CN106931888A - A kind of double light path type laser displacement sensor - Google Patents
A kind of double light path type laser displacement sensor Download PDFInfo
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- CN106931888A CN106931888A CN201710199279.4A CN201710199279A CN106931888A CN 106931888 A CN106931888 A CN 106931888A CN 201710199279 A CN201710199279 A CN 201710199279A CN 106931888 A CN106931888 A CN 106931888A
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- light
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- spectroscope
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses a kind of double light path type laser displacement sensor.Spectroscope, laser, transmitting microscope group and optical filter are sequentially arranged along same rectilinear direction, and optical filter is arranged on the side wall of housing towards measured surface；Left reflection minor and right reflection mirror are arranged in the left and right sides of laser with being respectively symmetrically, spectroscope side is disposed with light-sensitive device and receives microscope group, laser, transmitting microscope group and optical filter optical axis coincidence and perpendicular to spectroscopical optical axis, spectroscopical one facing to light-sensitive device and receives microscope group；The reflected light of left reflection minor and right reflection mirror is incided on spectroscopical two sides respectively be there is reflection and transmits and beam combination respectively, then received microscope group images in light-sensitive device together.Bifocal path structure of the present invention, reduces measurement error caused by uneven measured surface, and compact conformation, and hardware cost is low, debugs easily.
Description
Technical field
The present invention relates to a kind of sensor of field of optical measuring technologies, more particularly, to a kind of double light path type laser position
Displacement sensor.
Background technology
Due to laser displacement sensor have simple structure, noncontact, high accuracy, measuring speed it is fast, can real-time processing etc.
Advantage, is widely used in the aspects such as various geometric parameter detections, measuring surface form and three-dimensional modeling.
Laser displacement sensor is suitable for most of measured surface, but the roughness of measured surface, color and gradient
Hot spot centre-of gravity shift can be caused so as to produce measurement error, and traditional monochromatic light road laser displacement sensor is measuring ditch sheave
The problem of measurement blind area can be run into when wide.
To solve problem above, common improvement way is to arrange that two sets receive microscope group and photosensor in laser both sides
Part, by compensating hot spot centre-of gravity shift to two hot spot data processings, also increases sensor and receives the angle for diffusing.
Exist in the prior art and be designed with two panels completely reflecting mirror to change the direction of imaging beam, reduce the profile of gauge head
Size, while the rear cut-off distance for receiving microscope group can be increased, obtains sensitivity higher.But it is above-mentioned to be required for using two sets of receptions
Microscope group and light-sensitive device, inevitably increase the volume of sensor, and two sets of installations for receiving microscope groups and light-sensitive device
Symmetry requirement also brings difficulty to the assembling and setting of system.
The content of the invention
For laser measurement the deficiencies in the prior art, object of the present invention is to provide a kind of double light path type laser displacement
Sensor, compact conformation, low cost and low to matching requirements, can solve the problem that the mistake that hot spot centre-of gravity shift is brought on measured surface
Difference problem, improves accuracy of measurement.
The present invention is achieved by the following technical solutions, and the present invention includes：
Using bifocal path structure, including housing and the light-sensitive device in housing, reception microscope group, spectroscope, laser
Device, transmitting microscope group, right reflection mirror, optical filter and left reflection minor, spectroscope, laser, transmitting microscope group and optical filter are along with always
Line direction is sequentially arranged, and optical filter is arranged on the side wall of housing, and optical filter is towards measured surface during measurement；Left reflection minor and the right side
Speculum is arranged in the left and right sides of laser with being respectively symmetrically, and the side of spectroscope one is disposed with light-sensitive device and receives microscope group.
The laser, transmitting microscope group and optical filter optical axis coincidence and perpendicular to spectroscopical optical axis, it is spectroscopical
Reflecting surface is towards light-sensitive device and receives microscope group.
Described laser sends laser, and being irradiated to measured surface after emitted microscope group and optical filter there is diffusing reflection successively,
Irreflexive reflected light again filtered into housing and inciding on left reflection minor and right reflection mirror respectively, left reflection minor and
The reflected light of right reflection mirror is incided on spectroscopical two sides respectively be there is reflection and transmits and beam combination respectively, another to play warp
Receive microscope group and incide light-sensitive device.
Two beam reflected lights of the left reflection minor and right reflection mirror are superimposed at the spectroscope so that light beam coincidence, enters
And the hot spot for causing two beams that light-sensitive device is received symmetrical coincides such that it is able to reduce hot spot centre-of gravity shift band on measured surface
The error come.
Described spectroscope is half reflection and half transmission spectroscope.
Described light-sensitive device is ccd image sensor, cmos image sensor or position sensitive detector.
Compared to the prior art, the beneficial effects of the invention are as follows：
Superposition of the present invention by diffusing reflection light at the spectroscope reduces hot spot centre-of gravity shift on measured surface
The error brought, can solve the problem that error problem, so as to improve accuracy of measurement.
And the present invention only needs to a set of reception microscope group and light-sensitive device and carries out displacement realizing the laser measurement of light path
Detection, so that overall structure is more compact, reduces hardware cost and installation and debugging difficulty.
Brief description of the drawings
Fig. 1 show the light channel structure schematic diagram of existing traditional laser measurement.
Fig. 2 show the light channel structure schematic diagram of laser measurement of the invention.
Fig. 3 show the schematic diagram that double light path laser displacement transducer of the invention is compensated hot spot centre-of gravity shift.
Fig. 4 show the present invention and uses monochromatic light drive test amount.
Fig. 5 show double light path of the invention
In figure：Housing 1, light-sensitive device 2, reception microscope group 3, spectroscope 4, laser 5, transmitting microscope group 6, right reflection mirror 7, quilt
Survey surface 8, optical filter 9, left reflection minor 10.
Specific embodiment
Embodiments of the invention are elaborated below, the present embodiment is carried out under premised on technical solution of the present invention
Implement, give detailed implementation method and specific operating process, but protection scope of the present invention is not limited to following implementations
Example.
Present invention specific implementation includes housing 1 and the light-sensitive device in housing 2, receives microscope group 3, spectroscope 4, swashs
Light device 5, transmitting microscope group 6, right reflection mirror 7, optical filter 9 and left reflection minor 10, spectroscope 4, laser 5, transmitting microscope group 6 and optical filtering
Piece 9 is sequentially arranged along same rectilinear direction, and optical filter 9 is arranged on the side wall of housing 1, and optical filter 9 is towards tested table during measurement
Face 8；Left reflection minor 10 and right reflection mirror 7 are arranged in the left and right sides of laser 5 with being respectively symmetrically, what spectroscope 4 reflected
Face is disposed with light-sensitive device 2 and receives microscope group 3；Laser 5, transmitting microscope group 6 and the optical axis coincidence of optical filter 9 and perpendicular to described point
The optical axis of light microscopic 4, the reflecting surface of spectroscope 4 is towards light-sensitive device 2 and receives microscope group 3.
Laser 5 sends laser, and being irradiated to measured surface 8 after emitted microscope group 6 and optical filter 9 there is diffusing reflection successively, overflow
The reflected light of reflection again filtered 9 into inciding in housing 1 and respectively on left reflection minor 10 and right reflection mirror 7, left reflection
Received microscope group 3 incides light-sensitive device 2 to the reflected light of mirror 10 again after the reflective surface of spectroscope 4, right reflection mirror 7 it is anti-
Received microscope group 3 incides the reflected light of light-sensitive device 2, left reflection minor 10 and right reflection mirror 7 again after the transmission of spectroscope 4 to penetrate light
Received microscope group 3 is imaged onto on light-sensitive device 2 after being processed through spectroscope 4.
Two beams of left reflection minor 10 and right reflection mirror 7 diffuse it is superimposed at the spectroscope so that light beam overlap,
And then the hot spot for causing two beams that light-sensitive device 2 is received symmetrical coincides such that it is able to reduce hot spot center of gravity on measured surface inclined
The error that shipper pole comes.
Spectroscope 4 is half reflection and half transmission spectroscope, and its light splitting ratio is reflection 50%, transmission 50%.
Receive microscope group 3 and use doubly telecentric object lens, hot spot distortion and non-thread that common image-forming objective lens are introduced can be greatly reduced
Property degree error.
Specific implementation of the invention and principle are：
Existing traditional light path is as shown in figure 1, wherein laser 5 sends laser emitted microscope group 6 and optical filter 9 successively
After be irradiated to measured surface 8 diffusing reflection occur, irreflexive reflected light again filtered 9 into inciding in housing 1 and respectively
Hot spot imaging is formed on two sets of receiving light paths, often covering receiving light path includes that one receives microscope group 3 and a light-sensitive device 2.Specifically
Implementation is that correspondence measured surface is obtained by the position of hot spot imaging apart from the range data of optical filter, carries out displacement detecting.
But light path of the invention is, as shown in Fig. 2 the emitted collimation focusing of microscope group 6 of laser beam that laser 5 sends
Afterwards, laser facula is formed on measured surface 8, the diffusing reflection light of hot spot enters in housing 1 by after bandpass filter 9, with
Afterwards by being symmetrically picture on spectroscope 4 after speculum 7 and speculum 10.Half reflection according to spectroscope in embodiment 4 is semi-transparent
Penetrate characteristic, the reflection light of the reflecting component and speculum 7 of the reflection light of speculum 10 on spectroscope 4 is on spectroscope 4
Transmitted component formed coincidence light, coincidence light by receive microscope group 3 is formed on light-sensitive device 2 measure hot spot.
Referring to Fig. 3, the present invention formed left laser image spot on light-sensitive device 2 after being reflected by left reflection minor 10, logical
The formed right laser image spot on light-sensitive device 2 is crossed after right reflection mirror 7 reflects, two hot spots are symmetrical.Black block is represented in figure
The region (of light color to deeply feel the light intensity light and shade for showing imaging facula) of hot spot missing, therefore when measured surface is due to roughness, color
Or when inclining and causing uneven diffusing reflection, the hot spot center of gravity collected by light-sensitive device can produce skew.And the present invention is logical
The left laser image spot and right laser image spot for crossing two-beam are symmetrical and coincidence just can be compensated the hot spot after hot spot centre-of gravity shift, from
And measurement error problem caused by uneven measured surface is reduced, improve accuracy of measurement.
Experimental technique in embodiment is that the light and shade striped on same benchmark tested surface is measured, and light and shade striped is in quilt
Survey and moved in parallel on surface, the color light and shade change of measured surface can make hot spot center of gravity produce skew, so as to cause measurement error.
Referring to Fig. 4, cover in the present embodiment double light path wherein all the way, using monochromatic light drive test amount, obtain the front and rear of light and shade striped process
About 47 μm of the measurement error that can cause.Referring to Fig. 5, the present embodiment uses double-optical path, obtains light and shade striped by front and rear
The measurement error that can cause is about 10 μm.
Claims (6)
1. a kind of laser displacement sensor, it is characterised in that：Light-sensitive device (2) including housing (1) and in housing, connect
Receive microscope group (3), spectroscope (4), laser (5), transmitting microscope group (6), right reflection mirror (7), optical filter (9) and left reflection minor
(10), spectroscope (4), laser (5), transmitting microscope group (6) and optical filter (9) are sequentially arranged along same rectilinear direction, optical filter
(9) on the side wall of housing (1), optical filter (9) is towards measured surface (8) during measurement；Left reflection minor (10) and right reflection
Mirror (7) is arranged in the left and right sides of laser (5) with being respectively symmetrically, and the side of spectroscope (4) is disposed with light-sensitive device (2) and connects
Receive microscope group (3).
2. a kind of laser displacement sensor according to claim 1, it is characterized in that：The laser (5), transmitting microscope group
(6) and optical filter (9) optical axis coincidence and perpendicular to the optical axis of the spectroscope (4), spectroscope (4) reflect facing to light
Sensing device (2) and reception microscope group (3).
3. a kind of laser displacement sensor according to claim 2, it is characterized in that：Described laser (5) sends laser
Measured surface (8) generation diffusing reflection is irradiated to after emitted microscope group (6) and optical filter (9) successively, irreflexive reflected light is passed through again
Optical filter (9) enters in housing (1) and incides respectively on left reflection minor (10) and right reflection mirror (7), left reflection minor (10) and
The reflected light of right reflection mirror (7) is incided on the two sides of spectroscope (4) respectively be there is reflection and transmits and beam combination respectively, then
Received microscope group (3) images in light-sensitive device (2) together.
4. a kind of laser displacement sensor according to claim 2, it is characterized in that：The left reflection minor (10) and right reflection
Two beam reflected lights of mirror (7) are superimposed at the spectroscope so that light beam overlaps, and then causes the two of light-sensitive device (2) reception
The symmetrical hot spot of beam coincides.
5. a kind of laser displacement sensor according to claim 2, it is characterized in that：Described spectroscope (4) is half reflection
Half transmitting spectroscope.
6. laser displacement sensor according to claim 1, it is characterized in that：Described light-sensitive device (2) is passed for ccd image
Sensor, cmos image sensor or position sensitive detector.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710199279.4A CN106931888B (en) | 2017-03-29 | 2017-03-29 | A kind of double light path type laser displacement sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710199279.4A CN106931888B (en) | 2017-03-29 | 2017-03-29 | A kind of double light path type laser displacement sensor |
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| CN106931888A true CN106931888A (en) | 2017-07-07 |
| CN106931888B CN106931888B (en) | 2019-07-02 |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631693A (en) * | 2017-09-14 | 2018-01-26 | 重庆大学 | A kind of two-dimentional multiple spot laser displacement measurement system |
| CN108020163A (en) * | 2017-12-26 | 2018-05-11 | 中国科学技术大学 | A kind of device of micro- tracking particulate three-D displacement |
| CN112304415A (en) * | 2020-10-30 | 2021-02-02 | 电子科技大学 | Diffuse reflection type double-light-path air vibration detection system and method |
| CN112558081A (en) * | 2020-11-18 | 2021-03-26 | 国网智能科技股份有限公司 | Laser radar system based on wireless communication network and working method thereof |
| CN113520594A (en) * | 2021-05-31 | 2021-10-22 | 浙江大学 | Assembling method of double-light-path 3D imaging module |
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| CN105758719A (en) * | 2016-04-26 | 2016-07-13 | 河海大学 | Homogeneous strain optical measurement device based on double-mirror reflection and method |
| GB2517627B (en) * | 2012-07-05 | 2018-03-21 | Harbin Inst Technology | Conjugate double-pass confocal measurement device with fluorescent mirror or phase conjugate mirror |
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| CN101089550A (en) * | 2007-07-13 | 2007-12-19 | 上海大学 | Measuring device and method for transparent substance and reflector based on digital microscope and data synthetic technique |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107631693A (en) * | 2017-09-14 | 2018-01-26 | 重庆大学 | A kind of two-dimentional multiple spot laser displacement measurement system |
| CN107631693B (en) * | 2017-09-14 | 2020-02-07 | 重庆大学 | Two-dimensional multipoint laser displacement measurement system |
| CN108020163A (en) * | 2017-12-26 | 2018-05-11 | 中国科学技术大学 | A kind of device of micro- tracking particulate three-D displacement |
| CN108020163B (en) * | 2017-12-26 | 2020-01-31 | 中国科学技术大学 | device for microscopically tracking three-dimensional displacement of particles |
| CN112304415A (en) * | 2020-10-30 | 2021-02-02 | 电子科技大学 | Diffuse reflection type double-light-path air vibration detection system and method |
| CN112304415B (en) * | 2020-10-30 | 2021-08-03 | 电子科技大学 | Diffuse reflection type double-light-path air vibration detection system and method |
| CN112558081A (en) * | 2020-11-18 | 2021-03-26 | 国网智能科技股份有限公司 | Laser radar system based on wireless communication network and working method thereof |
| CN113520594A (en) * | 2021-05-31 | 2021-10-22 | 浙江大学 | Assembling method of double-light-path 3D imaging module |
| CN113520594B (en) * | 2021-05-31 | 2023-08-08 | 浙江大学 | Assembling method of double-light-path 3D imaging module |
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| CN106931888B (en) | 2019-07-02 |
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