CN207462960U - High-effect tail gas treatment device - Google Patents
High-effect tail gas treatment device Download PDFInfo
- Publication number
- CN207462960U CN207462960U CN201721434216.4U CN201721434216U CN207462960U CN 207462960 U CN207462960 U CN 207462960U CN 201721434216 U CN201721434216 U CN 201721434216U CN 207462960 U CN207462960 U CN 207462960U
- Authority
- CN
- China
- Prior art keywords
- exhaust gas
- treatment device
- methane
- gas treatment
- tail gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims abstract description 78
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 claims abstract description 69
- 238000010438 heat treatment Methods 0.000 claims abstract description 39
- 239000001272 nitrous oxide Substances 0.000 claims abstract description 39
- 238000006243 chemical reaction Methods 0.000 claims abstract description 22
- 238000005406 washing Methods 0.000 claims description 39
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 8
- 239000000919 ceramic Substances 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims description 3
- 239000002699 waste material Substances 0.000 claims description 3
- 210000002268 wool Anatomy 0.000 claims description 3
- 239000000203 mixture Substances 0.000 claims description 2
- 239000007789 gas Substances 0.000 description 76
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 239000004615 ingredient Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- -1 Nitrogen ion Chemical class 0.000 description 4
- 239000001569 carbon dioxide Substances 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000006479 redox reaction Methods 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 3
- 230000035807 sensation Effects 0.000 description 3
- 239000002912 waste gas Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- GPRLSGONYQIRFK-UHFFFAOYSA-N hydron Chemical compound [H+] GPRLSGONYQIRFK-UHFFFAOYSA-N 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- 238000005200 wet scrubbing Methods 0.000 description 2
- 229920000742 Cotton Polymers 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005336 cracking Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 239000005431 greenhouse gas Substances 0.000 description 1
- XLYOFNOQVPJJNP-ZSJDYOACSA-N heavy water Substances [2H]O[2H] XLYOFNOQVPJJNP-ZSJDYOACSA-N 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 230000002277 temperature effect Effects 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02C—CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG]
- Y02C20/00—Capture or disposal of greenhouse gases
- Y02C20/10—Capture or disposal of greenhouse gases of nitrous oxide (N2O)
Landscapes
- Treating Waste Gases (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
A kind of high-effect tail gas treatment device, suitable for handling nitrous oxide exhaust gas, and include exhaust gas appendix, methane input pipe and heating part with methane.The exhaust gas appendix is used to convey the nitrous oxide exhaust gas.The methane input pipe is used to provide methane.The heating part includes reacting furnace, the economizer bank through the reaction furnace hearth wall and vertical heating rod that is several interior set on the reacting furnace and surrounding to angular intervals the economizer bank each other.The economizer bank is flowed into after nitrous oxide exhaust gas in the exhaust gas appendix and the methane blended in the methane input pipe to preheat, and is heated subsequently into the reacting furnace by the heating rod, to carry out heat resolve reaction at a predetermined temperature.
Description
Technical field
The utility model is related to a kind of waste gas treatment equipment, more particularly to a kind of high-effect tail gas treatment device.
Background technology
Nitrous oxide (N2O) it is widely used on semi-conductor industry processing procedure, concentration may be up to 99.999%.However,
Nitrous oxide and carbon dioxide (CO2) equally all it is greenhouse gases, and temperature effect effect caused by nitrous oxide institute energy
About 296 times of carbon dioxide.Therefore, the theory based on environmental protection and earth Sustainable Development, it is necessary to try to reduce work
The nitrous oxide concentration discharged in industry manufacturing process.
Refering to the existing waste gas treatment equipments 1 of Fig. 1, the entrance washing connected including one with front end manufacturing equipment (not shown)
The outlet washing that the reaction member 12, one that unit 11, one is connected with the entrance washing unit 11 is connected with the reaction member 12 is single
Member 13 and one is used for the sink 14 of access washes.
The entrance washing unit 11 introduces external source, using the mode of direct spray water, exhaust gas is made to be carried out with water preliminary
Reaction, with the ingredient that removes water-soluble in exhaust gas or can be reacted with water.Then, the waste water generated after washing is directed to this
In sink 14.
The reaction member 12 is used to carry out heat resolve reaction to exhaust gas, and enabling to be heated in exhaust gas generates the ingredient of crystallization
It is precipitated.And the crystal salt that fractions generate after being precipitated directly can physically be struck off, and be additionally carried out targetedly handling.
The outlet washing unit 13 equally introduces external source and the exhaust gas after heat resolve reacts is washed again,
To remove ingredient that is water-soluble in removing exhaust gas or being reacted with water again.Waste water after scrubbing exhaust gas is equally directed to the water
Slot 14, and can be discharged after particular procedure.It is then by fan as the exhaust gas after being washed with the outlet washing unit 13
15 provide power and be discharged outside to.
However, as environmental consciousness comes back, exhaust gas can discharge standard also increasingly improve, thus merely to nitrous oxide
Exhaust gas is washed and heat resolve reaction, can not gradually meet discharge standard.Therefore, such as Fig. 2 TaiWan, Chinas M528512
Shown in number new patent case, a kind of gas treatment equipment 9100 with methane processing nitrous oxide exhaust gas is disclosed, includes one
Pipe-line cell 91, a reaction chamber seat 92 and a heating unit 93.The pipe-line cell 91 includes a methane delivery pipe 911, an air
Delivery pipe 912, one can connect methane conveying for the process gas delivery pipe 913 and one end 9141 that nitrous oxide is passed through
Pipe 911, the air delivery pipe 912 and the collecting pipe 914 of the process gas delivery pipe 913.The collecting pipe 914 defines a premix
Collaborate road 9140.The reaction chamber seat 92 connects the other end 9142 of the collecting pipe 914, and defines a reaction compartment including one
The air inlet 922 and one that 9210 cavity wall 921, one runs through the cavity wall 921 and is connected with the premixing runner 9140 runs through should
The exhaust outlet 923 of cavity wall 921.The heating unit 93 is adjacent to the reaction chamber seat 92 and can be used to heat the reaction compartment 9210, makes
9210 temperature of reaction compartment is not less than 600 degree Celsius.However, shown in above-mentioned TaiWan, China M528512 new patent cases
Gas treatment equipment 9100 reaction efficiency it is not high, thus can not effectively reduce nitrous oxide emission concentration.Therefore, having must
Seek solution.
Utility model content
The purpose of this utility model is to provide a kind of high-effect tail gas treatment devices.
The high-effect tail gas treatment device of the utility model, suitable for methane handle nitrous oxide exhaust gas, and comprising with
Exhaust gas appendix in conveying nitrous oxide exhaust gas, for providing the methane input pipe of methane and heating part, the heating
Portion include reacting furnace, through it is described reaction furnace hearth wall economizer bank and it is several be set on the reacting furnace in and angle is alternate each other
It is inputted every nitrous oxide exhaust gas of the ground in the vertical heating rod of the economizer bank, the exhaust gas appendix with the methane
Economizer bank preheating is flowed into after methane blended in pipe, is heated subsequently into the reacting furnace by the heating rod, with
Heat resolve reaction is carried out under predetermined temperature.
The high-effect tail gas treatment device of the utility model, the predetermined temperature are more than 850 DEG C~950 DEG C.
The high-effect tail gas treatment device of the utility model, the quantity of the heating rod is the six roots of sensation.
The high-effect tail gas treatment device of the utility model, the heating part further include the surrounding wall for being coated on the reacting furnace
The insulating unit of outer surface.
The high-effect tail gas treatment device of the utility model, the insulating unit have the air layer arranged from inside to outside, pottery
Porcelain cotton layer and aqueous layer.
The high-effect tail gas treatment device of the utility model is also included between front end manufacturing equipment and the exhaust gas appendix
Inlet portion and leading portion washing portion, the nitrous oxide exhaust gas from the front end manufacturing equipment entered by the inlet portion,
It flow to the leading portion washing portion washing again, then flows into the exhaust gas appendix.
The high-effect tail gas treatment device of the utility model, also comprising the back segment washing being set at the heating part downstream
Portion is used for the product after reacting heat resolve and is washed and it is made to reduce temperature.
The high-effect tail gas treatment device of the utility model, also comprising be set to the heating part, the leading portion washing portion and
Sink below the back segment washing portion is used for leading portion washing portion described in access and the back segment washing portion and is washed when institute
The waste liquid of generation.
The high-effect tail gas treatment device of the utility model, also comprising the exhaust being set at back segment washing subordinate's trip
Portion is used to that the gas after the back segment washing portion is water washed to be made to mix with outside air, various in the gas to reduce
The concentration of ingredient.
The beneficial effects of the utility model are：By several heating rods for being set in reacting furnace to being carried out in reacting furnace
Heating so that generate high temperature, and make nitrous oxide exhaust gas and methane gas that can similarly hereinafter walk progress in very high temperature environment
Thermal decomposition and redox reaction, thus the concentration of nitrous oxide exhaust gas can be reduced high-effectly.
Description of the drawings
Fig. 1 is a layout of equipment, illustrates an existing waste gas treatment equipment；
Fig. 2 is a layout of equipment, illustrates TaiWan, China M528512 new patent cases；
Fig. 3 is a schematic diagram, illustrates the flowing side of gas in the embodiment of the high-effect tail gas treatment device of the utility model
To；
Fig. 4 is a layout of equipment, illustrates the embodiment；
Fig. 5 is a stereogram, illustrates the heating part of the high-effect tail gas treatment device of this in the embodiment；And
Fig. 6 is a sectional view, illustrates the heating part.
Specific embodiment
The utility model is described in detail with reference to the accompanying drawings and embodiments.
Refering to Fig. 3, the high-effect tail gas treatment device of the utility model includes 2, one, a leading portion washing portion before this
Back segment washing portion 4 and one of the heating part 3, one at 3 downstream of heating part at 2 downstream of Duan Shuixi portions is located at should
The sink 82 in leading portion washing portion 2, the heating part 3 and 4 lower section of back segment washing portion, and apply to handle before this with methane
The nitrous oxide exhaust gas (as shown in the arrow for representing gas flow direction) in Duan Shuixi portions 2.
Refering to Fig. 4, the embodiment of the high-effect tail gas treatment device of the utility model includes an inlet portion 7, the leading portion water
Wash 2, one, portion, 5, methane input pipes 6 of exhaust gas appendix, the heating part 3,4, one, back segment washing portion exhaust portion 81 and
The sink 82.
The air inlet of the inlet portion 7 is connected to a front end manufacturing equipment (not shown), and for making from the front end system
The nitrous oxide exhaust gas of manufacturing apparatus enters the high-effect tail gas treatment device of the utility model.
The air inlet in the leading portion washing portion 2 is connected with the gas outlet of the inlet portion 7, and is the side using wet scrubbing
Formula washes off the ingredients such as dust, the water-soluble gas in the nitrous oxide exhaust gas with clear water.
Then, the nitrous oxide exhaust gas after primary wash leaves the leading portion washing portion 2 and enters the exhaust gas gas transmission
Pipe 5.At this point, methane gas is entered by the methane input pipe 6 and is mixed with the nitrous oxide exhaust gas in the exhaust gas appendix 5
Afterwards, the heating part 3 is flowed into.
Refering to Fig. 4,5,6, which includes a reacting furnace 31, one through the pre- of the bottom wall 311 of the reacting furnace 31
Heat pipe 32, several in the reacting furnace 31 and each other angular intervals around the economizer bank 32 vertical heating rod 33 and
One insulating unit 34.
Being flowed into after nitrous oxide exhaust gas in the exhaust gas appendix 5 and the methane blended in the methane input pipe 6 should add
The economizer bank 32 in hot portion 3 preheats, subsequently into being heated by the heating rod 33 in the reacting furnace 31, under a predetermined temperature into
Row heat resolve reacts, to destroy or aoxidize the nitrous oxide exhaust gas.In the present embodiment, which is more than 850 DEG C
~950 DEG C, and the quantity of the heating rod can be the six roots of sensation, but the utility model is without being limited thereto.
The insulating unit 34 is coated on 312 outer surface of surrounding wall of the reacting furnace 31, and is with collet (Insulation
Jacket) form provides heat insulation and preservation effect.In the present embodiment, which can with one arranged from inside to outside
Protect 341, ceramic wool (Ceramic Wool) layers 342 of air layer and an aqueous layer 343 of the reacting furnace 31.
Since the autoignition temperature of methane gas is about 550 DEG C, so flowing into methane gas meeting and the air of the reacting furnace 31
It carries out combustion reaction and persistently generating thermal energy increases the constant temperature in the reacting furnace 31, thus contributes in reacting furnace 31
Temperature reaches the cracking temperature of nitrous oxide exhaust gas in itself.Then, as the nitrous oxide gas of oxidant and conduct
The methane gas of reducing agent carries out redox reaction, and reaction equation is as follows：
4N2O+CH4→CO2+2H2O+4N2。
The present embodiment be mainly by the six roots of sensation heating rod 33 that is set in reacting furnace 31 to being heated in reacting furnace 31,
So that generating the predetermined temperature (being more than 850 DEG C~950 DEG C) of extreme temperatures, and make the nitrous oxide exhaust gas and methane gas
It synchronizes and is thermally decomposed and redox reaction, Nitrogen ion, oxonium ion are resolved into break molecular link under very high temperature environment,
And hydrogen ion.Since the bond strength between various ionic bonds is different, for example, the associativity between oxonium ion and hydrogen ion be better than oxygen from
Associativity between son and Nitrogen ion so molecule can be recombinated subsequently after cooling, with high-effect reduces an oxidation two
The concentration of nitrogen exhaust gas.
The back segment washing portion 4 is set at 3 downstream of heating part, and the product for after reacting heat resolve carries out again
It is primary to wash and it is made to reduce temperature.
The exhaust portion 81 is set at 4 downstream of back segment washing portion, and for making after the back segment washing portion 4 is water washed
Gas is mixed with outside air, to reduce the concentration of various composition in the gas.
The sink 82 is set to the heating part 3, the leading portion washing portion 2 and 4 lower section of back segment washing portion, and for access
The leading portion washing portion 2 and the back segment washing portion 4 carry out generated waste liquid after wet scrubbing.
In the present embodiment, after tail gas treatment device high-effect to the utility model carries out reaction efficiency test, test
As a result it is：When the flow of nitrous oxide is 5LPM (public liter/min) and the flow of methane is 4LPM, removal efficiency is destroyed
(Destruction Removal Efficiency, DRE) is 91%；And when the flow of nitrous oxide is 16LPM and methane
Flow be 3LPM when, DRE 92%.If that is, by the usage amount control of nitrous oxide in the utility model embodiment
System can obtain optimization process efficiency in 3~4LPM.In addition, with aforementioned TaiWan, China M528512 new patent bulletin cases
Under comparing, if the utility model is identical with the methane content that the existing new patent bulletin case uses, the utility model can be handled
The amount of nitrous oxide be four times of the new patent bulletin case, so the utility model is obviously imitated with higher reaction
Rate, thus can relatively efficiently reduce nitrous oxide emission concentration.
In conclusion the utility model is carried out by the way that the several heating rods 33 being set in reacting furnace 31 are interior to reacting furnace 31
Heating so that generate high temperature (being more than 850 DEG C~950 DEG C), and make nitrous oxide exhaust gas can be in pole with methane gas
Hot environment, which similarly hereinafter walks, to be thermally decomposed and redox reaction, thus can reduce the dense of nitrous oxide exhaust gas high-effectly
Degree, so, the purpose of this utility model can be reached really.
Claims (9)
1. a kind of high-effect tail gas treatment device, suitable for handling nitrous oxide exhaust gas, and comprising for conveying one with methane
The exhaust gas appendix of nitrous oxide exhaust gas, for providing the methane input pipe of methane and heating part, which is characterized in that it is described
Heating part include reacting furnace, through the reaction furnace hearth wall economizer bank and several be set in the reacting furnace and angle each other
Nitrous oxide exhaust gas in the vertical heating rod of the economizer bank, the exhaust gas appendix and the methane at intervals
The economizer bank preheating is flowed into after methane blended in input pipe, is heated subsequently into the reacting furnace by the heating rod,
To carry out heat resolve reaction at a predetermined temperature.
2. high-effect tail gas treatment device according to claim 1, it is characterised in that：The predetermined temperature is more than 850 DEG C
~950 DEG C.
3. high-effect tail gas treatment device according to claim 1, it is characterised in that：The quantity of the heating rod is six
Root.
4. high-effect tail gas treatment device according to claim 1, it is characterised in that：The heating part, which further includes, to be coated on
The insulating unit of the surrounding wall outer surface of the reacting furnace.
5. high-effect tail gas treatment device according to claim 4, it is characterised in that：The insulating unit has by introversion
Air layer, ceramic wool layer and the aqueous layer of outer arrangement.
6. high-effect tail gas treatment device according to claim 1, it is characterised in that：Also include between front end manufacturing equipment
And the inlet portion between the exhaust gas appendix and leading portion washing portion, the nitrous oxide exhaust gas from the front end manufacturing equipment
Entered by the inlet portion, then flow to the leading portion washing portion washing, then flowed into the exhaust gas appendix.
7. high-effect tail gas treatment device according to claim 6, it is characterised in that：It also includes and is set to the heating part
Back segment washing portion at downstream is used for the product after reacting heat resolve and is washed and it is made to reduce temperature.
8. high-effect tail gas treatment device according to claim 7, it is characterised in that：It also includes and is set to the heating
Sink below portion, the leading portion washing portion and the back segment washing portion, be used for leading portion washing portion described in access and it is described after
Duan Shuixi portions generated waste liquid when being washed.
9. high-effect tail gas treatment device according to claim 7, it is characterised in that：It also includes and is set to the back segment water
The exhaust portion at subordinate's trip is washed, is used to that the gas after the back segment washing portion is water washed to be made to mix with outside air, with drop
The concentration of various composition in the low gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721434216.4U CN207462960U (en) | 2017-10-31 | 2017-10-31 | High-effect tail gas treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721434216.4U CN207462960U (en) | 2017-10-31 | 2017-10-31 | High-effect tail gas treatment device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207462960U true CN207462960U (en) | 2018-06-08 |
Family
ID=62265991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721434216.4U Expired - Fee Related CN207462960U (en) | 2017-10-31 | 2017-10-31 | High-effect tail gas treatment device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207462960U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109718649A (en) * | 2017-10-31 | 2019-05-07 | 汉科系统科技股份有限公司 | High-effect tail gas treatment device |
-
2017
- 2017-10-31 CN CN201721434216.4U patent/CN207462960U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109718649A (en) * | 2017-10-31 | 2019-05-07 | 汉科系统科技股份有限公司 | High-effect tail gas treatment device |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180608 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |