CN207483847U - A kind of compression drying air pressure monitoring device of chemical vapor deposition machine station - Google Patents
A kind of compression drying air pressure monitoring device of chemical vapor deposition machine station Download PDFInfo
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- CN207483847U CN207483847U CN201721516339.2U CN201721516339U CN207483847U CN 207483847 U CN207483847 U CN 207483847U CN 201721516339 U CN201721516339 U CN 201721516339U CN 207483847 U CN207483847 U CN 207483847U
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- baroceptor
- drying air
- vapor deposition
- compression drying
- chemical vapor
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Abstract
The utility model provides a kind of compression drying air pressure monitoring device of chemical vapor deposition machine station, including on chemical vapor deposition machine station, chemical vapor deposition machine station baroceptor one, the compression drying air supply mouth that is connect with one gas pipeline of baroceptor, further include the three-way connection on baroceptor two and the gas pipeline；The three-way connection connection compression drying air supply mouth, baroceptor one, baroceptor two.The utility model is transformed board and installs compression drying air pressure upper limit monitoring device additional in itself, can predict simultaneously clamping compression drying air supply pressure monitor range in advance.
Description
Technical field
The utility model is related to a kind of a kind of compression drying of semiconductor equipment more particularly to chemical vapor deposition machine station skies
Atmospheric pressure monitoring device.
Background technology
Chemical vapor deposition (CVD, Chemical Vapor Deposition) is most widely used in semi-conductor industry
The technology for depositing multiple materials, including large-scale insulating materials, most metals material and metal alloy compositions.Two
Kind or two or more gaseous starting materials are imported into a reative cell, and then they chemically react between each other, are formed
A kind of new material, deposits in wafer surface.The chemical vapor depsotition equipment of existing Vector boards model often occurs
Supply pressure is excessive after pressure regulator valve damage on compression drying air (CDA, Compressed dry air) supply line leads to machine
The compression drying air of upper valve on platform gas piping is leaked so as to influence carcass switch event, due to valve member when serious
Not opening completely causes products thickness abnormal.It is primarily due to have no board import compression drying sky during the manufacture design of Vector boards
Atmospheric pressure upper limit monitoring device, can not effective monitoring work as the excessive situation of compression drying air pressure.And compression drying air simultaneously
It will cause equipment, pneumatic valve member excess load under no monitor state operates in itself when pressure is excessive.
Utility model content
Technical problem to be solved in the utility model is in view of the drawbacks of the prior art, to provide a kind of assembling simply, energy
Directly it is adapted to the compression drying air pressure monitoring device of existing chemical vapor deposition machine station.
The utility model uses following technical scheme to solve above-mentioned technical problem：
A kind of compression drying air pressure monitoring device of chemical vapor deposition machine station, including chemical vapor deposition machine station,
Baroceptor one on chemical vapor deposition machine station, the compression drying air being connect with one gas pipeline of baroceptor
Supply opening further includes the three-way connection on baroceptor two and the gas pipeline；The three-way connection connects compression drying
Air supply mouth, baroceptor one, baroceptor two.
In order to advanced optimize above-mentioned technical proposal, the technical measures that the utility model is taken are：
Preferably, the connector of baroceptor two is connect with 24V power supplys.
Preferably, the equipment interface of the connector of baroceptor two and chemical vapor deposition machine station connects.
Preferably, the connector of the baroceptor two is 5 needle signal wire joints.
Preferably, the equipment interface is 15 needle interfaces.
Preferably, the connector of the baroceptor is 15 adapters.
Preferably, the equipment interface is interlocking connecting pin.
The utility model uses above technical scheme, compared with prior art, has the following technical effect that：
The utility model is transformed board and installs compression drying air pressure upper limit monitoring device additional in itself, can carry
Preceding precognition and clamping compression drying air supply pressure monitor range, to reach technique effect：
By the way that the soft-off of not enabled on board is interlocked (Soft shutdown Interlock) application of function in compression
Interlocking (Interlock) during dry air pressure exception alarms and installs the baroceptor (Pressure of SMC models
Switch) on this circuit to reach effective monitoring equipment compression drying air supply pressure, when compression drying air supply pressure
Board quotes soft-off (Soft Shutdown) alarm when power is exceeded.When soft-off (Soft shutdown) alarm occurs, machine
Platform, which can be given tacit consent to currently to fulfil assignment in the product of board cavity, to be returned to wafer transfer box (FOUP) and stops follow-up product afterwards
Operation.
The pneumatic valve member of board is avoided, which to be used for a long time under high compression dry air pressure, to be caused itself to damage.
It avoids influencing when the supply of board compression drying air pressure is abnormal or certain compression drying air supply unit has leakage
Other especially mainly reflect process gas pipeline correlation carcass switch.
Description of the drawings
Fig. 1 is that a kind of compression drying air monitoring device of preferred embodiment of the utility model reequips module diagram；
Fig. 2 is a kind of circuit connection diagram of the baroceptor two of preferred embodiment of the utility model；
Reference numeral therein is：
1 baroceptor one；2 compression drying air supply mouths；3 baroceptors two；4 three-way connections；5 equipment interfaces.
Specific embodiment
The technical solution of the utility model is described in further detail below in conjunction with the accompanying drawings.
The utility model is suitable for the chemical vapor depsotition equipment of Vector models.
Fig. 1 is that a kind of compression drying air monitoring device of preferred embodiment of the utility model reequips module diagram；
Fig. 2 is a kind of circuit connection diagram of the baroceptor two of preferred embodiment of the utility model.
It should be noted that in the absence of conflict, the feature in embodiment and embodiment in the utility model can
To be combined with each other.
As illustrated in fig. 1 and 2, the compression drying air pressure monitoring device of the chemical vapor deposition machine station of the present embodiment, packet
Include chemical vapor deposition machine station, the baroceptor 1 on chemical vapor deposition machine station and one 1 gas of baroceptor
The compression drying air supply mouth 2 of pipeline connection, further includes the three-way connection 4 on baroceptor 23 and the gas pipeline；
The three-way connection 4 connects compression drying air supply mouth 2, baroceptor 1, baroceptor 23.
Further, in a kind of preferred embodiment, the baroceptor 23 is connect with 24V power supplys.
Further, in a kind of preferred embodiment, the connector and chemical vapor deposition machine station of baroceptor 23
Equipment interface 5 connect.
Further, in a kind of preferred embodiment, the connector of the baroceptor 23 connects for 5 needle signal wires
Head.
Further, in a kind of preferred embodiment, the equipment interface 5 is 15 needle interfaces.
Further, in a kind of preferred embodiment, the connector of the baroceptor 23 is 15 adapters.
Further, in a kind of preferred embodiment, the equipment interface 5 is interlocks connecting pin, i.e. interlock
Connecting pin is alarm linkage functional connector.
The concrete operations flow of above-described embodiment is：
By the soft-off of 5 needles of baroceptor 23 or 15 needles interlocking (Soft shutdown Interlock) connector with
The device junction 5 of (interlock) connecting pin is interlocked, then opens 24V power supplys, baroceptor 23 is made to start to work, it is original
Baroceptor 1 is provided with the warning device of air pressure lower limit, and baroceptor 23 is provided with the warning device of the air pressure upper limit,
It is now connected by the connector of the interlocking connecting pin of alarm linkage function, to realize that detecting board simultaneously atmospherically limits and lower limit
Function, it is preferred that baroceptor 1 and baroceptor 23 access IOC modules, to realize function；By air pressure sensing
The compression drying air supply mouth 2 of device 23 and baroceptor 1 and Vector chemical vapor deposition machine stations (complete machine is not shown)
By in the connection of three-way connection 4.After board is started to work, baroceptor 1 and baroceptor 23 monitor compression drying
The atmospheric pressure value of air, when atmospheric pressure value is too low, the warning device of baroceptor 1 starts to alarm, to show that air pressure is too low；Work as gas
When pressure value is excessively high, the warning device of baroceptor 23 starts to alarm, to show that air pressure is excessively high.In baroceptor 1 or air pressure
After the warning device alarm of sensor 23, board, which can be given tacit consent to currently to fulfil assignment in the product of board cavity, is returned to crystalline substance
Stop follow-up product operation after circle feeder, can adjust the air pressure of the entire instrument of detection at this time.If the normal alarm free of air pressure, board
After the completion of working properly, compression drying air supply mouth and its baroceptor 1 and baroceptor 23 are closed, is completed whole
A operation.
In conclusion the utility model is transformed board in itself installs compression drying air pressure upper limit monitoring dress additional
It puts, simultaneously clamping compression drying air supply pressure monitor range can be predicted in advance.Install the monitoring of compression drying air pressure additional
After device, the pneumatic valve member service life can be increased to 5 years from 1 year, then be calculated with each 300 U.S. dollar of valve member, and independent valve member can save 25
Overhead valve quantity * 4*300*6.3=25*2*4*300*6.3=378000 RMB (RMB) on platform equipment * boards；
The each valve member compression drying air leakage of Vector model devices can also result in 4 sheet articles and scrap, with every sheet articles 1000RMB
It calculates, 4000RMB can be caused to lose；Therefore by installing compression drying air pressure monitoring device additional after, can avoid making as far as possible
Product are scrapped, and are improved 4 years and calculated with the valve member service life, then product loss from spoilage is 25 equipment *, 4 systems caused by valve member damages
4 * of product * are per the sheet articles expense * exchange rate=25*4*4*1000=400000RMB；A set of compression drying air pressure monitoring device
The pressure sensor (Pressure Switch) that expense is electric wire+connector+gas piping=50RMB, a SMC, which is offered, is
417RMB. is with total quotation for 25 equipment * circuits quotation+pressure sensor quotation=25* (50+417)=11675；So mesh
It is preceding to save product failure costs+valve member failure costs * completed percentages-installation cost=378000+400000-11675=altogether
766325RMB。
Specific embodiment of the utility model is described in detail above, but it is only used as example, the utility model
It is not restricted to particular embodiments described above.To those skilled in the art, it is any that the practicality is equal
Modifications and substitutions are also all among the scope of the utility model.Therefore, the institute under the spirit and scope for not departing from the utility model
The impartial conversion of work and modification should all be covered in the scope of the utility model.
Claims (7)
1. a kind of compression drying air pressure monitoring device of chemical vapor deposition machine station including chemical vapor deposition machine station, is changed
The compression drying for learn the baroceptor one (1) on vapor deposition board, connecting with described one (1) gas pipeline of baroceptor
Air supply mouth (2), it is characterised in that：Further include the three-way connection (4) on baroceptor two (3) and the gas pipeline；
Three-way connection (4) the connection compression drying air supply mouth (2), baroceptor one (1), baroceptor two (3).
2. the compression drying air pressure monitoring device of chemical vapor deposition machine station according to claim 1, feature exist
In：The connector of baroceptor two (3) is connect with 24V power supplys.
3. the compression drying air pressure monitoring device of chemical vapor deposition machine station according to claim 1, feature exist
In：The connector of baroceptor two (3) and the equipment interface (5) of chemical vapor deposition machine station connect.
4. the compression drying air pressure monitoring device of chemical vapor deposition machine station according to claim 3, feature exist
In：The connector of the baroceptor two (3) is 5 needle signal wire joints.
5. the compression drying air pressure monitoring device of chemical vapor deposition machine station according to claim 3, feature exist
In：The equipment interface (5) is 15 needle interfaces.
6. the compression drying air pressure monitoring device of chemical vapor deposition machine station according to claim 5, feature exist
In：The connector of the baroceptor two (3) is 15 adapters.
7. the compression drying air pressure monitoring device of chemical vapor deposition machine station according to claim 5, feature exist
In：The equipment interface (5) is interlocking connecting pin.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721516339.2U CN207483847U (en) | 2017-11-14 | 2017-11-14 | A kind of compression drying air pressure monitoring device of chemical vapor deposition machine station |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721516339.2U CN207483847U (en) | 2017-11-14 | 2017-11-14 | A kind of compression drying air pressure monitoring device of chemical vapor deposition machine station |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207483847U true CN207483847U (en) | 2018-06-12 |
Family
ID=62477110
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721516339.2U Active CN207483847U (en) | 2017-11-14 | 2017-11-14 | A kind of compression drying air pressure monitoring device of chemical vapor deposition machine station |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207483847U (en) |
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2017
- 2017-11-14 CN CN201721516339.2U patent/CN207483847U/en active Active
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