CN207267302U - A kind of semiconductor silicon rod activity centering adjusting device - Google Patents
A kind of semiconductor silicon rod activity centering adjusting device Download PDFInfo
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- CN207267302U CN207267302U CN201721222692.XU CN201721222692U CN207267302U CN 207267302 U CN207267302 U CN 207267302U CN 201721222692 U CN201721222692 U CN 201721222692U CN 207267302 U CN207267302 U CN 207267302U
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- silicon rod
- centering adjusting
- handed nut
- support platform
- semiconductor silicon
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Abstract
It the utility model is related to semiconductor silicon rod diamond wire cutting technique field, it is related to a kind of semiconductor silicon rod activity centering adjusting device, including a support platform, include the left-right rotary trapezoidal screw of installation on the chute at least provided with a pair of centering adjusting mechanism for being used to place silicon rod, the centering adjusting mechanism in the support platform；The left-right rotary trapezoidal screw both ends have the opposite screw thread in direction of rotation respectively, this at two screw thread be connected respectively with left-handed nut and right-handed nut, the left-handed nut and right-handed nut are used for the counter motion when left-right rotary trapezoidal screw rotates；Wedge shaped support block is respectively provided with the left-handed nut and right-handed nut, the pair of wedge shaped support block is symmetrical.The utility model can adapt to the split requirement of different length silicon rod, while the placing height of silicon rod can be adjusted according to actual conditions, ensures the levelness of silicon rod axis, solves the problems, such as that the face of current generally existing is oblique.
Description
Technical field
Semiconductor silicon rod diamond wire cutting technique field is the utility model is related to, more particularly to a kind of semiconductor silicon rod activity
Centering adjusting device.
Background technology
It is progressively ripe with China's semiconductor technology it is generally known that monocrystalline silicon has higher photoelectric conversion efficiency, in
State's semi-conductor market has become global growth engine.Silicon rod during fabrication, need to be carried out cutting and blocked by semiconductor silicon sheet, so as to
In being processed into silicon chip by follow-up process.In actual production process, since the semiconductor silicon rod produced is impossible
It is the cylinder of standard, rough state occurs in surface, is that silicon rod is all supported using fixed wedge block mostly at present,
This supporting way is simple in structure, but can not adjust, thus can not meet demand.Someone is on this basis that wedge block supports
On, increase the structures such as a screw sliding block, can realize that wedge block activity is adjustable, but this structure is adjusted due to being unidirectional
Section gets up relatively time-consuming.Cylinder supports mode is more also used, this supporting way can realize automation, but due to gas
Body has compressibility, thus this support can not be very firm, it may appear that a degree of compression setback.To sum up institute
State, silicon rod centering regulation technology is always a problem in silicon rod cutting field, how to overcome the irregular shape on silicon rod surface
Shape, designs a kind of convenient and reliable centering adjusting mechanism, has very big side to lifting product cut quality, lifting stock utilization
Help.
Utility model content
For the utility model for when supporting silicon rod, the levelness of silicon rod axis is low in the prior art, silicon rod, which tilts, causes silicon
The low-quality problem of rod subsequent production, and a kind of semiconductor silicon rod activity centering adjusting device is provided.
A kind of semiconductor silicon rod activity centering adjusting device, including a support platform, at least set in the support platform
There is a pair of centering adjusting mechanism for being used to place silicon rod, it is trapezoidal that the centering adjusting mechanism includes the left-right rotary of installation on the chute
Screw；The left-right rotary trapezoidal screw both ends have the opposite screw thread in direction of rotation respectively, this at two screw thread respectively with left-handed spiral shell
Female and right-handed nut is connected, and the left-handed nut and right-handed nut are used to reversely transport when left-right rotary trapezoidal screw rotates
It is dynamic；Wedge shaped support block is respectively provided with the left-handed nut and right-handed nut, the pair of wedge shaped support block is symmetrical.
Preferably, for the centering adjusting mechanism at least provided with three, the centering adjusting mechanism at its both ends is separately fixed at institute
State in support platform, be used to move horizontally on the length direction of the support platform in middle centering adjusting mechanism.
Preferably, the centering adjusting mechanism lower section for moving horizontally is provided with movable device, the work accordingly
Motivation structure includes the structural member that is fixedly connected with centering adjusting mechanism, rotatably the shaft on the structural member and with
The handwheel of shaft connection；Coordinate fixation that gear is housed in the shaft, which nibbles with the rack being fixed in support platform
Transmission is closed, the structural member of the movable device is connected with the guide rail slide block component in the support platform.It is described
Gear drives movable device and centering adjusting mechanism to be slided on guide rail slide block by hand wheel rotating.
Preferably, locking mechanism is equipped with the shaft of the close handwheel, which is installed on movable device, institute
State locking mechanism to be arranged concentrically with the shaft, the locking mechanism is used to make shaft stop operating in locking.The locking
In non-locking, locking mechanism is arranged concentrically and non-interference with shaft for mechanism；When the locking of locking mechanism, made by frictional force
Shaft does not rotate, and further makes gear motionless, so that movable device is motionless.
Preferably, the movable device has gap, and a metal plate protected enclosure is worn along the length direction of the support platform
Cross the gap and do not interfered with the movable device.
Preferably, further include in support platform and be located at movable device side and be located at the metal plate protective cover
Organ shield below shell.
Preferably, the support platform is provided at both ends with supporting rack end to end.
Preferably, lubricating grease is marked with the sliding slot of the centering adjusting mechanism, for protecting left-right rotary trapezoidal screw and a left side
Spin nut and right-handed nut.
Preferably, the centering adjusting mechanism further includes a transverse slat, and the transverse slat passes through a pair of of wedge shaped support
Block, the transverse slat are equipped with nylon.
The utility model provides a kind of semiconductor silicon rod activity centering adjusting device, which can adapt to different length silicon
The split requirement of rod, while the placing height of silicon rod can be adjusted according to actual conditions, ensure the levelness of silicon rod axis,
Solve the problems, such as that the face of current generally existing is oblique.The design of Double-protection structure, being capable of effective water proof and dust proof.
A kind of semiconductor silicon rod activity centering adjusting device is provided, the device mainly include end to end supporting rack, movable device,
Centering adjusting mechanism and Double-protection mechanism etc..The movable device carries locking mechanism, and the mechanism is convenient and practical, can
Allow movable device to be parked in some position to remain stationary as.The centering adjusting mechanism drives both sides by a left-right rotary trapezoidal screw
Bearing diagonal block move at the same time, so can guarantee that the straightness of silicon rod in one direction.
The centering adjusting mechanism is equipped with one piece of transverse slat, can be one piece with traverse on the transverse slat of different centering adjusting mechanisms
Nylon, uses during supporting silicon chip when being used to support thin slice cutting, nylon can be directly cut after diamond wire is cut through, can play guarantor
Protect the effect of diamond wire and silicon chip.The sealing mechanism of the centering adjusting mechanism is by outer layer metal plate shield and interior filling lubricating oil
Fat forms, and protection effect is good.The supporting rack end to end can play the role of supporting silicon rod end to end, prevent when silicon rod is gone end to end
Silico briquette after only cutting off directly smashes other parts.The sealing mechanism is made of two layers of protective device：Outer layer metal plate protects
Cover and internal layer organ shield, outer layer metal plate shield can keep out big silico briquette drop or water impact to internal layer organ shield shine
Into destruction, internal layer organ shield can be very good to play the role of exclusion of water and part dirt.
The supporting rack end to end can play the role of supporting silicon rod end to end, after cut-out is prevented when silicon rod is gone end to end
Silico briquette directly smashes other parts.
Shaft avoids water, dirt etc. from entering rack-and-pinion with being provided with oil sealing and metal plate protected enclosure device at bearing fit
With guide rail slide block component, the damage of parts is caused.
