CN202808348U - Device for removing chlorosilane of hydrogen chloride - Google Patents
Device for removing chlorosilane of hydrogen chloride Download PDFInfo
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- CN202808348U CN202808348U CN 201220428217 CN201220428217U CN202808348U CN 202808348 U CN202808348 U CN 202808348U CN 201220428217 CN201220428217 CN 201220428217 CN 201220428217 U CN201220428217 U CN 201220428217U CN 202808348 U CN202808348 U CN 202808348U
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- hydrogenchloride
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- liquid separator
- condenser
- hydrogen chloride
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Abstract
The utility model discloses a gas separation device, and in particular relates to a device for removing chlorosilane of hydrogen chloride, belonging to the field of polycrystalline silicon production technologies. The device for removing chlorosilane of hydrogen chloride mainly comprises a condenser and a gas-liquid separator, wherein an inlet of the condenser is connected with a hydrogen chloride discharge pipeline of a polycrystalline silicon tail gas recovery system; and an outlet of the condenser is connected with an inlet of the gas-liquid separator. The device for removing chlorosilane of hydrogen chloride is simple and reliable in structure, is capable of effectively removing the chlorosilane in the recovered hydrogen chloride, and guarantees the quality of the recovered hydrogen chloride to meet the production technology demand of a synthesis system, thus reducing the production cost, the overhauling frequency of trichlorosilane synthesis process and the environmental pollution.
Description
Technical field
The utility model discloses a kind of gas separation unit, particularly a kind of hydrogenchloride dechlorination silane plants belongs to technical field of polysilicon production.
Background technology
Trichlorosilane is the important source material of producing polysilicon, and hydrogenchloride is the essential raw material of synthesizing trichlorosilane, in the improved Siemens polycrystalline silicon production system, reduction, all contain hydrogen chloride gas in hydrogenation and the synthetic tail gas, in the tail gas recycle treatment system, pass through absorption and resolve two steps, hydrogen chloride gas is separated, the recovery hydrogen chloride gas returns the trichlorosilane synthesis procedure and silica flour carries out building-up reactions, thereby realized the closed cycle of hydrogenchloride, material is fully utilized, and reduces production costs, simultaneously environmental pollution also is under control, and has good economic benefit and social benefit.
But because production unit and system process operation is unstable, cause easily in the hydrogenchloride that the hydrogenchloride Analytic Tower reclaims chlorosilane content higher, higher chlorosilane has the disadvantageous effect of following three aspects: in the recovery hydrogenchloride, the one, the hydrogenchloride that reclaims is owing to contain higher chlorosilane, do not reach the processing requirement of synthesis system and can not enter and react as raw material in the trichlorosilane synthesis system, the hydrogenchloride that can only use new product instead synthesizes, and will increase like this raw materials cost and environmental protection treatment expense; The 2nd, if will reclaim hydrogenchloride and self-produced hydrogenchloride is used with, chlorosilane in the recovery hydrogenchloride and the moisture generation hydrolysis reaction in the self-produced hydrogenchloride, the hydrolyzate that generates very easily stops up trichlorosilane synthetic furnace spray plate and affects building-up reactions, does not even get on-line maintenance, has reduced production efficiency; The 3rd, the chlorosilane that reclaims high-content in the hydrogenchloride has certain restraining effect to building-up reactions, has reduced Synthesis conversion.
Summary of the invention
Goal of the invention of the present utility model is: for the problem of above-mentioned existence, a kind of hydrogenchloride dechlorination silane plants is provided, the chlorosilane that reclaims in the hydrogenchloride can be removed, guarantee that the quality that reclaims hydrogenchloride satisfies the process requirements that synthesis system is produced, to reduce production costs and the repair rate of trichlorosilane synthesis procedure environmental contamination reduction.
The technical solution adopted in the utility model is as follows:
A kind of hydrogenchloride dechlorination silane plants, mainly comprise condenser and gas-liquid separator, the import of described condenser is connected with the hydrogenchloride discharge tube of polysilicon tail gas recovery system, the outlet of condenser is connected with the import of gas-liquid separator, described gas-liquid separator top is provided with outlet pipe, and the bottom is provided with Drainage pipe.
Further, the Drainage pipe of described gas-liquid separator bottom with lead the pouring system and be connected.
