CN207622447U - Silicon chip drying stove - Google Patents
Silicon chip drying stove Download PDFInfo
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- CN207622447U CN207622447U CN201721475361.7U CN201721475361U CN207622447U CN 207622447 U CN207622447 U CN 207622447U CN 201721475361 U CN201721475361 U CN 201721475361U CN 207622447 U CN207622447 U CN 207622447U
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Abstract
The utility model is related to silicon chip of solar cell production technical fields, and more particularly, to silicon chip drying stove, furnace body has silicon chip conveying drying space, and the upper and lower sides in silicon chip conveying drying space are respectively equipped with upper heating device and lower heating device；It is conveyed in silicon chip and is equipped with the conveying device for realizing the edge-on conveying of silicon chip in drying space, the length direction subregion that upper heating device and lower heating device convey drying space along silicon chip is arranged, there is upper heating device the upper calandria and upper bellows of downward radiation heat, lower heating device to have the lower calandria and lower bellows of upward radiations heat energy；Exhaust apparatus is additionally provided on furnace body.The edge-on conveying of silicon chip, upper calandria and lower calandria to the front of silicon chip and back side heating, drying, shorten the process time simultaneously；Upper bellows and lower bellows promote drying temperature homogenization, energy-saving and environmental protection, no temperature difference dead angle to meet the production of HIT solar-energy photo-voltaic cell silicon chips, and save production space, improve production efficiency and meet production quality requirements simultaneously.
Description
Technical field
The utility model is related to silicon chip of solar cell production technical fields, are especially for the silicon of printing conductive paste
Piece baking and curing equipment.
Background technology
HIT solar-energy photo-voltaic cells are to clamp list with the i/n type Si films of the p/i types Si film of light irradiation side and back side
Silicon chip is crystallized to constitute.HIT solar-energy photo-voltaic cell substrates based on silicon substrate, receive by the silicon for depositing high energy gap on a silicon substrate
Rice film, surface layer redeposition transparent conductive film, the back side are equipped with back surface electric field.By optimizing the surface texture of silicon, can reduce
Oxidic, transparent, conductive layers and a-Si layers of optical absorption loss.
When prepared by HIT solar-energy photo-voltaic cells, silicon chip surface is dried after printing conductive paste, traditional way
It is to use hot-air seasoning stove heat, and existing hot air drying stove mainly uses hot air circulation, and silicon chip lies low transmission, causes
Process time is long, and drying effect is bad, and yield rate is low.
Invention content
The purpose of the utility model is to overcome prior art defects, provide a kind of silicon chip drying stove, meet HIT solar energy
Photovoltaic cell silicon wafer produces, and promotes drying effect and yield rate.
In order to achieve the above objectives, the utility model adopts the following technical solution：
Silicon chip drying stove includes furnace body, which has silicon chip conveying drying space, and empty in silicon chip conveying drying
Between upper and lower sides be respectively equipped with heating device and lower heating device；It conveys in drying space and is equipped with for conveying in the silicon chip
The conveying device of silicon chip, conveying device are equipped with the carrier for realizing the edge-on conveying of silicon chip, carrier meet the upper and lower side of silicon chip by
Heat drying；The length direction subregion that the upper heating device and lower heating device convey drying space along silicon chip is arranged, upper to add
Thermal has the upper calandria and upper bellows of downward radiation heat, the blowing downwards of upper bellows cycle；Lower heating device have to
The lower calandria and lower bellows of upper radiations heat energy, lower bellows are recycled to up-draught；It is additionally provided with exhaust apparatus on the furnace body, is vented
Device is connected to the silicon chip conveying drying space of furnace body.
Said program is further：The upper calandria and lower calandria are heat-generating pipes, and upper calandria is sleeping to be located on silicon chip
It is square and longitudinally perpendicular arranged in a crossed manner with silicon chip conveying direction；Lower calandria is sleeping be located at below silicon chip and with the non-perpendicular friendship of upper calandria
Fork setting.
Said program is further：The carrier is equipped with U-lag, and silicon chip is edge-on in the U-lag.
Said program is further：There is the carrier supported rod erecting, the lower end of the supported rod erecting to be fixed on chain, chain
Item moves under sprocket wheel drive；Pedestal is propped in the upper end of supported rod erecting, and the upside of pedestal is equipped with convex guard bar, guard bar and pedestal
U-lag is constructed together, and pedestal has hollow hole.
