CN207243480U - A kind of polysilicon tai gas of rectifying recycling device - Google Patents
A kind of polysilicon tai gas of rectifying recycling device Download PDFInfo
- Publication number
- CN207243480U CN207243480U CN201721229394.3U CN201721229394U CN207243480U CN 207243480 U CN207243480 U CN 207243480U CN 201721229394 U CN201721229394 U CN 201721229394U CN 207243480 U CN207243480 U CN 207243480U
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- CN
- China
- Prior art keywords
- gas
- rectifying
- evacuated tube
- reaction tower
- polysilicon
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Abstract
A kind of polysilicon tai gas of rectifying recycling device, including rectifying column group, storage column, anti-disproportionated reaction tower, condenser, the vent gas of rectifying column group enters storage column by the first evacuated tube, storage column outlet connects anti-disproportionated reaction tower by the second evacuated tube, anti- disproportionated reaction tower bottom is connected with recovery channel, top is connected with the 3rd evacuated tube, the 3rd evacuated tube connection condenser, and condenser connection removes liquid emptier.Tai gas of rectifying is by storage tank centralized recovery, after the reaction of anti-disproportionated reaction tower, part generation raw material trichlorosilane, improves material utilization, mitigates the produce load of device for recovering tail gas, improve the stability of device production, the additive amount of water or lye is reduced, reduces production cost, active ingredient is recycled in emptying end gas, reduce the cooling needs of tail gas condensing, reduce the load of refrigeration system.
Description
Technical field
The utility model belongs to production of polysilicon apparatus field, and in particular to a kind of polysilicon tai gas of rectifying recycling dress
Put.
Background technology
In the production system of improved Siemens polysilicon, frequently with tail gas dry process recovery process, by trichlorosilane also
Exhaust gas after original reaction is separated into hydrogen, hydrogen chloride and a variety of chlorosilanes etc., a variety of chlorosilanes here contain trichlorosilane,
The impurity such as silicon tetrachloride, dichlorosilane could be recycled, it is necessary to handled by rectification working process.Chlorosilane rectifying system
After tail gas recycle of uniting, in rectifying column blowdown system, still containing a certain amount of dichlorosilane, trichlorosilane and tetrachloro hydrogen silicon
Deng material, while economic loss is caused, certain destruction is also caused to environment.
The content of the invention
In view of the deficienciess of the prior art, the utility model provides a kind of good in economic efficiency, working stability polysilicon
Tai gas of rectifying recycling device.
The utility model is achieved through the following technical solutions：
A kind of polysilicon tai gas of rectifying recycling device, including rectifying column group, storage column, anti-disproportionated reaction tower, condenser,
The vent gas of the rectifying column group enters the storage column by the first evacuated tube, and the storage column outlet passes through the second evacuated tube
The anti-disproportionated reaction tower is connected, the anti-disproportionated reaction tower bottom is connected with recovery channel, and top is connected with the 3rd evacuated tube,
3rd evacuated tube connects the condenser, and the condenser connection removes liquid emptier.
The first check valve and booster pump are installed on the pipeline of first evacuated tube.
The second check valve and pressure monitoring device are installed on the pipeline of second evacuated tube.
The 3rd check valve is installed on the pipeline of 3rd evacuated tube.
Compared with prior art, the beneficial effects of the utility model are：Tai gas of rectifying is by storage tank centralized recovery, through anti-discrimination
After changing reaction tower, part generates raw material trichlorosilane, can improve material utilization, mitigate the produce load of device for recovering tail gas,
The stability of device production is improved, reduces the additive amount of water or lye, reduces production cost, active ingredient quilt in emptying end gas
Recycle, reduce the cooling needs of tail gas condensing, reduce the load of refrigeration system.
Brief description of the drawings
Fig. 1 is the connection diagram of the utility model device.
In attached drawing：1. rectifying column group；2. storage column；3. anti-disproportionated reaction tower；4. condenser；5. the first evacuated tube；6. the
Two evacuated tubes；7. recovery channel；8. the 3rd evacuated tube；9. remove liquid emptier；10. the first check valve；11. increase pump；12. the
Two check valves；13. pressure monitoring device；14. the 3rd check valve.
Embodiment
A kind of polysilicon tai gas of rectifying recycling device as shown in Figure 1, including rectifying column group 1, storage column 2, anti-disproportionation
Reaction tower 3, condenser 4 and except liquid emptier 9, the vent gas of rectifying column group 1 enters storage column 2 by the first evacuated tube 5, deposits
The outlet of storage tower 2 connects anti-disproportionated reaction tower 3 by the second evacuated tube 6 and carries out anti-disproportionated reaction, anti-3 bottom of disproportionated reaction tower connection
There is recovery channel 7, collect reaction product trichlorosilane, top is connected with the 3rd evacuated tube 8, the connection condensation of the 3rd evacuated tube 8
Device 4, the connection of condenser 4 remove liquid emptier 9.
First check valve 10 and booster pump 11 are installed, the first check valve 10 prevents gas on the pipeline of first evacuated tube 5
Reflux, booster pump 11 is easy to compressed gas, lifting amount of storage.
Second check valve 12 and pressure monitoring device 13 are installed, the second check valve 12 is anti-on the pipeline of second evacuated tube 6
Only gas backstreaming, pressure monitoring device 13 prevent the overvoltage storage of storage tank 2.
3rd check valve 14 is installed, the 3rd check valve 14 prevents gas backstreaming on the pipeline of the 3rd evacuated tube 8.
In conclusion the only preferred embodiment of the utility model, is not used for limiting the utility model implementation
Scope, the equivalent change carried out by all shapes according to described in the utility model claims scope, construction, feature and spirit is with repairing
Decorations, should all be included in the right of the utility model.
Claims (4)
- A kind of 1. polysilicon tai gas of rectifying recycling device, it is characterised in that：Including rectifying column group (1), storage column (2), anti-discrimination Change reaction tower (3), condenser (4) and except liquid emptier (9), the vent gas of the rectifying column group (1) is by the first evacuated tube (5) storage column (2) is entered, storage column (2) outlet connects the anti-disproportionated reaction tower by the second evacuated tube (6) (3), anti-disproportionated reaction tower (3) bottom is connected with recovery channel (7), and top is connected with the 3rd evacuated tube (8), and the described 3rd Evacuated tube (8) connects the condenser (4), and condenser (4) connection removes liquid emptier (9).
- A kind of 2. polysilicon tai gas of rectifying recycling device according to claim 1, it is characterised in that：First emptying Manage and the first check valve (10) and booster pump (11) are installed on the pipeline of (5).
- A kind of 3. polysilicon tai gas of rectifying recycling device according to claim 1, it is characterised in that：Second emptying Manage and the second check valve (12) and pressure monitoring device (13) are installed on the pipeline of (6).
- A kind of 4. polysilicon tai gas of rectifying recycling device according to claim 1, it is characterised in that：3rd emptying Manage and the 3rd check valve (14) is installed on the pipeline of (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721229394.3U CN207243480U (en) | 2017-09-22 | 2017-09-22 | A kind of polysilicon tai gas of rectifying recycling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721229394.3U CN207243480U (en) | 2017-09-22 | 2017-09-22 | A kind of polysilicon tai gas of rectifying recycling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207243480U true CN207243480U (en) | 2018-04-17 |
Family
ID=61886390
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721229394.3U Expired - Fee Related CN207243480U (en) | 2017-09-22 | 2017-09-22 | A kind of polysilicon tai gas of rectifying recycling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207243480U (en) |
-
2017
- 2017-09-22 CN CN201721229394.3U patent/CN207243480U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180417 Termination date: 20200922 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |