CN207396364U - Endoporus detection optical system and endoporus detection device - Google Patents
Endoporus detection optical system and endoporus detection device Download PDFInfo
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- CN207396364U CN207396364U CN201721199305.5U CN201721199305U CN207396364U CN 207396364 U CN207396364 U CN 207396364U CN 201721199305 U CN201721199305 U CN 201721199305U CN 207396364 U CN207396364 U CN 207396364U
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Abstract
The utility model discloses a kind of endoporus detection optical system and endoporus detection device, wherein, endoporus detection optical system is used to detect workpiece, including image formation prism, spectroscope, photosensitive imaging element and light source, wherein, image formation prism, spectroscope, photosensitive imaging element is arranged at intervals successively, image formation prism closes on workpiece setting, the emergent light that light source is sent is through dichroic mirror to image formation prism, workpiece is exposed to via image formation prism, workpiece reflected image information is via image formation prism, it is imaged after through spectroscope in photosensitive imaging element, the image that technical solutions of the utility model make testing staff be formed according to photo-sensitive cell can be visually observed that the inner structural features of endoporus, simplify the process of endoporus detection, testing staff is facilitated to operate, it is effective to improve detection efficiency.
Description
Technical field
The utility model is related to optical detection apparatus technical field, more particularly to a kind of endoporus detection optical system and endoporus
Detection device.
Background technology
With the high speed development of modern industry, technique ensures and common qualitative judgement can not meet product quality requirement,
Therefore to the detection of parts endoporus in communications and transportation, aerospace, machine-building, mining machinery, physics and chemistry biology and national defence etc.
Application in field is more and more extensive.
In the prior art, judge that screw thread is when with the presence or absence of defect in the endoporus of workpiece with optical detection apparatus, use
Person needs multi-angle, the multi-faceted different position progress image acquisition to endoporus that could completely confirm, so operates very
Cumbersome and inconvenient and inefficiency.
Utility model content
The main purpose of the utility model is to provide a kind of endoporus detection optical system, it is intended to simplify inner hole of workpiece detection
Process facilitates testing staff to operate, and improves detection efficiency.
To achieve the above object, it is described interior for detecting workpiece the utility model proposes a kind of endoporus detection optical system
Hole detection optical system includes image formation prism (100), spectroscope (200), photosensitive imaging element (400) and light source (500)；
The image formation prism (100), spectroscope (200), photosensitive imaging element (400) are arranged at intervals successively, the imaging
Prism (100) closes on the workpiece setting；
The emergent light that the light source (500) sends reflexes to the image formation prism (100) through the spectroscope (200), warp
Workpiece is exposed to by the image formation prism (100), the workpiece reflected image information via the image formation prism (100), pass through
The imaging in the photosensitive imaging element (400) after the spectroscope (200).
Preferably, focus lamp (600) is additionally provided between the image formation prism (100) and the spectroscope (200), it is described
The position to be detected of workpiece described in focus lamp (600) face is set.
Preferably, it is additionally provided with zoom lens group between the spectroscope (200) and the photosensitive imaging element (400)
(300), photosensitive imaging element (400) described in zoom lens group (300) face.
Preferably, the zoom lens group (300) includes the second convex lens (310) and the 3rd convex lens (320), and described the
Two convex lenses (310) close on the spectroscope (200), the 3rd convex lens (320) be located at second convex lens (310) with
Between the photosensitive imaging element (400), second convex lens (310) and the confocal setting of the 3rd convex lens (320), institute
The focal length for stating the second convex lens (310) and the 3rd convex lens (320) is unequal.
Preferably, the image formation prism (100) includes the plane of incidence (110) and exit facet (120), the plane of incidence (110)
It is set towards the spectroscope (200), the exit facet (120) is towards the workpiece setting, the plane of incidence (110) and described
Exit facet (120) is sent perpendicular to the light source (500) and the light through the spectroscope (200) reflection is set.
Preferably, the prism (100) further includes first side 130 and second side (140), the first side
(130) it is connected with the plane of incidence (110), the second side (140) connects the first side (130) and the exit facet
(120), the area of the plane of incidence (110) is more than the area of the exit facet (120), and the second side (140) tilts and sets
It puts.
Preferably, the image formation prism (100), which is run through, is equipped with optical channel (170), and the optical channel (170) is close to described point
One end of light microscopic (200) is equipped with entrance port (150), is equipped with exit portal (160), the light source close to one end of the workpiece
(500) send and the light through the spectroscope (200) reflection is sequentially through the entrance port (150), the optical channel (170)
The position to be measured of the workpiece is irradiated to the exit portal (160).
Preferably, the image formation prism (100) includes the first inner surface (171) and the second inner surface (172), the light lead to
Road (170) is enclosed by first inner surface (171) and second inner surface (172), first inner surface (171)
The entrance port (150) and second inner surface (172) are connected, second inner surface (172) connects table in described first
Face (171) and the exit portal (160), second inner surface (172) are obliquely installed.
Preferably, the light source (500) includes the first convex lens (510) and point light source (520), first convex lens
(510) it is arranged between the point light source (520) and the spectroscope (200), the light that the point light source (520) sends is via described
After first convex lens (510) converges to the spectroscope (200), the workpiece is reflexed to via the image formation prism (100).
The utility model also proposes a kind of endoporus detection device, including endoporus detection optical system, the endoporus detection light
System, for detecting workpiece, the endoporus detection optical system include image formation prism (100), spectroscope (200), it is photosensitive into
Element (400) and light source (500)；
The image formation prism (100), spectroscope (200), photosensitive imaging element (400) are arranged at intervals successively, the imaging
Prism (100) closes on the workpiece setting；
The emergent light that the light source (500) sends reflexes to the image formation prism (100) through the spectroscope (200), warp
Workpiece is exposed to by the image formation prism (100), the workpiece reflected image information via the image formation prism (100), pass through
The imaging in the photosensitive imaging element (400) after the spectroscope (200).
Technical solutions of the utility model by the endoporus detection optical system for detecting workpiece be equipped with image formation prism,
Spectroscope, photosensitive imaging element and light source, wherein, image formation prism, spectroscope, photosensitive imaging element are arranged at intervals successively, imaging
Prism closes on workpiece setting, and the emergent light that light source is sent exposes to work through dichroic mirror to image formation prism via image formation prism
Part, workpiece reflected image information via image formation prism, through being imaged in photosensitive imaging element after spectroscope, it is so i.e. available
The figure of workpiece, and then it can be seen that the structure feature of the workpiece, judges whether the workpiece is qualified products.For example, detection workpiece
Endoporus when whether being qualified products, by the image formation prism of above-mentioned detection optical system close to the endoporus of workpiece, according to photosensitive member
The image that part is formed can be visually observed that the inner structural features of endoporus, it be judged with the presence or absence of defect etc., by upper
The mode of stating simplifies the process of endoporus detection, and testing staff is facilitated to operate, effectively improves detection efficiency.
Description of the drawings
It in order to illustrate the embodiment of the utility model or the technical proposal in the existing technology more clearly, below will be to embodiment
Or attached drawing needed to be used in the description of the prior art is briefly described, it should be apparent that, the accompanying drawings in the following description is only
It is some embodiments of the utility model, for those of ordinary skill in the art, in the premise not made the creative labor
Under, other attached drawings can also be obtained according to the structure shown in these attached drawings.
Fig. 1 is the utility model embodiment endoporus detection optical system structure and mirroring scheme light path schematic diagram；
Fig. 2 is the utility model embodiment endoporus detection optical system structure and refractive solutions light path schematic diagram；
Fig. 3 illustrates for the utility model embodiment endoporus detection optical system structure and image formation prism inner surface reflected light path
Figure.
Drawing reference numeral explanation：
| Label | Title | Label | Title |
| 1 | Endoporus detection optical system | 610 | Focus portion |
| 100 | Image formation prism | 620 | Tablet transmissive portions |
| 200 | Spectroscope | 621 | Plane |
| 300 | Zoom lens group | 110 | The plane of incidence |
| 400 | Photosensitive imaging element | 120 | Exit facet |
| 500 | Light source | 130 | First side |
| 600 | Focus lamp | 140 | Second side |
| 510 | First convex lens | 310 | Second convex lens |
| 520 | Point light source | 320 | 3rd convex lens |
| 150 | Entrance port | 170 | Optical channel |
| 160 | Exit portal | 171 | First inner surface |
| 172 | Second inner surface |
Specific embodiment
The following is a combination of the drawings in the embodiments of the present utility model, and the technical scheme in the embodiment of the utility model is carried out
It clearly and completely describes, it is clear that described embodiment is only the part of the embodiment rather than whole of the utility model
Embodiment.Based on the embodiment in the utility model, those of ordinary skill in the art are not making creative work premise
Lower all other embodiments obtained, shall fall within the protection scope of the present invention.
It is to be appreciated that the directional instruction (such as up, down, left, right, before and after ...) of institute in the utility model embodiment
It is only used for explaining relative position relation, motion conditions under a certain particular pose (as shown in drawings) between each component etc., such as
When the fruit particular pose changes, then directionality instruction also correspondingly changes correspondingly.
In addition, the description in " first ", " second " etc. involved in the utility model is only used for description purpose, without being understood that
To indicate or implying its relative importance or the implicit quantity for indicating indicated technical characteristic.Define as a result, " first ",
At least one this feature can be expressed or be implicitly included to the feature of " second ".In addition, the technical side between each embodiment
Case can be combined with each other, but must can be implemented as basis with those of ordinary skill in the art, when the combination of technical solution
Conflicting or can not realize when occur will be understood that the combination of this technical solution is not present, also not in the requires of the utility model
Protection domain within.
The utility model proposes a kind of endoporus detection optical systems 1.
In the utility model embodiment, which can be used for detecting workpiece, particularly include key
The workpiece of the endoporus such as slot, irregularly-shaped inner hole, threaded hole, stepped hole.
As depicted in figs. 1 and 2, endoporus detection optical system 1 mainly include image formation prism 100, spectroscope 200, it is photosensitive into
Element 400 and light source 500.Wherein, image formation prism 100, spectroscope 200, photosensitive imaging element 400 are arranged at intervals successively, into
It is set as prism 100 closes on measured workpiece.Light source 500 is located at the same side of spectroscope 200, photosensitive imaging with image formation prism 100
Element 400 is arranged at the one side different with image formation prism 100, and the emergent light that light source 500 is sent reflexes to imaging through spectroscope 200
Prism 100 exposes to workpiece via image formation prism 100, workpiece reflected image information via image formation prism 100, through spectroscope
It is imaged after 200 in photosensitive imaging element 400.Testing staff can be needed according to detection from above-mentioned image acquisition to position to be detected
The characteristic informations such as shape, the structure of (such as endoporus), to realize the detection to workpiece.
Technical solutions of the utility model in the endoporus detection optical system 1 for detecting workpiece by being equipped with image formation prism
100th, spectroscope 200, photosensitive imaging element 400 and light source 500, wherein, image formation prism 100, spectroscope 200, photosensitive imaging member
Part 400 is arranged at intervals successively, and image formation prism 100 closes on workpiece setting, and the emergent light that light source 500 is sent is reflected through spectroscope 200
To image formation prism 100, workpiece is exposed to via image formation prism 100, workpiece reflected image information via image formation prism 100, pass through
It is imaged after spectroscope 200 in photosensitive imaging element 400, testing staff is by the image formation prism of above-mentioned endoporus detection optical system 1
100 close to workpiece endoporus, the image formed according to photosensitive imaging element 400 can be visually observed that the internal structure of endoporus
Feature judges that it, with the presence or absence of defect etc., simplifies the process of endoporus detection, testing staff is facilitated to grasp through the above way
Make, effectively improve detection efficiency.
Further, in order to realize the detection to hole size, it is additionally provided between image formation prism 100 and spectroscope 200
Focus lamp 600, the position to be detected of 600 face workpiece of focus lamp are set.The emergent light that focus lamp 600 is arranged on light source 500 is dividing
On the reflected light path formed on light microscopic, by the light that spectroscope 200 reflects after focus lamp 600 gathers, by being imaged rib
Mirror 100 from front illuminated to endoporus on, exist respectively via image formation prism 100, focus lamp 600 again from the light of endoporus head-on reflection
It reflects on spectroscope 200, is imaged after refraction in photosensitive imaging element 400, endoporus front shape is included in the image of formation
Information by the measurement to endoporus front shape size in image, then is calculated by certain multiple proportion and can obtain
The size of endoporus reality.Wherein, the optical characteristics of above-mentioned multiple proportion and each optical element in endoporus detection optical system 1
Related with relative position relation etc., specific multiple proportion need to be obtained by the modes such as measuring or calculating.It should be noted that it is
The detection of the features such as inner hole of workpiece interior shape, structure and the measurement of hole size, the projected area of focus lamp 600 are realized simultaneously
It should be less than light and incide into area coverage on image formation prism 100.
For hole size measurement more accurate, when actually detected, the distance of 600 opposite piece of focus lamp is adjusted
To adjust the position for assembling light focus, hole size is measured to obtain relatively sharp image.
Specifically, focus lamp 600 includes focus portion 610 and the tablet transmissive portions 620 arranged on 610 periphery of focus portion,
The position to be detected of workpiece described in 610 face of focus portion is set.Focus portion 610 can collect survey of the caustic to hole size
Amount.Tablet transmissive portions 620 can be used for the installation of focus lamp 600 in actual product application, and specific tablet transmissive portions 620 can be excellent
Choosing includes two spaced planes 621, and two planes 621 are set perpendicular to light, and light passes through light after tablet transmissive portions 620
The direction on road will not change, and be on the one hand conducive to simplify shape, the structure of image formation prism 100, be on the other hand conducive to subtract
The loss of few light.Wherein, the area occupied to meet focus portion 610 simultaneously is no more than the 1/3 of 600 gross area of focus lamp.
Further, in order to adapt to the actual size of different workpieces endoporus, detection operating distance or detection demand, to obtain
Clearer image is additionally provided with zoom lens group 300, zoom lens group between spectroscope 200 and photosensitive imaging element 400
300 face photosensitive imaging elements 400.
The light of image information comprising inner hole of workpiece is irradiated to zoom lens group 300, zoom lens group from spectroscope 200
300 one side zoom in or out the light range of the image information comprising inner hole of workpiece, are equivalent to and zoom in or out
The image information of inner hole of workpiece, image information carries out imaging again after zooming in or out can make testing staff according to the different need of detection
It wants or various sizes of inner hole of workpiece gets accurate endoporus characteristic information.On the other hand it may filter that the light comprising image information
It is clearer to obtain in photosensitive imaging element 400 to ensure that light is irradiated in the form of directional light for unnecessary light in line
Image.Zoom lens group 300 can be multiple lens combinations, can also be by the combination of lens and other optical devices, and only needing can be real
The now scaling to image information and filtering.
Specifically, zoom lens group 300 includes the second convex lens 310 and the 3rd convex lens 320, and the second convex lens 310 faces
Nearly spectroscope 200, the 3rd convex lens 320 is between the second convex lens 310 and photosensitive imaging element 400, the second convex lens 310
With the 320 confocal setting of the 3rd convex lens, the focal length of the focal length of the 3rd convex lens 320 and the second convex lens 310 is unequal.The 3rd
The focal length of convex lens 320 be more than the second convex lens 310 focal length when, zoom lens group 300 can enlarged drawing information, it is convex the 3rd
When the focal length of lens 320 is less than the focal length of the second convex lens 310, zoom lens group 300 can downscaled images information.It is convex by second
The lens group that the combination of 310 and the 3rd convex lens 320 of lens is formed, can be realized by simple structure to the amplification of image information or
It reduces, clearer image is obtained in photosensitive imaging element 400 to obtain.Expose to the power of the light of workpiece and covering model
Enclose and be adjusted by image formation prism 100, thus in order to image information can more fully react workpiece detected part shape, knot
The characteristic informations such as structure, the concrete shape structure of image formation prism 100 can be fitted according to the difference such as shape, structure of detected part
Answering property is set.
Specifically, as depicted in figs. 1 and 2, above-mentioned image formation prism 100 may include the plane of incidence 110 and exit facet 120, incident
Face 110 is set towards spectroscope 200, and exit facet 120 is set towards workpiece setting, the plane of incidence 110 and exit facet 120 perpendicular to light
It puts.Wherein, the area of the plane of incidence 110 should be greater than the area of focus lamp 600, the light reflected by spectroscope 200 or focusing
The light gathered of mirror 600 is incided into from the plane of incidence 110 inside image formation prism 100, and light is in the side glazing of image formation prism 100
Road changes, and project and image formation prism 100 and be irradiated on the endoporus of workpiece from exit facet 120, wherein image formation prism 100
Side can be for one or multiple, specific with specific reference to the size of measured workpiece endoporus, pattern, optical path setting request etc.
It sets.The emergent light that the plane of incidence 110 and exit facet 120 are each perpendicular to light source 500 is set in the light that spectroscope 200 reflects, and is led to
The simplification of light path can be facilitated by crossing this mode.Especially when equipped with focus lamp 600, the plane of incidence 110 and exit facet 120 it is vertical
It sets, the light after focus lamp 600 can be made directly from front illuminated to the endoporus of workpiece, to realize the inspection to hole size
It surveys.
Specifically, in order to simplify the structure of image formation prism 100 and internal light path, image formation prism 100 may include first side
130 and second side 140, first side 130 be connected with the plane of incidence 110, second side 140 connect first side 130 and outgoing
Face 120, the area of the plane of incidence 110 are more than the area of exit facet 120, and second side 140 is obliquely installed.
Wherein, first side 130 is connected the plane of incidence 110 and second side 140, first side 130 and can be set with any angle
Put, first side 130 can change or not change light path, when need to only ensure that first side 130 causes the light path to change, light path without
Second side 140 directly projects from exit facet 120 or is irradiated to the endoporus of workpiece from exit facet 120 after second side 140
On, it is preferable that for the ease of image formation prism 100 processing and simplify light path, first side 130 can enter with image formation prism 100
It penetrates light to be arranged in parallel, first side 130 will not cause the direction of light path any change at this time.The connection of second side 140 the
One side 130 and exit facet 120, being obliquely installed for second side 140 can make to be irradiated in second side 140 from the plane of incidence 110
Reflection or refraction action of the light Jing Guo second side 140 be irradiated on the endoporus of workpiece.
Wherein, when light is when second side 140 reflects, as shown in Figure 1, the light reflected from second side 140
It converges on exit facet 120, then from each position that exit facet 120 is irradiated to inside the endoporus of workpiece；When light is second
When side 140 reflects, as shown in Fig. 2, the light reflected from second side 140 shines directly into without exit facet 120
On each position inside the endoporus of workpiece.The angle of inclination of second side 140 needed with specific reference to different detections depending on the
Reflection or the refraction action of two side faces 140 and set.
Wherein, due to light need to can coalescence expose on workpiece, the area of the plane of incidence 110 can be more than the face of exit facet 120
Product, it is preferable that when light is irradiated to from exit facet 120 inside the endoporus of workpiece by reflex or equipped with focus lamp
600 when need to measure the size of inner hole of workpiece, and the area of exit facet 120 should be greater than the positive area of inner hole of workpiece.Especially
When being provided with focus lamp 600, the light of focusing is enable to cover the positive to realize the measurement of hole size of endoporus, at this time focus portion
610 frontal area should be less than or the area equal to exit facet 120, to ensure the realization of hole size measurement.
In addition, as shown in figure 3, image formation prism 100, which can run through, is equipped with optical channel 170, the optical channel 170 is close to described point
One end of light microscopic 200 is equipped with entrance port 150, is equipped with exit portal 160 close to one end of the workpiece, and the light source 500 is sent simultaneously
The light reflected through the spectroscope 200 shines sequentially through the entrance port 150, the optical channel 170 and the exit portal 160
It is mapped to the position to be measured of the workpiece.The light that 150 face light source 500 of entrance port sends and reflected through spectroscope 200 is set, and is gone out
The position to be measured of 160 face workpiece of loophole is set, and light enters optical channel 170 from entrance port 150, and in optical channel 170
Occur to project the side for converging the position to be measured, wherein optical channel 170 that are irradiated to workpiece from exit portal 160 after light path changes in side wall
Wall can be one, it is possibility to have it is multiple, with specific reference to the progress such as the size of measured workpiece endoporus, pattern, optical path setting request
It sets.Preferably, entrance port 150 and exit portal 160 are coaxially disposed, and after can entering from entrance port 150 light does not occur for some light
Road changes directly impinges upon bore area from the injection of exit portal 160, to simplify detection of the light path realization to hole size.
Specifically, in order to simplify the structure of image formation prism 100 and internal light path, the image formation prism 100 is included in first
171 and second inner surface 172 of surface, the optical channel 170 are enclosed by first inner surface 171 and second inner surface 172
It closes, first inner surface 171 connects the entrance port 150 and second inner surface 172, second inner surface
172 connections, first inner surface 171 and the exit portal 160, second inner surface 172 are obliquely installed.
The side wall of first inner surface 171 and the second inner surface 172 as optical channel 170.First inner surface 171 connects incidence
150 and second inner surface 172 of mouth, the first inner surface 171 can be set with any angle, and light path can be sent out in the first inner surface 171
It is raw to change or do not change, when need to only ensure that the first inner surface 171 causes the light path to change, light path directly projected from exit portal 160 or
It is irradiated to after the reflex of the second inner surface 172 from the injection of exit portal 160 on the endoporus of workpiece.Preferably, in order to just
It can be arranged in parallel in the processing of image formation prism 100 and simplified light path, the first inner surface 171 with the incident light of image formation prism 100, this
When the first inner surface 171 any change will not be caused to the direction of light path.
Second inner surface 172, which connects the first inner surface 171 and exit portal 160, being obliquely installed for the second inner surface 172, to be made
The light being irradiated on the second inner surface 172 projects from exit portal 160 after the reflection of the second inner surface 172 and is irradiated to work
On the endoporus of part.The angle of inclination of second inner surface 172 is set according to actual conditions, and only light need to be ensured in the second inner surface
172 occur reflection and are projected from exit portal 160.
Wherein, due to light need to can coalescence expose on workpiece, the area of entrance port 150 can be more than the face of exit portal 160
Product, it is preferable that the area of exit portal 160 should be greater than the positive area of inner hole of workpiece.When being especially equipped with focus lamp 600, make to gather
Burnt light can cover the front of endoporus to realize the measurement of hole size, and the frontal area of focus portion 610 should be small at this time
In or equal to exit portal 160 area, with ensure hole size measurement realization.
Spectroscope 200 is the optical device that part reflection, part refraction can be carried out to the light for inciding into minute surface.Light source
500 emergent light forms reflected light path by the reflex of spectroscope 200, and image formation prism 100 is arranged on the reflected light path.
The light that the image information comprising inner hole of workpiece is reflected from workpiece forms refraction light by the refraction action of spectroscope 200
Road, photosensitive imaging element 400 are arranged in the refractive light paths.Preferably, spectroscope 200 is towards the surface of light source 500 and light source
Angle between 500 light sent is 45 degree, is conducive to image formation prism 100, spectroscope 200, zoom lens group 300, photosensitive
Image-forming component 400, focus lamp 600 can be substantially distributed in same optical axis along light path, and the vertical optical axis of light source 500 sends outgoing
Light when the endoporus detection optical system 1 is manufactured into actual product, saves taking up space for parts, simplifies product structure,
Facilitate production.
Light comprising image information is imaged after passing through spectroscope 200 in photosensitive imaging element 400, photosensitive imaging element
400 can be specially CCD (Charged Couple) element, CMOS (complementary metal oxide conductor) devices or traditional film etc..
Preferably, in order to which the image of inner hole of workpiece can be quickly obtained, detection efficiency is improved, CCD (electricity can be selected in photosensitive imaging element 400
Lotus couples) the photosensitive image-forming component of electronics such as element, CMOS (complementary metal oxide conductor) device.Selecting electronics photosensitive imaging
During element, endoporus detection optical system 1 further include controller and with the controller be electrically connected display, controller with it is photosensitive
Image-forming component 400 communicates to connect, and the data that controller is obtained in the photosensitive image-forming component of electronics are simultaneously handled, treated image
Data show that testing staff can in real time, intuitively obtain the detection image of inner hole of workpiece by display by display.This
Outside, controller can also measure the hole size in image, and measurement result is shown by display, make detection people
Member can directly obtain the measurement data of hole size.
Wherein, light source 500 can be point light source or source of parallel light in endoporus detection optical system 1.It is preferred that
, source of parallel light can be selected in light source 500, avoids unnecessary light attenuation, ensures image quality.It, can when using point light source
Directly using point light sources such as LED light, point light source and other optics combinations can also be used, make the outgoing luminous energy of light source 500
It converges on spectroscope 200.It, can be directly using sources of parallel light such as laser, it is possible to use point light source when using source of parallel light
Source of parallel light is obtained with other optics combinations.Specifically, light source 500 may include the first convex lens 510 and point light source 520,
First convex lens 510 is arranged between point light source 520 and spectroscope 200, and the light that point light source 520 is sent is via the first convex lens 510
After converging to spectroscope 200, workpiece is reflexed to via image formation prism 100, it is preferable that point light source 520 is arranged on the first convex lens
510 focal point makes emergent light that can form directional light after the first convex lens 510.
The utility model also proposes a kind of endoporus detection device, which includes above-mentioned endoporus detection optics
System, the concrete structure of the endoporus detection optical system is with reference to above-described embodiment, since endoporus detection device employs above-mentioned institute
There are whole technical solutions of embodiment, therefore all advantageous effects at least caused by the technical solution with above-described embodiment,
This is no longer going to repeat them.
The above is only the preferred embodiment of the present invention, and it does not limit the scope of the patent of the present invention,
Under every utility model in the utility model is conceived, equivalent structure made based on the specification and figures of the utility model
Conversion or directly/be used in other related technical areas indirectly and be included in the scope of patent protection of the utility model.
Claims (10)
1. a kind of endoporus detection optical system, for detecting workpiece, which is characterized in that the endoporus detection optical system include into
As prism (100), spectroscope (200), photosensitive imaging element (400) and light source (500)；
The image formation prism (100), spectroscope (200), photosensitive imaging element (400) are arranged at intervals successively, the image formation prism
(100) workpiece setting is closed on；
The emergent light that the light source (500) sends reflexes to the image formation prism (100) through the spectroscope (200), via institute
State image formation prism (100) and expose to workpiece, the workpiece reflected image information via the image formation prism (100), through described
The imaging in the photosensitive imaging element (400) after spectroscope (200).
2. endoporus detection optical system as described in claim 1, which is characterized in that the image formation prism (100) and described point
Focus lamp (600) is additionally provided between light microscopic (200), the position to be detected of workpiece described in focus lamp (600) face is set.
3. endoporus detection optical system as claimed in claim 2, which is characterized in that the spectroscope (200) and described photosensitive
Zoom lens group (300), photosensitive imaging described in zoom lens group (300) face are additionally provided between image-forming component (400)
Element (400).
4. endoporus detection optical system as claimed in claim 3, which is characterized in that the zoom lens group (300) includes the
Two convex lenses (310) and the 3rd convex lens (320), second convex lens (310) close on the spectroscope (200), and described
Three convex lenses (320) are between second convex lens (310) and the photosensitive imaging element (400), second convex lens
Mirror (310) and the confocal setting of the 3rd convex lens (320), second convex lens (310) and the 3rd convex lens (320)
Focal length it is unequal.
5. such as Claims 1-4 any one of them endoporus detection optical system, which is characterized in that the image formation prism (100)
Including the plane of incidence (110) and exit facet (120), the plane of incidence (110) is set towards the spectroscope (200), the outgoing
Face (120) is towards the workpiece setting, and the plane of incidence (110) and the exit facet (120) are perpendicular to the light source (500)
It sends and the light through the spectroscope (200) reflection is set.
6. endoporus detection optical system as claimed in claim 5, which is characterized in that the image formation prism (100) further includes
One side (130) and second side (140), the first side (130) are connected with the plane of incidence (110), the second side
Face (140) connects the first side (130) and the exit facet (120), and the area of the plane of incidence (110) goes out more than described in
The area of face (120) is penetrated, the second side (140) is obliquely installed.
7. such as Claims 1-4 any one of them endoporus detection optical system, which is characterized in that the image formation prism (100)
Through equipped with optical channel (170), the optical channel (170) close to one end of the spectroscope (200) be equipped with entrance port (150),
Exit portal (160) is equipped with close to one end of the workpiece, the light source (500) sends and through the spectroscope (200) reflection
Light is irradiated to the workpiece sequentially through the entrance port (150), the optical channel (170) and the exit portal (160)
Position to be measured.
8. endoporus detection optical system as claimed in claim 7, which is characterized in that the image formation prism (100) includes first
Inner surface (171) and the second inner surface (172), the optical channel (170) is by first inner surface (171) and described second
Surface (172) encloses, and first inner surface (171) connects the entrance port (150) and second inner surface
(172), second inner surface (172) connects first inner surface (171) and the exit portal (160), in described second
Surface (172) is obliquely installed.
9. such as Claims 1-4 any one of them endoporus detection optical system, which is characterized in that the light source (500) includes
First convex lens (510) and point light source (520), first convex lens (510) are arranged on the point light source (520) and the light splitting
Between mirror (200), the light that the point light source (520) sends converges to the spectroscope via first convex lens (510)
(200) after, the workpiece is reflexed to via the image formation prism (100).
10. a kind of endoporus detection device, which is characterized in that detect optics including endoporus as described in any one of claim 1 to 9
System.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561089A (en) * | 2017-09-15 | 2018-01-09 | 深圳市牧激科技有限公司 | Endoporus detection optical system and endoporus detection device |
| CN110243286A (en) * | 2019-06-30 | 2019-09-17 | 深南电路股份有限公司 | A kind of back drill offset detecting device and image acquiring device |
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2017
- 2017-09-15 CN CN201721199305.5U patent/CN207396364U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107561089A (en) * | 2017-09-15 | 2018-01-09 | 深圳市牧激科技有限公司 | Endoporus detection optical system and endoporus detection device |
| CN107561089B (en) * | 2017-09-15 | 2024-04-02 | 深圳市牧激科技有限公司 | Inner hole detection optical system and inner hole detection equipment |
| CN110243286A (en) * | 2019-06-30 | 2019-09-17 | 深南电路股份有限公司 | A kind of back drill offset detecting device and image acquiring device |
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