CN2075770U - Laser measuring device for surface roughness - Google Patents
Laser measuring device for surface roughness Download PDFInfo
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- CN2075770U CN2075770U CN 90214799 CN90214799U CN2075770U CN 2075770 U CN2075770 U CN 2075770U CN 90214799 CN90214799 CN 90214799 CN 90214799 U CN90214799 U CN 90214799U CN 2075770 U CN2075770 U CN 2075770U
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- light
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- surface roughness
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Abstract
The utility model relates to a laser measuring device for surface roughness, which is composed of a measuring head and an electricity box, wherein, the measuring head is composed of a laser 2, an optical fiber self-focusing lens 3, a measuring objective lens 4 and a light pillar face mirror 6; the electricity box is composed of a self-stable power laser source 1, a preamplifier 8, an A/D converter 9, an SCM 10, an LED display 11 and a keyboard 12. The laser measuring device for surface roughness quickly determines the values of the characteristic parameters R-[a] and R-[2] of the surface roughness or the corresponding levels of old national standard through the analysis of the surface scattering light. The utility model has the characteristics of low power consumption, strong anti-interference ability, high stability, large measuring ranges, small size, low cost and convenient carrying.
Description
The utility model relates to laser and the application of photoelectric technology in surface finish measurement.
With the light scattering principle measure surface roughness is a kind of new method, and its notable feature is a non-cpntact measurement, areal sampling, and measuring speed is fast etc.In the existing light scattering measurement method, adopt the He-Ne laser instrument as light source more, receive reflected light and scattered light with silicon photocell, its two ratio and surface roughness profile arithmetic average deviation Ra value has certain corresponding relation.But this method is subjected to light intensity to change the influence different with work materials greatly, and whole device is huge, uses inconvenient.1984-1986, people such as Germany R.Brodman and G.Thurn be at Ann.CIRP, and 33(1) 1984; Opt.ENg.24(3) 1985; And Wear, 109(1) delivered the report of studying optical surface roughness concentration instrument on 1986 magazines such as grade, its principle is when a branch of light projects on the surface of the work, because the modulation of surfaceness, scattered light is specific intensity angle distribution And Normal Distribution approx, and its distribution standard deviation and Ra value have definite funtcional relationship within the specific limits, like this standard deviation S that distributes by surface measurements scattered intensity angle
N, i.e. optical scattering eigenwert just can obtain the Ra value.Be characterized in the light channel structure compactness,, still,, collimate, cause instrument that following weak point is arranged with lens owing to adopt light emitting diode to make light source to the status requirement not high (displacement ± 2mm tilts ± 2 °) of measured workpiece:
1. lumination of light emitting diode efficient is low, and the angle of divergence is big, and the instrument power consumption is big,
2. the collimated system collimates weak effect, and light loss is big, makes photosignal descend, and signal to noise ratio (S/N ratio) is low,
3. light path is adjusted difficulty, and is strict, a little less than noise inhibiting ability.
The purpose of this utility model is to provide a kind of laser surface roughness instrument device at the prior art deficiency, it adopts semiconductor laser, optical fiber and more rational light channel structure, have low in energy consumption, antijamming capability is strong, good stability, measurement range is big, the Portable Laser Surface Roughometer device that volume is little, cost is low.
Fig. 1 is a laser surface roughness instrument structural representation.
Fig. 2 is a laser surface roughness instrument structure principle chart.
(1) Laser Power Devices, (2) semiconductor laser, (3) GRIN Lens, (4) measure object lens, (5) measured workpiece surface, (6) condensing cylindrical mirror, (7) phototriode array, (8) prime amplifier, (9) A/D analog to digital converter, (10) MCS-51 single chip microcomputer, (11) LED shows, (12) enter key, (13) spectroscope.
Laser detector for surface-roughness device such as Fig. 1 that the utility model provides are shown in Figure 2, and it is made up of gage outfit and electronic box two parts. Gage outfit contains semiconductor laser (2), optical fiber GRIN Lens (3), measure object lens (4) and condensing cylindrical mirror (6), measured workpiece surface (5) and phototriode array (7) lay respectively at thing, the side's of the elephant focal plane place of measuring object lens, measured workpiece change in location franchise ± 2mm; Tilt to allow ± 2 °; Electronic box is by Laser Power Devices (1), preamplifier (8), and A/D analog-digital converter (9), MCS-51 single chip microcomputer (10), LED show (11) and keyboard (12) composition.
