CN209111114U - A kind of manipulator basket structure against pressure - Google Patents
A kind of manipulator basket structure against pressure Download PDFInfo
- Publication number
- CN209111114U CN209111114U CN201821856105.7U CN201821856105U CN209111114U CN 209111114 U CN209111114 U CN 209111114U CN 201821856105 U CN201821856105 U CN 201821856105U CN 209111114 U CN209111114 U CN 209111114U
- Authority
- CN
- China
- Prior art keywords
- detection device
- hanging plate
- manipulator
- mechanical arm
- against pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Manipulator (AREA)
Abstract
The utility model discloses a kind of manipulator basket structures against pressure, including the multiple mechanical arms being arranged in mechanical arm lifting mould group, it further include the briquetting fixed by bolt and mechanical arm, the hanging plate that hand basket is used between briquetting and mechanical arm is set, the hanging plate is equipped with strip-shaped hole, the strip-shaped hole that the bolt passes through hanging plate slide up and down hanging plate can along bolt, mutually matched detection device is respectively equipped on the briquetting and hanging plate and by detection device, and detection device and by detection device sealed set, mechanical arm is set to stop working by the PCL controller that the detection range generation on-off signal that detection device leaves detection device is delivered to mechanical arm when hanging plate is moved upwards.The utility model by detection device and detection device sealed set by that will be allowed to be worked normally in the biggish space of smog containing acid-base property, and the sensitivity of magnetic detection switch is good, and error rate is low.
Description
Technical field
The utility model relates to semiconductor field, in particular to a kind of manipulator basket structure against pressure.
Background technique
In the slot type cleaning equipment and black silicon etching device of solar silicon wafers, need to load the load-bearing part such as piece of silicon wafer
Box or the gaily decorated basket etc. successively clean among each technology groove；It is all to be promoted by mechanical arm, carry cleaning silicon in cleaning process
Piece basket, in case of the exception such as unhook, makes silicon wafer basket fail to be suggested come what is realized, will generate silicon wafer basket and laminates, causes workpiece
With the damage of silicon wafer basket.Existing market carrys out the gaily decorated basket in detection mechanical arm generally by ultrasound detection, the method for laser detection
Whether normally lift, but larger due to reacting the smog for being more acutely easy to cause the device space to include acid-base property in slot, holds very much
Perishable detection setting, causes both modes that can not all be competent at and is normally detected under such rugged environment.
Utility model content
The utility model proposes a kind of manipulator basket knot against pressure to solve above-mentioned the technical problems existing in the prior art
Structure.
The technical solution adopted in the utility model is:
A kind of manipulator basket structure against pressure further includes leading to including the multiple mechanical arms being arranged in mechanical arm lifting mould group
The briquetting that bolt and mechanical arm are fixed is crossed, the hanging plate that hand basket is used between briquetting and mechanical arm is set, the hanging plate is equipped with
Strip-shaped hole, the strip-shaped hole that the bolt passes through hanging plate slide up and down hanging plate can along bolt, set respectively on the briquetting and hanging plate
There is mutually matched detection device and by detection device, and detection device and by detection device sealed set, when hanging plate is transported upwards
Machinery is made by the PCL controller that the detection range generation on-off signal that detection device leaves detection device is delivered to mechanical arm when dynamic
Arm stops working.
Totally two, the bolt, and it is longitudinally disposed.
The upper end of hanging plate is arranged in the strip-shaped hole, and the lower end of the hanging plate is equipped with the hook for grabbing silicon wafer basket.
The briquetting is equipped with for install by the mounting hole of detection device, described to pass through sealant sealing by detection device
In mounting hole.
The hanging plate is equipped with the fabrication hole for installation detecting device, and the opening of the fabrication hole, which is equipped with, may pass through
The seal nipple of connecting line.
The detection device be magnetic switch, it is described by detection device be magnet.
The sealant is epoxide-resin glue.
Compared with the prior art, utility model has the advantages that
The utility model by detection device and detection device sealed set by that will be allowed in the smog containing acid-base property
It is worked normally in biggish space, and the detection sensitivity of magnetic detection device is good, error rate is low.
Detailed description of the invention
Fig. 1 is the front view of the utility model normal condition；
Fig. 2 is the partial enlarged view of Fig. 1；
Fig. 3 is the side view of the utility model normal condition hanging plate part；
Fig. 4 is the front view that the utility model presses basket state；
Fig. 5 is the partial enlarged view of Fig. 4；
Fig. 6 is the side view that the utility model presses basket state hanging plate part.
Specific embodiment
With reference to the accompanying drawing and the principles of the present invention and structure are described in detail in embodiment.
As shown in Figures 1 to 6, the utility model proposes a kind of manipulator basket structures against pressure, comprising: multiple mechanical arms 2 and machine
Briquetting 3 that tool arm 2 is bolted, the hanging plate 4 and PCL controller being arranged between mechanical arm 2 and briquetting 3, mechanical arm 2 are set
It sets in mechanical arm lifting mould group 1, mechanical arm goes up and down the laterally setting of mould group 1, and mechanical arm 2 is longitudinally disposed, and the lower end of mechanical arm 2 is set
There is a bolt hole, hanging plate 4 is equipped with strip-shaped hole 41, and strip-shaped hole 41 is Chong Die with the bolt hole of mechanical arm 2 when installation, the spiral shell on briquetting 3
Bolt passes through strip-shaped hole 41 and is fixed in bolt hole, keeps briquetting 3 and mechanical arm 2 fixed, while between briquetting 3 and mechanical arm 2
Hanging plate can be by strip-shaped hole 41 along sliding block on bolt, hanging plate 4 is for extracting and silicon wafer basket, hanging plate 4 are equipped with detection dress
Set 5, detection device 5 is along the top edge sealed set of strip-shaped hole 41, and sealed set has by detection device 6 on briquetting 3, is detected
Device 6 is located at the detection zone of detection device 5, and when pressure basket occurs, hanging plate 4 is moved upwards by jack-up, makes to leave inspection by detection device 6
The detection range for surveying device 5 generates the PCL controller that on-off signal is delivered to manipulator, and control mechanical arm 2 stops working, thus
It prevents from pressing basket.The detection device 5 of the utility model and it is located in connection structure by detection device 6, and sealed set,
It can also be worked normally in the space of the smog containing acid-base property.
In the utility model, totally two, screw, and longitudinally disposed prevent hanging plate 4 from swinging.
In the utility model, the upper end of hanging plate 4 is strip-shaped hole 41, and lower end is equipped with hook 7, hook 7 can grab silicon wafer basket into
Row hand basket and the work for putting basket.
In the utility model, briquetting 3 is equipped with for installing by the mounting hole of detection device 6, is passed through by detection device close
Sealing, which is sealed in, to be prevented from being corroded in mounting hole, and sealant can be epoxide-resin glue, and hanging plate 4 is equipped with for installing detection dress
5 fabrication hole is set, the opening of fabrication hole is equipped with seal nipple, and seal nipple may pass through the connecting line of connecting detection device 5,
Ensure that detection device 5 works normally under acid or alkali environment, wherein detection device 5 is magnetic switch, is magnet by detection device 6.
The above is only the preferred embodiment of the utility model only, is not intended to limit the utility model, all at this
Made any modifications, equivalent replacements, and improvements etc., should be included in the utility model within the spirit and principle of utility model
Protection scope within.
Claims (7)
1. a kind of manipulator basket structure against pressure, special including the multiple mechanical arms (2) being arranged in mechanical arm lifting mould group (1)
Sign is, further includes the briquetting (3) fixed by bolt and mechanical arm (2), and setting is used between briquetting (3) and mechanical arm (2)
In the hanging plate (4) of hand basket, the hanging plate (4) is equipped with strip-shaped hole (41), and the strip-shaped hole (41) that the bolt passes through hanging plate (4) makes
Hanging plate (4) can be slided up and down along bolt, be respectively equipped on the briquetting (3) and hanging plate (4) mutually matched detection device (5) and
By detection device (6), and detection device (5) and by detection device (6) sealed set, it is detected when hanging plate (4) moves upwards
The PCL controller that the detection range generation on-off signal that device (6) leaves detection device (5) is delivered to manipulator stops mechanical arm
Only work.
2. manipulator basket structure against pressure as described in claim 1, which is characterized in that totally two, the bolt, and it is longitudinally disposed.
3. manipulator basket structure against pressure as described in claim 1, which is characterized in that the strip-shaped hole (41) is arranged in hanging plate
(4) upper end, the lower end of the hanging plate (4) are equipped with the hook (7) for grabbing silicon wafer basket.
4. manipulator basket structure against pressure as described in claim 1, which is characterized in that the briquetting (3) is equipped with for installing
It is described to be sealed in mounting hole by detection device (6) by sealant by the mounting hole of detection device (6).
5. manipulator basket structure against pressure as described in claim 1, which is characterized in that the hanging plate (4) is equipped with for installing
The fabrication hole of detection device (5), the opening of the fabrication hole are equipped with the seal nipple that may pass through connecting line.
6. manipulator basket structure against pressure as described in claim 4 or 5, which is characterized in that the detection device (5) is opened for magnetism
Close, it is described by detection device (5) be magnet.
7. manipulator basket structure against pressure as claimed in claim 4, which is characterized in that the sealant is epoxide-resin glue.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821856105.7U CN209111114U (en) | 2018-11-12 | 2018-11-12 | A kind of manipulator basket structure against pressure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201821856105.7U CN209111114U (en) | 2018-11-12 | 2018-11-12 | A kind of manipulator basket structure against pressure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209111114U true CN209111114U (en) | 2019-07-16 |
Family
ID=67204783
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201821856105.7U Active CN209111114U (en) | 2018-11-12 | 2018-11-12 | A kind of manipulator basket structure against pressure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209111114U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117153718A (en) * | 2023-08-11 | 2023-12-01 | 无锡亚电智能装备有限公司 | Flower basket state detection device and method |
-
2018
- 2018-11-12 CN CN201821856105.7U patent/CN209111114U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117153718A (en) * | 2023-08-11 | 2023-12-01 | 无锡亚电智能装备有限公司 | Flower basket state detection device and method |
| CN117153718B (en) * | 2023-08-11 | 2024-01-26 | 无锡亚电智能装备有限公司 | Flower basket state detection device and method |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN202428209U (en) | High-precision blank work piece positioning mechanism | |
| CN202507408U (en) | Intelligent device for automatically adjusting speed of cutting silicon pieces with diamond wire | |
| CN209111114U (en) | A kind of manipulator basket structure against pressure | |
| US9403247B2 (en) | Screw tightening rubbish vacuum | |
| CN109848892B (en) | Clamp unit for clamping thin-wall part and operation method | |
| CN111996529B (en) | Anti-collision device and method for inner hole laser cladding head | |
| CN107271130A (en) | A kind of server mechanical shock test tool | |
| CN103586876B (en) | A kind of robot system and recognition methods thereof with Turnover Box recognition function | |
| CN209167331U (en) | Manipulator and chip test system | |
| CN104475398A (en) | PCB (printed circuit board) cleaning system | |
| CN109015691A (en) | A kind of robot manipulator structure and its implementation method for detecting hand basket, pressing basket | |
| CN105564982B (en) | Grabbing device | |
| CN103295940B (en) | Automatic liquid supplementing system of metal film stripping and cleaning equipment | |
| CN207938581U (en) | A kind of novel groove type etching plant machinery arm hand basket detection device | |
| CN215033727U (en) | Chuck clamp of intelligence clamping | |
| CN103567350A (en) | Method for preventing automatic drilling and riveting machine from no-rivet riveting or crooked rivet riveting | |
| CN205237712U (en) | Split type terminal surface piece automatic checkout device | |
| CN110579301A (en) | Three-dimensional anti-collision sensor and induction processing system | |
| CN212444289U (en) | Numerical control machine tool material loading detects and cleaning device | |
| CN208117856U (en) | A kind of semiconductor mechanical hand end effector of real-time monitoring wafer offset | |
| CN208592866U (en) | A kind of manipulator Hanging Basket detection device | |
| CN215616005U (en) | Welding wire position automatic checkout device | |
| CN202964286U (en) | Automatic tapping missing-proof detection device | |
| CN213918316U (en) | Anti-collision device of manipulator when machine tool generates continuous punching | |
| CN208246369U (en) | precision machining feeding device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |