CN207585528U - A kind of high-precision part on-line measuring device - Google Patents
A kind of high-precision part on-line measuring device Download PDFInfo
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- CN207585528U CN207585528U CN201720953560.8U CN201720953560U CN207585528U CN 207585528 U CN207585528 U CN 207585528U CN 201720953560 U CN201720953560 U CN 201720953560U CN 207585528 U CN207585528 U CN 207585528U
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- electron microscope
- precision part
- measuring device
- line measuring
- machine tool
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- 230000007246 mechanism Effects 0.000 claims description 12
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 239000004411 aluminium Substances 0.000 claims 1
- 238000001514 detection method Methods 0.000 abstract description 17
- 238000013461 design Methods 0.000 abstract description 9
- 230000003321 amplification Effects 0.000 abstract description 3
- 238000003199 nucleic acid amplification method Methods 0.000 abstract description 3
- 238000011982 device technology Methods 0.000 abstract 1
- 238000005259 measurement Methods 0.000 description 5
- 238000012545 processing Methods 0.000 description 3
- 230000005611 electricity Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Classifications
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The utility model discloses a kind of detection device, particularly a kind of high-precision part on-line measuring device belongs to high-precision part detection device technology field；The device includes numerically-controlled machine tool, is installed on moveable electron microscope and the display shown for electron microscope on numerically-controlled machine tool, the electron microscope is connect with display to show that high-precision part sees the region observed in electron microscope, and datum line is additionally provided on the display；A kind of high-precision part on-line measuring device of the utility model solves the problems, such as that traditional high-precision part detection is difficult, workpiece amplification several times to be detected are made using the design of electron microscope, it is positioned using datum line, and pass through numerically-controlled machine tool movement and can intuitively obtain the size that part measures, it is easy to operate, accuracy of detection is high, is conducive to the working efficiency and accuracy of detection of on-line checking.
Description
Technical field
The utility model is related to a kind of detection device, particularly a kind of high-precision part on-line measuring device belongs to high-precision
Spend part detection device technical field.
Background technology
Electron microscope（electron microscope）, abbreviation Electronic Speculum or electricity are aobvious, are to carry out article on display using electronics
Internal or surface microscope.The wavelength of the electronics of high speed is shorter than the wavelength of visible ray（Duality principle）, and microscopical point
Resolution is limited by the wavelength that it is used, therefore the resolution ratio of electron microscope（About 0.2 nanometer）Far above light microscope
Resolution ratio（About 200 nanometers）.Electron microscope is made of lens barrel, vacuum plant and power cabinet three parts.Lens barrel mainly has electronics
The components such as source, electron lens, specimen holder, fluorescent screen and detector, these components are typically assembled into a column from top to down
Body.Electron lens is used for focusing on electronics, is most important component in electron microscope lens barrel.
The processing detection of the high-accuracy product of thin-walled is always a great problem in industry, since product size is smaller as used
It is difficult accurately to detect each size that common detection methods, which are detected the product,.
Common three apparatus of coordinate detecting can measure size, but pass through when verifying the three-dimensional coordinates measurement product due to product wall thickness
Relatively thin, what three coordinate arrangements used measures the ball-type gauge head that detector is 1mm, and the ball of ball-type gauge head need to be used during three-dimensional coordinates measurement
Body peak measures point to be measured, face, and the position face measured needed for the integral thickness of the product is smaller, and three sit
It is difficult that accurately the face is measured during mapping amount.Product must be moved to when using three coordinate arrangements simultaneously in equipment
Product can be detected, therefore can not achieve the on-line checking of product.
Invention content
The goal of the invention of the utility model is：In view of the above problems, provide one kind can accurately detect it is high-precision
The size of part is spent, it is simple in structure, it is skillfully constructed, accuracy of detection is high, is applicable in the high-precision part on-line checking dress of on-line checking
It puts.
The technical solution adopted in the utility model is as follows：
A kind of high-precision part on-line measuring device including numerically-controlled machine tool, is installed on moveable electronics on numerically-controlled machine tool
Microscope and the display shown for electron microscope, the electron microscope connect to show that high-precision part exists with display
Electron microscope sees the region observed, and datum line is additionally provided on the display.It can be by needed for using electron microscope
The part to be detected amplification, utilizes the most prominent position of datum line snap part set on display；Manipulate numerically-controlled machine tool
It is mobile, the position snap for making the opposite side of datum line and part most prominent；Identify unidirectional displacement distance on numerically-controlled machine tool, from
And measure the size of part.
A kind of high-precision part on-line measuring device of the utility model, the electron microscope are fixed by installing mechanism
It is connected on numerically-controlled machine tool.
Further, machine tool chief axis and the handle of a knife being arranged on machine tool chief axis, electronic display are provided on the numerically-controlled machine tool
Micro mirror is installed on by installing mechanism on handle of a knife.The mounting means is most simple, also more stablizes, and stablizes conducive to electron microscope and examines
Survey workpiece.
Further, the installing mechanism is installed on by plug on handle of a knife, in favor of extending electron microscope.Convenient for electricity
The detection of the microscopical installation of son and electron microscope to part.
Further, the installing mechanism includes frame body, and the one end of the frame body is provided with for by erection of frames and core
The first mounting hole on stick, the other end are equipped with the second mounting hole for installing electron microscope.
Further, the first bolt for adjusting the first mounting hole hole internal diameter is provided on first mounting hole.
Further, threaded hole is additionally provided on first mounting hole, is provided with to fasten frame body on the threaded hole
The second bolt, second bolt by threaded hole through the first mounting hole side wall and and core rod touch.
Further, the plug is aluminum plug.
A kind of high-precision part on-line measuring device of the utility model, the electron microscope acquire one section of end of signal
It is provided with the headlamp for improving image definition.
Further, the headlamp is LED light.
A kind of high-precision part on-line measuring device of the utility model, the datum line include a plurality of horizontal line and a plurality of perpendicular
Line.
In conclusion by adopting the above-described technical solution, the beneficial effects of the utility model are：The one of the utility model
Kind high-precision part on-line measuring device solves the problems, such as that traditional high-precision part detection is difficult, using the design of electron microscope
Make workpiece amplification several times to be detected, positioned using datum line, and pass through numerically-controlled machine tool movement can intuitively obtain part
The size measured, easy to operate, accuracy of detection is high, is conducive to the working efficiency and accuracy of detection of on-line checking.
Description of the drawings
Fig. 1 is the structure diagram of the utility model.
It is marked in figure：1- electron microscopes, 11- headlamps, 2- displays, 3- datum lines, 4- installing mechanisms, 41- frame bodies,
The first mounting holes of 42-, the second mounting holes of 43-, the first bolts of 44-, the second bolts of 45-, 5- numerically-controlled machine tools, 51- machine tool chief axis,
52- handle of a knifes, 6- plugs.
Specific embodiment
Below in conjunction with the accompanying drawings, the utility model is described in detail.
In order to make the purpose of the utility model, technical solutions and advantages more clearly understood, below in conjunction with attached drawing and implementation
Example, the present invention is further described in detail.It should be appreciated that specific embodiment described herein is only used to explain
The utility model is not used to limit the utility model.
Embodiment
A kind of high-precision part on-line measuring device, as shown in Figure 1, including numerically-controlled machine tool 5, be installed on numerically-controlled machine tool can
Mobile electron microscope 1 and the display 2 shown for electron microscope, the electron microscope 1 are connect with display 2 with aobvious
Show that high-precision part sees the region observed in electron microscope, datum line 3 is additionally provided on the display 2.
Specifically, in the design basis of above-mentioned specific embodiment, which is computer.It can be more using computer
Adapt to the performance of electron microscope.
In another specific embodiment, electron microscope 1 is fixedly connected on by installing mechanism 4 on numerically-controlled machine tool 5.
In design basis based on above-mentioned specific embodiment, in a wherein specific embodiment, set on numerically-controlled machine tool 5
Machine tool chief axis 51 and the handle of a knife 52 being arranged on machine tool chief axis 51 are equipped with, electron microscope 1 is installed on handle of a knife by installing mechanism 4
On.
In design basis based on above-mentioned specific embodiment, in another specific embodiment, installing mechanism 4 passes through core
Stick 6 is installed on handle of a knife, in favor of extending electron microscope.Which can not only ensure the space of electron microscope, simultaneously
The development length of electron microscope can be extended.
In another specific embodiment, installing mechanism 4 includes frame body 41, and the one end of the frame body 41 is provided with to incite somebody to action
Erection of frames and the first mounting hole 42 on plug, the other end are equipped with the second mounting hole 43 for installing electron microscope.
The design method can be convenient for the dismounting of electron microscope, also stablize conducive to the installation of electron microscope.
In design principle based on above-mentioned specific embodiment, in a wherein specific embodiment, the first mounting hole 42
On be provided with for adjust the first mounting hole hole internal diameter the first bolt 44.Frame body can be made more abundant with core rod touch, protected
Demonstrate,prove stability of the single unit system in moving process.
Meanwhile in order to be fastenedly connected relationship, in another specific embodiment, screw thread is additionally provided on the first mounting hole 42
Hole is provided with the second bolt 45 for fastening frame body on the threaded hole, and second bolt 45 is by threaded hole through the first peace
Fill hole side wall and and core rod touch.
Specifically, the first mounting hole 42 is tube-in-tube structure, the length of the sleeve is more than the width of connecting rod in the middle part of frame body.More
Add specifically, the first mounting hole 42 and the second mounting hole 43 are tube-in-tube structure.
In another specific embodiment, plug 6 is aluminum plug.Specifically, the length of the plug is 300mm.Generally
Using 250mm-350mm.
Certainly, the second mounting hole 43 can be assembled by bolt and electron microscope.Alternatively, it is also possible to use tapered shaft
Chamber is assembled.Shell as more preferably frame body and electron microscope is made into integration.The stability is stronger.
Due to being in on-line checking, the detection to part can be influenced in the case where light is bad, therefore, wherein one
In specific embodiment, one section of end set of the electron microscope 1 acquisition signal is useful for improving the illumination of image definition
Lamp 11.As more specifical, headlamp 11 is LED light.
In design basis based on above-mentioned specific embodiment, in another specific embodiment, datum line 3 includes a plurality of
Horizontal line and a plurality of vertical line.And in practical operation, which could be provided as inside electron microscope and is shown in display
On.The addition relevant program of lines in software can also be utilized in the acquisition information that electron microscope is shown by software.Tool
Body, it is connected between electron microscope 1 and display 2 by communication data line.
In the present embodiment, survey dimensional accuracy through measurement electron microscope and can reach 0.002mm, meet institute's converted products
Measurement accuracy, while can realize machine tool on-line measurement function, improving processing efficiency reduces processing cost.
In conclusion a kind of high-precision part on-line measuring device of the utility model solves traditional high-precision part inspection
The problem of difficult is surveyed, workpiece to be detected is made to amplify several times using the design of electron microscope, is positioned using datum line, and lead to
The size that part measures can intuitively be obtained by crossing numerically-controlled machine tool movement, easy to operate, and accuracy of detection is high, is conducive to on-line checking
Working efficiency and accuracy of detection.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
All any modification, equivalent and improvement made within the spirit and principle of utility model etc., should be included in the utility model
Protection domain within.
Claims (10)
1. a kind of high-precision part on-line measuring device, it is characterised in that：Including numerically-controlled machine tool（5）, be installed on numerically-controlled machine tool
Moveable electron microscope（1）With the display shown for electron microscope（2）, the electron microscope（1）With display
（2）Connection is to show that high-precision part sees the region observed in electron microscope, the display（2）On be additionally provided with benchmark
Line（3）.
2. a kind of high-precision part on-line measuring device as described in claim 1, it is characterised in that：The electron microscope
（1）Pass through installing mechanism（4）It is fixedly connected on numerically-controlled machine tool（5）On.
3. a kind of high-precision part on-line measuring device as claimed in claim 2, it is characterised in that：The numerically-controlled machine tool（5）
On be provided with machine tool chief axis（51）Be arranged on machine tool chief axis（51）On handle of a knife（52）, electron microscope（1）Pass through fitting machine
Structure（4）It is installed on handle of a knife.
4. a kind of high-precision part on-line measuring device as claimed in claim 3, it is characterised in that：The installing mechanism（4）
Pass through plug（6）It is installed on handle of a knife, in favor of extending electron microscope.
5. a kind of high-precision part on-line measuring device as claimed in claim 4, it is characterised in that：The installing mechanism（4）
Including frame body（41）, the frame body（41）One end be provided with for by the first mounting hole on erection of frames and plug（42）,
The other end is equipped with the second mounting hole for installing electron microscope（43）.
6. a kind of high-precision part on-line measuring device as claimed in claim 5, it is characterised in that：First mounting hole
（42）On be provided with for adjust the first mounting hole hole internal diameter the first bolt（44）.
7. a kind of high-precision part on-line measuring device as claimed in claim 5, it is characterised in that：First mounting hole
（42）On be additionally provided with threaded hole, the second bolt for fastening frame body is provided on the threaded hole（45）, second bolt
（45）By threaded hole through the first mounting hole side wall and and core rod touch.
8. a kind of high-precision part on-line measuring device as claimed in claim 4, it is characterised in that：The plug（6）For aluminium
Coremaking stick.
9. a kind of high-precision part on-line measuring device as described in claim 1, it is characterised in that：The electron microscope（1）
One section of end set of acquisition signal is useful for improving the headlamp of image definition（11）.
10. a kind of high-precision part on-line measuring device as claimed in claim 9, it is characterised in that：The headlamp（11）
For LED light.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720953560.8U CN207585528U (en) | 2017-08-02 | 2017-08-02 | A kind of high-precision part on-line measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720953560.8U CN207585528U (en) | 2017-08-02 | 2017-08-02 | A kind of high-precision part on-line measuring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207585528U true CN207585528U (en) | 2018-07-06 |
Family
ID=62717685
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720953560.8U Active CN207585528U (en) | 2017-08-02 | 2017-08-02 | A kind of high-precision part on-line measuring device |
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| Country | Link |
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| CN (1) | CN207585528U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238348A (en) * | 2017-08-02 | 2017-10-10 | 四川明日宇航工业有限责任公司 | A kind of high-precision part online test method and detection means |
-
2017
- 2017-08-02 CN CN201720953560.8U patent/CN207585528U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107238348A (en) * | 2017-08-02 | 2017-10-10 | 四川明日宇航工业有限责任公司 | A kind of high-precision part online test method and detection means |
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| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address | ||
| CP03 | Change of name, title or address |
Address after: 618400 Sichuan Deyang Shifang Economic Development Zone (Ling Jie Park) blue sky Road No. 3 Patentee after: Sichuan Xinhang Titanium Technology Co.,Ltd. Address before: 618400 Sichuan Deyang Shifang Economic Development Zone (Ling Jie Park) blue sky Road No. 3 Patentee before: SICHUAN FUTURE AEROSPACE INDUSTRIAL Co.,Ltd. |