A kind of semiconductor silicon rod activity centering adjusting device, mainly including movable device, centering adjusting mechanism, support end to end
Four parts of frame and sealing mechanism.Wherein movable device can realize that the distance between each centering adjusting mechanism is adjustable, with
Adapt to the cutting of different length silicon rod；Centering adjusting mechanism can play support silicon rod and adjust the effect of silicon rod level；End to end
Supporting rack is used for supporting the part end to end of silicon rod；Sealing mechanism is mainly used to protect the rapid wears zero such as guide rail slide block, rack-and-pinion
Part.
The movable device has supporting rack, guide rail slide block and rack-and-pinion to form, between each movable device mutually
Independent, distance can be adjusted by shaking handwheel.
The movable device carries locking mechanism, and the mechanism is convenient and practical, and movable device can be allowed to be parked in some position
Remain stationary as.
The centering adjusting mechanism drives the bearing diagonal block of both sides to move at the same time by a left-right rotary trapezoidal screw, so
It can guarantee that the straightness of silicon rod in one direction.
The centering adjusting mechanism is equipped with one piece of transverse slat, can be one piece with traverse on the transverse slat of different centering adjusting mechanisms
Nylon, uses during supporting silicon chip when being used to support thin slice cutting, nylon can be directly cut after diamond wire is cut through, can play guarantor
Protect the effect of diamond wire and silicon chip.
The sealing mechanism of the centering adjusting mechanism is made of outer layer metal plate shield and interior filling lubricant grease, protection effect
Fruit is good.
The supporting rack end to end can play the role of supporting silicon rod end to end, after cut-out is prevented when silicon rod is gone end to end
Silico briquette directly smashes other parts.
The sealing mechanism is made of two layers of protective device：Outer layer metal plate shield and internal layer organ shield, outer layer metal plate
Shield can keep out big silico briquette drop or water impact to internal layer organ shield according into destruction, internal layer organ shield can be with
Play the role of exclusion of water and part dirt well.Guide rail slide block is housed, therefore whole activity centering adjusts dress under mounting base
Putting to move horizontally.
The beneficial effects of the utility model are：The movable device being equipped with the utility model device can make centering adjust machine
Structure slidably reciprocates in support platform, can be adjusted according to the length of actual silicon rod, meets the cutting of different length silicon rod
, can be with it is required that a left-right rotary trapezoidal screw being equipped with centering adjusting mechanism drives the wedge shaped support block of both sides to move at the same time
Ensure silicon rod straightness in one direction, make silicon rod while being supported again will not run-off the straight, meet follow-up
Production requirement, improves the production efficiency of silicon rod；The utility model device is easy to operate, simple and reliable, Double-protection sealing structure
Effect is good.The centering that the utility model realizes semiconductor silicon rod is adjusted, while disclosure satisfy that wanting for different length silicon rod cutting
Ask, convenient and simple for operation reliable, Double-protection sealing structure effect is good.Metal plate protected enclosure and organ in the utility model
Shield form sealing mechanism, the metal plate protected enclosure can keep out big silico briquette drop or water impact to internal layer organ protect
The destruction shone is covered, organ shield can be very good to play the role of exclusion of water and part dirt.
Brief description of the drawings
Fig. 1 is the three dimensional structure diagram of the utility model.
Fig. 2 is the sectional view of the utility model.
Fig. 3 is the sectional view of the movable device in the utility model.
Fig. 4 is the centering adjusting mechanism three dimensional structure diagram of the utility model.
Fig. 5 is the sectional view of the centering adjusting mechanism of the utility model.
Reference numeral in figure is：1 supporting rack end to end；2 centering adjusting mechanisms；3 fixing support racks；4 movable devices；5 metal plates
Golden protected enclosure；6 organ shields；7 move horizontally support platform；8 racks；9 gears；10 guide rail slide block components；11 shafts；12 armfuls
Crash structure；13 handwheels；2.1 wedge shaped support blocks；2.2 sliding slot；2.3 transverse slat；2.4 metal plate cases；2.5 left-right rotary trapezoidal screws；2.6
Left-handed nut；2.7 right-handed nut.