Provide electric energy to make the light of semiconductor laser (2) output firm power by power-self-stablizing Laser Power Devices (1), after optical fiber GRIN Lens (3), become directional light, focus on measured workpiece surface (5) by measuring object lens (4), its hot spot is approximately 1.5mm, the scattered light on surface becomes a banded directional light after measuring object lens, lip-deep hot spot is equivalent to the light hurdle of system, constitute telecentric beam path, can reduce the inaccurate influence that brings of object lens focusing, condensing cylindrical lens (6) converge at the scattering light belt on the phototriode array (7), its effect is to improve the efficient that receives light, enlarge measurement range, array distributes the scattering optic angle and becomes electric signal, sending into single chip microcomputer (10) through prime amplifier (8) and A/D analog to digital converter (9) handles, and demonstrate corresponding Ra by charactron light-emitting diode display (11), Rz or demonstrate former capital's target appropriate level.To different job operations, its optical scattering eigenwert S
NInconsistent with the relation of Ra value, be summed up as three class surfaces by experiment, select by keyboard (12) during measurement.
For making scattered light signal stable, the utility model adopts the power-self-stablizing Laser Power Devices, and its power circuit principle as shown in Figure 4.
Fig. 4 is a power-self-stablizing laser power supply circuit schematic diagram.
By IC
1, BG provides a stable voltage, IC
2The photocurrent of photo-detector PD is converted into voltage, at voltage comparator ic
3In, regulate Ws and can obtain required laser power output.
If owing to the reason of changes in environmental conditions or circuit itself makes the laser Output optical power raise, electric current increases IC among the PD to having so
2Output voltage also increases, voltage comparator ic
3Output voltage reduces, and makes BG
2Tube impedance increases, electric current I in the semiconductor laser LD loop
FReduce, the drive current of LD reduces like this, and the rising of its Output optical power just is inhibited.
The optical fiber GRIN Lens that the utility model provides is as the colimated light system of semiconductor laser, and fiber lengths L is taken as 0.23P, and P is the optical fiber pitch.Relevant with optical maser wavelength, its collimated light beam collimation reaches about 1 °.
The measuring head light channel structure that the utility model provides has two kinds of forms such as Fig. 2, shown in Figure 3.
Fig. 2 is the measuring head light channel structure of first kind of form, and the loss of this structured light is little, and the light path compactness influences measurement range but the scattering light belt is crooked slightly, certain improvement is arranged after adding cylindrical mirror.
Fig. 3 is second kind of form measuring head light channel structure figure.
(13) spectroscope, its numbering is the same.
The measuring head light channel structure of second kind of form is by laser instrument, optical fiber GRIN Lens, spectroscope (13), the measurement object lens are formed, measured workpiece surface and phototriode array also are positioned at thing, the side's of the elephant focal plane place of measuring object lens, measured workpiece change in location franchise ± 2mm, tilt to allow ± 2 ° of this structured light losses big, owing to be vertical incidence, scattered power reduces, but scattered band is a straight line, and measurement range is bigger.
The utlity model has following advantage:
1. efficiency of light energy utilization height, power consumption little (300mW-500mW) can be adopted dry cell power supply.
2. the scattered light signal light intensity is big, the signal to noise ratio (S/N ratio) height, and antijamming capability is strong.
3. measurement range is big, 0.001＜Ra＜3.2 μ m, and the repeatable accuracy height is better than 2%, and is insensitive to the measured surface material.
4. to the position of measured surface, vibration etc. are disturbed insensitive, and change in location permission ± 2mm tilts to allow ± 2 °.
The instrument volume little, in light weight, easy to carry, flexible, be applicable to that vast factory or enterprise apply on producing, and have economic benefit and social benefit significantly.
Embodiment:
Laser surface roughness instrument device such as Fig. 1 that the utility model provides shown in 2,3, can make of conventional optics, machining.Standardized product such as A/D analog to digital converter, the MCS-51 single chip microcomputer, LED demonstration and input keyboard etc. all can be purchased in market, and equal can the manufacturing by figure of general engineering technology personnel assembled, debugged and normal the use.
Claims (4)
1, a kind of laser surface roughness instrument device [1] [2], it is characterized in that it is made up of measuring head and electronic box that can manual working, measuring head contains semiconductor laser (2), optical fiber GRIN Lens (3), measure object lens (4) and condensing cylindrical mirror (6), measured workpiece surface (5) and phototriode array (7) lay respectively at thing, the side's of the elephant focal plane place of measuring object lens, electronic box is by power-self-stablizing Laser Power Devices (1), prime amplifier (8), A/D converter (9), Mcs-51 single chip microcomputer (10), LED show (11) and keyboard (12) composition.
2, according to the described laser surface roughness instrument of claim 1 device, it is characterized in that described measuring head light channel structure provides electric energy to make the light of semiconductor laser (2) output firm power by power-self-stablizing Laser Power Devices (1), after optical fiber GRIN Lens (3), become directional light, focus on measured workpiece surface (5) by measuring object lens (4), its hot spot is approximately 1.5mm, the scattered light on surface becomes a banded directional light after measuring object lens, lip-deep hot spot is equivalent to the Guang Lan of system, constitute telecentric beam path, can reduce the inaccurate influence that brings of object lens focusing, condensing cylindrical lens (6) converge at light with the scattering light belt, on the electricity triode array (7), array distributes the scattering optic angle and becomes electric signal, sending into single chip microcomputer (10) through prime amplifier (8) and A/D analog to digital converter (9) handles, and by charactron LED(11) demonstrate corresponding Ra, Rz value or demonstrate former capital's target appropriate level, to different job operations, be summed up as three class surfaces by experiment, select by keyboard (12) during measurement.〔2〕
3, according to claim 1 or 2 described laser surface roughness instrument devices, it is characterized in that described power-self-stablizing Laser Power Devices have a power circuit device (4).
4, according to claim 1 or 2 described laser surface roughness instrument devices, it is characterized in that the colimated light system of described optical fiber GRIN Lens (optical fiber) as semiconductor laser, fiber lengths L is taken as 0.23P, P is the optical fiber pitch, relevant with optical maser wavelength, diameter d=φ 1.8mm, numerical aperture NA=0.37, its collimated light beam collimation can reach about 1 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90214799 CN2075770U (en) | 1990-07-24 | 1990-07-24 | Laser measuring device for surface roughness |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 90214799 CN2075770U (en) | 1990-07-24 | 1990-07-24 | Laser measuring device for surface roughness |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN2075770U true CN2075770U (en) | 1991-04-24 |
Family
ID=4894143
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 90214799 Withdrawn CN2075770U (en) | 1990-07-24 | 1990-07-24 | Laser measuring device for surface roughness |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN2075770U (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105066914A (en) * | 2015-08-05 | 2015-11-18 | 贵州大学 | Method and device for quickly distinguishing surface smoothness of metal parts |
| CN109579748A (en) * | 2018-12-21 | 2019-04-05 | 中国建筑材料科学研究总院有限公司 | The detection device and detection method of microchannel plate flatness |
| CN109693033A (en) * | 2019-02-28 | 2019-04-30 | 大族激光科技产业集团股份有限公司 | A kind of method of the laser welding system and automatic focusing of automatic focusing |
| CN110549233A (en) * | 2019-09-30 | 2019-12-10 | 重庆九方铸造有限责任公司 | Laser sensing stop device for camshaft grinding |
| CN110657953A (en) * | 2018-06-29 | 2020-01-07 | 上海微电子装备（集团）股份有限公司 | Focal length measuring system and method, focusing system and method and photoetching device |
| CN111545545A (en) * | 2020-04-22 | 2020-08-18 | 深圳市迅特通信技术有限公司 | Optical fiber end face cleaning method, device, equipment and computer readable storage medium |
-
1990
- 1990-07-24 CN CN 90214799 patent/CN2075770U/en not_active Withdrawn
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105066914A (en) * | 2015-08-05 | 2015-11-18 | 贵州大学 | Method and device for quickly distinguishing surface smoothness of metal parts |
| CN110657953A (en) * | 2018-06-29 | 2020-01-07 | 上海微电子装备（集团）股份有限公司 | Focal length measuring system and method, focusing system and method and photoetching device |
| CN110657953B (en) * | 2018-06-29 | 2022-02-18 | 上海微电子装备（集团）股份有限公司 | Focal length measuring system and method, focusing system and method and photoetching device |
| CN109579748A (en) * | 2018-12-21 | 2019-04-05 | 中国建筑材料科学研究总院有限公司 | The detection device and detection method of microchannel plate flatness |
| CN109579748B (en) * | 2018-12-21 | 2020-06-26 | 中国建筑材料科学研究总院有限公司 | Device and method for detecting planeness of microchannel plate |
| CN109693033A (en) * | 2019-02-28 | 2019-04-30 | 大族激光科技产业集团股份有限公司 | A kind of method of the laser welding system and automatic focusing of automatic focusing |
| CN110549233A (en) * | 2019-09-30 | 2019-12-10 | 重庆九方铸造有限责任公司 | Laser sensing stop device for camshaft grinding |
| CN111545545A (en) * | 2020-04-22 | 2020-08-18 | 深圳市迅特通信技术有限公司 | Optical fiber end face cleaning method, device, equipment and computer readable storage medium |
| CN111545545B (en) * | 2020-04-22 | 2021-02-19 | 深圳市迅特通信技术股份有限公司 | Optical fiber end face cleaning method, device, equipment and computer readable storage medium |
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| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |