CN107238348A - A kind of high-precision part online test method and detection means - Google Patents

A kind of high-precision part online test method and detection means Download PDF

Info

Publication number
CN107238348A
CN107238348A CN201710649805.2A CN201710649805A CN107238348A CN 107238348 A CN107238348 A CN 107238348A CN 201710649805 A CN201710649805 A CN 201710649805A CN 107238348 A CN107238348 A CN 107238348A
Authority
CN
China
Prior art keywords
electron microscope
detected
machine tool
line
digit control
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201710649805.2A
Other languages
Chinese (zh)
Inventor
刘波
高巍
姚佳志
张明枝
史成伟
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sichuan Mingri Aerospace Industry Co Ltd
Original Assignee
Sichuan Mingri Aerospace Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sichuan Mingri Aerospace Industry Co Ltd filed Critical Sichuan Mingri Aerospace Industry Co Ltd
Priority to CN201710649805.2A priority Critical patent/CN107238348A/en
Publication of CN107238348A publication Critical patent/CN107238348A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/02Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/182Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by the machine tool function, e.g. thread cutting, cam making, tool direction control
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B19/00Programme-control systems
    • G05B19/02Programme-control systems electric
    • G05B19/18Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
    • G05B19/19Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37345Dimension of workpiece, diameter
    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05BCONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00Program-control systems
    • G05B2219/30Nc systems
    • G05B2219/37Measurements
    • G05B2219/37398Thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Manufacturing & Machinery (AREA)
  • Automation & Control Theory (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention discloses a kind of online test method and detection means, especially a kind of high-precision part online test method and detection means belong to high-precision part detection technique field;The device includes Digit Control Machine Tool, is installed on moveable electron microscope and the display shown for electron microscope on Digit Control Machine Tool, the electron microscope is connected with display to show that high-precision part sees the region observed in electron microscope, and datum line is additionally provided with the display;The present invention solves the problem of traditional high-precision part detection is difficult, workpiece amplification several times to be detected are made using the design of electron microscope, positioned using datum line, and the size that part is measured can intuitively be drawn by Digit Control Machine Tool movement, it is simple to operate, accuracy of detection is high, is conducive to the operating efficiency and accuracy of detection of on-line checking.

