CN202433173U - Device for measuring diffraction efficiency of reflective grating by parabolic reflector - Google Patents
Device for measuring diffraction efficiency of reflective grating by parabolic reflector Download PDFInfo
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- CN202433173U CN202433173U CN2012200115336U CN201220011533U CN202433173U CN 202433173 U CN202433173 U CN 202433173U CN 2012200115336 U CN2012200115336 U CN 2012200115336U CN 201220011533 U CN201220011533 U CN 201220011533U CN 202433173 U CN202433173 U CN 202433173U
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Abstract
The utility model relates to a device for measuring diffraction efficiency of a reflective grating by a parabolic reflector, so as to introduce the parabolic reflector into measuring systems. The parabolic reflector is characterized in that all lights emitted from a focus are reflected by the parabolic reflector, the reflected beam is gathered by the convex lens vertical to the optical axis of the reflector at the focus of a rear focal plane of a convex lens along the direction parallel to an optical axis, and a probe of a detector is fixed on the focus of the rear focal plane of the convex, in this way, all the illuminating lights emitted on the grating at any emitting angle can be received by the probe of the detector. According to the device provided by the utility model, the diffracted light energy is received in real time in a large angle range and can be detected all the way, so that the system space is saved, and the size and the weight are reduced; meanwhile, the real-time and fixed-point measurement of the diffraction efficiency can be carried out. Besides, the device is applicable to the requirements on different detection angles only by integrally adjusting the positions of the parabolic reflector, the grating incidence point and the probe of the detector, thereby having high universality.
Description
Technical field
The present invention relates to a kind of method and system of measuring the grating diffraction efficiency curve, relate in particular to a kind of parabolic mirror character of utilizing, measure the device of reflective gratings diffraction efficiency.
Background technology
Grating is a kind of important beam split optical element, is widely used in the every field of contemporary optics.Utilize the spectroscopic property of grating can make various device, like grating chi, grating spectrograph etc.When utilizing grating to carry out the practical devices design, at first to accurately know the peculiar parameters of grating such as grating cycle, grating refractive index degree of modulation and net thickness.These Determination of Parameters can obtain through research diffraction efficiency of grating curve.
In carrying out the diffraction efficiency of grating measuring process, the grating diffration angle can change along with the incident angle of incident light wave and change.When the grating cycle is big, multistage diffraction has appearred in diffraction direction, and changing with incident angle to the inferior angle of diffraction of certain one-level is not clearly.Can detector be fixed on a position to such grating, just can accomplish the measurement of diffraction efficiency.But for very little grating of grating cycle, especially for body grating, when wavelength was constant, very big change can take place with the change of incident angle in angle of diffraction, so, adopt the fixed detector method, can not accomplish measurement to diffraction efficiency of grating.This probe that just requires to accept diffraction energy can change in polarizers of big angle scope.
The measurement of diffraction efficiency of grating at present is to change incident angle with electronic step machine control turntable basically, manually changes position of detector and measures.This method can change because of the angle of detector artificially introduces measuring error.When the light wave near normal incided grating surface, its diffraction light wave was near incident light wave simultaneously.When surveying the diffraction light energy, detector will light-baffling phenomena occur and make the measurement of diffraction efficiency the blind area occur measuring.
Though a kind of realization of proposition is arranged recently diffraction efficiency of grating is carried out the autoscan measurement mechanism (patent No.: CN101545826); Can direct detection near the diffracted beam in the full angle scope, effectively solved the problem that exists in the above-mentioned diffraction efficiency measuring process.But this method in accepting the process of diffraction energy, need to detector on a large scale in along with incident angle changes and rotates, this makes measuring system need very big space, is unfavorable for this set of systems is dressed up instrument, carries out engineering survey.Simultaneously need adopt two detectors that are fixed on the electrical turntable to survey for different incidence angles, different detector record diffraction energies are introduced error to diffraction efficiency curve, have also increased the requirement of measuring system to experimental cost greatly.In the process of two detector conversions, might exist in addition and measure blind area and error in judgement.
Summary of the invention
The technical matters that solves
For fear of the weak point of prior art, the present invention proposes a kind of parabolic mirror that utilizes and measures reflective gratings diffraction efficiency device.
Thought of the present invention is: Fermat principle is obeyed in the propagation of light, and promptly in all possible travel path that light experienced, the pairing light path of Actual path is got extreme value.According to paraboloidal geometric properties; Arbitrarily a bit after parabolic reflector, all be parallel to parabolic axis of symmetry on the parabola with the line of focus; Therefore for parabolic mirror; The Ray Of Light that is set out by focus is after parabolic mirror reflects, and reflection ray must be parallel to the optical axis of parabolic mirror.As shown in Figure 1, the light that is sent by focus is through parabolic mirror reflects, and reflected light all is parallel to the optical axis direction of paraboloidal mirror.
Technical scheme
A kind of device that utilizes parabolic mirror to measure the reflective gratings diffraction efficiency is characterized in that comprising laser instrument 1, beam splitter 2, beam-expanding collimation mirror 10, ellipsoidal reflector 6, second optical power detector 7 and first optical power detector 8; Beam splitter 2 is set on the laser optical path of laser instrument 1, and it is 1: 1 first light beam and second light beam that the light beam that beam splitter 2 sends laser instrument 1 is divided into beam intensity ratio; The light intensity that second optical power detector 7 records second light beam is set in the light path of second light beam; Beam-expanding collimation mirror 10 is set in the light path of first light beam, is the parallel beam of diameter less than 1mm with its collimation, and tested reflective gratings 5 is arranged on the light path of collimated light beam, and parabolic mirror 6 is arranged on the light path of tested reflective gratings diffracted beam; Wherein the incidence point of collimation parallel beam on tested reflective gratings is the focus of parabolic mirror; On the reflected light path of parabolic mirror; With the optical axis vertical direction one convex lens 9 are set; In convex lens 9 back focal plane focal positions first optical power detector 8 is set, measures the intensity of reflected light of parabolic mirror; The twice of the light intensity that the light intensity numerical value that measures with first optical power detector 8 measures divided by second optical power detector 7 obtains the diffraction efficiency of tested reflective gratings.
Tested reflective gratings is placed on the universal stage 3; First optical power detector 8 places convex lens 9 back focal plane focal positions; Parallel beam behind the adjustment beam-expanding collimation mirror 10 shines on the tested reflective gratings; Rotate universal stage 3 and make that the incident angle of parallel beam changes from 0 ° to-80 ° or 0 ° to 80 ° on the tested reflective gratings; Change amount step value is less than 2 °, use first optical power detector 8 in incident angle from 0 ° to-80 ° or 0 ° of intensity of reflected light that records second light beam on the parabolic mirror when to 80 °, changing; The twice of the light intensity that the light intensity numerical value that in each the variation, measures with first optical power detector 8 measures divided by second optical power detector 7, the serial diffraction efficiency of the tested reflective gratings that obtains changing.
Beneficial effect
A kind of method and system of utilizing parabolic mirror to measure the reflective gratings diffraction efficiency that the present invention proposes are incorporated into measuring system with parabolic mirror.The characteristics of parabolic mirror are through parabolic mirror reflects with all light that send from focus; Folded light beam is all along being parallel to optical axis direction; Convex lens through perpendicular to mirror optical axis converge at convex lens back focal plane focal position, and the probe of detector is fixed on convex lens back focal plane focal position.Lighting light wave can be received by detector probe with the arbitrarily angled light that incides on the grating like this.This system is can be in polarizers of big angle scope real-time accepts the diffraction light energy.Can carry out whole process to the diffraction light energy and survey, save system space.Effectively dwindle the volume of this measuring system and alleviate its weight, realized the real-time one-point measurement of diffraction efficiency simultaneously.In addition, only need whole parabolic mirror, grating incidence point and the detector probe position adjusted, promptly, have very high versatility applicable to different detection angle scope demands.
Description of drawings
Fig. 1: the light that is the different directions that sends from focus of parabolic mirror is through parabolic mirror reflects, and reflected light is along the synoptic diagram that is parallel to the parabolic mirror optical axis direction;
Fig. 2: be the system architecture synoptic diagram that the present invention measures the reflective gratings diffraction efficiency;
Fig. 3: the angle Selection linearity curve that is the tested reflective gratings diffraction efficiency measured of the present invention
Among the figure: 1-laser instrument, 2-beam splitter, 3-universal stage, 4-three-dimensional adjustable shelf, 5-reflective gratings, 6-ellipsoidal mirror, 7-second optical power detector, 8-first optical power detector, 9-convex lens, 10-beam-expanding collimation mirror.
Embodiment
Combine embodiment, accompanying drawing that the present invention is further described at present:
Embodiment one: a kind of system architecture synoptic diagram that utilizes parabolic mirror to measure the reflective gratings diffraction efficiency of the present invention's design is as shown in Figure 2, comprising: laser instrument 1, beam splitter 2; Universal stage 3, three-dimensional adjustable shelf 4, reflective gratings 5; Parabolic mirror 6, the second optical power detectors 7, the first optical power detectors 8; Convex lens 9, beam-expanding collimation mirror 10.
Describedly a kind ofly realize that the said workflow of the system that parabolic mirror measures reflection-type grating diffraction efficiency of utilizing is following: the wavelength that optical fiber coupling output He-Ne laser instrument 1 sends is that the laser beam of 632nm is that 1: 1 fiber optic splitter 2 is divided into first light beam and second light beam through splitting ratio; The light intensity P1 of second light beam is surveyed by second optical power detector and measures; Reflective body grating 5 is fixed on the three-dimensional adjustable shelf 4, and overall fixed is on universal stage 3; First light beam is become diameter to be not more than the parallel beam of 1mm by beam-expanding collimation mirror 10 beam-expanding collimations and incides on the reflective gratings 5; Adjustment three-dimensional adjustable shelf 4 and universal stage 3, and the focal position that parabolic mirror 6 is set overlaps with the light beam incidence point make formation after diffracted beam polished object face catoptron 6 reflections of reflective gratings 5 be parallel to the reflected light of incident beam; Reflected light shines on first optical power detector 8 that is positioned at its back focal plane convergent point position through behind the convex lens 9, and measures its intensity level P2; Use the twice of the light intensity numerical value P2 at the convergent point place that measures, obtain the diffraction efficiency of tested reflective gratings divided by the second light beam light intensity P1; Change parallel beam from 40 ° to 55 ° and incide the incident angle on the reflective gratings 5 with 0.00125 ° precision change, obtain the diffraction efficiency series of values; With the incident angle is transverse axis, and diffraction efficiency is the longitudinal axis, obtains the angle Selection linearity curve of tested reflective gratings diffraction efficiency as shown in Figure 3.
Claims (2)
1. device that utilizes parabolic mirror to measure the reflective gratings diffraction efficiency; It is characterized in that comprising laser instrument (1), beam splitter (2), beam-expanding collimation mirror (10), ellipsoidal reflector (6), second optical power detector (7) and first optical power detector (8); Beam splitter (2) is set on the laser optical path of laser instrument (1), and it is 1: 1 first light beam and second light beam that the light beam that beam splitter (2) sends laser instrument (1) is divided into beam intensity ratio; The light intensity that second optical power detector (7) records second light beam is set in the light path of second light beam; Beam-expanding collimation mirror (10) is set in the light path of first light beam; With its collimation is the parallel beam of diameter less than 1mm; Tested reflective gratings (5) is arranged on the light path of collimated light beam, and parabolic mirror (6) is arranged on the light path of tested reflective gratings diffracted beam; Wherein the incidence point of collimation parallel beam on tested reflective gratings is the focus of parabolic mirror; On the reflected light path of parabolic mirror; With the optical axis vertical direction one convex lens (9) are set; In convex lens (9) back focal plane focal position first optical power detector (8) is set, measures the intensity of reflected light of parabolic mirror; The twice of the light intensity that the light intensity numerical value that measures with first optical power detector (8) measures divided by second optical power detector (7) obtains the diffraction efficiency of tested reflective gratings.
2. the device that utilizes the parabolic spherical reflector to measure the reflective gratings diffraction efficiency according to claim 1; It is characterized in that: tested reflective gratings is placed on the universal stage (3); First optical power detector (8) places convex lens (9) back focal plane focal position; Parallel beam behind the adjustment beam-expanding collimation mirror (10) shines on the tested reflective gratings; Rotate universal stage (3) and make that the incident angle of parallel beam changes from 0 ° to-80 ° or 0 ° to 80 ° on the tested reflective gratings; Change amount step value is less than 2 °, use first optical power detector (8) in incident angle from 0 ° to-80 ° or 0 ° of intensity of reflected light that records second light beam on the parabolic mirror when to 80 °, changing; The twice of the light intensity that the light intensity numerical value that in each the variation, measures with first optical power detector (8) measures divided by second optical power detector (7), the serial diffraction efficiency of the tested reflective gratings that obtains changing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN2012200115336U CN202433173U (en) | 2012-01-04 | 2012-01-04 | Device for measuring diffraction efficiency of reflective grating by parabolic reflector |
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| Application Number | Priority Date | Filing Date | Title |
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| CN2012200115336U CN202433173U (en) | 2012-01-04 | 2012-01-04 | Device for measuring diffraction efficiency of reflective grating by parabolic reflector |
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| CN2012200115336U Expired - Fee Related CN202433173U (en) | 2012-01-04 | 2012-01-04 | Device for measuring diffraction efficiency of reflective grating by parabolic reflector |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110736721A (en) * | 2018-07-18 | 2020-01-31 | 西安工业大学 | Glass plate refractive index uniformity detection device and detection method based on diffraction grating |
| CN114779456A (en) * | 2022-05-26 | 2022-07-22 | 南开大学 | Compact incident angle adjusting device based on parabolic mirror |
-
2012
- 2012-01-04 CN CN2012200115336U patent/CN202433173U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110736721A (en) * | 2018-07-18 | 2020-01-31 | 西安工业大学 | Glass plate refractive index uniformity detection device and detection method based on diffraction grating |
| CN114779456A (en) * | 2022-05-26 | 2022-07-22 | 南开大学 | Compact incident angle adjusting device based on parabolic mirror |
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| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120912 Termination date: 20150104 |
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