CN207623629U - A kind of graticle - Google Patents
A kind of graticle Download PDFInfo
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- CN207623629U CN207623629U CN201721851643.2U CN201721851643U CN207623629U CN 207623629 U CN207623629 U CN 207623629U CN 201721851643 U CN201721851643 U CN 201721851643U CN 207623629 U CN207623629 U CN 207623629U
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- supporting body
- division line
- graticle
- antireflection layer
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Abstract
The utility model discloses a kind of graticles, including：Supporting body, the supporting body include first surface and the second surface that is oppositely arranged with first surface；Antireflection layer, the first surface and second surface of the supporting body are respectively equipped with antireflection layer；Division line, the division line is located at the first surface side of the supporting body, and the division line consists of metal；Structure, the protection structure is protected to coat the division line；Wherein, the division line reflectivity is not less than 95%, and the supporting body entirety transmitance for being equipped with antireflection layer is not less than 95%.A kind of graticle forms silver using magnetron sputtering technique, obtained two-sided silverskin, while ensureing that film layer has reached two-sided high reflectance, increase the adhesion strength between silverskin and glass matrix, it is equipped with antireflection layer on supporting body surface, the transmitance made in this way is more than or equal to 95%, and the reflectivity for the material silver that division line uses is more than or equal to 95%, high contrast, the division line made in this way are more clear.
Description
Technical field
The utility model is related to graticle technical field more particularly to a kind of graticles.
Background technology
Graticle is typically mounted on the right eyepiece focal plane of telescope, it is that graduation dense bit is carved on the surface of one piece of pole book
The thin glass of line extends the focal length of object lens since this block thin glass has also assisted in imaging theoretically, can be to the length of right eyepiece
Degree has more or less influence.Graticle is high to purity requirements, and any small dust can all generate very big in observation
Stain, while the installation site required precision of graticle is high, therefore, tries not to dismantle, if dismounting, has to by original
Sample restores.Civilian aspect：Graticle is mainly used for the optical detections such as microscope, magnifying glass, theodolite, measurement, instrument of surveying and mapping
Middle be used as measures calibration optical component.For example the instrument of surveying and mapping in engineering project is required for using.
In the prior art, using being electroplated or steaming chrome-plated metal, the graticle of this structure is electroplated or is deposited first graticle
The graticle of chromium is not fine for the sensibility of light, is needed by extraneous light source, in some special dimensions, in this way when use
Graticle cannot reach the set goal；Second, the requirement become reconciled cannot be reached using silver-plated graticle adhesive force, held
It is easy to fall off, and it is easy oxidation, prevent it from normal use；Third needs when large area prepares graticle by big face
Long-pending graticle cuts into independent graticle, is susceptible to and bursts apart during cutting；4th, in the prior art due to
Supporting body such as glass, transmitance general 90% or so, such graticle is easy fuzzy during use, so that
Graticle is limited（Such as precision）, a kind of supporting body and division line high contrast are urgently provided based on these above-mentioned technical problems
Graticle and preparation method thereof technical solution.
Utility model content
Based on this, it is necessary to provide a kind of graticle to solve above-mentioned technical problem.
One technical solution of the utility model is：
A kind of graticle, which is characterized in that including：
Supporting body, the supporting body include first surface and the second surface that is oppositely arranged with first surface；
Antireflection layer, the first surface and second surface of the supporting body are respectively equipped with antireflection layer；
Division line, the division line is located at the first surface side of the supporting body, and the division line consists of metal；
Structure, the protection structure is protected to coat the division line；
Wherein, the division line reflectivity is not less than 95%, and the supporting body entirety transmitance equipped with antireflection layer is not less than
98%。
In a wherein embodiment, the supporting body and the protection structure are there are refringence, and the refractive index
Difference is less than 0.4.
In a wherein embodiment, the supporting body is glass.
In a wherein embodiment, when the antireflection layer is set to the first surface and second surface, the division line
Reflectivity is not less than 95%, and the supporting body entirety transmitance for being equipped with antireflection layer is not less than 98.5%.
In a wherein embodiment, the protection structure is silica, the combination of ITO or AZO one or more, institute
It states silica, ITO or AZO and the division line surface is formed in by vapor deposition or magnetron sputtering mode.
In a wherein embodiment, the protection structure side is equipped with coating, and the overlay structure is made of polymer.
In a wherein embodiment, the polymer is UV glue, and the thickness is not more than 20 μm.
In a wherein embodiment, the division line height is 150nm ~ 350nm.
In a wherein embodiment, the anti-reflection film at least one layer structure.
In a wherein embodiment, the protection structural thickness is 100nm ~ 500nm；Or the protection structural thickness is
150nm~500nm；Or the protection structural thickness is 200nm ~ 400nm.
The beneficial effects of the utility model：A kind of graticle of the utility model offer forms silver using magnetron sputtering technique,
Obtained two-sided silverskin increases while ensureing that film layer has reached two-sided high reflectance between silverskin and glass matrix
Adhesion strength is equipped with antireflection layer, so that transmitance is more than or equal to 95%, and the material silver that division line uses on supporting body surface
Reflectivity be more than or equal to 95%, the transmitance of transmission is very high, and the reflectivity of division line is very high, high contrast, make in this way point
Scribing line is more clear, and improves precision；On silver-based graticle, forming one layer using vapor deposition or magnetron sputtering technique has certain thickness
Silica, ITO the or AZO films of degree enhance the wearability and oxidation resistance of silver-based graticle, while without reducing silverskin
Two-sided rate, more low using the AZO films cost in the composition that large area prepares graticle, thermal stability is good, for
Graticle is more preferable；Furthermore the protection body structure surface is equipped with UV glue-lines, it is not easy to collapse during large area produces cutting in this way
It splits, and the UV carries out ultra-violet curing.
Description of the drawings
Fig. 1 is a kind of structural schematic diagram of large area graticle of the utility model；
Fig. 2 is a kind of structural schematic diagram of graticle another kind of the utility model；
Fig. 3 is a kind of another structural schematic diagram of graticle of the utility model；
Fig. 4 is a kind of another structural schematic diagram of graticle of the utility model；
Fig. 5 is a kind of another structural schematic diagram of graticle of the utility model；
Fig. 6 is a kind of another structural schematic diagram of graticle of the utility model；
Fig. 7 is a kind of graticle preparation method flow diagram of the utility model.
Specific implementation mode
The utility model is more fully retouched below with reference to relevant drawings for the ease of understanding the utility model,
It states.The better embodiment of the utility model is given in attached drawing.But the utility model can pass through many different forms
To realize, however it is not limited to embodiment disclosed below.On the contrary, the purpose of providing these embodiments is that making to this practicality
Novel disclosure understands more thorough and comprehensive.
It should be noted that when element is referred to as " being set to " another element, it can be directly on another element
Or there may also be elements placed in the middle.When an element is considered as " connection " another element, it can be directly connected to
To another element or it may be simultaneously present centering elements.Term as used herein " vertical ", " horizontal ", " left side ",
" right side " and similar statement for illustrative purposes only, are not offered as being unique embodiment.
Unless otherwise defined, all of technologies and scientific terms used here by the article is led with the technology for belonging to the utility model
The normally understood meaning of technical staff in domain is identical.Terminology used in the description of the utility model herein only be
The purpose of description specific embodiment, it is not intended that in limitation the utility model.Term as used herein "and/or" packet
Include any and all combinations of one or more relevant Listed Items.
A kind of graticle provided by the utility model, which is characterized in that including：
Supporting body, the supporting body include first surface and the second surface that is oppositely arranged with first surface；It is described to hold
Carrier first choice glass, glass can preferably use on high-end instrument；
Antireflection layer, the antireflection layer are set to the first surface and/or second surface；The namely described supporting body wherein one
Surface can be equipped with antireflection layer；Can also two sides be designed with antireflection layer, the transmitance of the supporting body entirety made in this way increases, and not small
In 95%, it might even be possible to reach 98% or 98.5% high transmittance；Wherein, the antireflection layer is the combinations such as TiO2/SiO2/MgF
At optical film, that is to say, that the antireflection layer is at least one layer of structure, can also be what multilayer film formed, and purpose is holding of making
Carrier transmitance increases.
Division line, the division line is located at the first surface of the supporting body, and the division line consists of metal, described
Metal can be formed in the supporting body surface by way of magnetron sputtering, and metal and glass are made by the way of magnetron sputtering
The contact of glass more securely；Height 50nm ~ 500nm of the division line or height 150nm ~ 350nm of the division line.
Structure, the protection structure is protected to coat the division line, since graticle is more for precision instrument or high-end
On instrument, so division line is oxidized easily using metal, in division line surface shape by way of vapor deposition or magnetron sputtering
At protection structure, to prevent division line from being aoxidized；Wherein, the division line reflectivity is not less than 95%, is equipped with the described of antireflection layer
Supporting body entirety transmitance is not less than 95%；When the antireflection layer is set to the first surface and second surface, the division line
Reflectivity is not less than 95%, and the supporting body entirety transmitance for being equipped with antireflection layer is not less than 98%, wherein what the transmitance referred to
It is wavelength of light between 400nm ~ 1000nm；The protection structural thickness is 100nm ~ 500nm；Or the protection structure is thick
Degree is 150nm ~ 500nm；Or the protection structural thickness is 200nm ~ 400nm.
During large area prepares graticle, the graticle is additionally provided with coating, and the coating is set to described
Body structure surface is protected, and the coating is made of polymer, is prepared graticle in large area, finally to be cut into single graduation
Plate is equipped with coating on its surface, and such cut surface can be very neat, the case where will not bursting apart, and described covers
Cap rock uses flexible polymer layer, can more preferably prevent from bursting apart.
In a wherein embodiment, there are refringence between the supporting body and the protection structure, and the folding
It penetrates rate difference absolute value and is less than 0.4, can be very good to ensure that the transmitance of graticle is more preferable in this way, and the refringence is absolute
Value is less than 0.4, ensure that be not in apparent optical parallax between layers.
In a wherein embodiment, the division line is made of silver, and the silver is formed in institute using magnetron sputtering mode
The first surface for stating supporting body is used as graduation wire material, the division line reflectivity higher being prepared using silver, and uses magnetic
The mode of sputtering is controlled, more improves the reflecting effect of division line, division line is more clear such graticle during use.
In a wherein embodiment, the protection structure is silica, ITO or AZO, can be a kind of, can also be
Two or more combinations, the silica, ITO or AZO are formed in the division line table by vapor deposition or magnetron sputtering mode
Face, large area use AZO costs also low when producing graticle, and thermal stability is good, is more in line with the protection requirement of division line.
In a wherein embodiment, due to the transmitance of graticle to be ensured, so the thickness of coating to have it is certain
Limitation, the polymer is UV glue, and the thickness is not more than 20 μm.
The invention also discloses a kind of graduation board manufacturing methods, which is characterized in that includes the following steps：
S1, a supporting body is provided, the supporting body includes first surface and the second table being oppositely arranged with first surface
Face is equipped with antireflection layer in the first surface and/or second surface；It is equipped with metal film in the supporting body first surface；
S2, the metallic film patternization in step S1 is formed into division line；
S3, in step s 2 the division line surface are equipped with protection structure；The division line reflectivity is not less than 95%, if
There is the supporting body entirety transmitance of antireflection layer to be not less than 95%.
In a wherein embodiment, in the step S3 protect body structure surface be equipped with coating, and the coating by
Polymer is constituted, for example, polymer uses UV, and uses ultra-violet curing for the solidification of the polymer.
In a wherein embodiment, metal film is formed using magnetron sputtering mode in the step S1, the metal film made with
The binding force of supporting body is more preferable.
In a wherein embodiment, structure is protected to be formed using vapor deposition or magnetron sputtering mode in the step S3, wherein
The protection structural silica dioxide, the combination of ITO or AZO one or more, wherein protection structure can only covering division line
Part can also cover the side that the supporting body is equipped with division line.
Referring to Fig. 1, for large area graticle, the large area graticle 100 include supporting body 10 and it is several solely
Vertical small graticle 101, the small graticle 101 are set to 10 surface of the supporting body.
Referring to Fig. 2, a kind of graticle is disclosed, including：Supporting body 10, such as glass, the supporting body 10 include the
One surface and the second surface being oppositely arranged with first surface；Antireflection layer 50, the antireflection layer 50 are set to the supporting body 10
First surface；Division line 20, the division line 20 are located at the first surface side of the supporting body 10, and equipped with described anti-reflection
50 side far from the supporting body 10 of layer, and the division line 20 consists of metal, such as silver, silver-colored reflectivity is higher, and
And it is not less than 95% using the silver-colored reflectivity that magnetron sputtering mode is formed, the relatively good metal of preferred reflectance；Structure 30 is protected,
The protection structure 30 coats the division line 20, also, the protection structure 30 covers the supporting body 10 and is equipped with division line
20 this side.Wherein, 10 transmitance of the supporting body for being equipped with antireflection layer is more than or equal to 95%, or the institute equipped with antireflection layer
State 10 transmitance of supporting body be more than or equal to 96%, it is higher to reach 98% or more；Since graticle use is in some accurate instrument
Device, and have relatively high requirement for transmitance, such as：Telescope, microscope etc..
The protection structure 30 coats the division line 20, and " cladding " here makes division line 20 is not exposed to prevent outside point
The oxidation of scribing line 20, influences the normal use of graticle.
Referring to Fig. 2, the external morphology of protection structure 30 in Fig. 2 and division line 20 are similar, continuous risen there are one
Volt；Referring to Fig. 3, the protection structure 31 in Fig. 3 only coats division line 20, division line 20 is protected just, and the protection is tied
The pattern of structure 31 and division line 20 are similar, in 10 second surface side of supporting body equipped with antireflection layer 51；Referring to Fig. 4, in Fig. 4
Side of the protection structure 32 far from division line 20 be a flat surface, and it is described protection structure 32 thickness be more than the division line 20
Thickness, inside is embedded in by protection structure 32 equal to the division line 20 in this way, is respectively equipped on 10 two surfaces of supporting body
Anti-reflection film 50,51.
Fig. 5 and Fig. 6 is please referred to, structure 33 and protection structure 34 is protected to form one on the basis of Fig. 2 and Fig. 3
Fixed radian；Furthermore when large area prepares graticle, structure 33,34 surfaces is protected to further respectively have and cover in Fig. 5 and Fig. 6
Cap rock 40,41, the coating 40,41 are located at the protection structure 33,34 sides, and the coating 40,41 material therefors are
Polymer, such as UV glue, and UV glue needs to use ultra-violet curing when solidification.
In a wherein embodiment, the field used due to graticle is all high-precision optical apparatus measures, it is described in this way
It is required that supporting body 10, protection structure 30 and 40 optical difference of coating cannot be too big, thus the supporting body 10 with it is described
Protecting structure 30, there are refringences, and the refringence is less than 0.7, is further less than equal to 0.5, or be less than or equal to
0.4。
In a wherein embodiment, the supporting body 10 can select glass or the modeling of high transmittance hard of high transmittance
Material, such as PMMA.
In a wherein embodiment, 20 reflectivity of division line on graticle is higher so when in use will be more apparent,
More recognizable, so the division line 20 is made of silver, and the silver is formed in the supporting body using magnetron sputtering mode
10 first surface, silver-colored reflectivity is relatively high, silver-colored and supporting body 10 the bonding for using magnetron sputtering mode to make so here
Power is more secured, and the double-sided reflecting rate of silver can reach more than or equal to 90% or the double-sided reflecting rate of silver can reach and be more than or equal to
95%, so during use, the requirement for ambient light is not that very high, applicable environment is broader.
In a wherein embodiment, in order to reduce supporting body and protect the optical difference between structure, when supporting body 10 selects
When with glass, the protection structure 30 is ITO, AZO or silica, and described ITO, AZO or silica pass through vapor deposition or magnetic
Control sputtering mode is formed in 20 surface of the division line, and difference so between the two is very small, and performance is more superior, in addition,
The adhesive force increased between supporting body is formed using vapor deposition or magnetron sputtering mode, is allowed to more securely.
Referring to Fig. 7, a kind of graduation board manufacturing method, which is characterized in that include the following steps：
S1, provide one carrying, 10, the supporting body 10 include first surface and be oppositely arranged with first surface second
Surface is equipped with antireflection layer 50 in the first surface and/or second surface；It is equipped with metal in 10 first surface of the supporting body
Film；
S2, the metallic film patternization in step S1 is formed into division line 20；
S3, in step s 2 the division line surface are equipped with protection structure 30 or 31 or 32 or 33 or 34；Wherein, described point
Reflectivity of crossing is not less than 95%, and the whole transmitance of the supporting body 10 for being equipped with antireflection layer 50 is not less than 95%.
In a wherein embodiment, body structure surface is protected to be equipped with coating 40, and the coating in the step S3
40 are made of polymer, for example, polymer uses UV, and use ultra-violet curing for the solidification of the polymer.
In a wherein embodiment, in order to increase the adhesive force of metal and supporting body 10, metal film is adopted in the step S1
It is formed with magnetron sputtering mode.
In a wherein embodiment, patterned way is in the step S2：Photoresists are equipped in the metallic film surface,
The metal film can select Ag films, be etched by exposing, and form division line 20；Wherein, described to etch the etching solution used
Including ammonium ceric nitrate or sodium acetates, during corrosion, can be obtained 1 μm of unilateral lateral erosion ＜, lines are steep, edge impulse- free robustness lack
The silver-based figure graticle of mouth.
In a wherein embodiment, structure is protected to be formed using vapor deposition or magnetron sputtering mode in the step S3.It is described
There are refringences with the protection structure for supporting body, and the refringence is less than 0.4.Wherein, the supporting body 10 can be with
Select high permeability glass or high transmittance rigid plastics, protection structure that can select material similar with supporting body optical effect
Material then protects structure to select silica for example, supporting body 10 selects glass.
Structure 30 is protected to be intended merely to the convenience in narration to protection structure 34, coating 40 ~ 41 in the application, in fact institute
The purpose for playing the role of and reaching is identical.
A kind of graticle of the utility model offer and preparation method thereof forms silver using magnetron sputtering technique, and what is obtained is two-sided
Silverskin increases the adhesion strength between silverskin and glass matrix while ensureing that film layer has reached two-sided high reflectance, is holding
Carrier surface is equipped with antireflection layer, and the transmitance made in this way is more than or equal to 95%, and the reflectivity for the material silver that division line uses is more than
Equal to 95%, the transmitance of transmission is very high, and the reflectivity of division line is very high, high contrast, and the division line made in this way is more clear
It is clear, improve precision；On silver-based graticle, forming one layer using vapor deposition or magnetron sputtering technique has certain thickness titanium dioxide
Silicon, ITO or AZO films enhance the wearability and oxidation resistance of silver-based graticle, while the reflection two-sided without reducing silverskin
Rate, more low using the AZO films cost in the composition that large area prepares graticle, thermal stability is good, for graticle
More preferably；Furthermore the protection body structure surface is equipped with UV glue-lines, is not easy to burst apart during large area produces cutting in this way, and
And the UV carries out ultra-violet curing.
