CN207321085U - A kind of novel permanent magnetic array and planar motor - Google Patents

A kind of novel permanent magnetic array and planar motor Download PDF

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Publication number
CN207321085U
CN207321085U CN201721408890.5U CN201721408890U CN207321085U CN 207321085 U CN207321085 U CN 207321085U CN 201721408890 U CN201721408890 U CN 201721408890U CN 207321085 U CN207321085 U CN 207321085U
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permanent magnet
magnetizer
prism
quadrangular
hexagon
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CN201721408890.5U
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刘广斗
刘晓怡
胡永兵
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China University of Petroleum East China
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China University of Petroleum East China
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Abstract

It the utility model is related to motor field, and in particular to a kind of novel permanent magnetic array and planar motor.Hexagon straight prism permanent magnet has been used, has formed a kind of new permanent magnet array topological structure.The magnetic induction intensity expression formula of permanent magnet array has been derived by scalar magnetic potential and fourier series.More compact, the tight between permanent magnet with permanent magnet array structure compared before;Using principle of stacking and fourier series, the expression formula of magnetic induction intensity has been derived, by introducing effective amplitude, new expression formula has been obtained and can be used for control in real time;Z-direction magnetic induction intensity bigger, high-order harmonic wave component smaller, therefore the fluctuation of planar motor power can be reduced.

Description

A kind of novel permanent magnetic array and planar motor
Technical field
It the utility model is related to motor field, and in particular to a kind of novel permanent magnetic array and planar motor.
Background technology
Levitation planar motor is suspended by magnetic field and realizes plane motion contactless, without abrasion.Led with traditional by straight line The plane motion structure of rail Orthogonal Composite is compared, and for levitation planar motor without guide supporting, mechanism is simple, it can be achieved that lightweight, Realize high speed, high acceleration precise motion, there is important application prospect in terms of the high speed precision assembly such as high-precision litho machine.For Moving-iron type levitation planar motor, since coil array is arranged on stator, there is no electrical connecting wires and cooling pipeline obstruction for mover The situation of movement, motor heat is also easier to distribute, beneficial to the raising of system motion performance.
Current integrated circuit EQUIPMENT MARKET GUIDE rapid growth, litho machine are to manufacture core most complicated in integrated circuit equipment to set It is standby.Levitation planar motor directly produces plane motion using electromagnetic energy, has the characteristics that the high and low heat consumption of force density, high-precision, Control object and motor can be made of one structure, there is light weight, compact-sized, reaction is fast, high sensitivity, trackability are good etc. Advantage, it will as high speed, the important drive form of precise machining equipment.
Permanent magnet array is the chief component of levitation planar motor electromagnetic structure, the field drives motor fortune being generated by it It is dynamic.Therefore, permanent magnet array structural requirement high efficiency and harmonic wave is small.Cho et al. proposes a kind of for moving iron type planar electricity The compact-sized Halbach permanent magnet arrays of machine, obtain the magnetic field intensity of higher compared with traditional NS arrays.Its magnetic induction intensity Harmonic-model is derived by by scalar magnetic potential, but analytic expression is more complicated, for ease of control in real time, has used SIN function approximation table Show magnetic induction intensity.Compter and Jansen et al. have used different two-dimentional Halbach permanent magnet arrays, equally use magnetic mark Gesture has derived the harmonic-model of magnetic induction intensity, but does not account for influence of the higher hamonic wave part to whole permanent magnet array.Min Et al. propose two-dimentional Halbach permanent magnet arrays, with the minimum target of higher harmonic components, obtained using genetic algorithm optimization The structural parameters of permanent magnet array.Y Zhang and L Huang et al. has used trapezoidal permanent magnet in permanent magnet array, finds trapezoidal Permanent magnet can reduce the higher harmonic components of magnetic induction intensity.Peng Junrong proposes a kind of two dimension using trapezoidal permanent magnet forever Magnetic array, has obtained reducing higher harmonic components and has strengthened the permanent magnet array structure in magnetic field, but the harmonic wave of its magnetic induction intensity Model analyzing formula is excessively complicated.Halbach permanent magnet arrays make it that the magnetic field on array one side significantly increases and another side significantly subtracts It is weak, and be readily obtained in the comparatively ideal Sine distribution magnetic field in space, therefore it is usually used in the design of levitation planar motor.
Utility model content
Technical problem to be solved in the utility model is that have gap between existing permanent magnet array structure, and structure is not tight enough Gather, it is not accurate enough in calculated magnetic induction intensity, and Z-direction magnetic induction intensity is not big enough, so as to cause the fluctuation of planar motor big.
To solve the above problems, the utility model provides a kind of novel permanent magnetic array and planar motor, including hexagon straight Prism permanent magnet and four prism type magnetizer, the hexagon straight prism permanent magnet are arranged closely in four side structure of quadrangular magnetizer Into octagon right prism, the length of side and height of hexagon straight prism permanent magnet are equal with quadrangular magnetizer;Specially along x-axis side It is hexagon straight prism permanent magnet point contact close-packed arrays to m rows, the magnetizing direction of adjacent hexagon straight prism permanent magnet Along y-axis on the contrary, m+1 rows are hexagon straight prism permanent magnets contacts close-packed arrays with four prism type magnetizer line, four prism type The magnetizing direction of the hexagon straight prism permanent magnet of magnetizer both sides along x-axis on the contrary, the hexagon straight prism permanent magnet of m rows and The hexagon straight prism permanent magnet line contact close-packed arrays of m+1 rows;The n-th row are hexagon straight prism permanent magnets along the y-axis direction Point contact close-packed arrays, the magnetizing direction of adjacent hexagon straight prism permanent magnet is along x-axis on the contrary, the (n+1)th row are hexagon straights Prism permanent magnet contacts close-packed arrays, the hexagon straight prism permanent magnetism of four prism type magnetizer both sides with four prism type magnetizer line The magnetizing direction of body is along y-axis on the contrary, the hexagon straight prism permanent magnet of the hexagon straight prism permanent magnet of the n-th row and the (n+1)th row Line contacts close-packed arrays;The magnetic line of force direction of adjacent quadrangular magnetizer is on the contrary, when the hexagon straight on four side of quadrangular magnetizer The direction of magnetization of prism permanent magnet is when being directed toward the quadrangular magnetizer, and the magnetic line of force direction of quadrangular magnetizer is along z Axis is inside, when the direction of magnetization of the hexagon straight prism permanent magnet on four side of quadrangular magnetizer is backwards to the quadrangular magnetic conduction During body, the magnetic line of force direction of quadrangular magnetizer is outside along z-axis.
Further, hexagon straight prism permanent magnet uses rare-earth permanent magnet.
Further, quadrangular magnetizer is ferromagnetic material.
A kind of purposes of above-mentioned novel permanent magnetic array, the permanent magnet array for planar motor.
A kind of planar motor, applies above-mentioned novel permanent magnetic array, as stator or mover.The permanent magnetism of the planar motor Array has used hexagon straight prism permanent magnet, forms a kind of new permanent magnet array topological structure.Pass through scalar magnetic potential and Fourier Leaf series has derived the magnetic induction intensity expression formula of permanent magnet array.Compared with permanent magnet array before, has the following advantages:
(1) used x to y to the hexagon straight prism permanent magnet to magnetize.
(2) permanent magnet array more compact structure, tight between permanent magnet, without packing material, magnet steel is full of whole space. Therefore in calculated magnetic induction intensity, the relative permeability without assuming permanent magnet is 1, and result of calculation is more accurate.
(3) using principle of stacking and the analysis method of fourier series, the expression formula of magnetic induction intensity has been derived, by drawing Enter effective amplitude, obtain new expression formula and can be used for control in real time.
(4) the Z-direction magnetic induction intensity bigger of new permanent magnet array, it is big by about 10% at 4mm, pass through and optimize analysis, it is high Order harmonic component smaller, therefore the fluctuation of planar motor power can be reduced.
Brief description of the drawings
Fig. 1 is the top view of the utility model permanent magnet array;
Fig. 2 is the sectional view of the utility model permanent magnet array;
Fig. 3 is projection of the x direction of magnetizations in x directions of hexagon permanent magnet;
Fig. 4 is projection of the x direction of magnetizations in y directions of hexagon permanent magnet;
Fig. 5 is periodic function figure;
Fig. 6 is magnetic induction meter nomogram;
Fig. 7 is the optimization analysis chart calculated based on Bz;
Fig. 8 is to use Matlab genetic algorithm optimizations, the optimization figure of effective amplitude method;
Fig. 9 is Magnetic Induction Density Distribution figure a;
Figure 10 is Magnetic Induction Density Distribution figure b;
Figure 11 is high-order harmonic wave figure;
Figure 12 is the utility model magnetic steel array and Jansen arrays contrast a;
Figure 13 is the utility model magnetic steel array and Jansen arrays contrast b;
In figure, hexagon straight prism permanent magnet 1, four prism type magnetizer 2.
Embodiment
The utility model is made below in conjunction with the accompanying drawings described further below, but the utility model is not limited to specific reality Apply example.
Embodiment 1:
As shown in Figure 1, a kind of novel permanent magnetic array, including hexagon straight prism permanent magnet 1 and four prism type magnetizer 2, The hexagon straight prism permanent magnet is arranged closely in 2 four side of quadrangular magnetizer and forms octagon right prism, hexagon straight rib The length of side and height of column permanent magnet 1 are equal with quadrangular magnetizer 2;Specially along the x-axis direction m rows be hexagon straight prism forever 1 point contact close-packed arrays of magnet, the magnetizing direction of adjacent hexagon straight prism permanent magnet 1 is along y-axis on the contrary, m+1 rows are six Side shape right prism permanent magnet 1 contacts close-packed arrays, the hexagon of 2 both sides of four prism type magnetizer with 2 line of four prism type magnetizer The magnetizing direction of right prism permanent magnet 1 is along x-axis on the contrary, the hexagon straight prism permanent magnet 1 of m rows and the hexagon of m+1 rows 1 line of right prism permanent magnet contacts close-packed arrays;The n-th row are that 1 point contact of hexagon straight prism permanent magnet is closely arranged along the y-axis direction Row, the magnetizing direction of adjacent hexagon straight prism permanent magnet 1 is along x-axis on the contrary, the (n+1)th row are hexagon straight prism permanent magnets 1 Close-packed arrays are contacted with 2 line of four prism type magnetizer, the hexagon straight prism permanent magnet 1 of 2 both sides of four prism type magnetizer fills Magnetic direction is along y-axis on the contrary, 1 line of hexagon straight prism permanent magnet that the hexagon straight prism permanent magnet 1 and (n+1)th of the n-th row arranges connects Touch close-packed arrays;The magnetic line of force direction of adjacent quadrangular magnetizer 2 is on the contrary, when the hexagon straight rib on 2 four side of quadrangular magnetizer The direction of magnetization of column permanent magnet 1 is when being directed toward the quadrangular magnetizer 2, and the magnetic line of force direction of quadrangular magnetizer 2 is along z Axis is inside, when the direction of magnetization of the hexagon straight prism permanent magnet 1 on 2 four side of quadrangular magnetizer is to be led backwards to the quadrangular During magnet 2, the magnetic line of force direction of quadrangular magnetizer 2 is outside along z-axis.
The purposes of novel permanent magnetic array described in a kind of claim 1, it is characterised in that:Permanent magnetism battle array for planar motor Row.
A kind of planar motor, it is characterised in that:Apply the novel permanent magnetic array described in claim 1, as stator or Mover.
Embodiment 2:
Hexagon straight prism permanent magnet 1 uses rare-earth permanent magnet.
Quadrangular magnetizer 2 is ferromagnetic material.
Remaining is same as Example 1.
Halbach array traditionally uses cuboid or square permanent magnet.The utility model is attempted to add six Side shape right prism permanent magnet, can make tight between magnetic steel array using this permanent magnet;And reference papers Modeling and Analysis of a New 2-D Halbach Array for Magnetically Levitated Planar Motor are counted The space magnetic induction intensity of magnetic steel array is calculated, using paper Analysis and Optimization of a New 2-D The optimization method of Magnet Array for Planar Motor optimizes this magnetic steel array, then using paper Modeling and Analysis of a New 2-D Halbach Array for Magnetically Levitated The method of Planar Motor carries out magnetic steel array to simplify replacement.Finally provide pair of this magnetic steel array and Jansen arrays Than:
(1) magnetic steel array magnetic induction intensity calculates:Theory uses scalar magnetic potential, Fourier space analytic approach, array such as Fig. 1;
As shown in figure 3, hexagon permanent magnet, the x direction of magnetizations, the projection in x directions, the periodic function of Fig. 3 are expressed as
Even function, bn=0, it is computed a0=0
The a of above formulanT is substituted with d, is recalculated, the cycle is
Obtain
As shown in figure 4, hexagon permanent magnet, the x direction of magnetizations, the projection in y directions, projection is change, therefore is substituted into The periodic function of function y=v (x), Fig. 4 represent
Odd function, an=0, it is computed a0=0
Wherein contain function v (x), it is as follows to obtain function according to the scope of x
Locate because in m=2,4,6,8 ... as 0, therefore obtain following results
The coefficient distribution of above-mentioned function is obtained, is periodic function, as shown in Figure 5.Periodic function expression formula
Even function, bn=0, a0=0
Obtain Fourier's expression formula of the intensity of magnetization
Wherein
e1=k+l+u
e2=k+l-u
e3=k-l+u
e4=k-l-u
Wherein
e5=l+k+u
e6=l+k-u
e7=l-k+u
e8=l-k-u
Wherein:
To this set up the condition formula, calculated magnetic induction intensity (such as Fig. 6)
Make μr=1,
The expression formula of magnetic induction intensity is as follows:
Wherein
e1=k+l+u, e2=k+l-u, e3=k-l+u, e4=k-l-u
e5=l+k+u, e6=l+k-u, e7=l-k+u, e8=l-k-u
(2) optimization analysis:Calculated based on Bz;
Chosen area is as shown in Fig. 7 heavy black line square frames
There is formula
Calculate, when n is how many ranks, obtainLess than earth's magnetic field 6 × 10-5T。
Work as k=1, when l=49, u=49, obtain amplitude -2.664e-05 at this time.Then k is worked as, any one in l is more than 49 When, harmonic wave can be ignored.
Obtain at this time
Bz=1.375415547250888
Obtain
The magnetic induction intensity summation in this region.
Majorized function is as follows
Relational expression
With Matlab genetic algorithm optimizations, the optimization of effective amplitude method
Following optimum results, come from pitch_optim_asa.m files, such as Fig. 8
Optimization running.
Objective function value:5.1052859201288986E-5
Optimization terminated:maximum number of generations exceeded.
Obtained optimum results value
0.4099541518376512≈0.41
Fval=5.1052859201288986E-5
Magnetic Induction Density Distribution is, it is necessary to change, such as Fig. 9 and Figure 10;
The value of high-order harmonic wave, as shown in figure 11;
(3) data comparison, the utility model magnetic steel array are compared with Jansen arrays, as shown in Figure 12 and Figure 13, this reality With new compared with permanent magnet array before, has the following advantages:
(1) used x to y to the hexagon straight prism permanent magnet to magnetize.
(2) permanent magnet array more compact structure, tight between permanent magnet, without packing material, magnet steel is full of whole space. Therefore in calculated magnetic induction intensity, the relative permeability without assuming permanent magnet is 1, and result of calculation is more accurate.
(3) using principle of stacking and the analysis method of fourier series, the expression formula of magnetic induction intensity has been derived, by drawing Enter effective amplitude, obtain new expression formula and can be used for control in real time.
(4) the Z-direction magnetic induction intensity bigger of new permanent magnet array, it is big by about 10% at 4mm, pass through and optimize analysis, it is high Order harmonic component smaller, therefore the fluctuation of planar motor power can be reduced.

Claims (5)

  1. A kind of 1. novel permanent magnetic array, it is characterised in that:It is described including hexagon straight prism permanent magnet and four prism type magnetizer Hexagon straight prism permanent magnet is arranged closely in four side of quadrangular magnetizer and forms octagon right prism, hexagon straight prism permanent magnetism The length of side and height of body are equal with quadrangular magnetizer;Specially m rows are that hexagon straight prism permanent magnet point connects along the x-axis direction Close-packed arrays are touched, the magnetizing direction of adjacent hexagon straight prism permanent magnet is along y-axis on the contrary, m+1 rows are hexagon straight prisms Permanent magnet contacts close-packed arrays with four prism type magnetizer line, the hexagon straight prism permanent magnet of four prism type magnetizer both sides Magnetizing direction is along x-axis on the contrary, the hexagon straight prism permanent magnet line of the hexagon straight prism permanent magnet of m rows and m+1 rows connects Touch close-packed arrays;The n-th row are hexagon straight prism permanent magnet point contact close-packed arrays along the y-axis direction, adjacent hexagon straight rib The magnetizing direction of column permanent magnet is along x-axis on the contrary, the (n+1)th row are that hexagon straight prism permanent magnet is contacted with four prism type magnetizer line Close-packed arrays, the magnetizing direction of the hexagon straight prism permanent magnet of four prism type magnetizer both sides is along y-axis on the contrary, the six of the n-th row The hexagon straight prism permanent magnet line contact close-packed arrays of side shape right prism permanent magnet and the (n+1)th row;Adjacent quadrangular magnetizer Magnetic line of force direction on the contrary, when the direction of magnetization of the hexagon straight prism permanent magnet on four side of quadrangular magnetizer is described in direction During quadrangular magnetizer, the magnetic line of force direction of quadrangular magnetizer is inside along z-axis, when the hexagon on four side of quadrangular magnetizer When the direction of magnetization of right prism permanent magnet is backwards to the quadrangular magnetizer, the magnetic line of force direction of quadrangular magnetizer is edge Z-axis is outside.
  2. 2. novel permanent magnetic array as claimed in claim 1, it is characterised in that:Hexagon straight prism permanent magnet uses rare earth permanent magnet Body.
  3. 3. novel permanent magnetic array as claimed in claim 1, it is characterised in that:Quadrangular magnetizer is ferromagnetic material.
  4. A kind of 4. purposes of novel permanent magnetic array described in claim 1, it is characterised in that:Permanent magnetism battle array for planar motor Row.
  5. A kind of 5. planar motor, it is characterised in that:The novel permanent magnetic array described in claim 1 is applied, as stator or dynamic Son.
CN201721408890.5U 2017-10-30 2017-10-30 A kind of novel permanent magnetic array and planar motor Expired - Fee Related CN207321085U (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107819391A (en) * 2017-10-30 2018-03-20 中国石油大学(华东) A kind of novel permanent magnetic array and planar motor
CN111799055A (en) * 2020-07-23 2020-10-20 苏州英磁新能源科技有限公司 Magnetizing and using method of polygonal magnetic steel
CN118572973A (en) * 2024-08-02 2024-08-30 佛山市增广智能科技有限公司 Planar motor rotor of Hall Baker array based on radiation ring unit structure

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107819391A (en) * 2017-10-30 2018-03-20 中国石油大学(华东) A kind of novel permanent magnetic array and planar motor
CN111799055A (en) * 2020-07-23 2020-10-20 苏州英磁新能源科技有限公司 Magnetizing and using method of polygonal magnetic steel
CN118572973A (en) * 2024-08-02 2024-08-30 佛山市增广智能科技有限公司 Planar motor rotor of Hall Baker array based on radiation ring unit structure

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Granted publication date: 20180504