CN207480616U - It is applicable to the robot clamping jaw of various sizes of wafer carrying basket - Google Patents
It is applicable to the robot clamping jaw of various sizes of wafer carrying basket Download PDFInfo
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- CN207480616U CN207480616U CN201721336574.1U CN201721336574U CN207480616U CN 207480616 U CN207480616 U CN 207480616U CN 201721336574 U CN201721336574 U CN 201721336574U CN 207480616 U CN207480616 U CN 207480616U
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- clamping jaw
- wafer carrying
- various sizes
- clamp arm
- carrying basket
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Abstract
The utility model is a kind of robot clamping jaw for being applicable to various sizes of wafer carrying basket, includes a pedestal and a pair of clamp arm that can be connected to relative swing the pedestal, each clamp arm are respectively arranged at least two hanging rods for going to upper and lower arrangement；The robot clamping jaw of the utility model by can the clamp arm of relative swing adjust the distance between two clamp arm, and various sizes of wafer carrying basket is enable to correspond to and is placed on corresponding hanging rod, to realize that single clamping jaw can hang the effect of the different wafer carrying basket of size, the trouble for replacing robot clamping jaw is eliminated.
Description
Technical field
The utility model is to be applicable to various sizes of wafer about the robot with clamping function, especially one kind
The robot clamping jaw of bearing basket.
Background technology
Due to the evolution of automatic technology, robot has been imported as largely carrying or carry in many high-tech factories
The main means of article, by taking the existing wafer production equipment 50 of Fig. 5 as an example, by one can carry out lifting start driving
Component 51 is arranged in pairs or groups a clamping jaw 52, and a bearing basket 60 of wafer is carried for clamping, due to the bearing basket 60 size for 8 ",
Therefore the single size that the existing clamping jaw 52 only has the corresponding bearing basket 60 is designed, and existing market separately has the size to be
12 " bearing basket design so that the existing clamping jaw 52 can not be grasped in response to the change in size of bearing basket, need to replace
Various sizes of clamping jaw mode either is designed to cope with, can all increase the cost in production, in view of this utility model people, recognizes
Still there is improved necessity for existing robot clamping jaw.
Utility model content
There is various sizes of design to solve existing wafer carrying basket, and clamping jaw used in robot can only be limited to
The crawl of single size a kind of is applicable to various sizes of wafer carrying basket the main purpose of the utility model is that providing
Robot clamping jaw has the hanging rod be capable of the clamp arm of relative swing and arranged above and below, can correspond to the various sizes of crystalline substance of crawl
Circle bearing basket.
The utility model with technological means be to provide and a kind of be applicable to various sizes of wafer carrying basket
Robot clamping jaw, which is characterized in that including：
A pair of of pedestal, each pedestal extend horizontally and are disposed in parallel relation to one another；
A pair of of clamp arm, each clamp arm be connected to each pedestal and can relative swing, and be respectively arranged with and at least two present,
The hanging rod of lower arrangement.
Preferably, the robot clamping jaw for being applicable to various sizes of wafer carrying basket, wherein, each pair of clamp arm
For the mutually symmetrical with U-shaped body of rod.
Preferably, the robot clamping jaw for being applicable to various sizes of wafer carrying basket, wherein, each pair of clamp arm
With each pedestal to be connect by bearing.
Preferably, the robot clamping jaw for being applicable to various sizes of wafer carrying basket, wherein, this is to pedestal
Being connected to one with one end can carry out lifting the drive component of start above and below.
The utility model utilizes the robot clamping jaw for being applicable to various sizes of wafer carrying basket provided, can obtain
The effect of obtaining, which is promoted, to be, the utility model sets more than two by swingable a pair of of clamp arm and in each clamp arm
Hanging rod enables this to the distance between clamp arm relative swing and change, to grasp various sizes of wafer carrying in response to adjustment
Basket allows various sizes of wafer carrying basket that can correspond to the different location above or below being hung on, without in addition replacing or
Various sizes of clamping jaw is designed, and then can achieve the effect that save production cost.
Description of the drawings
Fig. 1 is the front view of the preferred embodiment of the utility model.
Fig. 2 is the partial right side view of the preferred embodiment of the utility model.
Fig. 3 is that the preferred embodiment of the utility model captures the front view of various sizes of wafer carrying basket.
Fig. 4 is that the preferred embodiment of the utility model captures the partial right side view of various sizes of wafer carrying basket.
Fig. 5 captures the 8 " front views of wafer carrying basket for existing robot clamping jaw.
Specific embodiment
Coordinate the preferred embodiment of schema and the utility model below, it is predetermined real to reach that the utility model is expanded on further
The technological means taken with novel purpose.
In order to understand the technical characteristics of the utility model and practical effect in detail, and can come according to the content of specification
Implement, further with preferred embodiment as shown in drawings, be described in detail as after, please refer to Fig. 2 and one kind shown in Fig. 2
The robot clamping jaw of various sizes of wafer carrying basket is applicable to, includes a drive component 10, a pair of of pedestal 20 and a pair
Clamp arm 30.
The drive component 10 includes a body 11, one can be with respect to the connecting rod 12 and one of the body 11 flexible start above and below
The driving unit 13 at 12 top of connecting rod is set to, which can be by motor and belt, cylinder or servo motor etc.
Type of drive start since emphasis is created in the 13 non-this case of driving unit, is not illustrated herein.
This is connected to pedestal 20 driving unit 13 of the drive component 10, and the opposite driving unit 13 is in level
Extend and each pedestal 20 is disposed in parallel relation to one another.
This is connected to clamp arm 30 each pedestal 20 and this pedestal 20 can be swung relatively, and each clamp arm 30 is mutually opposite
The U-shaped body of rod of title, and each pedestal 20 is connected to by bearing respectively at top, each clamp arm 30 be respectively arranged with two present,
Lower arrangement and hanging rod 31 parallel each other, hang for wafer carrying basket.
The embodiment of the utility model as shown in Figures 1 and 2, be used to capturing size for 8 " wafer carrying basket
40A, when the robot clamping jaw of the utility model is captured, this is relatively close to clamp arm 30, make between two clamp arm 30 away from
From being about equal to the outer diameter of wafer carrying basket 40A, and the wafer carrying basket 40A is made to be hung on this respectively with both sides to clamp arm
It, then can be by this to pedestal when this has grabbed clamp arm 30 steady wafer carrying basket 40A on 30 underlying each hanging rods 31
20 actions lifted above and below with the drive component 10, achieve the purpose that be transported or be processed.
As shown in Figures 3 and 4, the robot clamping jaw of the utility model also can be used in one size of crawl for 12 " crystalline substance
Circle bearing basket 40B, when the robot clamping jaw of the utility model is captured, this is relatively distant from clamp arm 30, makes two clamp arm 30
The distance between be about equal to the outer diameter of wafer carrying basket 40B and captured, and distinguished with the both sides of wafer carrying basket 40B
It is hung on each hanging rod 31 being located above to clamp arm 30.
Therefore, two clamp arm 30 of the utility model can swing pedestal 20 with respect to this, by between two clamp arm 30 of change
Distance and be hung on the different location of each clamp arm 30, can be useful in suitable for various sizes of wafer carrying basket to reach,
It does not need in addition replace or design various sizes of clamping jaw so carrying out crawl using the robot clamping jaw of the utility model, just
The various sizes of wafer carrying basket of crawl, the production efficiency at the scene of can improving can be switched fast.
The above is only the preferred embodiment of the utility model, and not the utility model is done in any form
Limitation although the utility model is disclosed above with preferred embodiment, is not limited to the utility model, any to be familiar with
Professional and technical personnel, in the range of technical solutions of the utility model are not departed from, when in the technology using the disclosure above
Hold the equivalent embodiment made a little change or be modified to equivalent variations, as long as being without departing from technical solutions of the utility model
Hold, any simple modification, equivalent change and modification that foundation the technical essence of the utility model makees above example, still
Belong in the range of technical solutions of the utility model.
Claims (4)
1. a kind of robot clamping jaw for being applicable to various sizes of wafer carrying basket, which is characterized in that including：
A pair of of pedestal, each pedestal extend horizontally and are disposed in parallel relation to one another；
A pair of of clamp arm, each clamp arm be connected to each pedestal and can relative swing, and be respectively arranged at least two rows of going to upper and lower
The hanging rod of row.
2. it is applicable to the robot clamping jaw of various sizes of wafer carrying basket as described in claim 1, which is characterized in that each
It is the mutually symmetrical with U-shaped body of rod to clamp arm.
3. it is applicable to the robot clamping jaw of various sizes of wafer carrying basket as claimed in claim 2, which is characterized in that each
To clamp arm with each pedestal to be connect by bearing.
4. it is applicable to the robot clamping jaw of various sizes of wafer carrying basket as claimed any one in claims 1 to 3,
It is characterized in that, this is connected to one to pedestal with one end can carry out lifting the drive component of start above and below.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721336574.1U CN207480616U (en) | 2017-10-17 | 2017-10-17 | It is applicable to the robot clamping jaw of various sizes of wafer carrying basket |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721336574.1U CN207480616U (en) | 2017-10-17 | 2017-10-17 | It is applicable to the robot clamping jaw of various sizes of wafer carrying basket |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207480616U true CN207480616U (en) | 2018-06-12 |
Family
ID=62480542
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721336574.1U Active CN207480616U (en) | 2017-10-17 | 2017-10-17 | It is applicable to the robot clamping jaw of various sizes of wafer carrying basket |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207480616U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107511841A (en) * | 2017-10-17 | 2017-12-26 | 海鑫光电系统科技（上海）有限公司 | It is applicable to the robot clamping jaw of various sizes of wafer carrying basket |
-
2017
- 2017-10-17 CN CN201721336574.1U patent/CN207480616U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107511841A (en) * | 2017-10-17 | 2017-12-26 | 海鑫光电系统科技（上海）有限公司 | It is applicable to the robot clamping jaw of various sizes of wafer carrying basket |
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