To keep the above objects, features, and advantages of the utility model more obvious and easy to understand, above in conjunction with attached drawing to this
The specific implementation mode of utility model is described in detail.Elaborate many details in order to abundant in the above description
Understand the utility model.But the utility model can be much to implement different from other manner described above, this field
Technical staff can do similar improvement without prejudice to the utility model connotation, therefore the utility model is not by public above
The limitation for the specific embodiment opened.Also, each technical characteristic of embodiment described above can be combined arbitrarily, to make to retouch
It states succinctly, combination not all possible to each technical characteristic in above-described embodiment is all described, as long as however, these skills
Contradiction is not present in the combination of art feature, is all considered to be the range of this specification record.
Above-described embodiments merely represent several embodiments of the utility model, the description thereof is more specific and detailed,
But it should not be understood as limiting the scope of the patent of the utility model.It should be pointed out that for the common of this field
For technical staff, without departing from the concept of the premise utility, various modifications and improvements can be made, these all belong to
In the scope of protection of the utility model.Therefore, the protection domain of the utility model patent should be determined by the appended claims.
Claims (10)
1. a kind of graticle, which is characterized in that including：
Supporting body, the supporting body include first surface and the second surface that is oppositely arranged with first surface；
Antireflection layer, the first surface and second surface of the supporting body are respectively equipped with antireflection layer；
Division line, the division line is located at the first surface side of the supporting body, and the division line consists of metal, described
Division line height is 50nm ~ 500nm；
Structure, the protection structure is protected to coat the division line；
Wherein, the division line reflectivity is not less than 95%, and the supporting body entirety transmitance for being equipped with antireflection layer is not less than 98%.
2. a kind of graticle according to claim 1, which is characterized in that the supporting body and the protection structure exist
Refringence, and the refringence is less than 0.4.
3. a kind of graticle according to claim 1, which is characterized in that the supporting body is glass.
4. a kind of graticle according to claim 1, which is characterized in that the division line reflectivity is not less than 95%, is equipped with
The supporting body entirety transmitance of antireflection layer is not less than 98.5%.
5. a kind of graticle according to claim 1, which is characterized in that the protection structure be silica, ITO or
AZO one or more combine, and the silica, ITO or AZO are formed in described point by vapor deposition or magnetron sputtering mode
Scribing line surface.
6. a kind of graticle according to claim 1, which is characterized in that the protection structure side is equipped with coating, institute
Overlay structure is stated to be made of polymer.
7. a kind of graticle according to claim 6, which is characterized in that the polymer is UV glue, and the thickness is not
More than 20 μm.
8. a kind of graticle according to claim 1, which is characterized in that the division line height is 150nm ~ 350nm.
9. a kind of graticle according to claim 1, which is characterized in that the antireflection layer at least one layer structure.
10. a kind of graticle according to claim 1, which is characterized in that the protection structural thickness be 100nm ~
500nm；Or the protection structural thickness is 150nm ~ 500nm；Or the protection structural thickness is 200nm ~ 400nm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721851643.2U CN207623629U (en) | 2017-12-27 | 2017-12-27 | A kind of graticle |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721851643.2U CN207623629U (en) | 2017-12-27 | 2017-12-27 | A kind of graticle |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109445122A (en) * | 2018-12-18 | 2019-03-08 | 长沙韶光铬版有限公司 | A kind of reflection-type graticle and preparation method thereof |
| CN109459867A (en) * | 2018-12-18 | 2019-03-12 | 长沙韶光铬版有限公司 | A kind of lens graticle and preparation method thereof |
-
2017
- 2017-12-27 CN CN201721851643.2U patent/CN207623629U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109445122A (en) * | 2018-12-18 | 2019-03-08 | 长沙韶光铬版有限公司 | A kind of reflection-type graticle and preparation method thereof |
| CN109459867A (en) * | 2018-12-18 | 2019-03-12 | 长沙韶光铬版有限公司 | A kind of lens graticle and preparation method thereof |
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