CN207517646U - It is automatic to survey sheet resistance equipment - Google Patents
It is automatic to survey sheet resistance equipment Download PDFInfo
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- CN207517646U CN207517646U CN201721373722.7U CN201721373722U CN207517646U CN 207517646 U CN207517646 U CN 207517646U CN 201721373722 U CN201721373722 U CN 201721373722U CN 207517646 U CN207517646 U CN 207517646U
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Abstract
The utility model is related to a kind of automatic survey sheet resistance equipment, control feeding area that the gaily decorated basket for filling silicon chip is delivered to lower section by control section, silicon chip in the gaily decorated basket is unloaded one by one and is delivered to the first buffer area in lower section, silicon chip is delivered to correction zone by the first buffer area, correction zone is delivered to test section and carries out sheet resistance test after silicon chip is corrected, the silicon chip completed by sheet resistance test is transported to the second buffer area, it is controlled by control section, after piece being distinguished after being compared with established standards by fragment, it will be separated more than the established standards upper limit and more than the silicon chip of established standards lower limit, silicon chip of the sheet resistance test result in normal range (NR) is only delivered to section, and silicon chip is placed on the gaily decorated basket by upper section, the gaily decorated basket for most filling silicon chip at last is transferred out by discharging area；Effectively prevent the problem of pollution that piece is manually taken to be brought with survey piece, fragmentation are with scratching；Automatic test silicon chip sheet resistance, substantially increases testing efficiency, can complete batch detection.
Description
Technical field
The utility model is related to solar battery sheet technical field, more particularly, to a kind of automatic survey sheet resistance equipment.
Background technology
At present in solar battery sheet field, P-N junction is made, that is, is diffused as the core of solar battery technology, spreads work
Skill carries out high temperature in boiler tube and is reacted with phosphorus source, and phosphorus simple substance is generated in silicon chip surface, and passes through high temperature and occur with silicon atom
It replaces and enters inside silicon crystal, form N-type semiconductor, PN junction is formed with P-type wafer contact area before.Wherein, judgement diffusion
Whether it is excellent be to be embodied by test silicon wafer sheet resistivity.Current test equipment is required to manually carry out taking piece, surveys piece
And film releasing.Light efficiency is not low, during which there is the bad phenomenons such as friction, breakage and pollution unavoidably；And it is sampling observation silicon to test at present
For undetected silicon chip, the possibility of next procedure is flowed into there are sheet resistance extremely for piece.
Utility model content
The technical problems to be solved in the utility model is：In order to overcome test equipment of the prior art be required to manually into
Row takes piece, surveys piece and film releasing.Light efficiency is not low, during which there is the bad phenomenons such as friction, breakage and pollution unavoidably；And it tests at present
It is sampling observation silicon chip, for undetected silicon chip, there are problems that sheet resistance flows into next procedure extremely, one kind is provided and is surveyed automatically
Sheet resistance equipment.
Technical solution is used by the utility model solves its technical problem：A kind of automatic survey sheet resistance equipment, including：Packet
Material loading part, part of detecting, blanking part and control section are included, the material loading part includes feeding area, lower section, the first caching
Area and correction zone, the part of detecting include test section, the blanking part include the second buffer area, fragment area, upper section and
Discharging area, the feeding area, lower section, the first buffer area, correction zone, test section, the second buffer area, fragment area, upper section and
Discharging area is set gradually in assembly line, and the control section controls feeding area, lower section, the first buffer area, correction zone, survey respectively
Try area, the second buffer area, fragment area, upper section and discharging area.
The automatic of the utility model surveys sheet resistance equipment, feeding area is controlled to convey the gaily decorated basket for filling silicon chip by control section
To lower section, the silicon chip in the gaily decorated basket is unloaded and is delivered to the first buffer area by lower section one by one, and the first buffer area conveys silicon chip
To correction zone, correction zone is delivered to test section and carries out sheet resistance test after silicon chip is corrected, the silicon chip quilt completed by sheet resistance test
The second buffer area is delivered to, is controlled by control section, after distinguishing piece by fragment after being compared with established standards, will be more than
The established standards upper limit and silicon chip more than established standards lower limit separate, only that silicon chip of the sheet resistance test result in normal range (NR) is defeated
Supreme section is sent, and silicon chip is placed on the gaily decorated basket by upper section, the gaily decorated basket for most filling silicon chip at last is conveyed by discharging area
It goes out；By automatic test silicon chip sheet resistance, effectively prevent that piece is manually taken to ask with what is scratched with surveying pollution, fragmentation that piece is brought
Topic；
Automatic test silicon chip sheet resistance, substantially increases testing efficiency, can complete batch detection.
Further, the feeding area includes transmitting device, and transmitting device described in two groups is arranged at intervals up and down, the transmission
Right photoelectric sensor is installed on the right side of device, the right photoelectric sensor is electrically connected with the control section, positioned at upper
The transmitting device of side fills the gaily decorated basket of silicon chip for conveying, and underlying transmitting device is used to convey the empty gaily decorated basket.
Further, the lower section includes lower sheet devices, clamping device and conveying device, and the lower sheet devices include connection
Dynamic device and fixed station, the linkage drive the fixed station to realize lifting, and the clamping device is fixedly mounted on described
The top of fixed station, the conveying device include transmitting device and movable transport device, and the transmitting device is fixedly mounted on institute
It states on fixed station, and positioned at the underface of the clamping device, the activity transport device is located at clamping device and transmitting device
Between.
Further, first buffer area and the second buffer area include linkage, transmitting device and storage basket, institute
It states storage basket and is provide with the transmitting device, the linkage drives the storage basket to realize lifting.
Preferably, the storage basket includes snap-gauge, two snap-gauges are parallel and are arranged at intervals, the transmitting device position
Between two snap-gauges, several cache slots are offered on the snap-gauge, the cache slot on two snap-gauges corresponds
It sets, left and right photoelectric sensor is installed on the snap-gauge, the left and right photoelectric sensor is respectively positioned at cache slot
Both ends.
Further, the correction zone includes transmitting device, left and right photoelectric sensor and calibrating installation, the calibration cartridge
Put including be in row arrangement pulley blocks and cylinder, pulley blocks described in two groups respectively be located at transmitting device both sides, and with the biography
Defeated device is arranged in parallel, and the pulley blocks are driven by driving device closer or far from transmitting device, the left and right photoelectric sensor
It is located at the both ends of transmitting device respectively, the driving device is cylinder.
Further, the test section includes transmitting device, test platform, four probe panels of test and lifting gear, institute
It states four probe panels of test to be fixedly mounted on the test platform, the test platform is being located at the transmitting device just
Top, the lifting gear are located at the underface of the transmitting device, are fixedly mounted on the lifting gear and are useful for placing silicon
The objective table of piece, silicon chip on the lifting gear driving objective table closer or far from test platform, the test section it is left and right
Both sides are installed with left and right photoelectric sensor respectively, and the left and right photoelectric sensor is electrically connected with the control section,
The lifting gear is cylinder.
Further, the fragment area includes transmitting device and telecontrol equipment, and the left side of the transmitting device is fixedly mounted
Have left photoelectric sensor, the left photoelectric sensor is electrically connected with the control section, the telecontrol equipment include linkage,
Lifting gear and sucker, the linkage are located at the surface of the transmitting device, for lifting gear to be driven to be filled to transmission
The front or behind movement put, the lifting gear are slidably mounted on the linkage, and the sucker is fixedly mounted on institute
It states on lifting gear, the lifting gear is cylinder.
Further, the upper section includes upper sheet devices, clamping device and conveying device, and the upper sheet devices include connection
Dynamic device and fixed station, the linkage drive the fixed station to realize lifting, and the clamping device is fixedly mounted on described
The top of fixed station, the conveying device include transmitting device and movable transport device, and the transmitting device is fixedly mounted on institute
It states on fixed station, and positioned at the underface of the clamping device, the activity transport device is located at clamping device and transmitting device
Between.
Further, the discharging area includes transmitting device, and transmitting device described in two groups is arranged at intervals above and below, the biography
Right photoelectric sensor is installed on the right side of defeated device, the right photoelectric sensor is electrically connected with the control section.
Further, the clamping device includes driving device, and the driving device is cylinder, and the driving device is fixed
Mounted on the top of the fixed station, clamping plate is installed in the driving device, the clamping plate is located at the transmission
The surface of device, the driving device drive clamping plate closer or far from transmitting device.
Further, the movable transport device includes rack and belt, and first rotating shaft is installed in the rack
With the second shaft, third shaft and the 4th shaft, the first rotating shaft and the 4th shaft are slidably fitted in the rack
In same level, belt is installed in the first rotating shaft, the second shaft, third shaft and the 4th shaft
Wheel, the belt is successively around the belt pulley in first rotating shaft, the second shaft, third shaft and the 4th shaft, in the rack
Promotion cylinder is installed with, two external parts for pushing cylinder are fixedly connected respectively with third shaft and the 4th shaft, two
The promotion cylinder drives third shaft and the 4th shaft to be moved left and right in rack respectively, and pressure is installed in the rack
Sensor, the pressure sensor are located at the left side of the 4th shaft, and the pressure sensor is electrically connected with the control section.
In order to simplify the integral installation structure of the utility model, the transmitting device is belt conveyor.
In order to simplify the integral installation structure of the utility model, the linkage is spindle gear.
Preferably, the control section is programmable logic controller (PLC).
In order to which the silicon chip with different sheet resistance values is distinguished, the fragment area further includes the first accommodating case and second and holds
Case, first accommodating case and the second accommodating case, first accommodating case and the second accommodating case are respectively positioned at transmitting device
Front and rear sides.
The beneficial effects of the utility model are:The automatic of the utility model surveys sheet resistance equipment, is controlled by control section
The gaily decorated basket for filling silicon chip is delivered to lower section by material area, and the silicon chip in the gaily decorated basket is unloaded and is delivered to the first caching by lower section one by one
Silicon chip is delivered to correction zone by area, the first buffer area, and correction zone is delivered to test section and carries out sheet resistance test after silicon chip is corrected, lead to
It crosses the silicon chip that sheet resistance test is completed and is transported to the second buffer area, controlled by control section, passed through after being compared with established standards
After fragment distinguishes piece, it will separate beyond more than the established standards upper limit and more than the silicon chip of established standards lower limit, only test sheet resistance
As a result the silicon chip in normal range (NR) is delivered to section, and silicon chip is placed on the gaily decorated basket by upper section, most fills at last
The gaily decorated basket of silicon chip is transferred out by discharging area；By automatic test silicon chip sheet resistance, effectively prevent manually taking piece with surveying piece
The problem of pollution, fragmentation and scuffing for bringing；Automatic test silicon chip sheet resistance, substantially increases testing efficiency, can complete batch
Detection.
Description of the drawings
The utility model is further illustrated with reference to the accompanying drawings and examples.
Fig. 1 is the schematic three dimensional views of the utility model；
Fig. 2 is the front view of the utility model；
Fig. 3 is the schematic three dimensional views of feeding area in the utility model (discharging area)；
Fig. 4 is the schematic three dimensional views of lower section (upper section) in the utility model；
Fig. 5 is the schematic three dimensional views of the first buffer area in the utility model (the second buffer area)；
Fig. 6 is the schematic three dimensional views of correction zone in the utility model；
Fig. 7 is the schematic three dimensional views of test section in the utility model；
Fig. 8 is the schematic three dimensional views in fragment area in the utility model.
In figure：1. feeding area, 2. times sections, 2-1. fixed stations, 3. first buffer areas, 3-1. snap-gauges, 3-2. cache slots,
4. correction zone, 4-1. pulley blocks, 5. test sections, 5-1. test platforms, 5-2. objective tables, 6. second buffer areas, 7. fragment areas,
7-1. suckers, the first accommodating cases of 7-2., the second accommodating cases of 7-3., on 8. section, 8-1. clamping plates, 8-2. belts, 8-3. first
Shaft, the second shafts of 8-4., 8-5. third shafts, the 4th shafts of 8-6., 8-7. belt pulleys, 9. discharging areas, 10. belt transports
Machine, 11. spindle gears, 12. cylinders.
Specific embodiment
Presently in connection with attached drawing, the utility model is described in more detail.These attached drawings are simplified schematic diagram,
Only illustrate the basic structure of the utility model in a schematic way, therefore it only shows the composition related with the utility model.
The automatic survey sheet resistance equipment of one kind as depicted in figs. 1 and 2, including：Including material loading part, part of detecting, blanking portion
Divide and control section, the material loading part include feeding area 1, lower section 2, the first buffer area 3 and correction zone 4, the test department
Divide and include test section 5, the blanking part includes the second buffer area 6, fragment area 7, upper section 8 and discharging area 9, the feeding area
1st, lower section 2, the first buffer area 3, correction zone 4, test section 5, the second buffer area 6, fragment area 7, upper section 8 and discharging area 9 are in
Assembly line is set gradually, and the control section controls feeding area 1, lower section 2, the first buffer area 3, correction zone 4, test section respectively
5th, the second buffer area 6, fragment area 7, upper section 8 and discharging area 9.
As shown in figure 3, the feeding area 1 includes belt conveyor 10, belt conveyor 10 described in two groups is between the upper and lower every setting
It puts, the right side of the belt conveyor 10 is installed with right photoelectric sensor, the right photoelectric sensor and the control unit
Divide electrical connection, the belt conveyor 10 being located above fills the gaily decorated basket of silicon chip, underlying belt conveyor 10 for conveying
For conveying the empty gaily decorated basket.
As shown in figure 4, the lower section 2 includes lower sheet devices, clamping device and conveying device, the lower sheet devices include
Spindle gear 11 and fixed station 2-1, the spindle gear 11 drive the fixed station 2-1 to realize lifting, the folder
Tight device is fixedly mounted on the top of the fixed station 2-1, and the conveying device includes belt conveyor 10 and activity transport fills
It puts, the transmitting device is fixedly mounted on the fixed station 2-1, and positioned at the underface of the clamping device, the activity
Transport device is between clamping device and belt conveyor 10.The clamping device includes driving device, the driving device
For cylinder 12, the driving device is fixedly mounted on the top of the fixed station 2-1, folder is installed in the driving device
Tight plate 8-1, the clamping plate 8-1 are located at the surface of the belt conveyor 10, the driving device driving clamping plate 8-1
Closer or far from belt conveyor 10.The activity transport device includes rack and belt 8-2, is installed in the rack
First rotating shaft 8-3 and the second shaft 8-4, is slidably fitted with third shaft 8-5 and the 4th shaft 8-6 in the rack, and described
One shaft 8-3 and the 4th shaft 8-6 is located in same level, and the first rotating shaft 8-3, the second shaft 8-4, third turn
Belt pulley 8-7 is installed on axis 8-5 and the 4th shaft 8-6, the belt 8-2 is successively around first rotating shaft 8-3, second
Belt pulley 8-7 on shaft 8-4, third shaft 8-5 and the 4th shaft 8-6 is installed with promotion cylinder in the rack, described
Promotion cylinder is cylinder 12, and the external part of two cylinders 12 is fixedly connected respectively with third shaft 8-5 and the 4th shaft 8-6,
Two cylinders 12 drive third shaft 8-5 and the 4th shaft 8-6 to be moved left and right in rack respectively, fixed in the rack
Pressure sensor is installed, the pressure sensor is located at the left side of the 4th shaft 8-6, the pressure sensor and the control
Part is electrically connected.
As shown in figure 5,3 and second buffer area 6 of the first buffer area includes spindle gear 11, belt conveyor
10 and storage basket, the storage basket is provide with the belt conveyor 10, and the spindle gear 11 drives the storage basket real
It now lifts, the storage basket is parallel including snap-gauge 3-1, two snap-gauge 3-1 and is arranged at intervals, the belt conveyor 10
Between two snap-gauge 3-1, several cache slot 3-2 are offered on the snap-gauge 3-1, on two snap-gauge 3-1
Cache slot 3-2 is arranged in a one-to-one correspondence, and left and right photoelectric sensor, the left and right photoelectric transfer are installed on the snap-gauge 3-1
Sensor is located at the both ends of cache slot 3-2 respectively.
As shown in fig. 6, the correction zone 4 includes belt conveyor 10, left and right photoelectric sensor and calibrating installation, it is described
Calibrating installation includes the pulley blocks 4-1 and cylinder 12 in row's arrangement, and pulley blocks 4-1 described in two groups is located at belt conveyor respectively
10 both sides, and be arranged in parallel with the belt conveyor 10, the pulley blocks 4-1 is driven by driving device closer or far from skin
Band conveyer 10, the left and right photoelectric sensor are located at the both ends of belt conveyor 10 respectively, and the driving device is cylinder
12。
As shown in fig. 7, the test section 5 includes belt conveyor 10, test platform 5-1, four probe panels of test and liter
Falling unit, four probe panels of the test are fixedly mounted on the test platform 5-1, and the test platform 5-1 is located at described
The surface of the belt conveyor 10, the lifting gear are located at the underface of the belt conveyor 10, the lifting dress
Put be fixedly mounted be useful for place silicon chip objective table 5-2, the lifting gear driving objective table 5-2 on silicon chip it is close or
Far from test platform 5-1, the arranged on left and right sides of the test section 5 is installed with left and right photoelectric sensor respectively, it is described it is left,
Right photoelectric sensor is electrically connected with the control section, and the lifting gear is cylinder 12.
As shown in figure 8, the fragment area 7 includes belt conveyor 10 and telecontrol equipment, a left side for the belt conveyor 10
Side is installed with left photoelectric sensor, and the left photoelectric sensor is electrically connected with the control section, the telecontrol equipment packet
Spindle gear 11, lifting gear and sucker 7-1 are included, the spindle gear 11 is being located at the belt conveyor 10 just
Top, for lifting gear to be driven to be moved to the front or behind of belt conveyor 10, the lifting gear is slidably mounted on institute
It stating on spindle gear 11, the sucker 7-1 is fixedly mounted on the lifting gear, and the lifting gear is cylinder 12,
The fragment area 7 further includes the first accommodating case 7-2 and the second accommodating case 7-3, the first accommodating case 7-2 and the second accommodating case 7-
3, the first accommodating case 7-2 and the second accommodating case 7-3 are located at the front and rear sides of belt conveyor 10 respectively.
As shown in figure 4, the upper section 8 includes upper sheet devices, clamping device and conveying device, the upper sheet devices include
Spindle gear 11 and fixed station 2-1, the spindle gear 11 drive the fixed station 2-1 to realize lifting, the folder
Tight device is fixedly mounted on the top of the fixed station 2-1, and the conveying device includes belt conveyor 10 and activity transport fills
It puts, the transmitting device is fixedly mounted on the fixed station 2-1, and positioned at the underface of the clamping device, the activity
For transport device between clamping device and belt conveyor 10, the clamping device includes driving device, the driving device
For cylinder 12, the driving device is fixedly mounted on the top of the fixed station 2-1, folder is installed in the driving device
Tight plate 8-1, the clamping plate 8-1 are located at the surface of the belt conveyor 10, the driving device driving clamping plate 8-1
Closer or far from belt conveyor 10.The activity transport device includes rack and belt 8-2, is installed in the rack
First rotating shaft 8-3 and the second shaft 8-4, is slidably fitted with third shaft 8-5 and the 4th shaft 8-6 in the rack, and described
One shaft 8-3 and the 4th shaft 8-6 is located in same level, and the first rotating shaft 8-3, the second shaft 8-4, third turn
Belt pulley 8-7 is installed on axis 8-5 and the 4th shaft 8-6, the belt 8-2 is successively around first rotating shaft 8-3, second
Belt pulley 8-7 on shaft 8-4, third shaft 8-5 and the 4th shaft 8-6 is installed with promotion cylinder in the rack, described
Promotion cylinder is cylinder 12, and the external part of two cylinders 12 is fixedly connected respectively with third shaft 8-5 and the 4th shaft 8-6,
Two cylinders 12 drive third shaft 8-5 and the 4th shaft 8-6 to be moved left and right in rack respectively, fixed in the rack
Pressure sensor is installed, the pressure sensor is located at the left side of the 4th shaft 8-6, the pressure sensor and the control
Part is electrically connected.
As shown in figure 3, the discharging area 9 includes belt conveyor 10, interval is set belt conveyor 10 described in two groups above and below
It puts, the right side of the belt conveyor 10 is installed with right photoelectric sensor, the right photoelectric sensor and the control unit
Divide electrical connection.
The control section is programmable logic controller (PLC), and English is abbreviated as：PLC.
The work step of the utility model is as follows：
1st, the gaily decorated basket after diffusion blanking is placed on the belt conveyor 10 being located above in feeding area 1, setup test；
2nd, PLC controls the belt conveyor 10 that is located above in feeding area 1 to work, and the gaily decorated basket is moved right, when being moved to
During right photoelectric sensor, the belt conveyor 10 on PLC controls feeding area 1 is stopped, and it is most right to reach feeding area 1 for the gaily decorated basket at this time
End；
3rd, spindle gear 11 works in the lower section 2 of PLC controls, and fixed station 2-1 is moved up fixed range, is made solid
The conveyor surface of conveyor surface and top belt conveyor 10 in feeding area 1 for determining platform 2-1 upper belts conveyer 10 keeps horizontal；
4th, PLC controls the belt conveyor 10 being located above in feeding area 1 and 10 work of belt conveyor in lower section 2
Make, the gaily decorated basket continues to move right to the belt conveyor 10 in lower section 2, when reaching lower 2 rightmost side of section, in PLC controls
The belt conveyor 10 being located above in material area 1 is stopped with the belt conveyor 10 in lower section 2；
5th, the cylinder 12 on the lower section 2 of PLC controls is inflated, and cylinder 12 moves downward clamping plate 8-1, and with gaily decorated basket upper table
Face paste is closed, so as to which the gaily decorated basket is clamped on fixed station 2-1；
6th, the spindle gear 11 on the lower section 2 of PLC controls works, and fixed station 2-1 is driven to move down fixed range, makes flower
Lower side silicon chip and the belt 8-2 in movable transport device are horizontal in basket；
7th, PLC controls two cylinders 12 in movable conveyer to stretch out simultaneously, pushes third shaft 8-5 and the 4th turn
Axis 8-6 is moved to the gaily decorated basket, and the belt 8-2 in movable conveyer is made to be located at the lower section of the gaily decorated basket, belt 8-2 is made to arrive to the gaily decorated basket most lower
The lower section of side silicon wafer, at this time the pressure sensor on the left of movable transport device experience pressure；
8th, PLC according to pressure sensor by without to changing, transporting the belt conveyor 10 in movable transport device
Turn, the silicon chip in the gaily decorated basket is transported to the first buffer area 3；
9th, PLC makes the spindle gear 11 on lower section 2 work, makes according to pressure sensor by having to unchanged
The gaily decorated basket fixes downwards mobile a distance each second, until pressure sensor by nothing to changing, continues to fill activity transport
Belt conveyor 10 in putting operates, and thus recycles, until silicon chip is transferred to the first buffer area 3 in the gaily decorated basket；
10th, the spindle gear 11 on the lower section 2 of PLC controls drives fixed station 2-1 to move down on fixed station 2-1
The conveyor surface of belt conveyor 10 is horizontal with the conveyor surface of 1 lower section belt conveyor 10 of feeding area, makes the cylinder in clamping device
10 antiport of belt conveyor after 12 homings on fixed station 2-1, the empty gaily decorated basket are transported to the belt of 1 lower section of feeding area
On conveyer 10, thus the feeding gaily decorated basket completes a cycle.
11st, the silicon chip being transmitted away enters the first buffer area 3, if silicon chip rests on the first buffer area 3 for a long time
(and the right photoelectric sensor of buffer area is sensed as sometimes for a long time), PLC controls 11 band of spindle gear in the first buffer area 3
Dynamic storage basket moves up a distance, will be in silicon slice loading to cache slot 3-2；If silicon chip long-time is without by buffer area
While being sensed as no for a long time (and the left photoelectric sensor of buffer area), PLC controls the spindle gear 11 in the first buffer area 3
Storage basket is driven to move down a distance, silicon chip is downloaded in the first buffer area 3 on the belt 8-2 of belt conveyor 10, PLC leads to
The belt conveyor 10 in the first buffer area 3 of control is crossed, silicon chip is sent to correction zone 4；
12nd, when the corrected 4 left photoelectric sensor of area of silicon chip, PLC control 4 belt conveyors 10 of correction zone work, silicon
When piece reaches right photoelectric sensor, PLC control belt conveyors 10 are stopped, and the cylinder 12 of correction zone 4 is controlled to work, school
Positive pulley blocks 4-1 can be moved toward one another inwardly, make silicon chip holding horizontal, and completing an action exhaust hood 12 separates it, PLC controls
Belt conveyor 10 processed works, transmission silicon chip to test section 5；
13rd, when silicon chip is to 5 left photoelectric sensor of test section, PLC control 5 belt conveyors 10 of test section work, and make silicon chip
When reaching right photoelectric sensor, belt conveyor 10 is stopped；
14th, PLC controls 5 cylinder 12 of test section to work, and cylinder 12 moves up objective table 5-2, the silicon on belt conveyor 10
Piece reaches on objective table 5-2, and top four probe panels of test carry out sheet resistance test to silicon chip at this time.After testing, cylinder 12 will
Objective table 5-2 is moved down, until the silicon chip on objective table 5-2 is placed to belt conveyor 10, belt conveyor 10 works silicon chip
It sends out, with this reciprocation cycle；
15th, for the silicon chip after testing by the second buffer area 6, the operation principle compared with the first buffer area 3 is similar；
16th, enter after the second buffer area 6 fragment area 7, when sheet resistance test result is more than the established standards upper limit, PLC
Cylinder 12 can be driven to move sucker 7-1 down, then silicon chip is sucted, cylinder 12 drives sucker 7-1 up to move, and PLC is controlled again
Spindle gear 11 processed drives sucker 7-1 to move forward and backward, and silicon chip is placed in box 1；
17th, when sheet resistance test result is more than established standards lower limit, PLC can drive cylinder 12 to transport sucker 7-1 down
It is dynamic, then silicon chip is sucted, cylinder 12 drives sucker 7-1 up to move, and PLC controls spindle gear 11 to move forward and backward again, will
Silicon chip is placed in box 2；
18th, when sheet resistance test result is in the range of normal sheet resistance, PLC can control belt conveyor 10 to work, by silicon chip
Send supreme section 8；
19th, when silicon chip is successively by upper section 8 with discharging area 9, operation principle and lower section 2 are similar with feeding area 1；
20th, on control panel, it can be seen that the quantity of sheet resistance test result and sheet resistance exception completes a cycle with this.
Using the above-mentioned desirable embodiment according to the utility model as enlightenment, pass through above-mentioned description, related work people
Member can carry out various changes and amendments in the range of without departing from this item utility model technological thought completely.This item is real
The content being not limited to novel technical scope on specification, it is necessary to which its technology is determined according to right
Property range.
Claims (16)
1. a kind of automatic survey sheet resistance equipment, it is characterised in that：Including material loading part, part of detecting, blanking part and control section,
The material loading part includes feeding area (1), lower section (2), the first buffer area (3) and correction zone (4), the part of detecting and includes
Test section (5), the blanking part include the second buffer area (6), fragment area (7), upper section (8) and discharging area (9), it is described on
Expect area (1), lower section (2), the first buffer area (3), correction zone (4), test section (5), the second buffer area (6), fragment area (7),
Upper section (8) and discharging area (9) are set gradually in assembly line, the control section control respectively feeding area (1), lower section (2),
First buffer area (3), correction zone (4), test section (5), the second buffer area (6), fragment area (7), upper section (8) and discharging area
(9)。
2. automatic survey sheet resistance equipment as described in claim 1, it is characterised in that：The feeding area (1) includes transmitting device, and two
The group transmitting device is arranged at intervals up and down, and right photoelectric sensor, the right light are installed on the right side of the transmitting device
Electric transducer is electrically connected with the control section.
3. automatic survey sheet resistance equipment as described in claim 1, it is characterised in that：The lower section (2) includes lower sheet devices, folder
Tight device and conveying device, the lower sheet devices include linkage and fixed station (2-1), and the linkage driving is described solid
Determine platform (2-1) and realize lifting, the clamping device is fixedly mounted on the top of the fixed station (2-1), the conveying device packet
Transmitting device and movable transport device are included, the transmitting device is fixedly mounted on the fixed station (2-1), and positioned at the folder
The underface of tight device, the activity transport device is between clamping device and transmitting device.
4. automatic survey sheet resistance equipment as described in claim 1, it is characterised in that：First buffer area (3) and the second caching
Area (6) includes linkage, transmitting device and storage basket, and the storage basket is provide with the transmitting device, the linkage
The storage basket is driven to realize lifting.
5. automatic survey sheet resistance equipment as claimed in claim 4, it is characterised in that：The storage basket include snap-gauge (3-1), two
The snap-gauge (3-1) is parallel and is arranged at intervals, and the transmitting device is located between two snap-gauges (3-1), the snap-gauge (3-
1) several cache slots (3-2) are offered on, the cache slot (3-2) on two snap-gauges (3-1) is arranged in a one-to-one correspondence, the card
Left and right photoelectric sensor is installed on plate (3-1), the left and right photoelectric sensor is located at the two of cache slot (3-2) respectively
End.
6. automatic survey sheet resistance equipment as described in claim 1, it is characterised in that：The correction zone (4) including transmitting device,
Left and right photoelectric sensor and calibrating installation, the calibrating installation include in row arrangement pulley blocks (4-1) and driving device, two
The group pulley blocks (4-1) are located at the both sides of transmitting device respectively, and are arranged in parallel with the transmitting device, the pulley blocks
(4-1) is driven by driving device closer or far from transmitting device, and the left and right photoelectric sensor is located at the two of transmitting device respectively
End.
7. automatic survey sheet resistance equipment as claimed in claim 2, it is characterised in that：The test section (5) includes transmitting device, survey
Platform (5-1), four probe panels of test and lifting gear are tried, four probe panels of the test are fixedly mounted on the test platform
On (5-1), positioned at the surface of the transmitting device, the lifting gear is located at the transmission and fills the test platform (5-1)
The objective table (5-2) for being useful for placing silicon chip, the lifting gear driving are fixedly mounted on the lifting gear for the underface put
Closer or far from test platform (5-1), the arranged on left and right sides of the test section (5) is fixed respectively to pacify silicon chip on objective table (5-2)
Equipped with left and right photoelectric sensor, the left and right photoelectric sensor is electrically connected with the control section.
8. automatic survey sheet resistance equipment as claimed in claim 2, it is characterised in that：The fragment area (7) including transmitting device and
Telecontrol equipment is installed with left photoelectric sensor, the left photoelectric sensor and the control on the left of the transmitting device
Part is electrically connected, and the telecontrol equipment includes linkage, lifting gear and sucker (7-1), and the linkage is located at described
The surface of transmitting device, for lifting gear to be driven to be moved to the front or behind of transmitting device, the lifting gear slides
On the linkage, the sucker (7-1) is fixedly mounted on the lifting gear.
9. automatic survey sheet resistance equipment as claimed in claim 3, it is characterised in that：The upper section (8) includes upper sheet devices, folder
Tight device and conveying device, the upper sheet devices include linkage and fixed station (2-1), and the linkage driving is described solid
Determine platform (2-1) and realize lifting, the clamping device is fixedly mounted on the top of the fixed station (2-1), the conveying device packet
Transmitting device and movable transport device are included, the transmitting device is fixedly mounted on the fixed station (2-1), and positioned at the folder
The underface of tight device, the activity transport device is between clamping device and transmitting device.
10. automatic survey sheet resistance equipment as described in claim 1, it is characterised in that：The discharging area (9) includes transmitting device,
Transmitting device described in two groups is arranged at intervals above and below, and right photoelectric sensor, the right side are installed on the right side of the transmitting device
Photoelectric sensor is electrically connected with the control section.
11. the automatic survey sheet resistance equipment as described in claim 3 or 9, it is characterised in that：The clamping device includes driving and fills
It puts, the driving device is fixedly mounted on the top of the fixed station (2-1), and clamping plate is installed in the driving device
(8-1), for the clamping plate (8-1) positioned at the surface of the transmitting device, the driving device drives clamping plate (8-1) close
Or far from transmitting device.
12. the automatic survey sheet resistance equipment as described in claim 3 or 9, it is characterised in that：The activity transport device includes rack
With belt (8-2), first rotating shaft (8-3) and the second shaft (8-4) are installed in the rack, peace is slided in the rack
Equipped with third shaft (8-5) and the 4th shaft (8-6), the first rotating shaft (8-3) is with the 4th shaft (8-6) positioned at same
It is fixed in the first rotating shaft (8-3), the second shaft (8-4), third shaft (8-5) and the 4th shaft (8-6) on horizontal plane
Belt pulley (8-7) is installed, the belt (8-2) is successively around first rotating shaft (8-3), the second shaft (8-4), third shaft
Belt pulley (8-7) on (8-5) and the 4th shaft (8-6) is installed with promotion cylinder, two promotion cylinders in the rack
External part be fixedly connected respectively with third shaft (8-5) and the 4th shaft (8-6), two it is described push cylinders drive third respectively
Shaft (8-5) and the 4th shaft (8-6) move left and right in rack, and pressure sensor is installed in the rack, described
Pressure sensor is located at the left side of the 4th shaft (8-6), and the pressure sensor is electrically connected with the control section.
13. the automatic survey sheet resistance equipment as described in Claims 2 or 3 or 4 or 6 or 7 or 8 or 9, it is characterised in that：The transmission
Device is belt conveyor (10).
14. the automatic survey sheet resistance equipment as described in claim 3 or 4 or 8 or 9, it is characterised in that：The linkage is screw
Transmission device (11).
15. automatic survey sheet resistance equipment as described in claim 1, it is characterised in that：The control section is programmable logic control
Device processed.
16. automatic survey sheet resistance equipment as claimed in claim 8, feature exist：The fragment area (7) further includes the first accommodating case
(7-2) and the second accommodating case (7-3), first accommodating case (7-2) and the second accommodating case (7-3), the first accommodating case (7-
2) and the second accommodating case (7-3) is respectively positioned at the front and rear sides of transmitting device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721373722.7U CN207517646U (en) | 2017-10-23 | 2017-10-23 | It is automatic to survey sheet resistance equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721373722.7U CN207517646U (en) | 2017-10-23 | 2017-10-23 | It is automatic to survey sheet resistance equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207517646U true CN207517646U (en) | 2018-06-19 |
Family
ID=62536206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721373722.7U Active CN207517646U (en) | 2017-10-23 | 2017-10-23 | It is automatic to survey sheet resistance equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207517646U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107591342A (en) * | 2017-10-23 | 2018-01-16 | 常州亿晶光电科技有限公司 | It is automatic to survey sheet resistance equipment |
-
2017
- 2017-10-23 CN CN201721373722.7U patent/CN207517646U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107591342A (en) * | 2017-10-23 | 2018-01-16 | 常州亿晶光电科技有限公司 | It is automatic to survey sheet resistance equipment |
| WO2019080508A1 (en) * | 2017-10-23 | 2019-05-02 | 常州亿晶光电科技有限公司 | Device for automatically testing sheet resistance |
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