Description

A kind of high-precision part online test method and detection means
Technical field
The present invention relates to a kind of online test method and detection means, especially a kind of high-precision part online test method And detection means, belong to high-precision part detection technique field.
Background technology
Electron microscope(electron microscope), abbreviation Electronic Speculum or electricity show, and are to carry out article on display using electronics The microscope on internal or surface.The wavelength of the wavelength ratio visible ray of the electronics of high speed is short(Duality principle), and microscopical point The wavelength that resolution is used by it is limited, therefore the resolution ratio of electron microscope(About 0.2 nanometer)Far above light microscope Resolution ratio(About 200 nanometers).Electron microscope is made up of lens barrel, vacuum plant and the part of power cabinet three.Lens barrel mainly has electronics The parts such as source, electron lens, specimen holder, fluorescent screen and detector, these parts are typically assembled into a post from top to down Body.Electron lens is used for focusing on electronics, is most important part in electron microscope lens barrel.
The processing detection of the high-accuracy product of thin-walled is always a great problem in industry, because product size is smaller as used It is difficult accurately to detect each size that common detection methods, which carry out detection to the product,.
The measurable size of conventional three apparatus of coordinate detecting, but by verifying during the three-dimensional coordinates measurement product due to product wall thickness Relatively thin, the measurement detection head that three coordinate arrangements are used is 1mm ball-type gauge head, and the ball of ball-type gauge head need to be used during three-dimensional coordinates measurement Body peak is measured to the point to be measured, face, and the position face of measurement needed for the integral thickness of the product is smaller, and three sit It is difficult that accurately the face is measured during mapping amount.Product must be moved to when using three coordinate arrangements simultaneously in equipment Product can be detected, therefore the on-line checking of product can not be realized.
The content of the invention
The goal of the invention of the present invention is:For above-mentioned problem high accuracy zero can be accurately detected there is provided one kind The size of part, it is simple in construction, be skillfully constructed, accuracy of detection is high, be applicable on-line checking high-precision part on-line measuring device and Detection method.
The technical solution adopted by the present invention is as follows:
A kind of high-precision part online test method, it is characterised in that:Comprise the following steps:
A, part to be detected enter after detection means detection zone, and manipulation Digit Control Machine Tool controls electron microscope close to be detected zero Part, adjusts the focal length of electron microscope, part to be detected is clearly shown in order to the positioning of reference position;
Straight line adjusts Digit Control Machine Tool, makes the straight line and to be detected zero as datum line on b, any selection display interfaces The starting end face of detected size needed for part is tangent, and coordinate position on Digit Control Machine Tool is set into initial position, i.e.,:X0, Y0 and Z0;
C, control Digit Control Machine Tool movement, it is tangent with datum line another survey name corresponding with part initial surface to be detected, record numerical control Lathe axial direction displacement, i.e.,:The axial coordinate in detected size direction needed for part to be detected, obtains accessory size to be detected.
A kind of high-precision part online test method of the present invention, in the step a, in addition to electron microscope is installed In so that Digit Control Machine Tool controls the movement of electron microscope, and electron microscope being connected with display on Digit Control Machine Tool.
A kind of high-precision part online test method of the present invention.In the step b, a plurality of horizontal stroke is set on display interfaces Line and a plurality of vertical line, when detecting the width of part to be detected, arbitrarily choose a vertical line as datum line, detect part to be detected Thickness when, arbitrarily choose a horizontal line be used as datum line.
In a kind of high-precision part online test method of the present invention, the step b, a plurality of horizontal stroke is set on display interfaces Line or a plurality of vertical line, choose any one as datum line, the size adjusting detected according to needed for part to be detected is to be detected The mode mode of part.
A kind of high-precision part on-line measuring device, including Digit Control Machine Tool, moveable electronics is installed on Digit Control Machine Tool Microscope and the display shown for electron microscope, the electron microscope are connected to show that high-precision part exists with display Electron microscope sees the region observed, and datum line is additionally provided with the display.Can be by needed for using electron microscope The part to be detected amplification, utilizes the most prominent position of the datum line snap part set on display;Manipulate Digit Control Machine Tool It is mobile, make the most prominent position snap of the opposite side of datum line and part;Unidirectional displacement on Digit Control Machine Tool is recognized, from And measure the size of part.
A kind of high-precision part on-line measuring device of the present invention, the electron microscope is fixedly connected by installing mechanism On Digit Control Machine Tool.
Further, machine tool chief axis and the handle of a knife being arranged on machine tool chief axis, electronic display are provided with the Digit Control Machine Tool Micro mirror is installed on handle of a knife by installing mechanism.The mounting means is most simple, also more stablizes, and is examined beneficial to electron microscope is stable Survey workpiece.
Further, the installing mechanism is installed on handle of a knife by plug, in favor of extension electron microscope.It is easy to electricity The detection of the microscopical installation of son and electron microscope to part.
Further, the installing mechanism includes support body, and the one end of the support body, which is provided with, to be used for erection of frames and core The first mounting hole on rod, the other end is provided with the second mounting hole for being used for installing electron microscope.
Further, the first bolt for adjusting the first mounting hole hole internal diameter is provided with first mounting hole, should Screwed hole is additionally provided with first mounting hole, the second bolt for fastening support body is provided with the screwed hole, second bolt By screwed hole through the first mounting hole side wall and and core rod touch.
Further, the plug is aluminum plug.
A kind of high-precision part on-line measuring device of the present invention, one section of end of electron microscope collection signal is set There is the illuminating lamp for improving image definition.
Further, the illuminating lamp is LED.
A kind of high-precision part on-line measuring device of the present invention, the datum line includes a plurality of horizontal line and a plurality of vertical line.
In summary, by adopting the above-described technical solution, the beneficial effects of the invention are as follows:The present invention solves traditional height The problem of precision piece test is difficult, is made workpiece to be detected amplify several times, is entered using datum line using the design of electron microscope Row positioning, and the size that part is measured can intuitively be drawn by Digit Control Machine Tool movement, simple to operate, accuracy of detection is high, favorably In the operating efficiency and accuracy of detection of on-line checking.
Brief description of the drawings
Examples of the present invention will be described by way of reference to the accompanying drawings, wherein:
Fig. 1 is the structural representation of the present invention.
Marked in figure:1- electron microscopes, 11- illuminating lamps, 2- displays, 3- datum lines, 4- installing mechanisms, 41- support bodys, The mounting holes of 42- first, the mounting holes of 43- second, the bolts of 44- first, the bolts of 45- second, 5- Digit Control Machine Tools, 51- machine tool chief axis, 52- handle of a knifes, 6- plugs.
Embodiment
All features disclosed in this specification, or disclosed all methods or during the step of, except mutually exclusive Feature and/or step beyond, can combine in any way.
Any feature disclosed in this specification, unless specifically stated otherwise, can be equivalent by other or with similar purpose Alternative features are replaced.I.e., unless specifically stated otherwise, each feature is an example in a series of equivalent or similar characteristics .
Embodiment 1
A kind of high-precision part online test method, as shown in figure 1, comprising the following steps:
A, part to be detected enter after detection means detection zone, and manipulation Digit Control Machine Tool controls electron microscope close to be detected zero Part, adjusts the focal length of electron microscope, so that part to be detected is clearly shown in order to the positioning of reference position;
Straight line adjusts Digit Control Machine Tool, makes the straight line and to be detected zero as datum line on b, any selection display interfaces The starting end face of detected size needed for part is tangent, and coordinate position on Digit Control Machine Tool is set into initial position, i.e.,:X0, Y0 and Z0;
C, control Digit Control Machine Tool movement, it is tangent with datum line another survey name corresponding with part initial surface to be detected, record numerical control Lathe axial direction displacement, i.e.,:The axial coordinate in detected size direction needed for part to be detected, obtains accessory size to be detected.
In design principle based on above-mentioned embodiment, in another embodiment, in step a, in addition to Electron microscope is installed on Digit Control Machine Tool so that Digit Control Machine Tool control electron microscope movement, and by electron microscope with Display is connected.
In a wherein embodiment, a plurality of horizontal line and a plurality of vertical line are set in step b, on display interfaces, examined When surveying the width of part to be detected, a vertical line is arbitrarily chosen as datum line, when detecting the thickness of part to be detected, any choosing A horizontal line is taken as datum line.
