CN217360550U - Monitoring tool of glue spreading and developing chemical liquid inlet equipment - Google Patents
Monitoring tool of glue spreading and developing chemical liquid inlet equipment Download PDFInfo
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- CN217360550U CN217360550U CN202221204314.XU CN202221204314U CN217360550U CN 217360550 U CN217360550 U CN 217360550U CN 202221204314 U CN202221204314 U CN 202221204314U CN 217360550 U CN217360550 U CN 217360550U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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Abstract
The utility model provides a monitoring tool of a gluing and developing chemical liquid inlet device, which comprises a monitoring shell and a connecting mechanism arranged on the monitoring shell, wherein a control unit and an inlet monitoring unit, a valve monitoring unit, a liquid monitoring unit and a pressure monitoring unit which are connected with the control unit are arranged in the monitoring shell; the control unit is used for receiving and processing data sent by the inlet monitoring unit, the valve monitoring unit, the liquid monitoring unit and the pressure monitoring unit; the inlet monitoring unit is used for monitoring the opening and closing monitoring states of a gas inlet and a liquid inlet which are arranged on the monitoring shell; the valve monitoring unit is used for monitoring the opening and closing state of a solenoid valve arranged in the monitoring shell; a liquid monitoring unit for monitoring the flow of liquid through the monitoring housing; a pressure monitoring unit for monitoring the pressure of the gas passing through the monitoring housing; the utility model discloses can be convenient monitor rubber coating development equipment unit, reduce the work load of equipment joint debugging, improve the production efficiency of equipment.
Description
Technical Field
The utility model relates to a semiconductor equipment technical field specifically is a monitoring tool of rubber coating development chemicals feed liquor equipment.
Background
In recent years, with the rapid development of economic society, the problem of chip shortage in manufacturing industry is highlighted, and the upgrading speed of semiconductor device technology is accelerated.
In the semiconductor industry, a glue spreading developing machine set is composed of a plurality of system modules, wherein a chemical cabinet liquid inlet system is an important component of glue spreading developing, and related main parts of the current system mainly comprise a tank body, a vacuum generator, an electromagnetic sensor, an electromagnetic valve, a diluent, a pipeline and the like.
After the existing equipment is assembled, whether the liquid inlet system can work normally can be determined only by joint debugging of a gluing developing equipment unit, and whether the quality of the liquid inlet system can meet the technical requirements cannot be determined in advance. Therefore, the workload of the device joint debugging is greatly increased, and the production rate is reduced.
SUMMERY OF THE UTILITY MODEL
To the technical problem, the utility model provides a monitoring tool of rubber coating development chemicals inlet means, can be convenient monitor rubber coating development equipment unit, reduced the work load of equipment joint debugging, improved the production efficiency of equipment.
In order to achieve the above object, the utility model provides a following technical scheme: a monitoring tool of a gluing and developing chemical liquid inlet device comprises a monitoring shell and a connecting mechanism arranged on the monitoring shell, wherein a control unit, an inlet monitoring unit connected with the control unit, a valve monitoring unit, a liquid monitoring unit and a pressure monitoring unit are arranged in the monitoring shell;
the control unit is used for receiving and processing data sent by the inlet monitoring unit, the valve monitoring unit, the liquid monitoring unit and the pressure monitoring unit;
the inlet monitoring unit is used for monitoring the opening and closing monitoring states of a gas inlet and a liquid inlet which are arranged on the monitoring shell;
the valve monitoring unit is used for monitoring the opening and closing state of a solenoid valve arranged in the monitoring shell;
the liquid monitoring unit is used for monitoring the liquid flow passing through the monitoring shell;
and the pressure monitoring unit is used for monitoring the gas pressure in the monitoring shell.
Preferably, the monitoring shell is provided with a connecting device and a monitoring device for conveying liquid and gas, and a storage tank for storing liquid, wherein the storage tank is arranged in the monitoring shell, and the connecting device is used for connecting gas and liquid; the monitoring device is used for monitoring the pressure of the accessed gas and the flow of the accessed liquid.
Preferably, the connecting device comprises a liquid inlet and a gas inlet which are arranged on the monitoring shell; the monitoring device comprises a gas pressure monitoring meter, a liquid flow monitoring meter, a liquid level monitoring circuit and a valve monitoring circuit which are arranged on a monitoring shell, and the liquid flow monitoring meter is connected with the liquid monitoring unit; the gas pressure monitoring meter is connected with the pressure monitoring unit.
Preferably, the liquid access end and the gas access end are both provided with electromagnetic valves, the electromagnetic valves arranged on the liquid access end and the gas access end are respectively connected with a liquid valve switch and a gas valve switch arranged on the monitoring shell, and the liquid valve switch and the gas valve switch are both connected with the inlet monitoring unit.
Preferably, the monitoring shell is further provided with a frequency converter, a power display lamp, a power switch, a liquid discharge end, a gas discharge end and a power supply access end.
The utility model has the advantages that: the gluing and developing equipment unit is connected into the monitoring shell, and the inlet monitoring unit, the invention unit, the liquid monitoring unit and the pressure monitoring unit which are arranged in the monitoring shell are used for monitoring the liquid inlet system of the gluing and developing equipment unit after the liquid inlet system is assembled, so that whether the liquid inlet system can work normally, whether parts are damaged and whether the type of assembly connection is correct can be monitored conveniently, the gluing and developing equipment unit can be monitored conveniently, the workload of equipment combined debugging is reduced, and the production efficiency of equipment is improved.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention, and do not constitute a limitation on the invention, and in the drawings:
fig. 1 is the utility model provides a monitoring tool side view structure schematic diagram of rubber coating development chemicals inlet means.
Fig. 2 is the utility model provides a monitoring tool first state schematic structure of rubber coating development chemicals inlet means.
Fig. 3 is the utility model provides a monitoring tool second state structure schematic diagram of rubber coating development chemicals inlet means.
Fig. 4 is a schematic diagram of the top view structure of the monitoring housing of the present invention.
Fig. 5 is the utility model discloses a simple and easy structure schematic diagram of monitoring tool of rubber coating development chemicals inlet means that proposes.
In the figure: 1. a storage tank; 2. monitoring the housing; 3. a frequency converter; 4. a gas valve switch; 5. a gas pressure monitoring meter; 6. a liquid flow monitoring meter; 7. a liquid valve switch; 8. a power supply display lamp; 9. a power switch; 10. a liquid level monitoring circuit; 11. a valve monitoring circuit; 12. a liquid discharge end; 13. a gas discharge end; 14. a liquid inlet end; 15. a power supply access end; 16. a gas inlet end.
Detailed Description
In order to make the technical means, the creation features, the achievement purposes and the functions of the present invention easy to understand, the present invention will be further explained below with reference to the following embodiments and the accompanying drawings, but the following embodiments are only preferred embodiments of the present invention, and not all embodiments are included. Based on the embodiments in the implementation, other embodiments obtained by those skilled in the art without any creative work belong to the protection scope of the present invention.
Referring to fig. 1-5, a monitoring tool of a liquid inlet device for a glue spreading and developing chemical comprises a monitoring shell 2 and a connecting mechanism arranged on the monitoring shell 2, wherein a control unit, an inlet monitoring unit connected with the control unit, a valve monitoring unit, a liquid monitoring unit and a pressure monitoring unit are arranged in the monitoring shell 2;
the control unit is used for receiving and processing data sent by the inlet monitoring unit, the valve monitoring unit, the liquid monitoring unit and the pressure monitoring unit;
an inlet monitoring unit for monitoring the open/close monitoring state of the gas inlet and the liquid inlet on the monitoring shell 2;
the valve monitoring unit is used for monitoring the opening and closing state of a solenoid valve arranged in the monitoring shell 2;
a liquid monitoring unit for monitoring the liquid flow through the monitoring housing 2;
a pressure monitoring unit for monitoring the pressure of the gas passing through the monitoring casing 2.
As shown in fig. 1-5, the glue spreading developing equipment set is first connected to the monitoring housing 2, and the technical means adopted in the creation of the present invention is circuit integration, and the technical framework of each subunit is controlled by branches, the subunit is connected to the related equipment components, and the required working conditions of the subunit are output, and the working state of the components is judged by monitoring the parameter state change of the components, so that the glue spreading developing equipment set can be conveniently monitored, the workload of the joint debugging of the equipment is reduced, and the production efficiency of the equipment is improved.
Wherein the entry monitoring unit monitors the on-off state of accessing into conveying gas and liquid to be convenient for judge whether gaseous and liquid normally insert monitoring housing 2 in, valve monitoring unit opens the closed condition when being used for monitoring gaseous access and liquid access valve, so that judge whether the valve can normally work, and can verify whether the closed condition is opened to valve monitoring unit monitoring valve through entry monitoring unit.
The monitoring method is simple, convenient and quick to operate. The liquid inlet equipment of the gluing and developing equipment is used for monitoring, so that the input and the output of the equipment can be simultaneously met, the working efficiency can be remarkably improved, and the qualification rate and the reliability of the quality can be ensured.
The monitoring shell 2 is provided with a connecting device and a monitoring device for conveying liquid and gas and a storage tank 1 for storing liquid, which is arranged in the monitoring shell 2, wherein the connecting device is used for connecting gas and liquid; the monitoring device is used for monitoring the pressure of the accessed gas and the flow of the accessed liquid. As shown in fig. 1, in which a storage tank 1 is used to store liquid.
The connection means comprise a liquid inlet 14 and a gas inlet 16 provided on the monitoring housing 2; the monitoring device comprises a gas pressure monitoring meter 5, a liquid flow monitoring meter 6, a liquid level monitoring circuit 10 and a valve monitoring circuit 11 which are arranged on the monitoring shell 2, wherein the liquid flow monitoring meter 6 is connected with a liquid monitoring unit; the gas pressure monitoring meter 5 is connected with the pressure monitoring unit.