Embodiment
Embodiment 1
The utility model is described further below in conjunction with the accompanying drawings：
As shown in Figs. 1-5, a kind of semiconductor silicon rod activity centering adjusting device, including support platform 7 is moved horizontally, it is described
The both ends for moving horizontally support platform 7 are respectively provided with supporting rack 1 end to end at support crystal bar both ends, supporting rack 1 end to end
Between be equipped with 6 centering adjusting mechanisms 2, wherein, the centering adjusting mechanism 2 positioned at both ends is solid by respective fixing support rack 3
It is scheduled on and moves horizontally in support platform 7, middle 4 centering adjusting mechanisms 2 is realized in level by installation activity mechanism 4 respectively
Moving horizontally back and forth in mobile support platform 7.
Such as Fig. 4, shown in Fig. 5, the centering adjusting mechanism 2 includes the left-right rotary trapezoidal screw being installed on sliding slot 2.2
2.5,2.5 both ends of left-right rotary trapezoidal screw have an opposite screw thread in direction of rotation respectively, the screw thread at the both ends respectively with a left side
Spin nut 2.6 and right-handed nut 2.7 are connected, and spin nut is at the same time inwards when left-right rotary trapezoidal screw 2.5 rotates or so
Or side is moved outwardly, realizes the counter motion of left-handed nut 2.6 and right-handed nut 2.7.The left-handed nut 2.6 and right-handed nut
Wedge shaped support block 2.1 is separately installed with 2.7, a pair of of wedge shaped support block 2.1 is symmetrical, it is used to support silicon rod；Institute
State in sliding slot 2.2 and be marked with lubricating grease, for protecting left-right rotary trapezoidal screw and left-handed nut and right-handed nut.The centering is adjusted
Mechanism 2 further includes a transverse slat 2.3, which passes through a pair of of wedge shaped support block 2.1, its both ends is fixed on the chute, the horizontal stroke
Plate 2.3 is equipped with nylon, and for protecting diamond wire and silicon chip, the lower section of transverse slat 2.3 is additionally provided with metal plate case 2.4.
As shown in figure 3, the movable device 4 includes structural member, handwheel 13, shaft 11, the structure of the movable device 4
Part includes upper weldment and lower weldment, and upper weldment is fixedly connected with lower weldment, has gap, metal plate protection in vain among it
Case 5 passes through the gap along the length direction for moving horizontally support platform 7 and is not required to 4 interference of movable device, the metal plate
5 both ends of protected enclosure, which are fixedly mounted on, to be moved horizontally in support platform 7.
The upper weldment of the structural member of the movable device 4 is fixedly connected with the bottom plate of centering adjusting mechanism 2；The shaft
11 are rotatably installed on lower weldment, the handwheel 13 and 11 key connection of shaft, coordinate in the shaft 11 and fix
One gear 9 is installed, the gear 9 and the engaged transmission of rack 8 above it, the rack 8, which is fixedly mounted on, moves horizontally support
On platform 7；The lower weldment is connected with guide rail slide block component 10, specifically, the lower welding of the structural member of the movable device 4
Part is fixedly connected with the sliding block of guide rail slide block component 10, and the guide rail of the guide rail slide block component 10 is installed on to move horizontally to support and puts down
On platform 7, the sliding block of the guide rail slide block component 10 is engaged with guide rail, realizes slip of the sliding block on guide rail.The close handwheel
A locking mechanism 12 is equipped with 13 shaft 11, which is arranged concentrically with the shaft 11, the locking mechanism 12
On movable device 4；Shown locking mechanism 12 is non-interference with the shaft in non-locking, when locking mechanism 12 is embraced
When dead, shaft is prevented from rotating by frictional force, and then makes gear motionless, finally realizes that movable device is motionless.The locking mechanism
12 are improved design on the basis of bicycle quick-detaching mechanism principle, and need to only be switched by one can conveniently locking
Shaft, the position of fixed movable device；Or the locking mechanism 12 also can be using technological means commonly known in the art
It can realize the locking of countershaft 11.
Below the metal plate protected enclosure 5 and moving horizontally between movable device 4 is also installed in support platform 7
There is organ shield 6, the organ shield 6 is used for the effect of exclusion of water and part dirt.
Handwheel 13 on the movable device 4 of the utility model drives the gear 9 in shaft 11 to rotate, because of tooth when rotating
Wheel 9 is meshed with rack 8, and rack 8 is motionless, and gear 9 rotates, and is further driven to movable device 4 and is fixedly connected with movable device 4
Centering adjusting mechanism 2 slided on the guide rail of guide rail slide block component 10, so as to fulfill movable device 4 drive centering adjusting mechanism
2 slidably reciprocate on support platform 7 is moved horizontally.
Semiconductor silicon rod activity centering adjusting device three dimensional structure diagram as shown in Figure 1, whole device function module
It is main to include fixed frame 1, centering adjusting mechanism 2 and movable device 4 end to end.Wherein supporting rack totally 2 end to end, centering adjusting mechanism
6 are shared, movable device there are 4, and the position positioned at the centering adjusting mechanism at both ends is immutable, 4 middle position
It can change, requirement is blocked with adapt to different length silicon rod.
Semiconductor silicon rod activity centering adjusting device three-dimensional structure sectional view as shown in Figure 2, movable device 4 is by tooth in figure
Wheel 9 and the engaged transmission of rack 8, slide block guide rail 10 are used for being oriented to.Its middle rack is fixedly mounted on gear top, can effectively prevent
Only silicon mud is accumulated.
Movable device three-dimensional structure sectional view as shown in Figure 3, handwheel 13 are connected by key with shaft 11, directly pass through hand
Wheel, which shakes, can be achieved to move back and forth, and have a locking mechanism 12 close to the Position Design of handwheel 13 in shaft 11, which exists
Design is improved on the basis of bicycle quick-detaching mechanism principle, locking need to conveniently can only be turned by a switch
Axis, the position of fixed movable device.
Movable device three-dimensional structure sectional view as shown in Figure 3, movable device pass through screw by upper and lower two weldments
Mode connects, and an intersegmental gap is left in centre, and metal plate protected enclosure 5 passes through among this intersegmental gap, before portable propelling mechanism
After do not interference while move and with metal plate protected enclosure 5.
Movable device three-dimensional structure sectional view as shown in Figure 3, shaft 11 at bearing fit with being provided with oil sealing and metal plate
Protected enclosure device, avoids water, dirt etc. from entering rack-and-pinion and guide rail slide block component, causes the damage of parts.
Centering adjusting mechanism three dimensional structure diagram as shown in Figure 4, the wedge shaped support block 2.1 in centering adjusting mechanism 2
It is arranged symmetrically, is used to support semiconductor silicon rod；Injection lubricating grease in sliding slot 2.2, for protecting screw, feed screw nut etc..
Centering adjusting mechanism three dimensional structure diagram as shown in Figure 5, two wedge shaped support blocks in centering adjusting mechanism 2
2.1 driven by a left-right rotary trapezoidal screw 2.5 and meanwhile inwards or outside movement so that adjust support silicon rod height.
Finally it should be noted that listed above is only specific embodiment of the utility model.Obviously, this practicality is new
Type is not limited to above example, can also there is many variations.Those of ordinary skill in the art can be from disclosed in the utility model
All deformations for directly exporting or associating in content, are considered as the scope of protection of the utility model.
Claims (9)
- A kind of 1. semiconductor silicon rod activity centering adjusting device, it is characterised in that：Including a support platform, the support platform On at least provided with a pair of centering adjusting mechanism for being used to place silicon rod, the centering adjusting mechanism include the left side of installation on the chute Dextrorotation trapezoidal screw；The left-right rotary trapezoidal screw both ends have the opposite screw thread in direction of rotation respectively, the screw thread difference at two It is connected with left-handed nut and right-handed nut, the left-handed nut and right-handed nut are used for when left-right rotary trapezoidal screw rotates Counter motion；Wedge shaped support block is respectively provided with the left-handed nut and right-handed nut, the pair of wedge shaped support block is symmetrical.
- A kind of 2. semiconductor silicon rod activity centering adjusting device according to claim 1, it is characterised in that：The centering tune Mechanism is saved at least provided with three, the centering adjusting mechanism at its both ends is separately fixed in the support platform, in middle pair Middle adjusting mechanism is used to move horizontally on the length direction of the support platform.
- A kind of 3. semiconductor silicon rod activity centering adjusting device according to claim 2, it is characterised in that：It is described to be used for water Corresponding below the dynamic centering adjusting mechanism of translation to be provided with movable device, the movable device includes consolidating with centering adjusting mechanism Surely the structural member connected, rotatably the shaft on the structural member and is connected with the rotating shaft handwheel；In the shaft Coordinate to fix and gear is housed, the gear and the rack engaged transmission being fixed in support platform, the structure of the movable device Part is connected with the guide rail slide block component in the support platform.
- A kind of 4. semiconductor silicon rod activity centering adjusting device according to claim 3, it is characterised in that：The close hand Locking mechanism is equipped with the shaft of wheel, which is installed on movable device, and the locking mechanism and the shaft are concentric Set, the locking mechanism is used to make shaft stop operating in locking.
- A kind of 5. semiconductor silicon rod activity centering adjusting device according to claim 3 or 4, it is characterised in that：The work Motivation structure has a gap, a metal plate protected enclosure along the length direction of the support platform through the gap and not with it is described Movable device interferes.
- A kind of 6. semiconductor silicon rod activity centering adjusting device according to claim 5, it is characterised in that：Further include installation Organ shield in support platform and positioned at movable device side and below the metal plate protected enclosure.
- 7. according to a kind of any semiconductor silicon rod activity centering adjusting devices of claim 1-4, it is characterised in that：It is described Support platform be provided at both ends with supporting rack end to end.
- A kind of 8. semiconductor silicon rod activity centering adjusting device according to claim 1, it is characterised in that：The centering tune Save in the sliding slot of mechanism and be marked with lubricating grease, for protecting left-right rotary trapezoidal screw and left-handed nut and right-handed nut.
- A kind of 9. semiconductor silicon rod activity centering adjusting device according to claim 8, it is characterised in that：The centering Adjusting mechanism further includes a transverse slat, and the transverse slat passes through a pair of of wedge shaped support block, and the transverse slat is equipped with nylon.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721222692.XU CN207267302U (en) | 2017-09-22 | 2017-09-22 | A kind of semiconductor silicon rod activity centering adjusting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721222692.XU CN207267302U (en) | 2017-09-22 | 2017-09-22 | A kind of semiconductor silicon rod activity centering adjusting device |
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| Publication Number | Publication Date |
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| CN207267302U true CN207267302U (en) | 2018-04-24 |
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ID=61960408
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721222692.XU Active CN207267302U (en) | 2017-09-22 | 2017-09-22 | A kind of semiconductor silicon rod activity centering adjusting device |
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| Country | Link |
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| CN (1) | CN207267302U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024002159A1 (en) * | 2022-07-01 | 2024-01-04 | 青岛高测科技股份有限公司 | Silicon rod cutting apparatus and cutting control method |
-
2017
- 2017-09-22 CN CN201721222692.XU patent/CN207267302U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024002159A1 (en) * | 2022-07-01 | 2024-01-04 | 青岛高测科技股份有限公司 | Silicon rod cutting apparatus and cutting control method |
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