The Drainage pipe of described gas-liquid separator bottom is provided with storage tank.
Further, the inside of described gas-liquid separator is provided with scum dredger.
Described gas-liquid separator is provided with liquidometer.
Further, described condenser is the vertical array tubular condenser.
The refrigerant of described condenser is imported and exported, and is connected on the low temperature chlorosilane transport pipe between absorption tower and the Analytic Tower.
The hydrogenchloride that will come from hydrogenchloride Analytic Tower in the polycrystalline silicon production system tail gas recycle operation is introduced in this device, after condenser condenses, chlorosilane wherein obtains condensation, the hydrogenchloride that contains chlorosilane liquid produced carries out the separation of liquids and gases by gas-liquid separator, the top of described gas-liquid separator is provided with outlet pipe, the bottom is provided with Drainage pipe, the hydrogenchloride of condensed gaseous state is discharged from the top outlet of gas-liquid separator, be sent to the trichlorosilane synthesis procedure, liquid chlorosilane is collected in the gas-liquid separator bottom, the Drainage pipe of gas-liquid separator bottom can be connected directly to the pouring system that leads, the chlorosilane of the liquid state that reclaims is unified to process, storage tank can also be set to be reused in the input coefficient after with collected liquid chlorosilane stores processor, perhaps Drainage pipe is connected to the chlorosilane storage tank of other processing parameter matching in the system, on the connecting tube of other chlorosilane storage tanks in the system, pump can also be set in order to the conveying of material.
The scum dredger that the inside of described gas-liquid separator arranges can be strengthened gas-liquid separation effect, can also prevent effectively that gas flow forms eddy current in the surge tank, and liquidometer can be observed the liquid level in the separator easily, conveniently carries out timely discharge opeing and processes.
In the utility model, described condenser is the vertical array tubular condenser, be convenient to the collection of condensed fluid material, to be the low temperature chlorosilane absorption liquid that adopts hydrogen chloride absorption tower bottom in the exhaust gas recovery system come condensation to reclaim chlorosilane in the hydrogen chloride gas as refrigerant with condenser, utilized so existing low-temperature receiver in the system and unnecessary special introducing low-temperature receiver, saved production cost, further strengthen condensation effect than water coolant as low-temperature receiver, also effectively avoided simultaneously water to be bled into the industrial accident that system causes as cryogen.
In sum, owing to adopted technique scheme, the beneficial effects of the utility model are: this hydrogenchloride dechlorination silane plants, simple and reliable for structure, can effectively the chlorosilane that reclaims in the hydrogenchloride be removed, can guarantee that the quality that reclaims hydrogenchloride satisfies the process requirements that synthesis system is produced, reduce the repair rate of production cost and trichlorosilane synthesis procedure, reduce environmental pollution.
Description of drawings
Fig. 1 is device connection diagram of the present utility model.
Mark among the figure: 1-condenser, 2-gas-liquid separator, 3-scum dredger, 4-liquidometer, 5-storage tank.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in detail.
In order to make the purpose of this utility model, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the utility model is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the utility model, and be not used in restriction the utility model.
Embodiment 1, a kind of hydrogenchloride dechlorination silane plants, as shown in Figure 1, the discharge outlet of the recovery hydrogenchloride in the import of condenser 1 and the polysilicon system is connected, outlet is connected with gas-liquid separator 2, described condenser 1 is the vertical array tubular condenser, and the refrigerant of condenser 1 is imported and exported pipeline and connected on cooling water system or the coolant system pipeline; Described gas-liquid separator is provided with scum dredger 3 and liquidometer 4, described scum dredger 3 is on the gas-liquid separator entrance location, the upper gas outlet of described gas-liquid separator 2 is connected to the trichlorosilane synthesis system by pipeline, the liquid discharge tube road of bottom is connected to leads the pouring pipeline in the production system, carries out the unified of recovering liquid and processes by leading the pouring system.Described condenser 1, gas-liquid separator 2 and the pipeline that adopts in device and valve all adopt stainless steel to make.
Embodiment 2, a kind of hydrogenchloride dechlorination silane plants, as shown in Figure 1, the discharge outlet of the recovery hydrogenchloride in the import of condenser 1 and the polysilicon system is connected, outlet is connected with gas-liquid separator 2, described condenser 1 is the vertical array tubular condenser, the absorption tower transporting low temperature chlorosilane liquid produced that the refrigerant import and export pipeline of condenser 1 is connected to the tail gas recycle operation is to the pipeline of Analytic Tower, and existing low temperature chlorosilane liquid produced is as refrigerant in the employing system; Described gas-liquid separator is provided with scum dredger 3 and liquidometer 4, described scum dredger 3 is on the gas-liquid separator entrance location, the upper gas outlet of described gas-liquid separator 2 is connected to the trichlorosilane synthesis system by pipeline, and the liquid discharge tube road of bottom also is provided with storage tank 5; Described condenser 1, gas-liquid separator 2, storage tank 5 and the pipeline that adopts in device and valve all adopt stainless steel to make.
The above only is preferred embodiment of the present utility model; not in order to limit the utility model; all any modifications of within spirit of the present utility model and principle, doing, be equal to and replace and improvement etc., all should be included within the protection domain of the present utility model.
Claims (7)
1. hydrogenchloride dechlorination silane plants, it is characterized in that: mainly comprise condenser (1) and gas-liquid separator (2), the import of described condenser (1) is connected with the hydrogenchloride discharge tube of polysilicon tail gas recovery system, the outlet of condenser (1) is connected with the import of gas-liquid separator (2), described gas-liquid separator (2) top is provided with outlet pipe, and the bottom is provided with Drainage pipe.
2. hydrogenchloride dechlorination silane plants as claimed in claim 1 is characterized in that: the Drainage pipe of described gas-liquid separator (2) bottom with lead the pouring system and be connected.
3. hydrogenchloride dechlorination silane plants as claimed in claim 1, it is characterized in that: the Drainage pipe of described gas-liquid separator (2) bottom is provided with storage tank (5).
4. such as claim 1 or 2 or 3 described hydrogenchloride dechlorination silane plants, it is characterized in that: the inside of described gas-liquid separator (2) is provided with scum dredger (3).
5. such as claim 1 or 2 or 3 described hydrogenchloride dechlorination silane plants, it is characterized in that: described gas-liquid separator (2) is provided with liquidometer (4).
6. hydrogenchloride dechlorination silane plants as claimed in claim 1, it is characterized in that: described condenser (1) is the vertical array tubular condenser.
7. hydrogenchloride dechlorination silane plants as claimed in claim 6 is characterized in that: the refrigerant of described condenser (1) is imported and exported, and is connected on the low temperature chlorosilane transport pipe between absorption tower and the Analytic Tower.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220428217 CN202808348U (en) | 2012-08-28 | 2012-08-28 | Device for removing chlorosilane of hydrogen chloride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201220428217 CN202808348U (en) | 2012-08-28 | 2012-08-28 | Device for removing chlorosilane of hydrogen chloride |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202808348U true CN202808348U (en) | 2013-03-20 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201220428217 Expired - Fee Related CN202808348U (en) | 2012-08-28 | 2012-08-28 | Device for removing chlorosilane of hydrogen chloride |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202808348U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105597493A (en) * | 2015-12-21 | 2016-05-25 | 浙江衢州正邦有机硅有限公司 | Treatment method for polymethyl triethoxy silane reaction tail gas |
| CN110850901A (en) * | 2019-10-30 | 2020-02-28 | 新疆东方希望新能源有限公司 | Method and system for controlling liquid level of vapor-liquid separator in cold hydrogenation production of polycrystalline silicon |
-
2012
- 2012-08-28 CN CN 201220428217 patent/CN202808348U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105597493A (en) * | 2015-12-21 | 2016-05-25 | 浙江衢州正邦有机硅有限公司 | Treatment method for polymethyl triethoxy silane reaction tail gas |
| CN105597493B (en) * | 2015-12-21 | 2018-12-07 | 浙江衢州正邦有机硅有限公司 | A kind of processing method of poly- methyltriethoxysilane reaction end gas |
| CN110850901A (en) * | 2019-10-30 | 2020-02-28 | 新疆东方希望新能源有限公司 | Method and system for controlling liquid level of vapor-liquid separator in cold hydrogenation production of polycrystalline silicon |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20130320 Termination date: 20140828 |
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| EXPY | Termination of patent right or utility model |