In another embodiment, a plurality of horizontal line or a plurality of vertical line are set in step b, on display interfaces, selected Any one is taken as datum line, the mode mode of the size adjusting part to be detected detected according to needed for part to be detected.
It is a kind of high-precision in a wherein embodiment in design principle based on above-mentioned embodiment detection method Part on-line measuring device is spent, as shown in figure 1, including Digit Control Machine Tool 5, moveable electron microscope is installed on Digit Control Machine Tool 1 and the display 2 that is shown for electron microscope, the electron microscope 1 is connected to show high-precision part in electricity with display 2 Sub- microscope sees the region observed, and datum line 3 is additionally provided with the display 2.
Specifically, in the design basis of above-mentioned embodiment, the display 2 is computer.Can be more using computer Adapt to the performance of electron microscope.
In another embodiment, electron microscope 1 is fixedly connected on Digit Control Machine Tool 1 by installing mechanism 4.
In design basis based on above-mentioned embodiment, in a wherein embodiment, set on Digit Control Machine Tool 5 Machine tool chief axis 51 and the handle of a knife 52 being arranged on machine tool chief axis 51 are equipped with, electron microscope 1 is installed on handle of a knife by installing mechanism 4 On.
In design basis based on above-mentioned embodiment, in another embodiment, installing mechanism 4 passes through core Rod 6 is installed on handle of a knife, in favor of extension electron microscope.Which can not only ensure the space of electron microscope, simultaneously The development length of electron microscope can be extended.
In another embodiment, installing mechanism 4 includes support body 41, and the one end of the support body 41 is provided with for inciting somebody to action Erection of frames and the first mounting hole 42 on plug, the other end is provided with the second mounting hole 43 for being used for installing electron microscope. The design method can be easy to the dismounting of electron microscope, and also the installation beneficial to electron microscope is stable.
In design principle based on above-mentioned embodiment, in a wherein embodiment, the first mounting hole 42 On be provided with for adjust the first mounting hole hole internal diameter the first bolt 44.Support body can be made more abundant with core rod touch, protected Demonstrate,prove stability of the single unit system in moving process.
Meanwhile, in order to be fastenedly connected relation, in another embodiment, screw thread is additionally provided with the first mounting hole 42 The second bolt 45 for fastening support body is provided with hole, the screwed hole, second bolt 45 is by screwed hole through the first peace Fill hole side wall and and core rod touch.
Specifically, the first mounting hole 42 is tube-in-tube structure, the length of the sleeve is more than the width of connecting rod in the middle part of support body.More Plus specifically, the first mounting hole 42 and the second mounting hole 43 are tube-in-tube structure.
In another embodiment, plug 6 is aluminum plug.Specifically, the length of the plug is 300mm.Typically Using 250mm-350mm.
Certainly, the second mounting hole 43 can be assembled by bolt with electron microscope.Alternatively, it is also possible to use tapered shaft Chamber is assembled.It is made into integration as the shell of more excellent support body and electron microscope.The stability is stronger.
Due to being to be in on-line checking, the detection to part can be influenceed in the case where light is not good, therefore, wherein one In embodiment, one section of end of the electron microscope 1 collection signal is provided with the illumination for improving image definition Lamp 11.As more specific, illuminating lamp 11 is LED.
In design basis based on above-mentioned embodiment, in another embodiment, datum line 3 includes a plurality of Horizontal line and a plurality of vertical line.And in practical operation, the datum line could be arranged to inside electron microscope and be shown in display On.The collection information of electron microscope can also be being shown by software, utilize the program that lines correlation is added in software.Tool Body, connected between electron microscope 1 and display 2 by communication data line.
In the present embodiment, survey dimensional accuracy through measurement electron microscope and can reach 0.002mm, meet institute's converted products Measurement accuracy, while machine tool on-line measurement function can be realized, improves processing efficiency and reduces processing cost.
In summary, the present invention solves the problem of traditional high-precision part detection is difficult, using the design of electron microscope Make workpiece amplification several times to be detected, positioned using datum line, and part can intuitively be drawn by Digit Control Machine Tool movement The size measured, simple to operate, accuracy of detection is high, is conducive to the operating efficiency and accuracy of detection of on-line checking.
The invention is not limited in foregoing embodiment.The present invention, which is expanded to, any in this manual to be disclosed New feature or any new combination, and disclose any new method or process the step of or any new combination.

Claims (10)

1. a kind of high-precision part online test method, it is characterised in that:Comprise the following steps:
A, part to be detected enter after detection means detection zone, and manipulation Digit Control Machine Tool controls electron microscope close to be detected zero Part, adjusts the focal length of electron microscope, part to be detected is clearly shown in order to the positioning of reference position;
Straight line adjusts Digit Control Machine Tool, makes the straight line and to be detected zero as datum line on b, any selection display interfaces The starting end face of detected size needed for part is tangent, and coordinate position on Digit Control Machine Tool is set into initial position, i.e.,:X0, Y0 and Z0;
C, control Digit Control Machine Tool movement, it is tangent with datum line another survey name corresponding with part initial surface to be detected, record numerical control Lathe axial direction displacement, i.e.,:The axial coordinate in detected size direction needed for part to be detected, obtains accessory size to be detected.
2. a kind of high-precision part online test method as claimed in claim 1, it is characterised in that:In the step a, also wrap Include and electron microscope is installed on Digit Control Machine Tool to the movement so that Digit Control Machine Tool controls electron microscope, and by electron microscope It is connected with display.
3. a kind of high-precision part online test method as claimed in claim 1.
It 4. is characterized in that:In the step b, a plurality of horizontal line and a plurality of vertical line, detection to be detected zero are set on display interfaces During the width of part, a vertical line is arbitrarily chosen as datum line, when detecting the thickness of part to be detected, a horizontal line is arbitrarily chosen It is used as datum line;
A kind of high-precision part online test method as claimed in claim 1, it is characterised in that:In the step b, display A plurality of horizontal line or a plurality of vertical line are set on interface, any one is chosen as datum line, is detected according to needed for part to be detected Size adjusting part to be detected mode mode.
5. a kind of high-precision part on-line measuring device, it is characterised in that:Including Digit Control Machine Tool(5), be installed on Digit Control Machine Tool Moveable electron microscope(1)With the display shown for electron microscope(2), the electron microscope(1)With display (2)Connection is to show that high-precision part sees the region observed in electron microscope, the display(2)On be additionally provided with benchmark Line(3).
6. a kind of high-precision part on-line measuring device as claimed in claim 5, it is characterised in that:The Digit Control Machine Tool(5) On be provided with machine tool chief axis(51)Be arranged on machine tool chief axis(51)On handle of a knife(52), electron microscope(1)Pass through fitting machine Structure(4)It is installed on handle of a knife.
7. a kind of high-precision part on-line measuring device as claimed in claim 6, it is characterised in that:The installing mechanism(4) Pass through plug(6)It is installed on handle of a knife, in favor of extension electron microscope.
8. a kind of high-precision part on-line measuring device as claimed in claim 7, it is characterised in that:The installing mechanism(4) Including support body(41), the support body(41)One end be provided with for by the first mounting hole on erection of frames and plug(42), The other end is provided with the second mounting hole for being used for installing electron microscope(43).
9. a kind of high-precision part on-line measuring device as claimed in claim 8, it is characterised in that:First mounting hole (42)On be provided with for adjust the first mounting hole hole internal diameter the first bolt(44), first mounting hole(42)On be additionally provided with The second bolt for fastening support body is provided with screwed hole, the screwed hole(45), second bolt(45)Passed through by screwed hole Wear the first mounting hole side wall and and core rod touch.
10. a kind of high-precision part on-line measuring device as claimed in claim 6, it is characterised in that:The electron microscope(1) One section of end of collection signal is provided with the illuminating lamp for improving image definition(11).
CN201710649805.2A 2017-08-02 2017-08-02 A kind of high-precision part online test method and detection means Pending CN107238348A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201710649805.2A CN107238348A (en) 2017-08-02 2017-08-02 A kind of high-precision part online test method and detection means

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201710649805.2A CN107238348A (en) 2017-08-02 2017-08-02 A kind of high-precision part online test method and detection means

Publications (1)

Publication Number Publication Date
CN107238348A true CN107238348A (en) 2017-10-10

Family

ID=59989589

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201710649805.2A Pending CN107238348A (en) 2017-08-02 2017-08-02 A kind of high-precision part online test method and detection means

Country Status (1)

Country Link
CN (1) CN107238348A (en)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002312006A (en) * 2001-04-13 2002-10-25 Mitsubishi Electric Corp Control device and control system
CN201324968Y (en) * 2008-12-16 2009-10-14 上海电气集团股份有限公司 Ram droop compensation control device of large-scale floor-type milling and boring machine numerical control system
CN102866264A (en) * 2012-08-30 2013-01-09 内蒙古工业大学 Fiber push-out device based on scanning electron microscope environment
CN104108051A (en) * 2014-06-25 2014-10-22 山东鲁南机床有限公司 Magnifying and adjusting instrument for electric spark precise machining and application method thereof
CN104741972A (en) * 2013-12-27 2015-07-01 邹永康 Online machining measuring instrument
CN105922043A (en) * 2016-07-13 2016-09-07 四川明日宇航工业有限责任公司 Multi-station quick positioning device and method applicable to aviation sheet metal parts
CN207585528U (en) * 2017-08-02 2018-07-06 四川明日宇航工业有限责任公司 A kind of high-precision part on-line measuring device

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002312006A (en) * 2001-04-13 2002-10-25 Mitsubishi Electric Corp Control device and control system
CN201324968Y (en) * 2008-12-16 2009-10-14 上海电气集团股份有限公司 Ram droop compensation control device of large-scale floor-type milling and boring machine numerical control system
CN102866264A (en) * 2012-08-30 2013-01-09 内蒙古工业大学 Fiber push-out device based on scanning electron microscope environment
CN104741972A (en) * 2013-12-27 2015-07-01 邹永康 Online machining measuring instrument
CN104108051A (en) * 2014-06-25 2014-10-22 山东鲁南机床有限公司 Magnifying and adjusting instrument for electric spark precise machining and application method thereof
CN105922043A (en) * 2016-07-13 2016-09-07 四川明日宇航工业有限责任公司 Multi-station quick positioning device and method applicable to aviation sheet metal parts
CN207585528U (en) * 2017-08-02 2018-07-06 四川明日宇航工业有限责任公司 A kind of high-precision part on-line measuring device

Similar Documents

Publication Publication Date Title
CN103759641B (en) Three-dimensional micro-scale measurement device and method based on four-core fiber grating
CN101947746B (en) Laser interference-based ball arm measuring device and method
CN103759652B (en) Two-dimentional micro-scale measurement device and method based on double optical fiber grating
CN1731084A (en) Micro interior cavity dimension measuring apparatus and method based on double optical fiber coupling
CN107796321B (en) Cylinder inner diameter detection equipment
CN105180819B (en) Diameter measurement device and its measuring method based on laser displacement sensor
CN103900481B (en) Guarantor's inclined zero diopter fibre coupling ball minute yardstick sensor based on polarization state detection
CN102252600B (en) Capacitive transducer-based cylindricity deviation measuring method and device
CN202057295U (en) Measuring device used in cylindricity error measuring method
CN103759643B (en) Two-dimentional micro-scale measurement device and method based on twin-core fiber grating
CN102322819B (en) Gear chamfer laser measuring instrument
CN209166374U (en) A kind of automobile engine abnormal shape axis multi-segment pneumatic gauging tool fixture
CN207585528U (en) A kind of high-precision part on-line measuring device
CN103759653B (en) Three-dimensional micro-scale measurement device and method based on five core fibre gratings
CN108151672B (en) Shaft shape tolerance measuring instrument based on projection imaging
CN108240790A (en) A kind of turbine blade plane degree method for fast measuring
CN107238348A (en) A kind of high-precision part online test method and detection means
CN103900467B (en) Single fiber coupling ball minute yardstick sensor based on polarization state detection
Li et al. A high-speed in situ measuring method for inner dimension inspection
CN102878933A (en) Comparator based on white light interference positioning principle and detection method thereof
Tong et al. The research of screw thread parameter measurement based on position sensitive detector and laser
CN208171180U (en) The full-scale laser detecting apparatus of cylinder jacket
CN114193232A (en) Five-axis tool nose following function precision measuring device and method for heavy floor type boring and milling machine
CN103900469B (en) Double-optical-fiber coupling ball microscale sensor based on polarization state detection
CN205448983U (en) Cylinder liner external diameter and big platform thickness automated inspection appearance

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20171010

RJ01 Rejection of invention patent application after publication