Wherein the liquid level monitoring circuit 10 and the valve monitoring circuit 11 are connected to a monitoring device to facilitate visual observation of data to facilitate monitoring of the data of the device.
The liquid inlet 14 and the gas inlet 16 are respectively provided with an electromagnetic valve, the electromagnetic valves arranged on the liquid inlet 14 and the gas inlet 16 are respectively connected with the liquid valve switch 7 and the gas valve switch 4 arranged on the monitoring shell 2, and the liquid valve switch 7 and the gas valve switch 4 are both connected with the inlet monitoring unit. Wherein the control of the introduction of gas and liquid can be facilitated by controlling the solenoid valve.
The monitoring shell 2 is also provided with a frequency converter 3, a power supply display lamp 8, a power supply switch 9, a liquid discharge end 12, a gas discharge end 13 and a power supply access end 15.
As shown in fig. 1-5, the status, the liquid flow rate and the gas pressure of the power supply display lamp 8 are used for displaying the status, so that the status of the main parts of the gumming and developing chemical liquid inlet system can be judged conveniently.
The foregoing shows and describes the general principles, essential features, and advantages of the invention. It should be understood by those skilled in the art that the present invention is not limited by the above embodiments, and the description in the above embodiments and the description is only preferred examples of the present invention, and is not intended to limit the present invention, and that the present invention can have various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications all fall into the scope of the claimed invention. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (5)
1. A monitoring tool of a gluing and developing chemical liquid inlet device comprises a monitoring shell (2) and a connecting mechanism arranged on the monitoring shell (2), and is characterized in that a control unit, an inlet monitoring unit connected with the control unit, a valve monitoring unit, a liquid monitoring unit and a pressure monitoring unit are arranged in the monitoring shell (2);
the control unit is used for receiving and processing data sent by the inlet monitoring unit, the valve monitoring unit, the liquid monitoring unit and the pressure monitoring unit;
the inlet monitoring unit is used for monitoring the opening and closing monitoring states of a gas inlet and a liquid inlet which are arranged on the monitoring shell (2);
the valve monitoring unit is used for monitoring the opening and closing states of the electromagnetic valve arranged in the monitoring shell (2);
the liquid monitoring unit is used for monitoring the liquid flow passing through the monitoring shell (2);
the pressure monitoring unit is used for monitoring the pressure of the gas in the monitoring shell (2).
2. A tool for monitoring the entrance of glue developing chemicals into a device according to claim 1, wherein: the monitoring shell (2) is provided with a connecting device and a monitoring device for conveying liquid and gas and a storage tank (1) which is arranged in the monitoring shell (2) and used for storing liquid, and the connecting device is used for connecting gas and liquid; the monitoring device is used for monitoring the pressure of the accessed gas and the flow of the accessed liquid.
3. A monitoring tool for a paste application and development chemical inlet apparatus according to claim 2, wherein: the connecting device comprises a liquid inlet end (14) and a gas inlet end (16) which are arranged on the monitoring shell (2); the monitoring device comprises a gas pressure monitoring meter (5), a liquid flow monitoring meter (6), a liquid level monitoring line (10) and a valve monitoring line (11) which are arranged on a monitoring shell (2), and the liquid flow monitoring meter (6) is connected with the liquid monitoring unit; the gas pressure monitoring meter (5) is connected with the pressure monitoring unit.
4. A monitoring tool for a paste application and development chemical inlet apparatus according to claim 3, wherein: liquid incoming end (14) with all be provided with the solenoid valve on gas incoming end (16), liquid valve switch (7) and gas valve switch (4) on locating monitoring casing (2) are connected respectively to the solenoid valve that sets up on liquid incoming end (14) and gas incoming end (16), liquid valve switch (7) with entry monitoring unit is all connected in gas valve switch (4).
5. A monitoring tool for a paste application and development chemical inlet apparatus according to claim 1, wherein: the monitoring shell (2) is also provided with a frequency converter (3), a power display lamp (8), a power switch (9), a liquid discharge end (12), a gas discharge end (13) and a power supply access end (15).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221204314.XU CN217360550U (en) | 2022-05-19 | 2022-05-19 | Monitoring tool of glue spreading and developing chemical liquid inlet equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221204314.XU CN217360550U (en) | 2022-05-19 | 2022-05-19 | Monitoring tool of glue spreading and developing chemical liquid inlet equipment |
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| Publication Number | Publication Date |
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| CN217360550U true CN217360550U (en) | 2022-09-02 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202221204314.XU Active CN217360550U (en) | 2022-05-19 | 2022-05-19 | Monitoring tool of glue spreading and developing chemical liquid inlet equipment |
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| CN (1) | CN217360550U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115729058A (en) * | 2022-11-14 | 2023-03-03 | 上海图双精密装备有限公司 | Full-automatic liquid supply system for gluing developing equipment |
-
2022
- 2022-05-19 CN CN202221204314.XU patent/CN217360550U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115729058A (en) * | 2022-11-14 | 2023-03-03 | 上海图双精密装备有限公司 | Full-automatic liquid supply system for gluing developing equipment |
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