Said program is further：The air side for case of being in the wind is arranged in the upper calandria, and upper bellows have upper compression empty
Gas input pipe, upper fan, the first interior room and the second interior room, the first interior room of upper compressed air input pipe connection upper bellows, windward
The web plate of indoor air towards the first interior room lower bottom part moves in machine driving first；The setting of second interior room is peripheral in the first interior room,
And second interior room have connection silicon chip conveying drying space upper cycle inlet scoop and be connected to the first interior room upper cycle air inlet
Mouthful.
Said program is further：The lower calandria is arranged in the air side of lower bellows, and lower bellows have lower compression empty
Gas input pipe, lower wind turbine, third interior room and the 4th interior room, compressed air input pipe are connected to the third interior room of lower bellows, leeward
Machine drives the web plate of indoor air towards third interior room upper top in third to move；The setting of 4th interior room is peripheral in third interior room,
And the 4th interior room have connection silicon chip conveying drying space lower cycle inlet scoop and be connected to third interior room lower cycle air inlet
Mouthful.
Said program is further：The exhaust apparatus has induction chamber and is connected to the exhaust pipe of induction chamber, and is being vented
Compressed air is introduced in pipe, compressed air sprays to the outlet side of exhaust pipe；It is additionally provided with outer air on the exhaust pipe and fills into mouth, outside
Air fills into mouth and is located at after blast injection；The silicon chip conveying drying space of the induction chamber connection furnace body.
Said program is further：The exhaust apparatus is arranged in the silicon chip conveying drying space two ends of furnace body, institute
It states exhaust pipe and compressed-air atomizer is set with induction chamber junction, compressed-air atomizer is erected at middle part in exhaust pipe；It is described outer
It is a collar extension that air, which fills into mouth, and being divided into the mutually nested gap reserved of two sections by exhaust pipe forms.
Said program is further：The left and right sides of the chain is equipped with guide wheel.
Said program is further：On the chain carrier is distributed according to pitch.
Using the above scheme, the utility model realizes that the upper and lower of space is dried in the edge-on conveying of silicon chip, the silicon chip conveying of furnace body
Side is respectively equipped with heating device and lower heating device, and upper heating device has the upper calandria and windward of downward radiation heat
Case, lower heating device have the lower calandria and lower bellows of upward radiations heat energy；Thus upper calandria and lower calandria are right simultaneously
Front and the back side heating, drying of silicon chip, shorten the process time；Upper bellows and lower bellows promote drying temperature to homogenize, energy saving,
Environmental protection, no temperature difference dead angle are conducive to drying operation, meet the production of HIT solar-energy photo-voltaic cell silicon chips, and save production space, carry
High efficiency meets production quality requirements simultaneously.
Description of the drawings：
Attached drawing 1 is the one embodiment outline structural diagram of the utility model；
Attached drawing 2 is the internal structure sectional view of Fig. 1 embodiments；
Attached drawing 3 is the upper heating device internal structure sectional view of Fig. 1 embodiments；
Attached drawing 4 is the upper calandria distribution schematic diagram of the upper heating device of Fig. 1 embodiments；
Attached drawing 5 is the plan structure distribution schematic diagram of the upper heating device of Fig. 1 embodiments；
Attached drawing 6 is the lower heating device internal structure sectional view of Fig. 1 embodiments；
Attached drawing 7 is the lower calandria distribution schematic diagram of the lower heating device of Fig. 1 embodiments；
Attached drawing 8 is the side view structure distribution schematic diagram of the lower heating device of Fig. 1 embodiments；
Attached drawing 9 is the transport conveyor constructions schematic diagram of Fig. 1 embodiments；
Attached drawing 10 is the conveying device side view of Fig. 9 embodiments；
Attached drawing 11 is the exhauster structure schematic diagram of Fig. 1 embodiments.
Specific implementation mode：
The technique effect of the design of the utility model, concrete structure and generation is made furtherly below with reference to attached drawing
It is bright, to be fully understood from the purpose of this utility model, feature and effect.
It is the utility model preferred embodiment schematic diagram shown in refering to fig. 1 ~ 11, the utility model is dried in relation to a kind of silicon chip
Dry stove includes furnace body 1, and furnace body 1 is horizontal strip, which has silicon chip conveying drying space, and in the silicon chip
The upper and lower sides in conveying drying space are respectively equipped with heating device 2 and lower heating device 3.It is conveyed in drying space in the silicon chip
Equipped with the conveying device 4 for conveying silicon chip, conveying device 4 is equipped with the carrier 41 for realizing the edge-on conveying of silicon chip, and carrier 41 is full
The heated drying of the upper and lower side of sufficient silicon chip.The upper heating device 2 and lower heating device 3 convey the length in drying space along silicon chip
The setting of direction subregion is spent, facilitates control and maintenance, preferably upper heating device 2 and lower 3 subregion of heating device unanimous between the higher and lower levels.Upper heating
There is device 2 the upper calandria 21 and upper bellows 22 of downward radiation heat, upper bellows 22 to recycle downward blowing.Lower heating device 3
Lower calandria 31 with upward radiations heat energy and lower bellows 32, lower bellows 32 are recycled to up-draught.It is additionally provided on the furnace body 1
Exhaust apparatus 5, exhaust apparatus 5 are connected to the silicon chip conveying drying space of furnace body 1.When implementation, the edge-on conveying of silicon chip, upper calandria 21
With lower calandria 31 simultaneously to the front of silicon chip and back side heating, drying, shorten the process time；Upper bellows 22 and lower bellows 32 promote
Into drying equalizing temperature, energy-saving and environmental protection, no temperature difference dead angle, while the organic gas of drying course generation is taken away, is conducive to drying
Operation meets the production of HIT solar-energy photo-voltaic cell silicon chips, promotes drying effect and yield rate.
Shown in Fig. 1 ~ 11, in the present embodiment, the upper calandria 21 and lower calandria 31 are heat-generating pipes, and upper calandria 21 is sleeping
It is located above silicon chip and longitudinally perpendicular arranged in a crossed manner with silicon chip conveying direction；Lower calandria 31 is sleeping to be located at below silicon chip and adds with upper
Hot body 21 is non-perpendicular arranged in a crossed manner.Upper calandria 21 is alternatively arranged above silicon chip along silicon chip conveying direction subregion, upper heating
Body 21 and silicon chip conveying direction square crossing；And lower calandria 31 below silicon chip along silicon chip conveying direction between left and right every cloth
Set, and lower calandria 31 with upper calandria 21 is non-perpendicular intersects, V-shaped setting between adjacent lower calandria 31 in the present embodiment,
Thus the radiating surface that can increase lower calandria 31, gives the radiation of the silicon chip maximum area of edge-on conveying, lower calandria 31 with it is upper
About 21 calandria heat, while to silicon chip front with back side heating, drying, shorten the process time, promoted drying effect and at
Product rate.
Shown in Fig. 1,2,9,10, in the present embodiment, the carrier 41 is equipped with U-lag 414, and silicon chip is edge-on in the U-lag
In 414.There is carrier 41 supported rod erecting 411, the lower end of the supported rod erecting 411 to be fixed on chain 42, and chain 42 is in sprocket wheel 43
Drive lower movement.Pedestal 412 is propped in the upper end of supported rod erecting 411, and the upside of pedestal 412 is equipped with convex guard bar 413, guard bar
413 construct U-lag 414 together with pedestal 412, and there is pedestal 412 hollow hole 4121, hollow hole 4121 to meet heating radiation silicon
Piece.The structure realizes the edge-on conveying of silicon chip and drying operation, while facilitating loading and unloading.42 stable transmission of chain meets low speed, again
It carries and works under hot conditions, can guarantee accurate average ratios, help to dry operation.In the present embodiment, the chain
42 left and right sides is equipped with guide wheel 421, and guide wheel 421 coordinates the movement of 1 corresponding guide groove of furnace body, increases by 42 transmission stability of chain and standard
True property reduces vibration, helps to protect silicon chip transmission.In the present embodiment, carrier 41, support are distributed according to pitch on the chain 42
Upright bar 411 is erect in the pitch of chain 42 between two parties, structure optimization, promotes the performance of carrying and transmission.In the present embodiment, furnace body 1
Silicon chip conveying drying space in be set up in parallel three synchronous chains 42, realize the drying of three row silicon chip synchronous transports, promoted and dried
Dry rate.
Shown in Fig. 1,2,3,4,5, in the present embodiment, the air side for case 22 of being in the wind is arranged in the upper calandria 21, different
21 subregion parallel side-by-side of upper calandria, and each area is equipped with temperature conditioning unit 23, realizes subregion independence temperature control, conveniently regulating and controlling, it is ensured that
Temperature in the silicon chip conveying drying space of furnace body 1.Upper bellows 22 have upper compressed air input pipe 221, upper fan 222, the
One interior room 223 and the second interior room 224, upper compressed air input pipe 221 are connected to the first interior room 223 of upper bellows 22, upper fan 222
It drives the web plate 2231 of air towards 223 lower bottom part of the first interior room in the first interior room 223 to move, blows out upper bellows 22 and skim over
Calandria 21, heating form hot wind.The setting of second interior room 224 is in 223 periphery of the first interior room, and the second interior room 224 has connection
The upper cycle inlet scoop 2241 in silicon chip conveying drying space and the upper cycle air inlet 2242 for being connected to the first interior room 223.Thus
First interior room 223, the second interior room 224 and silicon chip conveying drying space form circulation loop, be in the wind machine 222 and upper compressed air
The compressed air that input pipe 221 inputs drives the lower hot wind flow realized hot air circulation, promote in silicon chip conveying drying space.Figure
In, each heating zone of upper heating device 2 is equipped with waste pipe 24, is connected to exhaust apparatus 5 by waste pipe 24, reaches effective band
Walk corresponding organic gas, it is ensured that dries quantity.
Shown in Fig. 1,2,6,7,8, in the present embodiment, the lower calandria 31 is arranged in the air side of lower bellows 32, different
31 subregion of upper calandria is arranged and V-shaped distribution between adjacent lower calandria 31, and each area is equipped with temperature conditioning unit 33, realizes subregion
Independent temperature control, conveniently regulating and controlling.Lower bellows 32 have compressed air input pipe 321, lower wind turbine 322, third interior room 323 and the 4th
Interior room 324, compressed air input pipe 321 are connected to the third interior room 323 of lower bellows 32, and lower wind turbine 322 drives third interior room 323
The web plate 3231 of interior air towards 323 upper top of third interior room moves, and blows out lower bellows 32 and skims over lower calandria 31, and heat up shape
At hot wind.The setting of 4th interior room 324 is in 323 periphery of third interior room, and the 4th interior room 324 has connection silicon chip conveying drying space
Lower cycle inlet scoop 3241 and connection third interior room 323 lower cycle air inlet 3242.Thus third interior room the 323, the 4th
Interior room 324 and silicon chip conveying drying space form circulation loop, are inputted in lower wind turbine 322 and compressed air input pipe 321
Compressed air drives the lower hot wind flow realized hot air circulation, promote in silicon chip conveying drying space.
The exhaust apparatus 5 of Fig. 1,2,3,5,11 has induction chamber 51 and is connected to the exhaust pipe 52 of induction chamber 51, induction chamber
The silicon chip conveying drying space of 51 connection furnace bodies 1.The induction chamber 51 of the present embodiment is cover shape, and ease of assembly, can on furnace body 1
It is assembled by movable button, is safeguarded convenient for changeing.Compressed air is introduced in exhaust pipe 52, compressed air sprays to the row of exhaust pipe 52
Outlet, the negative pressure and mobility for thereby utilizing compressed air to be formed, drives the air in exhaust pipe 52 to flow and make induction chamber 51
Negative pressure is formed, pumping effect is reached, is not necessarily to exhaust blower, energy conservation and environmental protection.It is additionally provided with outer air on the exhaust pipe 52 and fills into mouth
521, outer air fills into mouth 521 and is located at after blast injection, realizes that outside air fills into mixing, with further cooling discharge
Exhaust gas, the organic matter being conducive in condensation exhaust gas, thus in this implementations, also in the outlet side of exhaust pipe 52 equipped with recovery tube 54,
54 left and right sides of recovery tube connects exhaust pipe 52,54 open top of recovery tube exhaust, and accumulator tank is formed on bottom in recovery tube 54, receives
The organic matter for collecting condensation reaches recycling, reduces discharge.Shown in Figure 11, further, the exhaust apparatus 5 is arranged in stove
In the silicon chip conveying drying space two ends of body 1, compressed-air atomizer 53 is arranged with 51 junction of induction chamber in the exhaust pipe 52,
Compressed-air atomizer 53 is erected at middle part in exhaust pipe 52, and jet, formation air column make exhaust to compressed-air atomizer 53 vertically upward
52 axial area of pipe forms negative pressure, drives the flowing of 52 inner circumferential air of exhaust pipe, and then reaches induction chamber 51 and be evacuated effect.The outer space
It is a collar extension that gas, which fills into mouth 521, and being divided into the mutually nested gap reserved of two sections by exhaust pipe 52 forms, simple in structure, utilizes pressure
The negative pressure caused by jet vertically upward of contracting air nozzle 53, reaches outer air and fills into mouth 521 and fill into air automatically.
The utility model uses the edge-on conveying of silicon chip, and the upper and lower sides in the silicon chip conveying drying space of furnace body, which are respectively equipped with, to be added
Thermal and lower heating device, upper heating device have the upper calandria and upper bellows of downward radiation heat, lower heating device tool
There are the lower calandria and lower bellows of upward radiations heat energy；Simultaneously on design effectively calandria and lower calandria position and angle,
Reach calandria and lower calandria simultaneously to the front of silicon chip and back side heating, drying, improves production efficiency；Upper bellows are under
Bellows promote drying temperature homogenization, energy-saving and environmental protection, no temperature difference dead angle to be conducive to drying operation.The exhaust apparatus row of giving in real time
Gas meets the production of HIT solar-energy photo-voltaic cell silicon chips, and saves production space, improves production efficiency and meets production quality simultaneously
It is required that.
Certainly, although being described in conjunction with the accompanying the preferred embodiment of the utility model above, the utility model is not
Should be restricted to it is identical structurally and operationally with above description and attached drawing, to one skilled in the art,
It can also be to above-mentioned by logical analysis, reasoning, or a limited experiment without departing from the utility model conception and scope
Embodiment makes many equivalent improvement and variation, but such modifications and variations should all belong to the model of the requires of the utility model protection
It encloses.
Claims (10)
1. silicon chip drying stove includes furnace body（1）, it is characterised in that：The furnace body（1）It is conveyed with silicon chip and dries space, and
The upper and lower sides in silicon chip conveying drying space are respectively equipped with heating device（2）With lower heating device（3）；It is conveyed in the silicon chip
Dry the conveying device being equipped in space for conveying silicon chip（4）, conveying device（4）It is equipped with the load for realizing the edge-on conveying of silicon chip
Tool（41）, carrier（41）Meet the heated drying of upper and lower side of silicon chip；The upper heating device（2）With lower heating device（3）Edge
The length direction subregion setting in silicon chip conveying drying space, upper heating device（2）Upper calandria with downward radiation heat
（21）And upper bellows（22）, upper bellows（22）Cycle blowing downwards；Lower heating device（3）Lower heating with upward radiations heat energy
Body（31）And lower bellows（32）, lower bellows（32）It recycles to up-draught；The furnace body（1）On be additionally provided with exhaust apparatus（5）, exhaust
Device（5）It is connected to furnace body（1）Silicon chip conveying drying space.
2. silicon chip drying stove according to claim 1, it is characterised in that：The upper calandria（21）With lower calandria（31）
It is heat-generating pipe, upper calandria（21）Crouching, it is above silicon chip and longitudinally perpendicular arranged in a crossed manner with silicon chip conveying direction to be located at；Lower calandria
（31）It is sleeping be located at below silicon chip and with upper calandria（21）It is non-perpendicular arranged in a crossed manner.
3. silicon chip drying stove according to claim 1, it is characterised in that：The carrier（41）It is equipped with U-lag（414）,
Silicon chip is edge-on in the U-lag（414）In.
4. silicon chip drying stove according to claim 1 or 3, it is characterised in that：The carrier（41）With supported rod erecting
（411）, the supported rod erecting（411）Lower end be fixed on chain（42）On, chain（42）In sprocket wheel（43）Drive lower movement；Support
Upright bar（411）Upper end prop pedestal（412）, pedestal（412）Upside be equipped with convex guard bar（413）, guard bar（413）The bottom of with
Seat（412）U-lag is constructed together（414）, pedestal（412）With hollow hole（4121）.
5. silicon chip drying stove according to claim 1 or 2, it is characterised in that：The upper calandria（21）Setting is in the wind
Case（22）Air side, upper bellows（22）With upper compressed air input pipe（221）, upper fan（222）, the first interior room（223）
And second interior room（224）, upper compressed air input pipe（221）It is connected to upper bellows（22）The first interior room（223）, upper fan
（222）Drive the first interior room（223）Interior air is towards the first interior room（223）The web plate of lower bottom part（2231）It is mobile；Second interior room
（224）It is arranged in the first interior room（223）Periphery, and the second interior room（224）Upper cycle with connection silicon chip conveying drying space
Inlet scoop（2241）And the first interior room of connection（223）Upper cycle air inlet（2242）.
6. silicon chip drying stove according to claim 1 or 2, it is characterised in that：The lower calandria（31）It is arranged in leeward
Case（32）Air side, lower bellows（32）With compressed air input pipe（321）, lower wind turbine（322）, third interior room（323）
And the 4th interior room（324）, compressed air input pipe（321）It is connected to lower bellows（32）Third interior room（323）, lower wind turbine
（322）Drive third interior room（323）Interior air is towards third interior room（323）The web plate of upper top（3231）It is mobile；4th interior room
（324）It is arranged in third interior room（323）Periphery, and the 4th interior room（324）Lower cycle with connection silicon chip conveying drying space
Inlet scoop（3241）And connection third interior room（323）Lower cycle air inlet（3242）.
7. silicon chip drying stove according to claim 1, it is characterised in that：The exhaust apparatus（5）With induction chamber（51）
And connection induction chamber（51）Exhaust pipe（52）, and in exhaust pipe（52）Middle introducing compressed air, compressed air spray to exhaust pipe
（52）Outlet side；The exhaust pipe（52）On be additionally provided with outer air and fill into mouth（521）, outer air fills into mouth（521）Positioned at pressure
After the injection of contracting air；The induction chamber（51）It is connected to furnace body（1）Silicon chip conveying drying space.
8. silicon chip drying stove according to claim 7, it is characterised in that：The exhaust apparatus（5）It is arranged in furnace body（1）'s
In silicon chip conveying drying space two ends, the exhaust pipe（52）With induction chamber（51）Compressed-air atomizer is arranged in junction
（53）, compressed-air atomizer（53）It is erected at exhaust pipe（52）Interior middle part；The outer air fills into mouth（521）It is a collar extension, by
Exhaust pipe（52）It is divided into the mutually nested gap reserved of two sections to be formed.
9. silicon chip drying stove according to claim 4, it is characterised in that：The chain（42）Left and right sides be equipped with guide wheel
（421）.
10. silicon chip drying stove according to claim 4, it is characterised in that：The chain（42）On according to pitch be distributed carrier
（41）.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721475361.7U CN207622447U (en) | 2017-11-08 | 2017-11-08 | Silicon chip drying stove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721475361.7U CN207622447U (en) | 2017-11-08 | 2017-11-08 | Silicon chip drying stove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207622447U true CN207622447U (en) | 2018-07-17 |
Family
ID=62828319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721475361.7U Active CN207622447U (en) | 2017-11-08 | 2017-11-08 | Silicon chip drying stove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207622447U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631603A (en) * | 2017-11-08 | 2018-01-26 | 东莞市科隆威自动化设备有限公司 | Silicon chip drying stove |
| CN110608589A (en) * | 2019-10-21 | 2019-12-24 | 西安奕斯伟硅片技术有限公司 | Infrared drying device |
| CN110783240A (en) * | 2019-11-20 | 2020-02-11 | 常州捷佳创智能装备有限公司 | Furnace body equipment |
-
2017
- 2017-11-08 CN CN201721475361.7U patent/CN207622447U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631603A (en) * | 2017-11-08 | 2018-01-26 | 东莞市科隆威自动化设备有限公司 | Silicon chip drying stove |
| CN110608589A (en) * | 2019-10-21 | 2019-12-24 | 西安奕斯伟硅片技术有限公司 | Infrared drying device |
| CN110608589B (en) * | 2019-10-21 | 2020-08-28 | 西安奕斯伟硅片技术有限公司 | Infrared drying device |
| CN110783240A (en) * | 2019-11-20 | 2020-02-11 | 常州捷佳创智能装备有限公司 | Furnace body equipment |
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Address after: 523000 Building 2, 11 Jinfu West Road, Tangchun, Liaobu Town, Dongguan City, Guangdong Province Patentee after: Guangdong kelongwei Intelligent Equipment Co.,Ltd. Address before: Shi Bu Cun Shi Da Lu, Liaobu Town, Dongguan City, Guangdong Province Patentee before: FOLUNGWIN AUTOMATIC EQUIPMENT Co.,Ltd. |