substrate 200, block bar 300, support bar 400 and framework 100 be respectively adopted dilval, nickel cobalt (alloy) and
A kind of stainless steel material therein is made.For example, mask substrate 200, blocking bar 300, support bar 400 and framework 100 and adopting
It is made of invar alloy, invar alloy belongs to one kind of iron-nickel alloy, and its composition is generally nickel 36%, iron 63.8%, carbon
0.2%, the thermal coefficient of expansion of very little is shown in (- 80~230 DEG C) at normal temperatures, each part is by invar alloy system
Into mask plate be unlikely to deform, it is independent of temperature variations.
Each technical characteristic of embodiment described above can be combined arbitrarily, to make description succinct, not to above-mentioned reality
Apply all possible combination of each technical characteristic in example to be all described, as long as however, the combination of these technical characteristics is not deposited
In contradiction, the scope that this specification is recorded all is considered to be.
Embodiment described above only expresses several embodiments of the present utility model, and its description is more specific and detailed,
But therefore it can not be interpreted as the limitation to utility model patent scope.It should be pointed out that the common skill for this area
For art personnel, without departing from the concept of the premise utility, multiple modification and improvement can also be made, these are belonged to
The scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
- A kind of 1. mask plate, it is characterised in that including：Framework, multiple mask substrates and at least one block bar；Each mask substrate parallel interval is set on said frame, and a screening is set between every two neighboring mask substrate Blend stop, and each described to block bar least partially overlapped between two adjacent mask substrates respectively；Each mask substrate includes an at least masked areas, and each masked areas includes mask pattern subregion and nothing Mask pattern subregion, in each masked areas, the mask pattern subregion surrounds the no mask pattern subregion, And the mask pattern subregion offers multiple pattern openings.
- 2. mask plate according to claim 1, it is characterised in that the multiple pattern openings are evenly distributed on the mask On pattern subregion.
- 3. mask plate according to claim 1, it is characterised in that the bar that blocks is located at the framework and the mask base Between plate.
- 4. mask plate according to claim 1, it is characterised in that the mask plate also includes an at least support bar, each The support bar is separately positioned on the framework, and each support bar is located at two adjacent masks of each mask substrate Between region.
- 5. mask plate according to claim 4, it is characterised in that the support bar is located at the framework and described blocks bar Between, the bar that blocks is between the support bar and the mask substrate.
- 6. mask plate according to claim 1, it is characterised in that the mask pattern subregion surrounds the nothing and covered completely Film figure subregion.
- 7. mask plate according to claim 1, it is characterised in that the mask pattern subregion part surrounds the nothing and covered Film figure subregion.
- 8. mask plate according to claim 1, it is characterised in that the no mask pattern subregion is shaped as ellipse Shape.
- 9. mask plate according to claim 8, it is characterised in that the no mask pattern subregion is shaped as circle.
- 10. mask plate according to claim 1, it is characterised in that being shaped as the no mask pattern subregion is polygon Shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721104490.5U CN207109080U (en) | 2017-08-30 | 2017-08-30 | Mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721104490.5U CN207109080U (en) | 2017-08-30 | 2017-08-30 | Mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207109080U true CN207109080U (en) | 2018-03-16 |
Family
ID=61585720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721104490.5U Active CN207109080U (en) | 2017-08-30 | 2017-08-30 | Mask plate |
Country Status (1)
| Country | Link |
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| CN (1) | CN207109080U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108598133A (en) * | 2018-05-23 | 2018-09-28 | Oppo广东移动通信有限公司 | Manufacturing method, OLED display screen and the electronic device of OLED display screen |
| CN109182964A (en) * | 2018-08-31 | 2019-01-11 | 云谷（固安）科技有限公司 | Mask plate composition method |
| CN110541144A (en) * | 2019-09-29 | 2019-12-06 | 昆山国显光电有限公司 | Mask frame, mask plate and mask structure |
| CN111796706A (en) * | 2020-05-22 | 2020-10-20 | 南昌欧菲显示科技有限公司 | Panel, preparation method thereof, touch display screen and electronic equipment |
| CN111850467A (en) * | 2020-08-04 | 2020-10-30 | 京东方科技集团股份有限公司 | Metal mask plate assembly, OLED display panel and display device |
| WO2021199401A1 (en) * | 2020-04-02 | 2021-10-07 | シャープ株式会社 | Vapor deposition mask, display panel, and method for manufacturing display panel |
-
2017
- 2017-08-30 CN CN201721104490.5U patent/CN207109080U/en active Active
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108598133A (en) * | 2018-05-23 | 2018-09-28 | Oppo广东移动通信有限公司 | Manufacturing method, OLED display screen and the electronic device of OLED display screen |
| CN109182964A (en) * | 2018-08-31 | 2019-01-11 | 云谷（固安）科技有限公司 | Mask plate composition method |
| CN109182964B (en) * | 2018-08-31 | 2019-11-15 | 云谷（固安）科技有限公司 | Mask plate composition method |
| WO2020042538A1 (en) * | 2018-08-31 | 2020-03-05 | 云谷（固安）科技有限公司 | Mask plate layout method |
| US11021784B2 (en) | 2018-08-31 | 2021-06-01 | Yungu (Gu'an) Technology Co., Ltd. | Method of mask layout |
| CN110541144A (en) * | 2019-09-29 | 2019-12-06 | 昆山国显光电有限公司 | Mask frame, mask plate and mask structure |
| CN110541144B (en) * | 2019-09-29 | 2022-05-17 | 昆山国显光电有限公司 | Mask frame, mask plate and mask structure |
| WO2021199401A1 (en) * | 2020-04-02 | 2021-10-07 | シャープ株式会社 | Vapor deposition mask, display panel, and method for manufacturing display panel |
| CN111796706A (en) * | 2020-05-22 | 2020-10-20 | 南昌欧菲显示科技有限公司 | Panel, preparation method thereof, touch display screen and electronic equipment |
| CN111850467A (en) * | 2020-08-04 | 2020-10-30 | 京东方科技集团股份有限公司 | Metal mask plate assembly, OLED display panel and display device |
| CN111850467B (en) * | 2020-08-04 | 2022-08-02 | 京东方科技集团股份有限公司 | Metal mask plate assembly, OLED display panel and display device |
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